Trends in Metal Oxide Stability for Nanorods, Nanotubes, and Surfaces
Hydrogen sensing properties of ZnO nanorods: Effects of annealing, temperature and electrode...
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Hydrogen sensing properties of ZnO nanorods:Effects of annealing, temperature and electrodestructure
Sadullah Ozturk a, Necmettin Kılınc a,b,*, _Imren Torun a, Arif Kosemen a,c,Yasin S‚ahin
a, Zafer Ziya Ozturk a,d
aGebze Institute of Technology, Science Faculty, Department of Physics, 41400 Gebze, Kocaeli, TurkeybKoc University, Electrical and Electronics Engineering, 34450 Sariyer, Istanbul, TurkeycMus‚ Alparslan University, Department of Physics, 49100 Mus‚, TurkeydTUB_ITAK-Marmara Research Center, Materials Institute, 41470 Gebze, Kocaeli, Turkey
a r t i c l e i n f o
Article history:
Received 6 August 2013
Received in revised form
10 January 2014
Accepted 13 January 2014
Available online 11 February 2014
Keywords:
ZnO
Nanorods
Hydrothermal process
H2 sensor
Gas sensor
* Corresponding author. Gebze Institute of TTurkey. Tel.: þ90 2626051312; fax: þ90 262 6
E-mail address: [email protected] (N. K0360-3199/$ e see front matter Copyright ªhttp://dx.doi.org/10.1016/j.ijhydene.2014.01.0
a b s t r a c t
In this study, the hydrogen (H2) sensing properties of vertically aligned zinc oxide (ZnO)
nanorods were investigated depending on annealing, Pd coating, temperature and elec-
trode structure. ZnO nanorods were fabricated by using hydrothermal method on a glass
substrate and an indium tin oxide (ITO) coated glass substrate. In order to determine the
effects of annealing on the H2 sensor performance, the nanorods were heated at 500 �C in
dry air. H2 sensing measurements were done in the temperature range of 25e200 �C. It was
found that, the sensor response of Pd coated ZnO nanorods were much higher than the un-
coated nanorods due to the catalytic effect of Pd thin film. Moreover, the un-annealed
samples showed better sensor response than the annealed samples due to the number
of oxygen deficiency. In addition, the lateral electrode structure showed higher sensor
response than the sandwich electrode structure.
Copyright ª 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights
reserved.
1. Introduction
The use of hydrogen (H2) as a clean, efficient, and sustainable
energy source has been expanding into various fields, such as
the chemical industries, the food industry, the semiconductor
industry and the transportation [1]. The detection of H2 is so
crucial in safety issue due to the flammable and explosive
properties of H2 gas and also in a H2 source for leak detection
[2]. In addition, there are many different H2 production
echnology, Science Facu538490.ılınc).2014, Hydrogen Energy P66
processes such as steam reforming of natural gas, catalytic
decomposition of natural gas, partial oxidation of heavy oils,
coal gasification, steam-iron coal gasification, thermochem-
ical, photochemical, photoelectro-chemical and photobiolog-
ical processes [1,3,4,5,6] and the detection of H2 is also very
important for real-time quantitative analysis of H2 produc-
tion. The H2 sensors can be classified into several categories,
according to physicochemical detection mechanism: Cata-
lytic, electrochemical, resistor based, work function based,
mechanical, optical, acoustic [7,8,9,10,11,12,13,14,15,16,17,18].
lty, Department of Physics, P.O. Box 141, 41400 Gebze, Kocaeli,
ublications, LLC. Published by Elsevier Ltd. All rights reserved.
Fig. 1 e Schematic illustration of ZnO nanorod sensor
structures (lateral (a) and sandwich (b) electrodes types).
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Semiconducting metal oxides have been extensively using as
sensitive materials for H2 detection.
Although semiconducting metal oxide materials can be
effect very easily by physical and chemical effects in
ambient, they can conserve their structure stability. With
this property, metal oxide materials attracted the
attention of researchers, and interest on these materials has
been increased day by day. Metal oxide materials have
been used in many application areas such as solar cells,
transistors, light emitting diodes and gas sensors
[19,20,21,22,23,24,25,26]. Semi-conductive metal oxide ma-
terials are often selected as sensing materials for detecting
of pollutant, oxidized, flammable and explosive agents
[19,20,21,22,23,24,25,26]. These materials are attracted
considerable attention because they show high sensitivity
to the gases and resistant to physical and chemical defor-
mation [27,28,29,30]. In general, sensing mechanism of
metal oxide gas sensors depends on adsorbed oxygen ions
(O2�, O�, O2�) on the surface. Metal oxides have been used at
high temperatures due to the different forms of adsorbed
oxygen ions at the different temperature ranges
[31,32,33,34]. Operating metal oxide sensors at high tem-
peratures causes an increase the costs. In order to improve
the sensor performance (sensitivity and low operating
temperature) of metal oxide materials, the nanostructured
metal oxides have been fabricated by using different
methods [35,36,37,38]. Metal oxide nanostructures have
extraordinarily large surface-to-volume ratio. This causes
dominant surface effect due to increase of their specific
surface. Hence, high surface area leads to the enhancement
of the surface related properties, such as catalytic activity or
surface adsorption. The selectivity of metal oxide based gas
sensors is another drawback due to cross response to many
gas species [32,34]. To overcome this problem, researchers
have been focused on doping metal oxide with catalytic
materials or fabricating heterostructures [39,40,41,42,43]. In
semi-conductive metal oxide materials, SnO2, WO3, TiO2
and ZnO etc are most preferred materials for gas sensing.
Among metal oxides, ZnO has large band gap (3.37 eV) and
high exciton binding energy (60 meV) and has been used in
many application such as used in optoelectronics, transparent
electronics, spintronic devices, and sensor applications [13].
ZnO nanostructures have been intensively studied for sensing
different gases such as H2, NOx, CO, H2S, O2, ethanol, etc in the
temperature range between room temperatures to 400 �C [13].
In order to improve the sensor parameters of ZnO based
sensor such as sensitivity, response time, recovery time and
reducing optimal working temperatures at low temperatures,
researchers have been focused on generally two ways. The
first, metal oxides have been doped with noble metals such as
palladium (Pd), platinum (Pt), and the second, metal oxides
have been synthesized in nanostructure forms such as
nanowire, nanotube, nanorods. In this study, ZnO nanorod
were fabricated with hydrothermal method and then func-
tionalize the nanorod with Pd thin film to enhance sensor
performance of ZnO based H2 sensor.
Many research groups have focused on gas sensor based on
nanostructured ZnO and doped ZnO [25]. For instance, Xing
et al. fabricated PdeZnOnanoflowers and the gas sensor of the
nanoflowers presented high sensitivity, short response time,
high selectivity and low operating temperatures [44]. In gen-
eral, chemical vapor deposition (CVD), solegel and laser
deposition techniques have been used to dope metal oxides
materials with metals [44]. In addition, Wei et al. prepared
pure and PdeZnO nanofibers by using electro-spinning pro-
cess [45]. They found that the sensor parameters of PdeZnO
nanofibers were better than pure ZnO nanofibers at 220 �C for
low concentration range (1e20 ppm) of CO [45]. Liao et al.
prepared ZnO nanorods by reactive vapor deposition of pure
Zn powder in an oxygen-containing ambience with different
diameters and investigated the structure, optical, and gas-
sensing properties of the nanorods [46]. They found that the
thin nanorods have a significantly better sensing performance
than the thick nanorods for the detection of C2H5OH and H2S
in air. The H2 gas sensing properties of ZnO nanorods were
investigated depending on temperature, size of the nanorods,
electric field and Pd nanoparticle density on the nanorods
surface [13,43,47e51]. Besides that, Chang et al. fabricated ZnO
nanorods with controlling Pd nanoparticle density in nano-
rods with photochemical deposition method, and tested
PdeZnO nanorod sensors to H2 gas at different temperature
ranges for clarifying the sensing mechanism [43]. Wang et al.
synthesized ZnO nanorod on a ZnO thin film through a simple
hydrothermalmethod and found that the ZnO nanorod arrays
show a high sensitivity and reversible response to H2, NH3 and
CO at a relatively low operating temperature [51].
In this study, ZnO nanorods were fabricated by using hy-
drothermal process on to a glass and ITO substrates. H2 gas
sensing properties of ZnO nanorodwere studied depending on
annealing, Pd film coating, operating temperature, electrode
structure and H2 concentration. Work function based (Pd/ZnO
nanorod/ITO) and resistance-based (IDE on ZnO nanorod)
electrodes structures were used for understanding sensing
mechanism of ZnO nanostructures.
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2. Experimental details
ZnO nanorods were synthesized on ZnO thin film (seed layer)
coated glass substrate by hydrothermal method at 90 �C for
3 h, and the details were given in previous works [52e54]. The
glass and indium tin oxide (ITO) substrates were cleaned with
acetone, methanol and deionized water in an ultrasonic bath
for 10 min each, respectively. In order to fabricate ZnO
nanorod, zinc nitrate hexahydrate (Zn(NO3)2・6H2O) and
hexamethylenetetramine (HMTA; C6H12N4) were used as re-
agents in equi-molar. ZnO nanorods were synthesized on the
seed layer by using hydrothermal process at 90 �C for 3 h. The
fabricated ZnO nanorods are approximately 60 nm in diam-
eter and 800 nm in length. Some of the ZnO nanorod samples
were annealed at 500 �C in dry air ambient for 2 h in order to
investigate the effects of annealing to gas sensing properties.
Two types of electrode were used. Lateral and sandwich
type electrode structures are called as resistive and work
function based sensors respectively. Fig. 1 shows a schematic
diagram for the lateral (a) and sandwich (b) type electrodes. In
order to fabricate resistive based sensor; annealed and as-
prepared ZnO nanorods were coated with approximately
15 nm Pd thin film by using thermal evaporator (Leybold
Univex 450). Then gold (Au) inter digital electrodes were
deposited on to as-prepared and Pd film coated ZnO nanorods
using the same evaporator system. The thickness of Au elec-
trodes was 250 nm. For work function based sensor mea-
surements, ZnO nanorods that fabricated on ITO, were then
coated with approximately 100 nm Pd film by using the
evaporator system. The ITO and Pd were used as top and
bottom electrode of device respectively (Fig. 1(b)). ZnO nano-
rods were characterized by scanning electron microscope
(SEM-Jeol JSM 6335) and UVevis spectrophotometer (Scinco
UVevis spectrophotometer).
Five type samples were tested for H2 gas sensor in a tem-
perature interval of 25e200 �C for concentration range from
200 to 4000 ppm H2 in dry air. The sample notation and the
preparation conditions of samples are depicted in Table 1. For
instance, RAs sample was as-prepared, without Pd film depo-
sition, and then lateral Au electrode (IDE) coated ZnO nano-
rods. Pd/RAs sample was as-prepared and 15 Pd thin film
coated on to ZnO nanorods, and then lateral Au IDE deposited.
Table 1 e The sensor device notation and the preparationconditions of the devices.
No Device Operatingprinciple
Electrodestructure
Pd film Heattreatment
1 RAs Resistance-
Based
IDE/ZnO
nanorod
No No
2 Pd/RAs Resistance-
Based
IDE/ZnO
nanorod
Yes Yes
3 Pd/RHeated Resistance-
Based
IDE/ZnO
nanorod
Yes Yes
4 Pd/WAs Work
Function
Based
Pd/ZnO
Nanorod/ITO
Yes No
5 Pd/WHeated Work
Function
Based
Pd/ZnO
Nanorod/ITO
Yes Yes
For H2 gas sensing measurements, a constant voltage was
applied to sensor devices and the current was monitored
continuously and recorded using an IEEE 488 data acquisition
system incorporated into a PC during the measurements.
3. Results and discussion
3.1. Structural characterization
The morphologies of ZnO nanorods on ZnO seed layer were
studied by SEM. Fig. 2(a) shows the SEM image of ZnO nano-
rods. ZnO nanorods with average diameters of 60 nm have
been synthesized conveniently, and the ZnO nanorods are
vertically arranged with hexagonal shape on the substrate.
The detailed structural characterization, fabrication process
and the nanorod growth mechanism were discussed previ-
ously [52e54]. Fig. 2(b) shows UVevis spectrum of as-prepared
and annealed ZnO nanorods. UVevis analysis of the nanorods
was carried out at room temperature. A sharp UV absorption
at a wavelength of 374 nm (ca. 3.31 eV) and 382 nm (ca. 3.24)
was found for annealed and as-prepared ZnO nanorods,
respectively as seen in Fig. 2(b). This near UV absorption for
Fig. 2 e (a) SEM image of as-prepared ZnO nanorods and (b)
UVevis spectrum of as-prepared and annealed ZnO
nanorods.
Fig. 3 e The currentevoltage characteristic of as-prepared
(RAs) ZnO nanorods under dry air and exposed to 1000 ppm
H2 at 200 �C.
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annealed and as-prepared ZnO nanorods agreeswith the band
gap of bulk ZnO [55] which mainly originated from the free
carrier or excitonic transition between the valance band and
the conduction band. The band gap of ZnO nanorods
increasedwith annealing from 3.24 eV to 3.31 eV. The increase
in the band gap may be related to decline in the oxygen va-
cancy of the nanorods with annealing in air. The annealing of
ZnOunder oxygen ambient causes the decrease in the number
of oxygen vacancy or oxygen deficiency [56].
3.2. Hydrogen sensing measurements
3.2.1. Lateral electrode typeGenerally, Au, Pd and Ag metals make Schottky contacts to
ZnO material [57]. Fig. 3 shows the currentevoltage (IeV)
Fig. 4 e The current versus time graphs of as-prepared (RAs) (ae
nanorod samples exposed to 500 ppm H2 at room temperature
characteristic of as-prepared (RAs) ZnO nanorods that coated
with Au IDE electrodes under dry air and exposed to 1000 ppm
H2 at 200 �C. The symmetric IeV relation from the
AueZnOeAu confirms Schottky junction formation between
Au and ZnO nanorods both under dry air and exposed to
1000 ppm H2. The IeV characteristics of a Schottky diode are
represented by Ref. [58]
I ¼ I0
�exp
�qVnkT
�� 1
�(1)
where I0 is the saturation current based on thermionic emis-
sion theory, n is the ideality factor, k is the Boltzmann’s con-
stant, T is the absolute temperature. The magnitude of the
current of RAs ZnO nanorods sample towards 1000 ppm H2 is
higher than that of the sample under dry air in the whole
voltage range as seen in Fig. 3. The increase in the currentwith
exposing H2 could be explained with the decrease in the bar-
rier height between contact electrode and ZnO [13,49e51].
Fig. 4 shows current versus time graphs of as-prepared (RAs)
and 15 nm Pd coated as-prepared (Pd/RAs) ZnO nanorod
samples exposed to 500 ppm H2 at room temperature and
200 �C. After the current of the sensor samples was measured
under dry air flow for 25 min to obtain base line, 500 ppm H2
was flowed into the chamber for enough time to observe
response time. After the sensors had been come to saturation,
the sensorswere purgedwith dry air. This process that defined
as exposure to H2 and purging with dry air repeated two times
for observing repeatability of the sensors as seen in Fig. 4. It is
clearly seen from Fig. 4(a) that the current of RAs sample
increased slowly from 32 pA to 36 pAwhen expose to 500 ppm
H2, but the current of RAs sample did not recoverwhile purging
with dry air. The second exposure to 500 ppm H2 and purging
with dry air showed similar behavior. On the other hand, RAs
sensor sample exhibited recover response to H2 at a temper-
ature of 200 �C as seen in Fig. 4(b). The current of RAs sample
b) and 15 nm Pd coated as-prepared (Pd/RAs) (ced) ZnO
and 200 �C.
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increased rapidly from 20 nA to 34 nAwhen expose to 500 ppm
H2, and then came to saturation. The current of RAs sample
fully recovered to the base line while purging with dry air. The
sensing of H2 by ZnO nanorods could be explained as follow;
when oxygen adsorbed on ZnO nanorod surface as O2�, O� and
O2� ions, an electron extracted from the conduction band
[59,60]. The O2�, O� and O2� ions are stable 100 �C, between 100
and 300 �C and above 300 �C respectively [61]. The sensing
mechanism of a reduced gas such as hydrogen is based on
interaction between adsorbed oxygen on ZnOnanorod surface
and hydrogen gas. The reaction between hydrogen and oxy-
gen ions produces H2O molecules and consumes adsorbed
oxygen on the surface by releasing electrons. These electrons
will be back to the conduction band and causes an increase in
the current of ZnO nanorods. These electrons also provide in a
reduction of surface depletion region and increase conduc-
tivity of the nanorods.
Pd/RAs sensor sample shows fully recover and repeatable
response to 500 ppm H2 at both room temperature and 200 �Cas given in Fig. 4(c) and (d). The current of Pd/RAs sample
increased rapidly from approximately 5 mA and 7 mA to 65 mA
and 465 mA at room temperature and 200 �C respectively when
expose to 500 ppm H2, and then came to saturation. The cur-
rent of RAs sample fully recovered to the base line while
purging with dry air for both indicated temperature as seen in
Fig. 4(c) and (d). Pd film coating on ZnOnanorod provides rapid
and easy recoverability compared to uncoated nanorods at
room temperature as seen in Fig. 4(a) and (c). The H2 sensing
mechanism of Pd/RAs at room temperature can be explained
with catalytic properties of Pd to H2 and dissociation oxygen
molecules at low temperatures by Pd thin film. Similarly, Pd-
coated ZnO nanostructures showed high and fast hydrogen
response at room temperature [10,43,44]. The increase in the
current of Pd/RAs samplewas higher than that of RAs sample at
both room temperature and 200 �C as seen in Fig. 4.
The sensing properties of ZnO nanorods can be compared
by determining their sensor response which is defined as
Sensor responseðRÞ ¼ DI=I0 (2)
Fig. 5 e The temperature dependence the sensor response
graph for Pd/RAs (a) and Pd/RHeated (b) samples exposure to
500 ppm H2.
where DI is the change in current and I0 is the reference
value (baseline) of the nanorod devices exposed to H2. The
sensor response of RAs sample was in the range of 0.8e1.1 at
the temperature interval of 100e200 �C and lower than the
sensor response of both Pd/RAs and Pd/RHeated samples.
Fig. 5 shows temperature dependence the sensor response
graph for Pd/RAs and Pd/RHeated samples exposure to
500 ppm H2. It is clearly seen that Pd/RAs sample is more
sensitive to H2 than Pd/RHeated. The sensor response of as-
prepared sample was higher than that of annealed ones
for all measured temperature. As a result, Pd/RAs (as-pre-
pared and Pd film coated ZnO nanorods) sample shows
highest sensor response at all measured temperatures. The
low sensor response for annealed sample could be
explained with decreasing oxygen vacancies of the ZnO
nanorod by heating in air. The annealing process in dry air
significantly increases both the quantity and the rate of
oxygen, and this causes a decrease in oxygen vacancies on
the surface. On the other hand, the sensor response of both
Pd/RAs and Pd/RHeated samples increases with increasing
temperature as given in Fig. 5.
Fig. 6 e The sensor response versus time graphs of as-
prepared (Pd/WAs) (a) and annealed (Pd/WHeated) (b) ZnO
nanorod samples exposed to 200e3000 ppm H2 at room
temperature.
Fig. 7 e The sensor responses of Pd/WAs (a) and Pd/WHeated
(b) samples as a function of concentration at room
temperature and 200 �C.
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3.2.2. Sandwich electrode typeFig. 6 shows sensor response versus time graphs of as-
prepared (Pd/WAs) and annealed (Pd/WHeated) ZnO nanorod
samples exposed to 200e3000 ppm H2 at room temperature.
The H2 sensing mechanism of sandwich electrode was
differed from lateral electrode type. The mechanism for
sandwich electrode is based on Schottky barrier height be-
tween metal electrode and ZnO. The Pd thin film acts as a
Table 2 e A summary of sensor response for all sensordevices exposure to 500 ppm H2 at indicatedtemperatures.
Device Temperature (�C)
25 100 200
RAs No recovery 0.9 0.8
Pd/RAs 11.4 22.2 79.7
Pd/RHeated 1.4 4.4 27
Pd/WAs 13.5 2.21 14.94
Pd/WHeated 0.25 1.1 5.89
catalyst where the dissociation of hydrogenmolecules occurs.
The dissociation of H2 in to Pd electrode causes a decrease in
work function of the electrode and then Schottky barrier
height at the interface between the electrode and ZnO de-
creases [10]. Das et al. fabricated individual ZnO NW for
Schottky diode type hydrogen sensor by using Pt top electrode,
and reported a high sensitive and fast response at RT [62].
Sensor responses of both Pd/WAs and Pd/WHeated samples
increased with enhancing concentration as given in Fig. 6.
Sensor response of Pd/WAs sample was higher than that of Pd/
WHeated sample for measured concentrations as seen in Fig. 6.
Sensor responses of Pd/WAs and Pd/WHeated samples for
3000 ppm H2 were approximately 32 and 0.6 respectively. The
low sensor response for annealed sample could be explained
with decreasing oxygen vacancies of the ZnO nanorod by
heating in air. Similar behavior was observed for ZnO nanorod
with lateral electrode type.
Fig. 7 shows the sensor responses of Pd/WAs and Pd/
WHeated samples as a function of concentration at room tem-
perature and 200 �C. The sensor responses of the samples
increased with increasing concentration at the indicated
temperatures. The sensor response of Pd/WAs sample was
higher than that of Pd/WHeated sample at the temperature in-
terval of 25e200 �C as seen in Fig. 7. The enhance in the
temperature causes an increase in the sensor response for
measured concentration. Table 2 shows a summary of sensor
response for all samples exposure to 500 ppm H2 at various
temperatures. The highest sensor response was observed for
Pd/RAs sensor device. The sensors with lateral electrode type
showed higher sensor response for both as-prepared and
annealed samples compare to sandwich type electrode. The
Pd film coating enhanced H2 sensor response and decreased
working temperature to even room temperature.
4. Conclusions
Hydrogen gas sensor based on ZnO nanorods were investi-
gated depending on annealing, Pd coating, temperature and
electrode structure. ZnO nanorods were fabricated by using
hydrothermal process at 90 �C for 3 h. The Pd coated ZnO
nanorods are suitable for practical applications in high
hydrogen sensitive at low hydrogen concentrations at room
temperature. Annealing of ZnO nanorod showed low sensor
response compare to as-prepared ZnO nanorod due to the
decreasing oxygen vacancies of the ZnO nanorod by heating
in air. The sensor response of ITO/ZnO nanorods/Pd sand-
wich type sensor was lower than the response of Au IDE
coated ZnO nanorods lateral electrode structure. The sensing
mechanism for both electrode structures could be explained
with the change in the barrier height between contact elec-
trode and ZnO.
Acknowledgments
This study was supported by Scientific and Technological
Research Council of Turkey (TUB_ITAK) entitled “Development
of Automotive Gas Sensors Based on Nano-Metal-Oxide
i n t e rn a t i o n a l j o u r n a l o f h y d r o g e n en e r g y 3 9 ( 2 0 1 4 ) 5 1 9 4e5 2 0 15200
Semiconductor with increased Selectivity, Sensitivity and
Stability” (Project Number: 111M261). The authors thank to Dr.
Anıl Gunay-Demirkol for SEM measurements.
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