Deformation and fracture of TiN and TiAlN coatings on a steel substrate during nanoindentation
Transcript of Deformation and fracture of TiN and TiAlN coatings on a steel substrate during nanoindentation
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Surface & Coatings Technolog
Deformation and fracture of TiN and TiAlN coatings on a
steel substrate during nanoindentation
L.W. Ma, J.M. Cairney, M.J. Hoffman, P.R. Munroe*
Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
Received 12 August 2004; accepted in revised form 29 September 2004
Available online 11 November 2004
Abstract
The deformation mechanisms and mechanical properties of both TiN and TiAlN coatings on a V820 nitridable steel substrate have been
investigated. Deformation was induced by nanoindentation, and the microstructures of the indented regions were studied using various
techniques, including focused ion beam (FIB) and transmission electron microscopy (TEM). Two coatings deposited using a cathodic arc
process were investigated: a thicker (1.1 Am) TiAlN–TiN dual-layer coating and a slightly thinner (0.7 Am) TiN coating. Hardness was
measured using nanoindentation using a 5-Am-radius spherical indenter. A model developed by Korsunsky et al. was used to obtain the
hardness of the coatings, accounting for both the thickness of the coating and the influence of the substrate. Hardnesses of 30 and 24 GPa
were obtained for the TiAlN and TiN coatings, respectively. Both coatings exhibited broadly similar mechanisms of deformation. Columnar
cracking and shear steps at the coating–substrate interface indicated that coatings deform predominantly by shearing along the columnar grain
boundaries; however, significant lateral edge cracking was also observed, especially in the case of the TiAlN coating. The interface between
the TiAlN and TiN in the dual-layer coating did not appear to affect the deformation behaviour.
D 2004 Elsevier B.V. All rights reserved.
Keywords: TiN; TiAlN; FIB; TEM; Nanoindentation
1. Introduction
The use of physical vapour deposition (PVD) hard
coatings based on the transition metal nitride, titanium
nitride (TiN), is well established. The coatings are com-
monly applied to various kinds of steel cutting tools,
forming tools, dies, etc. [1–4], providing surfaces with
enhanced tribological properties in terms of low friction,
high hardness and improved wear resistance [1–6]. How-
ever, one disadvantage of TiN is in its application at high
temperature, since it oxidizes rapidly at temperatures above
~550 8C, to form a layer that is partially composed of the
rutile-structured TiO2 [1,2]. In order to overcome such
oxidation problems, ternary coatings, such as those based on
titanium aluminium nitride (TiAlN), are becoming increas-
ingly used because they show increased resistance to
0257-8972/$ - see front matter D 2004 Elsevier B.V. All rights reserved.
doi:10.1016/j.surfcoat.2004.09.034
* Corresponding author. Tel.: +61 2 9385 4435; fax: +61 2 9385 6400.
E-mail address: [email protected] (P.R. Munroe).
oxidation up to a temperatures of ~800 8C [7]. This is due
to a dense protective layer of an aluminium-based oxide that
is formed on the top of the (Ti,Al)N coating surface, which
acts to inhibit further oxidation and improve high-temper-
ature behaviour [7,8]. Furthermore, TiAlN is not only
effective at improving high-temperature oxidation resist-
ance, but also improves mechanical performance, through
enhanced hardness and wear resistance [7].
It has been well documented in the literature that
nanoindentation techniques can be effective in the evalua-
tion of the mechanical properties, such as hardness and
modulus, of hard coatings [9–12]. However, such techni-
ques do not provide direct observation of the coating
microstructure, in particular the mechanisms that may
operate when the coating is deformed. In recent years, the
focused ion beam (FIB) miller [13] has emerged as a
materials characterization tool that may be used to observe
the microstructure of thin films and coatings systems,
including thin films that have been locally deformed. This
y 200 (2006) 3518–3526
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–3526 3519
is because the FIB can be used to prepare and image cross
sections with high positional accuracy. The FIB can also be
used for the preparation of transmission electron microscope
(TEM) specimens with submicron locational precision
[14,15]. Therefore, FIB-based techniques are highly effec-
tive in the observation of coating–substrate deformation
mechanisms following nanoindentation [16].
A number of studies have evaluated the mechanical
performance of TiN-type coatings during nanoindentation
tests using both spherical and sharp indenter tips [11,17–20].
Some workers have reported the occurrence of radial and
circumferential cracks in the films and interfacial failure
during the microindentation tests with both indenter types
[17–20]. However, none of these studies have been entirely
satisfactory in the evaluation of the deformation mechanisms
of the TiN-based thin films during nanoindentation using a
spherical indenter, due to the lack of high-resolution micro-
structural data. Recently, Ma et al. [21] investigated the
deformation mechanisms in TiN coatings deposited onto a
V820 nitridable steel substrates by means of PVD coating
processes, using a combination of nanoindentation with a
spherical indenter, and microstructural analysis, including
FIB and TEM studies. Different modes of cracking, including
columnar, circumferential, edge and transgranular cracks,
and also shear steps at the base of coating, were observed. It
was concluded that deformation in TiN coating occurs
predominantly via cracking and shear sliding along the
intercolumnar grain boundaries. However, in more advanced
TiAlN-based coatings, the deformation mechanisms and
modes of cracking behaviour are yet to be investigated.
The work described in this paper compares the deforma-
tion behaviour of TiN with a dual-layer TiN–TiAlN coating.
Both coatings are deposited onto ductile V820 nitridable
steel substrates, and their mechanical performance is
assessed through nanoindentation using a spherical indenter.
The microstructures and properties of the two coatings are
compared, following nanoindentation, by use of micro-
structural analysis techniques, including FIB and TEM. FIB
cross sections were used to observe the microstructure of
TiAlN and TiN coatings in both the undeformed state and
following nanoindentation. Deformation mechanisms,
including different modes of crack propagation, will be
described. The microstructural features observed are corre-
lated with the force–displacement curves obtained during
nanoindentation. Finally, TEM cross sections of areas
locally deformed by nanoindentation, prepared using FIB-
based techniques, are used to observe these features at
higher resolution.
2. Experimental procedure
2.1. Coating process
Two coatings: (a) a binary (TiN) coating and (b) a dual-
layer TiN–TiAlN coating (which will be referred to here-
inafter as the ternary coating or simply TiAlN) were
deposited onto V820 nitridable steel substrates, using
multisource cathodic arc evaporation (CAE). Prior to the
film deposition, the substrates were initially ground and
polished to a 0.5-Am surface finish, then cleaned with
ultrasonic and mechanical agitation. This was followed by
rinsing in deionized water and drying.
For the binary coatings (TiN), steel substrates were
initially loaded into the coating chamber which was pumped
down to a base pressure of 5�10�3 Pa and heated to 250 8Cusing electric arc discharge. They were then biased at
�1 kV and cleaned by argon ion etching at a pressure of 5
Pa. The bias voltage was simultaneously reduced to �800 V
and the substrates metal-ion etched using Ti ions generated
from an arc source. Nitrogen was then introduced to a
chamber pressure of 7�10�1 Pa and a coating deposited for
about 40 min using a substrate bias of �200 V. A TiN
coating of ~0.7 Am in thickness was deposited.
For the ternary coatings (TiAlN), a base coating of TiN
was initially deposited for a period of about 20 min using
the same deposition conditions as for the single layer TiN
coating. This generated a TiN coating adjacent to the
substrate about 0.5 Am in thickness. The substrate bias was
then reduced to �100 V, and a TiAlN layer deposited for a
period of about 40 min using two Ti0.5Al0.5 cathode targets.
A 0.6-Am-thick TiAlN top layer was deposited, resulting in
a total coating thickness of 1.1 Am. Detailed microstructural
characterization of both the TiN and TiAlN coatings has
been published elsewhere [22].
2.2. Nanoindentation
Nanoindentation was performed using a CSIRO UMIS-
2000 (Ultra Micro-Indentation System). For investigations
of the nature of deformation under the indented region, a
spherically tipped diamond indenter with a radius of 5 Amwas used at maximum loads ranging from 5 to 500 mN. A
spherical indenter was chosen as it provides a more uniform
stress distribution under the indenter tip compared with
sharper indenter shapes. A sharper tip changes the stress
profile, such that significant deformation of the coating
occurs at low load independently of any substrate effects.
Under such loading, the coating behaves more as a bulk
material and so the materials assessment then becomes one
of the coating material rather than the coating/substrate
system. The loading cycle was continuous with a dwell time
of 1 s at each increment. Thirty increments were used for the
lower loads (b200 mN) and 50 increments were used at
higher loads (N200 mN). For measurements of coating
hardness, a Berkovich indenter was used as the smaller
deformation zone under the indenter allows a more accurate
measurement of the hardness. The coating hardness was
determined from force–displacement curves from indenta-
tions with maximum loads ranging from 4 to 50 mN using
the Oliver–Pharr method [23]. An area function was
developed for the indenter using both sapphire and silica
Fig. 1. FIB images of cross sections of undeformed regions of (a) the binary
TiN coating deposited on a V820 nitridable steel and (b) the ternary TiAlN
coating deposited on to the same substrate.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–35263520
standards of known modulus and applied in the hardness
calculation. Furthermore, since for thin, hard coatings on
soft substrates, such as the systems investigated here, the
measured hardness decreases with indentation depth, due to
the increasing influence of the substrate. Therefore, the
hardness of the coating alone was determined by applying a
model developed by Korsunsky et al. [24], which accounts
for the effect of the substrate and the coating thickness on
hardness. The Korsunsky model has been shown to be
effective in subtracting substrate effects and obtaining
relatively accurate values for the hardness of thin coatings
[24], particularly for the case of hard coatings on soft
substrates.
2.3. Focused ion beam (FIB) analysis
Focused ion beam (FIB) milling and imaging was
performed using a FEI 200xP FIB system. Cross sections
of both TiN and TiAlN, including both undeformed and
nanoindented regions, were milled with a beam currents of
2700 pA for the initial sections, 350 pA for the final
cleaning mills and further imaged with a beam current of 11
pA. Details of the preparation of cross sections using the
FIB have been described elsewhere [14,15]. It is important
to note that images of cross sections are geometrically
distorted because of the angle at which they are viewed. The
degree of tilt from the direction of the ion beam is therefore
always specified in the FIB images.
2.4. Transmission electron microscopy (TEM)
TEM specimens of nanoindented regions in both TiN and
TiAlN coatings, after loading to either 100 or 500 mN using
a 5-Am spherical indenter, were prepared using the FIB
workstation. Details of the use of the FIB for TEM specimen
preparation are reported elsewhere [25]. Prior to the
preparation of the TEM specimens, a protective layer of
platinum was initially deposited, using FIB-assisted chem-
ical vapour deposition, along the top edge of the area from
which the specimen was to be prepared (through the centre
of the indent). The H-type technique [26] was used with an
aperture corresponding to a beam current of 2700 pA used
for the initial cuts, followed by 1000 pA for finer cuts and
finally 350 pA for the final cleaning mills. Transmission
electron microscopy was performed in a Philips CM200
field emission gun TEM operating at 200 kV.
3. Results and discussion
Fig. 1 shows FIB cross sections of the two different
materials in the undeformed state, that is, (a) the binary
coating (TiN) and (b) the ternary coating (TiAlN), deposited
onto a V820 nitridable alloy steel using cathodic arc
evaporation (CAE). The binary coating (Fig. 1a) is
approximately 0.7 Am in thickness, whilst the ternary
coating (Fig. 1b) is approximately 1.1 Am in thickness.
For both of the coatings, the microstructure consists of
columnar grains 50–100 nm in width, oriented approx-
imately parallel to the direction of growth. On closer
inspection, the ternary coating (Fig. 1b) can be seen to
consist of two layers, specifically, TiAlN and TiN, which
are, labeled x and y, respectively. These layers are
approximately 0.6 Am and 0.5 Am, respectively, in thick-
ness. The microstructures of both of these coatings have
been previously characterized and it was noted that a ~100-
nm-thick interfacial zone existed in the ternary coating at the
boundary between the TiN and TiAlN coatings, consisting
of ~10-nm-thick alternate layers of both compounds [22].
Fig. 2 shows the force–displacement curves from both
the binary and ternary coatings, subjected to nanoindenta-
tion to maximum loads of (a) 5 mN and (b) 300 mN, using a
5-Am-radius spherical indenter, while Fig. 2c is an expanded
version of the higher load region in Fig. 2b. At very low
loads (up to 5 mN, as shown in Fig. 2a) the load–
displacement behaviour of both materials is mainly elastic
and reversible, although a small amount of plastic deforma-
tion is detected for the thinner TiN coating. The change
from mainly elastic to mainly plastic deformation occurs at
low loads of the order of 5 mN in the binary coating, as
described elsewhere [21]. The depth of penetration into the
Fig. 3. The curves plotted (a) indentation depth, (b) normalized indentation
depth against measured hardness for both the coatings and the V820 steel
substrate.
Fig. 2. Force–displacement curves for both the binary and ternary coatings
deposited on a V820 nitridable steel following (a) nanoindentation to a
maximum load of 5 mN, (b) nanoindentation to a maximum load of 300
mN, (c) an expanded section of the 300-mN curve shown in panel b. All
indentations were performed using a 5-Am spherical indenter.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–3526 3521
binary coating subjected to nanoindentation is larger than
that of the ternary coating under the same load, as shown in
Fig. 2b. This is, in part, because the addition of aluminium
to TiN to form a TiAlN ternary solid solution leads to
significant enhancement in hardness compared to the binary
coating [2,7,8], but is complicated by the fact that the
ternary coating is slightly thicker than the binary coating. A
comparison of the hardness for both coatings, where
corrections have been made for the effect of coating
thickness, is therefore necessary.
At loads greater than about 200 mN (Fig. 2b), there are
indications of pop-in events (sudden increases in indentation
depth with a small increase in load) in both coatings.
Examples are shown at points P1 (~210 mN) in the ternary
coating and P2 (~260 mN) in the binary coating, shown in
Fig. 2c, which shows an expanded portion of the curve
shown in Fig. 2b. Pop-in events are believed to be
associated with cracking events in the coatings [11], and
the pop-ins observed here will be discussed in more detail
later.
Fig. 3a shows the measured hardness plotted as a
function of the indentation depth for both coatings and for
the steel substrate (hardness data was obtained from
indentations made using a Berkovich indenter). It is noted
that even at relatively low loads, which lead to low
indentation depths, there is a strong influence from the
substrate on the hardness measured. This is evidenced by a
decrease in the measured hardness as the load is increased,
due to an increasing contribution from the substrate. At
higher loads, and therefore higher indentation depths, the
measured hardness begins to approach that of the V820 steel
Fig. 4. FIB image of the top surface of (a) the binary coating and (b) the
ternary coating following nanoindentation at a load of 100 mN using a 5-
Am spherical indenter.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–35263522
substrate, which was measured to be approximately ~4.3
GPa. Clearly, the measured hardness of the ternary coating
is greater than that of the binary coating, due to both the
addition of aluminium to the coating and the increased
thickness of this coating. Therefore, the hardness of the
coatings cannot be directly compared in this simple way. In
order to compare the true hardness response of the two
coatings, a model described by Korsunsky et al. [24] is used
to analyse the data. The model uses the following equation
[24] to describe contact response between a coating/
substrate system and a Berkovich indenter.
Hc ¼ Hs þHf � Hsð Þ1þ kb2� � ð1Þ
The coating hardness, Hf, is expressed in terms of the
overall, composite hardness, Hc, and the substrate hardness,
Hs, where k is a constant obtained from a fitting procedure
and b=h/t (where h is the maximum indentation depth and t
is the coating thickness) which denotes the indentation
depth normalized with respect to the coating thickness.
Fig. 3b shows the normalized indentation depth (b)plotted against measured hardness for both coatings. This
figure reveals that the ternary coating is harder than the
binary coating when the effect of thickness is excluded. A fit
of the model to the range of experimental data obtained
from both ternary and binary coatings provides a hardness
of ~30 GPa for the ternary coating, which is similar to the
values reported in the literature (28–32 GPa) [7], while a fit
of the model to the hardness data for the binary coating
gives a hardness of ~24 GPa, which is again similar to the
values found in the literature (15–33 GPa) [6].
Fig. 4a and b are secondary electron FIB images of the
top surface of the binary and ternary coatings, respectively,
subjected to nanoindentation to a maximum load of 100
mN, using a 5-Am-radius spherically tipped indenter. A
large-diameter indent (~3 Am) can be clearly observed in the
binary coating (Fig. 4a) and circumferential cracks inside
the indent, also known as dnest cracksT [18,19,21] are seen,marked by an arrow. The impression of the indent appears
more pronounced in the binary coating compared to the
ternary coating indented under the same conditions (Fig.
4b), and is known from load displacement data (Fig. 2b) to
be deeper. This is because the ternary coating is both harder
and thicker than the binary coating. However, similar
circumferential cracks can nevertheless be seen in the
ternary coating, arrowed in Fig. 4b, although the density
of such cracks is lower. At this load, no outer circum-
ferential, or dedgeT cracking [21,27] outside of the inden-
tation, is evident in either of the coatings.
At higher loads, the indents are larger and a higher
density of cracks can be observed. For example, Fig. 5a and
b show the top surfaces of the binary and ternary coatings
indented to a maximum load of 500 mN using a 5-Am-radius
spherically tipped indenter. The indent is again slightly
larger for the binary coating (11 Am) than for the ternary
coating (9 Am) and again less cracks are present in the
ternary coating. Circumferential cracks, in Fig. 5a and b,
both marked by an arrow, can be seen not only inside both
of the indents, but also outside the indents, especially in the
case of the ternary coating.
Fig. 6 shows FIB cross sections of the indents in (a) the
binary and (b) ternary coating after loading to 500 mN using
a 5-Am-radius spherical indenter. Circumferential cracks
were observed in both coatings, both inside and outside of
the indented area, for example, in the regions arrowed in both
images. The outer circumferential cracks, often termed dedgecracksT [20,26], were observed in both coatings following
loads in excess of 200 mN. These edge cracks (marked T in
Fig. 6) are initiated at the surface, but are associated with
subsurface transverse (or lateral) cracking, with cracks
running parallel to the substrate–coating interface away
from the contact area. Fig. 7 shows a higher magnification
FIB image of the cross section of the indented ternary
coating shown in Fig. 6b. A number of these transverse
cracks, marked T, can be clearly observed. In contrast, a FIB
cross section of the TiN coating (Fig. 8a) contains only a
small amount of these cracks (again marked T). In addition,
columnar cracks (marked C), and shear steps at the base of
the coating (marked S) were observed in both coatings.
Fig. 6. FIB cross-sectional images through the indents in (a) the binary
coating and (b) the ternary coating, following nanoindentation at a load of
500 mN using a 5-Am spherical indenter.
Fig. 7. FIB cross-sectional image of the indented regions as shown in Fig.
6b at higher magnification.
Fig. 5. FIB images of the top surface of (a) the binary coating and (b) the
ternary coating following nanoindentation at a load of 500 mN using a 5-
Am spherical indenter.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–3526 3523
As previously mentioned, pop-ins observed in load–
displacement curves for hard coatings on ductile substrates,
such as those shown in Fig. 2, are often associated with
cracking of the coating. In a previous study [21], pop-ins in
similar load–displacement curves for TiN coatings, several
microns in thickness, were attributed to cracking and the
resulting shearing along the columnar grain boundaries,
which eventually resulted in the formation of shear steps at
the interface between the coating and the steel substrate. It is
very likely that the pop-ins labeled P1 and P2 in Fig. 2c are
associated with similar cracking events.
Fig. 8b is another higher magnification FIB cross-
section image of the binary coating, subjected to nano-
indentation to a load of 500 mN, using the 5-Am indenter.
The columnar grains within the coating can be seen to be
rotated through large angles relative to their original
orientation following heavy deformation. Moreover, in
some areas, the thickness of the coating is distorted due to
this rotation of the grains. The substrate is also heavily
deformed beneath the indenter and the steel substrate has
been driven upwards into the coating. Such deformation
was not observed in the thicker ternary coating and
demonstrates the ability of these coatings to remain intact,
even at very high levels of strain.
Cross-sectional TEM specimens were also prepared
through the centre of indented regions of both coatings,
after loading to 100 mN (Fig. 9a–c) and 500 mN (Fig. 10a–
c), using a 5-Am-radius spherical indenter [15]. Fig. 9a is a
Fig. 8. FIB cross-sectional image of (a) the indented regions as shown in
Fig. 6a at higher magnification and (b) the indented region as shown in
Fig. 6a at different position.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–35263524
bright field image of the entire indent in the binary coating,
after indentation to a maximum load of 100 mN. The TiN
coating, V820 steel substrate and a protective platinum layer
are labeled in the image. Here, a number of columnar
cracks, approximately 200 nm in length, marked C, can be
Fig. 9. Bright field TEM images of (a) the binary coating and (b) the ternary coatin
spherical indenter, (c) the region in the ternary coating indicated by the white sq
clearly observed in the middle of the indent. In contrast,
only two large columnar cracks, approximately 200 and 600
nm in length, marked C, can be observed in the ternary
coating (Fig. 9b) deformed under the same conditions.
Fig. 9c is a higher magnification image of the ternary
specimen. The area from which this image was taken is
indicated by the white square in Fig. 9b. The microstructure
of the ternary coating consists of columnar grains, marked
G, ~50–100 nm wide and ranging from ~100 to 500 nm in
length, oriented approximately parallel to the direction of
growth. It is noted that a columnar crack (600 nm in length)
propagates through the ~100-nm-thick interlayer between
the TiN and TiAlN layers (marked by an arrow). It is
therefore concluded that the interface between the TiN and
TiAlN sublayers does not prevent crack propagation.
Furthermore, a transgranular crack, approximately 100 nm
in length, marked T, is observed at the end of the columnar
crack, well away from the interlayer.
Fig. 10a–c are bright field TEM images of the ternary
coating loaded to 500 mN, using a 5-Am-radius spherical
indenter. Fig. 10a shows the entire indent. A number of
columnar cracks are seen, marked C, approximately ~100–
150 nm wide and ranging from ~50 to 1000 nm in length.
The thickness of the coating is uniform across the indented
region, indicating that no plastic flow occurs in the coating
during indentation, while the substrate is heavily deformed
beneath the indent. It is again noted that the ternary coating,
although heavily deformed, has retained its structural
integrity and adhesion to the substrate. Fig. 10b is a higher
magnification image of the region indicated by the white
square in Fig. 10a. Three significant columnar cracks,
marked C, approximately ~50–100 nm wide and ~1000 nm
in length, can be clearly observed in the TiAlN coating.
Fig. 10c is a second higher magnification image of the same
specimen. The white circle, shown in Fig. 10a, indicates the
area from which this image was taken. A number of lateral
cracks, marked L, approximately ~50–100 nm wide and
ranging from ~100 to 1300 nm in length, running across the
columnar grains can be observed. Again, these cracks have
passed through the interlayer of the coating without
g, both following nanoindentation at a load of 100 mN using a 5-Am-radius
uare, shown in panel b at higher magnification.
Fig. 10. Bright field TEM images of the ternary coating following nanoindentation at a load of 500 mN using a 5-Am-radius spherical indenter. Panel a shows
the overall structure of the indentation; panel b shows, at higher magnification, the area indicated by the white square, shown in panel a and panel c shows, at
higher magnification, the area indicated by the white circle, shown in panel b.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–3526 3525
deviation. Moreover, the shear steps that result from
columnar sliding can be observed, marked S, at the interface
between the TiAlN coating and the steel substrate.
In the present study, lateral cracking occurred more
frequently in the dual-layer ternary coating (Fig. 6b) than
the binary coating (Fig. 6a), with columnar cracking being
the more dominant fracture type in the binary coating.
Direct in situ observations of cracking in a homogeneous
stiff coating on a compliant substrate (a glass-polymer
coating–substrate system), indented with a spherical inden-
ter have shown the presence of circumferential cracks which
initiate outside the contact area at the surface of the coating,
and change direction through the thickness of the coating to
run parallel with the plane of the coating [28]. Such cracking
is quite different to the Hertzian cone cracking observed
near the contact area in monolithic materials. These cracks
are similar in appearance to the edge cracks seen in the
present study.
Previous investigations of TiN coatings have shown that
these coatings deform predominantly by shear cracking and
sliding along the columnar grain boundaries [16,21,22],
although in some cases, a limited amount of transverse
cracking is observed towards the edge of the coating. It is
thought that relatively weak columnar grain boundaries
allow this type of fracture to occur.
It is therefore suggested that in the case of the dual-
layer ternary coating, increased grain boundary strength
may hinder crack propagation through the coating,
promoting the formation of edge cracks over columnar
cracks. Increased boundary strength is possibly due to the
~100-nm-thick interfacial region, which is known to
consist of a series of compositionally distinct layers
(bilayer length ~16 nm) [13].
Despite the presence of some lateral edge cracking, it
is noted that deformation in both the binary and ternary
coating still occurs predominantly via cracking and shear
sliding along the columnar grains boundaries. This is in
agreement with our previous study of TiN coatings, and
also with prior, but less detailed studies, by Loubet et al.
[20] and Weppelmann et al. [11], who, respectively,
investigated TiN films on stainless steel substrates
deformed using a Vickers indenter, and the fracture
mechanics of TiN films on silicon substrates during
deformation using a spherical indenter. The strain
generated by nanoindentation is thought to be accom-
modated by a combination of shearing of the columnar
grains in the brittle coating and plastic flow in the
ductile steel substrate. The stress is then transferred to
the steel substrate after cracking. The onset of plastic
deformation in both coatings occurred at a similar load
and in each case involved similar deformation mecha-
nisms, although they are of different thickness and
composition.
4. Conclusions
Hardness and deformation mechanisms in both a TiN
coating and TiAlN–TiN dual-layer coating were investi-
gated using a combination of nanoindentation, FIB milling
and imaging, and transmission electron microscopy.
Even at low loads, the substrate influenced hardness
measurements in these relatively thin coatings, and so a
model developed by Korsunsky et al. [24] was used to
determine the hardness of the coating itself. Hardnesses of
30 and 24 GPa were obtained for the TiAlN and TiN
coatings, respectively.
Columnar cracking and shear steps at the coating–
substrate interface indicated that both coatings deform
predominantly by shear at the columnar grain boundaries;
however, significant lateral edge cracking was also observed
in the case of the TiAlN coating. In general terms, the
overall deformation mechanisms of the binary and ternary
coatings were similar.
Cracks passed unhindered through the interface between
the TiAlN and TiN in the dual-layer coating, and this layer
is not thought to affect the deformation behaviour of the
coatings.
L.W. Ma et al. / Surface & Coatings Technology 200 (2006) 3518–35263526
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