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Page 1: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

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978-1-4244-1573-1/08/$25.00 c© 2008 IEEE

Page 2: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1683

Page 3: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

1684 2008 2nd IEEE International Nanoelectronics Conference (INEC 2008)

Page 4: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1685

Page 5: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

1686 2008 2nd IEEE International Nanoelectronics Conference (INEC 2008)

Page 6: Nanostructured silicon thin films prepared by layer-by-layer deposition technique

2008 2nd IEEE International Nanoelectronics Conference (INEC 2008) 1687

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