Nanostructured silicon thin films prepared by layer-by-layer deposition technique

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1682 978-1-4244-1573-1/08/$25.00 c 2008 IEEE

Transcript of Nanostructured silicon thin films prepared by layer-by-layer deposition technique

1682

978-1-4244-1573-1/08/$25.00 c© 2008 IEEE

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1683

1684 2008 2nd IEEE International Nanoelectronics Conference (INEC 2008)

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1685

1686 2008 2nd IEEE International Nanoelectronics Conference (INEC 2008)

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1687