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Transcript of 4 : prinsip dasar sensor - Direktori File UPI
4 : PRINSIP DASAR SENSOR
Program Studi Fisika
FI 365 FI 365 FI 365 FI 365 –––– SISTEM INSTRUMENTASISISTEM INSTRUMENTASISISTEM INSTRUMENTASISISTEM INSTRUMENTASI
Waslaluddin, dkk
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PRINSIP DASAR
ISI KULIAH
� Sensor Mekanik
� Sensor Elektrik
� Sensor Temperatur dan Radiasi
� Sensor Magnetik dan Kimia
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PRINSIP DASAR
SENSOR MEKANIK
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SENSOR MEKANIK:
Velocity and AccelerationVelocity and Acceleration• Capacitive Accelerometers • Piezoresistive Accelerometers • Piezoelectric Accelerometers • Thermal Accelerometers
• Heated-Plate Accelerometer • Heated-Gas Accelerometer
Velocity and AccelerationVelocity and Acceleration• Capacitive Accelerometers • Piezoresistive Accelerometers • Piezoelectric Accelerometers • Thermal Accelerometers
• Heated-Plate Accelerometer • Heated-Gas Accelerometer
Pressure Sensors Pressure Sensors • Mercury Pressure Sensor • Piezoresistive Sensors • Capacitive Sensors• VRP Sensors • Optoelectronic Sensors • Vacuum Sensors
• Pirani Gauge
Pressure Sensors Pressure Sensors • Mercury Pressure Sensor • Piezoresistive Sensors • Capacitive Sensors• VRP Sensors • Optoelectronic Sensors • Vacuum Sensors
• Pirani Gauge
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• Gyroscopes• Rotor Gyroscope• Monolithic Silicon Gyroscopes • Optical Gyroscopes
• Gyroscopes• Rotor Gyroscope• Monolithic Silicon Gyroscopes • Optical Gyroscopes
Force, Strain, and Tactile SensorsForce, Strain, and Tactile Sensors• Strain Gauges • Tactile Sensors . • Piezoelectric Force Sensors
Force, Strain, and Tactile SensorsForce, Strain, and Tactile Sensors• Strain Gauges • Tactile Sensors . • Piezoelectric Force Sensors
• Pirani Gauge • Ionization Gauges • Gas Drag Gauge
• Pirani Gauge • Ionization Gauges • Gas Drag Gauge
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SENSOR MEKANIK:
Flow SensorsFlow Sensors• Thermal Transport Sensors • Ultrasonic Sensors • Electromagnetic Sensors• Microflow Sensors • Breeze Sensor • Coriolis Mass Flow Sensors
Flow SensorsFlow Sensors• Thermal Transport Sensors • Ultrasonic Sensors • Electromagnetic Sensors• Microflow Sensors • Breeze Sensor • Coriolis Mass Flow Sensors
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• Coriolis Mass Flow Sensors • Drag Force Flow Sensors • Coriolis Mass Flow Sensors • Drag Force Flow Sensors
Acoustic SensorsAcoustic Sensors• Resistive Microphones • Condenser Microphones • Fiber-Optic Microphone • Piezoelectric Microphones • Electret Microphones • Solid-State Acoustic Detectors
Acoustic SensorsAcoustic Sensors• Resistive Microphones • Condenser Microphones • Fiber-Optic Microphone • Piezoelectric Microphones • Electret Microphones • Solid-State Acoustic Detectors
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SENSOR MEKANIK:Occupancy and Motion DetectorsOccupancy and Motion Detectors• Ultrasonic Sensors • Microwave Motion Detectors • Capacitive Occupancy Detectors • Triboelectric Detectors • Optoelectronic Motion Detectors
• Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Occupancy and Motion DetectorsOccupancy and Motion Detectors• Ultrasonic Sensors • Microwave Motion Detectors • Capacitive Occupancy Detectors • Triboelectric Detectors • Optoelectronic Motion Detectors
• Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Position, Displacement, and LevelPosition, Displacement, and Level• Potentiometric Sensors Position, Displacement, and LevelPosition, Displacement, and Level• Potentiometric Sensors
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• Potentiometric Sensors • Gravitational Sensors • Capacitive Sensors • Inductive and Magnetic Sensors
• LVDT and RVDT • Eddy Current Sensors & Transverse Inductive Sensor • Hall Effect Sensors & Magnetoresistive Sensors
• Optical Sensors • Optical Bridge & Proximity Detector with Polarized Light • Fiber-Optic Sensors & Fabry–Perot Sensors • Grating Sensors & Linear Optical Sensors (PSD)
• Ultrasonic Sensors • Radar Sensors : Micropower Impulse Radar & Ground-P enetrating Radar • Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
• Potentiometric Sensors • Gravitational Sensors • Capacitive Sensors • Inductive and Magnetic Sensors
• LVDT and RVDT • Eddy Current Sensors & Transverse Inductive Sensor • Hall Effect Sensors & Magnetoresistive Sensors
• Optical Sensors • Optical Bridge & Proximity Detector with Polarized Light • Fiber-Optic Sensors & Fabry–Perot Sensors • Grating Sensors & Linear Optical Sensors (PSD)
• Ultrasonic Sensors • Radar Sensors : Micropower Impulse Radar & Ground-P enetrating Radar • Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
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SENSOR TEKANAN (PRESSURE SENSOR):
Definisi makroskopis Tekanan (P) = Gaya mengenai permukaanSatuan luas
P = F/A
Definisi mikroskopis Tekanan (P) berdasar teori kinetik gas =“Total energi kinetik molekul gas mengenai permukaan persatuan volume”
P = 2/3 (E /V) = NRT
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P = 2/3 (Ek/V) = NRTEk = energi kinetik molekul gasV = volume gas
N = jumlah molekul gasR = konstanta gasT = temperatur gas
Satuan tekanan (P):1 Pa=1.45×10.4 lb/in2 =9.869×10.6 atm=7.5×10.4 cm Hg.
1 atm=760 torr=101,325 Pa.
1 psi=6.89×103Pa=0.0703 atm.(sistem US)
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Bellow & Membran Strain-gage Pressure Sensor
Z : defleksi r : jari-jari membranS : tensi pada membran
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plat tipis
membran
S : tensi pada membrang : tebal membranσσσσ : stress pada membran
Untuk plat :
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Membran/diaprahm Pressure SensorFI 365
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Membran/diaprahm Pressure Sensor
Defleksi yang kecil ditengah-tengah membran � jari-jari membran rn berubah
Untuk
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Untuk �
dimana
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Capacitive Transduction
d
AC roεε= ( ) ( )( )22
3
2
16
13rR
EhPry −−= ν
Bagaimana transduksi P � C ?
d
A = ππππr2
d – y(r)
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1010
∫∫−
=−
=R
roR
ro
d
ryrdr
ddr
ryd
rC
00)(
1
2
)(2
επεεπε
...)(
1)(
1...1
1
1 +
+=−
⇒++=−
rdrd
ry
d
ryrdr
xx
Maka:
Ingat pendekatan
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Capacitive Transduction
( ) ( )
−+=
+=
−=−
=
∫ ∫
∫∫
PRR
rdrryrdrC
rdrd
ry
dd
ryrdr
C
roR R
ro
Rro
R
ro
622
00
1212
)(1
2)(
12
νεπεεπε
επεεπε
Sehingga:
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1111
( ) ( )
+=
+= ∫ ∫ PEdhd
rdrryd
rdrd
C roro3
0 0 162
atau( )
PhEd
R
d
RPC roro
32
622
16
1)(
νεπεεπε −+=
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Capacitive Pressure SensorFI 365
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Piezoresistive TransductionFI 365
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Piezoresistive Transduction
and are the
transversal
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and are the perpendicular/transversal and parallel/longitudinal components of stress
longitudinal
and are the perpendicular and parallel piezoresistive coefficients
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Piezoresistive Transduction - CircuitFI 365
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Ra & Rc // stressRb & Rd ⊥ stress
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Piezoresistive Transduction - CircuitFI 365
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• One chip Si-Piezoresistive sensor and signal conditi oning• Pressure range: up to 5,2 bar Absolute• Operating temperature: -40 to 125 °C• Supply voltage: 5 V ± 0.25 V • Transfer function: linear, ratiometric • Accuracy over full-scale: 1 % full span (10 to 85 ° C)
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Position, Displacement, and LevelPosition, Displacement, and Level• Potentiometric Sensors• Gravitational Sensors • Capacitive Sensors • Inductive and Magnetic Sensors
• LVDT and RVDT • Eddy Current Sensors & Transverse Inductive Sensor • Hall Effect Sensors & Magnetoresistive Sensors
• Optical Sensors
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• Optical Sensors • Optical Bridge & Proximity Detector with Polarized L ight • Fiber-Optic Sensors & Fabry–Perot Sensors • Grating Sensors & Linear Optical Sensors (PSD)
• Ultrasonic Sensors • Radar Sensors :
• Micropower Impulse Radar & Ground-Penetrating Radar • Thickness and Level Sensors :
• Ablation & Thin-Film & Liquid-Level Sensors
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Displacement Sensor
Linear Variable Differential Transformer (LVDT)FI 365
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Basic Principles:a. AC current flows through “primary” coil, due to exc itation voltage e ex.b. Current is “induced” through a pair of secondary coils (e o1, eo2).c. The frequency of the induced AC current is the sa me as the excitation
frequency.d. The amplitude of the induced current in each secondary coil depen ds
upon the location of the movable “core”.
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Displacement Sensor
Linear Variable Differential Transformer (LVDT)
If core is located in “null” position then secondary voltages are equal, as illustrated below.
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Linear Variable Differential Transformer (LVDT)If the two secondary coils are connected in anti-series (+ → + and - →-) then the resulting output is the difference between the outputs of the individual seconary coils. The amplitude depends upon the position of the rod.
(There is also a Phase shift between eex and eo as we will show later)
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2020
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Linear Variable Differential Transformer (LVDT)The input, xi, is the MOTION of the rod to which the core is connected.
The output, eo, is the voltage difference between the induced voltages in the two secondary loops.
Note: The output is inherently AM modulated
(The “carrier” is AC excitation of the primary loop).
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2121Note: Phase Shift occurs as xicrosses “null” point
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Linear Variable Differential Transformer (LVDT)
Simulated Output
Generator00Y/t Chart00
Generator0125 50 75 100 125 150 175
1.000.750.500.250.00
-0.25-0.50-0.75-1.00
5.0
2.5
0.0
-2.5
-5.0
xi
→→→→
eo
→→→→
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2222
FFT00Formula00 Y/t Chart01
ms25 50 75 100 125 150 175
Hz250 500 750 1000 1250 1500 1750 2000 2250
0.90.80.70.60.50.40.30.20.10.0
2.252.001.751.501.251.000.750.500.250.00
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Linear Variable Differential Transformer (LVDT)
xi →→→→
eo,1 →→→→
1.00
0.00
-1.001.00
0.00
-1.00
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eo,2 →→→→
eo →→→→
ms25 50 75 100 125 150 175
1.00
0.00
-1.001.00
-0.75
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Linear Variable Differential Transformer (LVDT)
1.00
0.00
-1.001.00
Motion →→→→
LVDT output →→→→
How Do We Recover the LVDT Signal?
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2424ms
25 50 75 100 125 150 175
-0.754
0
-41.5
0.0
-1.5
Demod LVDT →→→→
Recovered Motion →→→→
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Linear Variable Differential Transformer (LVDT)
Motion →
LVDT output →
0.8
0.4
0.00.35
0.00
LVDT Signal Recover – Frequency Domain
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2525
Demod LVDT →
Recovered Motion →
Hz250 500 750 1000 1250
Y/t Chart 0 Y/t Chart 1
Y/t Chart 2 Y/t Chart 3
0.001.25
0.001.25
0.00
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Displacement SensorFI 365
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Displacement SensorFI 365
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ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
Displacement SensorFI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3030
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3131
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3232
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3333
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3434
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3535
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3636
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3737
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3838
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
3939
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
4040
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
PRINSIP DASAR
FI 365
FI 365
FI 365
FI 365
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
SIS
TEM
INSTRUM
ENTASI
4141