fD Vacuum Pressure Measurement

fD Vacuum Pressure Measurement Pressure Gauges

��===

Vacuum Pressure Introduction The definition of vacuum is an area void of matter and a partial vacuum is any pressure lower than the local atmospheric pressure being 760 Torr at sea level. Obtainable vacuum for process applications and laboratory experiments range from atmospheric pressure all the way down to 10-12 Torr. Vacuum pressure is often labeled by terms rough vacuum (below atmospheric pressure to 10-3 Torr), high vacuum (10-3 to 10-9Torr), and ultra-high vacuum(< 10-9 Torr). These terms can be confusing to a new comer to vacuum technology since high vacuum equals low pressure. Vacuum Reference Chart T h e r e i s a d i r e c t connection between Torr I mm Hg A�solute I Feet I Miles I Meters I in Hg Vacuum 1 in Hg Absolute 1 PSIA I Pa I Bar 1 atm t h e s e v a c u u m t e r m i n o l o g i e s a n d altitude, that is, low pressure occurs at high altitude, (figure 10-1 to the right) shows a v a c u u m r e f e r e n c e chart that displays vacuum pressure at different altitudes. The International System of Units (abbreviated 51) for pressure is the Pascal (Pa) but vacuum p r e s s u r e i s o f t e n reported in units of Torr, Bar, atmosphere, pounds per square inch a b s o l u t e ( PSI A ),

millimeters of mercury absolute (mmHg), and inches of mercury v a c u u m ( i n H g ) . Vacuum technology is g l o b a l l y u s e d i n numerous industrial a n d s c i e n t i f i c applications, many of t h e s e a r e a s o f expertise use different units to report vacuum pressure.

10·1

1.09 1.09 150,000 28.4 45,720 29.877 0.04

13 13 90,000 17.1 27,459 29.4 0.52

34 34 70,000 13.3 21,357 28.595 1.33

69 69 55,000 10.4 16,781 27.208 2.71

87 87 50 000 9.5 15 255 26A76 3.44

111 111 45,000 8.5 13,730 25.545 4.38

141 141 40 000 7.6 12 204 24.362 5.56

179 179 35,000 6.6 10,679 22.86 7.06

226 226 30,000 5.7 9153 21.017 8.90

282 282 25,000 4.7 7628 18.8 11.12

350 350 20,000 3.8 6102 16.16 l3.76

429 429 15,000 2.8 4577 13.03 16.89

522 -

522 10,000 1.:2.... 3050 1- 9.34 2�

543 543 9000 1.7 2746 8.53 21.39

564 564 8000 1.5 2441 7.69 22.23

586 586 7000 1.3 2136 6.82 23.10

609 609 6000 1.1 1831 5.93 23.99

633 633 5000 0.95 1526 5.02 24.90

644 644 4500 0.86 1373 4.55 25.37

656 656 4000 0.76 1220 4.08 25.84

669 669 3500 0.66 1068 3.59 26.33

681 681 3000 0.57 915 3.1 26.82

694 694 2500 0.47 763 2.6 27.32

706 706 2000 0.38 610 2.1 27.82

719 719 1500 0.28 458 1.59 28.33

732 732 1000 0.19 305 1.06 28.86

746 746 500 0.09 153 0.54 29.38

760 760 0 Sea Level 0 0 29.92

Perfect Vacuum = 0 Torr FIG. 10-1 Lower

Outer Space= 1 x 10·6 to <3 x 10"17 Torr Pressure Low

Density

Extremely High Vacuum = 1 x 10"12 Torr Ultra High Vacuum = 1 x 10-9 to 3 x 10"12 Torr High Vacuum = 1 x 10-3 to 3 x 10-9 Torr Rough Vacuum= 760 to 3 x 10-3 Torr Atmospheric Pressure= 760 Torr at seal Level

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Higher Pressure

High Density

0.02 150 0.00146 o.oo I 0.26 1760 0.01733 0.02 1 0.65 4490 0.04533 0.04 1 1.33 9170 0.09199 0.09

1.69 11650 0.11599 0.11

2.15 14820 0.14799 0.15

2.73 18820 0.18798 0.19

3.47 23930 0.23865 0.24

4.3Z. 30130 0.30131 0.30

5.46 37650 0.37597 0.37

6.76 46610 0.46663 ::2& 8.29 57160 0.57195 0.56

10.10 I-69M2.,. 0.6� 0.69

10.50 72400 0.72394 0.71

10.91 75220 0.75194 0.74

11.34 78190 0.78127 0.77

11.78 81220 0.81193 0.80

12.23 84330 0.84393 0.83

12.46 85910 0.85859 0.85

12.69 87490 0.87459 0.86

12.93 89150 0.89192 0.88

13.17 90810 0.90792 0.90

13.41 92460 0.92525 0.94

13.66 94190 0.94125 0.93

13.91 95910 0.95859 0.95

14.16 97630 0.97592 0.96

14.43 99490 0.99458 0.98

14.70 101330 1.01325 1.00

Air Pressure Decreases with

Altitude VI

..5!! ::::1 656,000 Ft. (.0075 Torr) u __;_; Q) 150,000 Ft. (1.09 Torr) 0

� 100,000 Ft. (8 Torr)

- 10,000 Ft. (522 Torr) 7,000 Ft. (586 Torr) 5,000 Ft. (633 Torr) 0 Ft. (760 Torr)

Vacuum Pressure Measurement f]) Pressure Gauges

·�-=============

Vacuum Pressure Gauge Introduction It is often very important to know the vacuum pressure. When building a new vacuum system, pressure measurement equipment is typically second on the list of required items, just after the vacuum pump requirements have been specified. Vacuum goes from 760 to 10-12 Torr, more than 1015 powers, and it is easy to understand why one type of vacuum pressure sensor cannot measure the complete range. It often requires two or more different sensors to cover from atmosphere to ultra-high vacuum. We will limit our vacuum gauge discussion here to mainstream modern vacuum gauge technologies,

(see figure 10-2 below) which includes the vacuum gauges; Bourdon, Capacitance Manometer, Thermocouple, ConvectionEnhanced Pi rani, Hot Cathode Ionization, Cold Cathode Ionization, and Combination Full-Range gauges.

UHV I High I Rou g h

IIIII( Vacuum Vacuum Vacuum Pressure (Torr)

1 o-13 10"11 10"9 1 o-7 1 o-s 1 o-3 10"1 101 103 I

1 o-11

I I I I I I I I I I

�ou dol) Gauge

• Thermocouple

e:apacitance Manometer

Ciovectron Pi�ani •

I

I I I I I I I I I � I � o UHV Models & Cold Catho.de hiwerted Mag:netrron •

: Comb]nat!on F.uii-Range I

r

Hot Cathode lo� Gauge•

10"9 1 o-7 1 o-s 1 o-3 1 o-1 Pressure (Pa)

101 103 105 FIG. 10-2

Rough Vacuum 760 to 1x1 0-3 Torr

[?��CLD �� CLD��

r

Capacitance Manometer Rough Vacuum

760 to 1x1 0-3 Torr

� Bourdon Gauge

Rough Vacuum 760 to 1x10-1 Torr

Full Range Combination

Rough to High Vacuum 100 to 1x10-9 Torr

Cold Cathode Inverted Magnetron

High Vacuum 1x10-3 to 1x10-12 Torr

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��

(Cont.JVacuum Pressure Gauge Introduction These gauges can be grouped into two categories labeled as roughing and high vacuum gauges. Roughing gauges are used to measure vacuum pressure provided by the mechanical roughing pumps in the 760 to 1x10-3 Torr pressure range, which includes, Bourdon, Capacitance Manometer, Thermocouple, and Convection-Enhanced Pi rani gauges. High and ultra-high vacuum gauges are used to measure pressure from high vacuum pumps in the 10-3 to 10-12 Torr pressure range, which includes, hot cathode and cold cathode ionization gauges.

There are modern full-range gauges available that measure vacuum pressure from atmosphere to around lQ-9 Torr. These wide-range combination gauges include both a roughing and high vacuum sensors all built into one. They use the roughing sensor to measure vacuum pressure until the pressure is low enough to turn on the high vacuum sensor. These gauges crossover seamlessly from roughing to high vacuum so that un-interrupted vacuum pressure data is displayed to the instrument user. There are full-range gauges available that even compose three measurement technologies into one multi-sensor.

Some examples of the full range gauges are the, (1) ConventionEnhance Pi rani & Hot Cathode, (2) Convention-Enhanced Pi rani & Cold Cathode, (3) Capacitance Diaphragm, Pirani, & Hot Cathode. Fullrange combination vacuum gauge sensors are compact and easy to use but are more expensive than the individual classical vacuum sensors. Therefore, full-range gauges are often used on clean dry vacuum applications with little chance of sensor contamination and where sensor replacement frequency would be low.

There are two basic designs of gauges, those that measure vacuum pressure directly and those that indirectly provide a pressure reading,

(see figure 10-3 to the side.) The direct gauges measure the actual vacuum pressure, force per unit area, which include the Bourdon and Capacitance Manometer. The indirect gauges calculate the vacuum pressure by measuring a physical property of the gas which changes in a predictable manner as gas density changes. The physical property is pressure depend so that if the gas-type and temperature are known then the vacuum pressure can be calculated. The physical property can be energy transfer as heat through the vacuum (Pirani and thermocouple gauges) or ion particle current (hot and cold cathode ionization gauges). The important factor here is, indirect pressure gauges must be calibrated for the gas-type used in the vacuum application, because indirect gauges will provide different pressure readings for different gases at the same pressure. Most indirect gauges are normally shipped from the factory set up to display the vacuum pressure reading as if the gas-type is air.

Direct Gauges (Measures Actual Pressure)

Capacitance Manometer

Bourdon Tube

Indirect Gauges (Measures Gas Properties)

Pi rani Thermocouple

Hot&Cold Cathode

Basic Design of Pressure Guages

FIG. 10-3

10·3 www.idealvac.com (505)872-0037


·�======

Direct Pressure Measurement Capacitance Manometer Capacitance manometers are often used for vacuum pressure measurement where a th in d iaphragm deflects with the force appl ied by the vacuum pressure. They are d irect pressure measurement gauges because they actua l ly measure the force from the a ppl ied vacuum pressure (see figure 10-4 to the side). I n many cases, a baff le is i nsta l led in d irect l i ne-of-sight between the sensor's vacuum in let and the d iaphragm which is useful at keeping the d iaphragm clean of debris. On the opposite side of the d iaphragm is a high vacuum reference cavity which contains a chemica l getter pump to mainta in h igh vacuum. A ring-shaped electrode is mounted in the reference cavity side just behind the d iaphragm. The appl ied force from the vacuum on the appl ication side causes the thin d iaphragm to deflect towards the electrode. A change in capacitance between the d iaphragm and the ring shaped electrode is produced. An electronic Printed Circuit Board ( PCB) measures the capacitance and transmits a de output voltage which is l i nea r and proportional to the appl ied vacuum pressure.

Most capacitance manometers require an addit ional Power Supply/Digita l Readout which provides the required input power(typica l ly ± 15 VDC) and displays the de output pressure reading from the transducer (typica l ly 0-10 VDC, l i near over the fu l l measurab le range of the sensor) . The capacita nce manometer is often used in the rough vacuum measurement range ( 1000 to 0.001 Torr) in process appl ications where the gas make up and concentration can change rapid ly. Since the capacitance manometer measures d irect force appl ied from the vacuum pressure its pressure measurement is independent of the gas-type. The ab i l ity of capacitance manometers to measure vacuum pressure independent of vacuum gas composition provides a critical advantage over ind irect pressure sensors. Capacitance manometers are a lso one of the most accurate rough vacuum pressure measurement sensors due to the fact that very smal l changes in the d iaphragm deflection can be accu rate ly measured . Capacitance manometers a re very susceptible to process a ppl ications which would generate deposition materia ls that could deposit on the d iaphragm surface. In an effort to protect the d iaphragm from process bu i ltup, heated models of capacitance manometers are ava i la ble up to 100 °C. This helps keep the process gases from condensing inside the capacitance manometer gauge tube.

Capacitance manometers are sold by their fu l l sca le pressure range, for example, gauges with fu l l sca le va lues of 1000, 100, 10, 1, 0. 100 Torr are common. At fu l l sca le pressure the d iaphragm has reached its maximum d isplacement and above which pressure measurements are not accurate. For this reason, the gauge control ler is designed to stops disp laying measured pressure just above the fu l l sca le range.

Sensor Capsule

Chemical Getter Pump

(Absolute Manometer)

FIG. 10-4

Reference (Pr) Side High Vacuum

Electronic PCB

•

Capacitance Manometer Rough Vacuum

760 to 1x1Q-3 Torr

It is important to purchase a ca pacitance manometer with the fu l l sca le pressure range needed for your vacuum appl ication. Capacitance manometers for low pressure measurement have a much thinner d iaphragm that can be deflected by the weak vacuum forces. It is okay to leave your low pressure capacitance manometers on at atmospheric pressure. This wi l l not damage the sensor. U p to three capacitance manometers are needed to bui ld a h igh accuracy pressure measurement system, for exam ple, 1000, 10, and 0. 100 Torr transducers. This wi l l provide very accurate pressure measurement from atmosphere down to the lowest measurable l im it in the 10-5 Torr range. These systems can become expensive, as a typical capacitance manometer and its Power Supply/Digital Readout control ler can cost $2,500 for the pair. These expenses can be justified since capacitance manometers are the most accurate rough vacuum pressure measurement devices, are d i rect measurement sensors, and can respond qu ickly to dynamic vacuum pressure changes.


fD Vacuum Pressure Measurement Pressure Gauges ��

Bourdon Gauge The Bourdon gauge is a d irect pressure measurement device that actua l ly measures the force from the vacuum pressure. The Bourdon gauge, (see figure 10-5 on the side) has a coil spring l i ke materia l that holds the vacuu m . A s t h e vacuum pressure changes s o does t h e forces on t h e coil, which wi l l change its shape. Smal l gears and levers are often used to ampl ify the movement of a gauge needle which wi l l d isplay the corresponding pressure. Bourdon gauges are the least expensive and only adequate for coarse vacuum pressure measurements, accuracy are typica l ly 10 Torr. More precise bourdon gauges can be manufactured but are not cost competitive to cheaper electronic gauges, such as, thermocouple and Pi ran i .

Indirect Pressure Measurement Thermal Conductivity Gauges

Bourdon Gauge Rough Vacuum 760 to 10 Torr

Therm ocoup le gauges measure the thermal energy-transfer "heat transport" property of the vacuum gas to ind irectly calcu late and d isplay the vacuum pressure. In the thermocouple gauge, a wire is heated by a constant current power supply (see Fig. 10-6 to the side) . A thermocouple is attached to the hot wire and is used to measure its tem perature. As gas molecules col l ide with the hot wire they can carry away heat and transfer it to the neighboring wa l ls of the thermocouple tube sensor (the therma l s ink) . The d istance between the hot wire and sensor body is sma l l, typica l ly on the order of a few mean-paths to a l low for effective thermal conductivity. The heated sensor wire is cooled as the vacuum pressure increases and while in free molecu lar flow, thermal conductivity by molecu lar col l isions increases l inearly with pressure. However, the heat removal from the hot wire to the sensor body becomes non-l inear as the pressure is further increased into the viscous flow regime, where gas-gas col l is ion can reorient molecule back toward the heated wire.

� WALLS (T =TAl ....----....::....--...,

FIG. 10-6 JUNCTION AND

SOURCE OF HEATER (T = T2) CONSTANT CURRENT (H)

The graph of heat removal versus pressure (see Fig. 10-7 to the side) would converge to a constant va lue if i t were not for convection current which he lps transfer heat to the sensor body wa l ls. In viscous gas flow, molecules closest to the hot wire heat up and undergoes thermal expansion where buoyancy forces cause the hot gas to rise producing the convection current. For this reason, most thermocouple sensors measure pressure in the 0.001 to 1 Torr range, it is possib le to extend the range of a thermocouple sensor towards atmospheric pressure if it takes into account for heat transfer from conventional currents. Thermocouple sensors are inexpensive devices for measuring the lower portion of the rough vacuum and are often used to measure pressure of the rough ing l i nes for mecha n ica l p u m ps . Thermocouple sensors are on ly 'rough' ind icators to monitor mechan ical pump vacuum levels and signal when crossover pressure has been reached.

..... Q) ....... en 1::: ro ..=

....... ro Q)

:I:

10-4 FIG. 10-7

====�---========-��


1 Pressure (Torr)

760

Vacuum Pressure Measurement� Pressure Gauges

·�==========�--

(Cont.) Indirect Pressure Measurement Pirani and Convection Enhanced Pirani Gauges The Pi ran i vacuum gauge is another therma l conductivity gauge, which is very s imi lar to the thermocouple gauge, but the resistance of the heated wire is measured to determine vacuum pressure (see thermocouple gauge discussion from previous page) . The Pirani gauge is designed to measure resistance imba lance where the heated fi lament forms one of the arms of a Wheatstone bridge circuit (see figure 10-8 below) . The compensating tube fi lament R4 is sea led in an envelope at a vacuum level greater than 0.001 Torr. The pressure gauge circuit is then balanced as close as possible by changing the resistance of R1 whi le the vacuum pressure on the pressure sensor fi lament R2 is held around 10-4 Torr. As the vacuum pressure increases, gas molecules transport heat away from the fi lament, and the resistance of the pressure sensor R2 wi l l move to a lower va lue which unbalances the circuit. The vacuum pressure is ca lcu lated from the pressure induced imba lance in the Wheatstone bridge c ircu it. Just as with the thermocoup le gauges, thermal conductivity by molecu lar col l isions increases l i nearly with pressure over the 0.001 to 1 Torr pressure range. However, the heat removal becomes non-l inear as the pressure is further increased into the viscous flow regime, where gas-gas col l ision can reorient molecules back towards the heated wire.

FIG. 10-8

Molecules have to col l ide many times before they reach the outer body of the sensor (the thermal s ink) . The convectionenhanced Piran i gauges take advantage of the convention current inside the sensor to extend its pressure measurement range a l l the way to atmospheric pressure.

The Piran i gauge is an ind irect pressure measurement sensors where measured readings are gas-type dependent. Some caution should be advised from the facts that heavier gases have poor heat transfer rates and that the standard conventionenhanced Pi rani gauges are ca l ibrated for N2 (basica l ly the same ca l ibration as Air) . This could lead to dangerous overpressure conditions when back fi l l i ng a vacuum systems with a heavier gas l i ke argon . The danger arises if the vacuum system operator does not correct the gauge d isplay reading for the correct gas-type, for example, a standard gauge ca l ibrated for N2 displays 24 Torr when the chamber is at 760 Torr of argon . The operator wou ld be fooled into thinking that the cha mber was sti l l under pressure and continue to increase the system to a critical over-pressured state.

Pirani Gauge


f]) Vacuum Pressure Measurement Pressure Gauges

��

(Cont.) Indirect Pressure Measurement Pirani and Convection Enhanced Pirani Gauges

Please see the ind icated vs true pressure measurement graph displayed in (figure 10-9 and 10-10.) Another source of error can be produced if the convection-enhanced Piran i gauge is not mounted correctly, most commercial sensors require that they are mounted para l le l to the ground. This keeps the convention current inside the sensor flowing in the designed d irection (errors of 20% or more can easily be introduced if the conventionenhanced Pi ran i sensor is not mounted horizonta l ly) .

Rapid evacuation of these convection-enhanced Pirani sensors wi l l produce sign ificant measurement error for a short period of several seconds. As the rapidly pumped gases expand, the removal of heat from the pressure sensor fi lament is not a normal convection current but is i nstead driven by forced convection.

1000

100

10

/. 10-1 �

10-2 10-1

I / '/ 'l.� �

FIG. 10-9

Freon 12 � Ar

/r' 1/ ) v ( N2, a i rl

I / r I / l CH4

II / --� He J

/J/ /p � � � /

Use only when gauge is horizontal

Pressure units equivalent 1um Hg = 1 mTorr = lx1Q-3 Torr 1000um Hg 1 Torr

10 100 Indicated Pressure (Torr)

(nitrogen equivalent)

1000

Convectron Gauge Indicated vs.True Pressure Curve; 10-1 to 1000 Torr

Whi le the vacuum pressure is dropping rapidly the gases expand and cool, this provides a secondary pathway for removing heat from the hot sensor wire. The convection-enhanced Piran i gauge can fa lsely display h igh pressures up to 1000 Torr during system evacuation. Once the flow of gases is stopped the pressure reading wil l aga in stab i l ize to a rea l istic measured va lue. For these reasons, convection-enhanced Piran i gauges are not well suited for measuring pressure changes under dynamic p u m ping condit ions . Overa l l , the convect ionenhanced Piran i is a popular cost effective rough vacuum pressure gauge which can measure from Atmosphere to 1x10-4 Torr with those measurements below 1 Torr being most accurate.

10-1

10-2

10-4

v

v �� / � @ /� � / � \ 1\.

� C02 N2, a1r

Ar D2 _LN,!., ..., LFreon 22J � He.J Freon 12J \ [CH4

/ l@' Pressure units equivalent �� v� � � � 1um Hg = 1 mTorr = lx1Q-3 Torr 1000um Hg = 1 Torr

10-4 10-3 10-2 10-1

FIG. 10_10 Indicated Pressure (Torr)

(nitrogen equivalent)

Convectron Gauge Indicated vs.True Pressure Curve; lQ-4 to lQ-1 Torr



·�==============

(Cont.) Indirect Pressure Measurement Ionization Gauges (Hot & Cold Cathode) I n the h igh and u ltra-high vacuum, gas density is extremely low current is a measure of gas particle density which is proportional so that d irect pressure measurement from vacuum forces are too to the tota l pressure. In the high and u ltra-high vacuum range weak to be measured di rectly. There is not enough momentum there a re two types of ionization gauges, hot cathode and cold transfer to the d iaphragm of the capacita nce manometer to be cathode. Each ionization gauge has its own lower l imit where detected. I n this range, the vacuum pressure is measured by particle counting is equal to the background noise, its own ionization of the gas, counting, and ampl ify the ion signa l . The ion advantages, and d isadvantages.

Hot Cathode Ionization Gauges The hot cathode gauge, as its name impl ies, has a fi lament cathode that operates at h igh temperature. In fact, the hot cathode ionization gauge has three electrodes, fi lament (cathode), grid (anode), and the collector, and is sometimes referred to as a tr iode vacuum gauge. I n the popu lar Bayard-Al pert design, (see figure 10-11 at right) the fi la ment is held at +30 VDC a nd is resistively heated to a point that electrons are boi led off by thermal emission producing around 10 mi l l iamps of thermal electron current. The helical grid is held at+ 180 VDC where the electrons are accelerated to 150 eV of h igh-energy by the potentia l d ifference between the fi lament and the grid. Most of the electrons pass through the helical grid and travel i n an e l l iptica l motion avoiding the central col lector which is held at 0 VDC, grounded respectively. Most of the moving electrons in this enclosed volume transverse back a nd forth around the grid several times before eventua l ly col l ide with and being absorbed by the grid . Some of these h igh-energy electrons col l ide with gas molecules where an electron is ejected from a molecu lar orbital leaving the molecule as a positively charged ion. Most of the positive ions formed inside the grid are accelerated towards the central col lector. The positively charged molecu lar ions impact the col lector forming an ion current in the collector. The hot cathode ion gauge is more of a particle density counter than and actual pressure gauge. However, since the gas density is proportiona l to the gas pressure, the vacuum pressure reading can be ca lcu lated from the ion current as long as the temperature is constant. The ion current on the col lector is measured in picoamps, is ampl ified, and used to ca lcu late the displayed vacuum pressure va lue.

X-Ray Limit of Hot Cathode The lowest measurable pressure l im it of a hot cathode ionization gauge is set by the X-ray photoelectron induced current generated on the col lector. When h ighenergy electrons from the fi l ament col l ide with the grid they can produce X-rays and those X-rays that col l ide with the col lector can eject electrons by the photoelectron effect. Since the ion current and photoelectron current are not d istinguishable, this process establ ishes a background noise level . The lowest measurable pressure l imit of a hot cathode ionization gauges design is when the ion current equals the X-ray generated photoelectron current. The improved Bayard-Al pert design has a thin wire col lector in the center of a hel ical grid and UHV versions can have a lower pressure measurement l imit of 10-12 Torr (described below); previous less sensitive designs had a large area col lector, a h igher X-ray photoelectron background current, and lowest measurable pressure of 10-8 Torr.

filament( cathode) /(+30V)

+30V = +180 v =

A =le

grid(anode) ( + 180 V) I

"ion collector (QV)

I+

FIG. 10- 1 1 (not UHV)

Hot Cathode I on Gauge


f]) Vacuum Pressure Measurement Pressure Gauges

The Sensitivity of Hot Cathode The job of the hot cathode ion gauge control ler is to provide the operating voltages for both the anode and cathode while its electrometer measures the ion current to display the calculated pressure. The ion gauge design determines its performance, how much ion current can be produced from a selected emission current at a specified pressure va lue. This gives r ise to the definition of ion gauge sensitivity.

S .t. 't _ lon Current

ens1 lVI y- E . . C p m1ss1on urrent x ressure

The equation above defines a l i near relationship between pressure and ion current which makes the Bayard-Alpert Gauge ( BAG) the most accurate indicator of total pressure in the h igh and ultra-high vacuum range. Bayard-Alpert type gauges typica l ly have a sensitivity of 10 Torr-1 when used with n itrogen or a i r. The ion current is a lso dependent upon the gas-type and the pressure reading wi l l change for different gases at the same pressure. That is, the gas-type dependent ionization crosssection differs by a lmost a decade at the electron energies with in a BAG. The table to the side shows relative sensitivities for a Bayard-Al pert gauge tubes where the gas sensitivity for n itrogen (N2) has been norma l ized to 1.

Construction Styles The Bayard-Al pert design of the hot cathode ionization gauge is manufactured in two different styles: a nude gauge where the electrode components extend past the vacuum sea l i ng flange; and a glass enca psulated gauge where the components are enclosed in an envelope of a glass and the vacuum flanged is a side port off the glass tube (see fig. 10-13 to the side). The glass ion gauges are the least expensive and by far the most popular for general h igh vacuum appl ications. The nude gauge is more expensive but better suited for ultra-h igh vacuum process. Sta ndard ser ies h ot cathode ion izat ion gauges h ave measurement accuracies better than± SO% which is more than adequate for the average h igh vacuum system where the user only needs a pressure reference to know that the system is work ing correct ly. Rea l i st ie, gauge-to-gauge pressure measurement variations can be expected to be with± 1S% for identica l new gauges and on-site ca l ibration should be required if accuracy greater than± SO% is requi red from a standard BAG. There are modern high-accuracy hot cathode BAGs avai lab le that boost ± 3% measurement accuracy, fol lowing ca l ibration aga inst NIST standards. Vi rtua l ly all commercia l ly ava i lab le hot cathode ion gauges are built on the standard Bayard-Alpert design. This makes it poss ib le for generic ion gauge control lers to work with gauges from many different manufacturers.

The data in the (fig. 10-12 below) below suggests that larger molecules and atoms are easier to ion ize and therefore have a h igher sensitivity. The upper pressure measurement l im it for a hot cathode gauges is around 10-3 Torr where the ion current vs pressure relationship deviates from l i nearity. The non- l inearity is due to the reduced mean-free path, a decreased probabi l ity that positive molecular ions reach the collector, they are removed by increased gas-gas col l isions which can knock the positive ion gas molecule outside the anode grid area. Relative Gas

Filament

FIG. 10- 12 Approximate

Relative Sensitivity of Bayard-Alpert Gauge Tubes to Different Gases

Sensitivity 0.42-0.53

He 0.1 8

H20 0.9

Ne 0.25

N2 1 .00

co 1 .05-1 . 1

02 0.8-0.9

Ar 1 .2

Hg 3.5

Acetone 5

The pressure of any gas is found by dividing the gauge reading by the relative sensitivity.

I on Collector � I on Collector I

"'-..

Nude lon Gauge Glass Encapsulated lon Gauge



�============== Hot Cathode Glass lon Gauges The glass tubulated Bayard-Al pert hot cathode ion gauges are the most common, least expensive, and meet the pressure measurement needs for most general h igh vacuum systems. Their lowest measurable pressure is l im ited to their X-ray photoelectron current, just as with nude gauges. G lass gauges with a l l-meta l sealed Conflat flanges have the same 450 °C bakeout temperature as the nude gauges. This is not the case for the glass gauges with compression port fittings which are l im ited to the lower bakeout temperatures of the 0-ring sea l i ng material, typica l ly 100 °C. When possib le, the largest side port diameter should be chosen to maxim ize conductance. G lass tubulated gauge have more surface area than nude gauges which requires a h igher attention to outgassing. They are fragi le and can result i n a safety hazard. If broken under vacuum they would implode. For this reason, they should be shielded, mounted in areas where they are un l ikely to be bumped, and include cables with stra in rel ief. An electrostatic charge can build on the inside of glass ion gauge tubes which can cause the pressure reading to become unstable at its lowest measurable pressure l im it. To increase stab i l ity of the lowest measurable pressure, some manufactured models include a conductive th in-coating of p latinum on the inner glass wa l l which is connected electrica l ly to grounded, this gives a s l ight advantage over uncoated glass gauges. G lass ion gauges are disposable when the fi l aments burn out.

Nude lon Gauges The nude hot cathode ion ization gauges el iminate the pressure differentia l norma l ly associated with tubulated gauges. They have unrestricted conducta nce a l lowing for a rapid response to pressure changes in the vacuum chamber. They have min ima l surface area and outgassing when compared to the tubulated gauges. Those with a l l -metal sealed Conflat flanges can be baked out at 450 °C. Nude gauges are more expensive than glass. The glowing hot fi lament is not visib le to the vacuum operator which increases the chance that it could be accidenta l ly over pressured. Nude gauges have user replacea ble fi laments that are a cost effective solutions when they burn out.

Some modern Ultra-High Vacuum (UHV) versions of the nude sty l e Baya rd-A l pe rt G auge ( BAG) a l low fo r p ressure measurement down to 10-12 Torr. These precision gauges ach ieve l ower detection l i m its by reduc ing the X-ray photoelectron current. This is done in several manufacturing changes; by reducing the diameter of the col lector wire lowering the X-ray col lector col l i sion cross-section, the anode grid (squirrel-cage) is manufactured from fine wire which reducing the a mount of X-rays generated, a nd the grid has enclosed ends to increase its sensitivity up to values of 25 Torr-1 for n itrogen or a i r. UHV col lector wire is fine, often with diameters as sma l l as

0.005 in ., this causes the col lector to be mechanical un-stab i l ity and easi ly bent or broken (handle with care) . The extra th in UHV col lector wire is not as efficient at col lecting the positive gas molecule ions. This sensitivity loss is overcome by the improved double hel ical grid with enclosed ends that trap the molecular ions unt i l they eventua l ly col l ide with the col lector. The improved grid design a lso acts better at conta in ing the h igh energy electrons so that a lower emission current is need (typical ly, 4 mi l l i amps of UHV BAGs) .

Filaments Single a nd dual-fi laments are ava i lab le for both glass tube and nude hot cathode ionization gauges. Dua l fi lament gauges help avoid having to bea k vacuum if a fi lament burns out. Nude gauges often have the a bi l ity for the vacuum user to replace the fi laments, which adds cost and downtime savings, un l ike glass gauge tubes which are disposable when the fi laments burn out.

Tungsten Filaments Tungsten (W) fi laments operates at h igh temperatures between 1,900 and 2,200 °C which causes rapid outgassing of the fi l ament, inc luding contaminate gases which wil l rapidly evaporate from the fi lament surface. The rapid heating of surrounding wa l ls at elevated temperatures produce large outgassing levels . Such high temperatures also produce increased reactivity of the fi lament. These characteristics make tungsten not the best choice for UHV measurements. The tungsten fi laments undergoes metal evaporation at h igher pressures, by a proposed mechanism where oxygen (02) and water molecu lar (H20) a ids in forming tungsten oxides (W02 and W03). Tungsten fi laments can act as a weak oxygen pump permanently removing oxygen from the vacuum gases. F i lament life can be reduced to 10-20 hours when operated at h igh pressures near 10-3 to 10-2 Torr. Under clean dry vacuum conditions with pressures lower than 10-6 Torr, tungsten fi laments can last 1000's of hours. Tungsten fi laments are easi ly to permanently damage if they are exposed to atmosphere whi le hot, that is , one accidenta l exposure can burn out the fi lament. Tungsten fi l aments are the least expensive, the most popular, and can be identified as a n overa l l straight fi lament with smal l tightly wound hel ica l curl- l ike shapes. Tungsten fi laments provide better electron emission stab i l ity over the long term since they are more l i kely to mainta in their orig ina l shape. They do not e longate a nd sag over time as often is the case with i ridium fi laments.

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Thoriated Iridium Filaments

Thoriated I ridium (Th02ir) fi laments are prepared by depositing layers of theria (thorium oxide) on to the iridium meta l . These fi laments are very resistant to oxidation and can survive being temporari ly turn on at atmospheric pressure; these benefits make them the best choice for appl ications with repeated operation near 10-3 Torr. Thoriated I ridium fi l aments operate around 1400 °C which is relatively cooler than tu ngsten, a l lowing them to generate less outgassing and be less chemical ly reactive. Thoriated I ridium (Th02ir) fi laments are more expensive than tungsten and can be identified as smooth r ibbon looking materia l formed in 'hairpin' style u-shape. The i ridium fi laments are thought to be less stable over t ime because they are more prone to loss their shape e longate and become relatively unsupported. Some i ridium fi la ment holder designs include a spring to remove slack as the fi lament elongates with t ime.

Degas Clean l i ness of ion gauges has great effect on its performance. It is possible for the vacuum pressure in a vacuum chamber to be dominated by a hot cathode gauge and its surroundings if it has not been correctly degassed. ion gauge degas is accomplished by resistance heating (12R) or electron bombardment (EB) . During 12R degas, a large current, for example, 10 Amps at 8 VAC is passed through the a node grid structure, ra ising its temperature and driving off contaminants. The degas process a lso raises the temperature of al l e lectrodes and surrounding surfaces. Degas bakeout is typica l ly 450 °C or h igher for 1 hour and is effective at removing impurity that can cha nge the emission efficiency of the cathode fi lament. The cathode ca n be poisoned by reactive gases, such as oxygen (02), carbon monoxide (CO), and carbon dioxide (C02) . It can take up to several hours after degas to reach thermal equi l i brium and display accurate readings.

UHV versions require electron bombardment ( EB) degas due to the thin anode grid wires. In EB the bias voltage can be raised to 500 VDC a nd the grid is bombarded with h igh energy electrons emitted from the fi lament at 30 VDC. An increased emission current of several 10's of mi l l i amps are enough to heat the grid and col lector electrodes to a dark red color which is very effective at outgassing and removing contaminants providing clean surfaces. UHV gauges are unstable for a period of sometime severa l hours after degas as the surfaces pacify from the very effective clean ing process. BAG degas in UHV appl ications is best carried out wh i le heating and outgassing the rest of the vacuum systems.

Radiation Resistant Nuclear and scientific appl ications, such as, nuclear power pla nts or in particle detectors require vacuum gauge sensors and sensor cables to be resistant to radiation and high temperatures. Ordinary thermoplastic i nsulation becomes britt le when exposed to radiation. Wires and cables protected by specia l thermoplastics, such as, Victrex or PEEK insulation resists even h igh doses of ionizing radiation, performing much better than PTFE and Teflon cable coverings. The h igh insulation resistance and a high breakdown voltage make this i nsulated cables ideal for del icate vacuum instrument signa ls and h igh voltage appl ications, such as, hot cathode ionization cables. Radiation resistant vacuum gauge sensors should be basic i n design, manufactured with a l l meta l sea led bodies, being free of onboard electron ics and ci rcuits that could be damaged by radiation or high temperatures. These same requirements often overlap with the required properties of U ltra-High Vacuum ( UHV) syste ms that requi re h igh-te mperature b a keout processes.

The soft X-rays generated, inside the Bayard-Alpert gauge ( BAG), during high energy electron col l isions with the anode grid are too weak in energy to penetrate outside the gauge envelope a nd are not considered a risk to the external vacuum cha mber components or its operator.

(505)872-0037


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Cold Cathode Ionization Gauges Cold Cathode Gauges (CCG) measure pressure by ionizing the vacuum gas inside a stable discharge. The ion ized molecules carry the current between the two electrodes and the current is measured to ca lculate the pressure. They can measure vacuum pressure from the 1x10-2 Torr down to the ultra-high vacuum, 10-11 Torr. Cold cathode gauges are often cal led Penn ing, Ph i l l ips, and magnetron gauges (sometimes cal led a discharge gauge) .

How the Cold Cathode Ionization Gauge Works The cold cathode ion ization gauge conta ins two electrodes, an electrica l ly grounded cathode (electron source) usual ly cyl inder or ring shaped and an anode (electron col lector) held at positive h igh voltage (see the inverted magnetron cold cathode gauge circuits in figure 10-14 below). The potentia l d ifference across these electrode is typica l ly in the 2 to 6 KV positive voltage DC with respect to the cathode. A d ischarge is i n itiated as a gas molecule is ion ized forming a positive molecular ion and its free electron, the positive ion is attracted to the grounded cathode electrode whi le the negatively charged electron is attracted to the positively charged anode. The gauge operates in a magnetic field, a round 1000 Gauss (0 . 1 Tesla), from an external magnet and is arranged so that the magnetic field l i nes cross the appl ied electrical field l ines. The negatively charged electrons from the d ischarge deflect through the magnetic fie ld in sp i ra l trajectories with an orbiting motion around the central anode (see electron trajectories in figure 10-15 below). The d ischarge electrons are accelerated to h igh kinetic energy but are trapped between the two electrodes by the crossed magnetic a nd electric fie lds so that they cannot plummet with straight trajectories from the cathode to the anode. The effect is cal led a trapped electron cloud. Ionization happens when a trapped electron h its a gas molecule with enough kinetic energy to knock an electron from a molecular orbital within the molecule leaving it as a positive charged molecular ion. An additiona l electron is generated as a result of the ionizing col l is ion and it is accelerated on to repeat the ionization process with another gas molecule. The cold cathode gauge design with crossed magnetic a nd

magnet envelope

anode feedthrough c��::��c�athode feedthrough

Circuit for operation -of a cold cathode inverted magnetron gauge

electrical fie lds increases the rate of ion ization per electron, to make the paths of the electrons so long that their col l is ion probabi l ity with gas molecules is sufficiently large to mainta in the d ischarge. Some col l isions are energetic enough to break complex molecules up into several smal ler fragments which can conta in one or more positive ions. These positive molecular ions are attracted to the cathode a nd since they are relatively massive are not trapped by the magnetic fie ld . The measure of ion current reaching the cathode is used to ca lculate the pressure. The cold cathode ion gauge control ler measures the ion current and uses that to d isplay the calculated pressure. In modern inverted magnetron cold cathode gauges the ion current versus vacuum pressure is relatively l inear, when compared to older cold cathode designs.

A key design requirement of cold cathode ionization gauges is to keep the discharge stable in a steady-state which requires that the electron c loud be replen ished as electrons are captured by the anode. This is accompl ished as electrons are often ejected from the cathode when the fast moving positive ion molecules strike it. An electron is a lso generated during each ionizing col l is ion as part of the positively charged molecular ion and electron pair (described above) . The electron cloud is held in a stable state through the whole operating pressure range of the gauge. The current across the d ischarge is ba lanced, that is, the a mount of positive molecular ions that reach the cathode is equa l to the number of electrons that escape through the electron cloud to the anode. E9

lon and electron trajectories in the inverted magnetron

Magnetic field into the page

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fD Vacuum Pressure Measurement Pressure Gauges ��-----

Uppper Pressure Limit The upper pressure l imit of the cold cathode gauge occurs around 10-2 Torr where the discharge starts to change to a glowing discharge and at this point the ion current vs pressure becomes non-l inear. At higher pressure the gas density increases, mean-free path reduces, and the discharge electrons and ions coll ide with neutral gas molecules very frequently. These constant col l isions l imit the electrons velocity and their kinetic energy. They are not energetic enough to ion ize neutral gas molecules but instead transfer a portions of their kinetic energy to them preparing a neutra l gas molecule with stored interna l energy. Radiative decay is one of the various ways that the metastable gas molecule can relax, giving off a photon, releasing its stored internal energy as l ight. As the gas pressure increases towards viscous flow, where gas-gas col l isions dominate, the discharge energy is absorbed by the neutral gas molecu les. At these higher pressures the discharge current is no longer directly related to the gas pressure and is not usefu l as a pressure measurement.

Direction of Magnetic Field

Design Versions The cold cathode gauge has several different designs, the Penn ing gauge, the magnetron, and the inverted magnetron see (F ig. 10-16 below) These designs differ in their ab i l ity to trap a stab le electron c loud which affects the ir correspondi ng sensitivity. The Penn ing gauge is often the least expensive and is less stable. The main difference between the magnetron and inverted magnetron gauges are that the anode and cathode electrodes are inverted ( in opposite orientations) . In the inverted magnetron design, a meta l pin anode is surrounded by a rotationa l ly symmetrical cathode. A permanent-magnet ring is p laced on the exterior of the measurement chamber to generate the magnetic field. The inverted magnetron also includes end caps on the cathode to better trap the electron c loud and keep electrons from escaping out the ends. This improvement of the inverted magnetron a l lows its design to be more stable in the ultra-h igh vacuum where gas density is very low. In the 10-11 Torr range of the ultra-h igh vacuum an electron trapped in the electron c loud can spend minutes before it undergoes a coll ision with a gas molecule. Conflat Flange

•••••• Permanent Magnetic Direction of Magnetic Field j Ring ••••••

Flange

FIG. 10- 16 Pumping Action Cold cathode ion ization gauges act as weak vacuum pump with estimated pumping speeds on the order of 0.01 1iters per second. The pumping mechanism is very s imi lar to how ion pumps work. When the positively charged molecular ions impact the cathode they can eject meta l atoms from the cathode surface. This process is cal led sputtering of the cathode where this materia l forms a gettering th in fi lm on the wa l l surfaces of the gauge and cathode. The fresh sputtered materia l fi lm is reactive with gas molecules forming chemical bonds that trap active gases (N2, 02,

Perman�:� ! Jf

Magne� Ring

Penning Magnetron Gauge

CO, C02. ) A characteristic of these gases is their ab i l ity to easily react with most meta ls forming stable compounds. This getter pumping mechanism can cause cold cathode ionization gauges to provide a fa lse reading that is lower than the actual chamber pressure. It is not recommend to connect CCG gauges to the vacuum chamber using long narrow vacuum tubing as this would promote a pressure differentia l between the gauge and the chamber.

(505)872-0037


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Bakeout Some models are bakeable up to 500 °C with Conflat flanged CFF vacuum ports. Bakeout often requires removing the outer body magnet and electrical cable connector.

Radiation Resistant Cold cathode gauges can be manufactured as rad iation resistant pressure sensors. These versions should be a l l meta l sealed, should not include on-boa rd electronics, and a l l e lectrica l insu lators and vacuum feedthroughs should be compatible for operation in a h igh ioniz ing rad iation environments. Radiation resistant wires and cables should be protected by specia l thermoplastics, such as, Victrex or PEEK . The use of Teflon or PTFE type materia ls for any component is prohibited.

Conclusion The cold cathode ionization gauge is extremely rugged and are often better su ited for industrial appl ications where the process can be d i rty. They are less expensive and have simpler electronics in their gauge controllers than hot cathode ionization gauges. The cold cathode gauge has a robust design which a l lows them to be opened and cleaned in-house by the vacuum system user without need ing to be reca l ibrated . They a re insensitive to the inrush of a i r and do not have del icate fi laments to break or burnout due to high-pressure. They have al l meta l bodies being robust, virtua l ly unbreakable, and do not have fine grid wires that can be damaged during insta l lation. The cathode and gauge are cold, they operate at room temperature, so outgassing is not as much a problem a nd they are less reactive to process gases when compared to hot cathode ionization gauges. They operate on less power, typica l ly only a Watt or less, the amount of power decreases as the pressure decreases. They are wel l su ited for appl ications where the presence of stray electrons and photons can cause problems in the vacuum system.

Starting a cold cathode gauge can sometime be d ifficult at lower pressures where gas density is low. This is especia l ly true where contamination bui ld-up on the electrodes can result in extended starting times, especial ly at h igh vacuum. Starting the CCG at UHV pressures requ i res a stray electron to in itiate the d ischarge process. Some manufactured improvements can aid starting, such as, sharp points on electrodes to induce field emission or add ing a small rad ioactive sources to induce the X-ray photoelectron effect. Cold cathode gauges can have pressure measurement jumps, where the positive ion current vs pressure record ing skips (producing discounted va lues). This was more a problem with the origina l Penning design and less an issue with the improved i nverted magnetron gauges. The pressure measurement is dependent on the type of gas measured, this is

very simi lar to the hot cathode ionization gauges. Take the magnetic fie ld into consideration when insta l l ing the gauge as it can interfere with sensitive equipment. While the inverted magnetron design ensures good l i nearity as compared to a standard cold cathode gauges they are genera l ly not as stable a nd l inear as a wel l-maintained Bayard-Al pert type hot cathode ion gauges. Even though the cold cathode gauge is more chemica l ly resista nt then the hot cathode ga uge it st i l l req u i res maintenance. I n some industrial processes, for example, d i l ute organic vapors are present in the pumped gases where the d ischarge wil l break them down forming a carbon bu i lt-up l ayer on the electrodes making the gauge unstable. This wi l l require the CCG to be opened and cleaned.

www.idealvac.com (505)872-0037 10·14

fD Vacuum Pressure Measurement Pressure &auges Hot cathode Ion

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liranville Phillips Jf p p /11 1 Ultra High Vacuum t'1¥lfkl1 I Ion Gauge Control ler Configured For: 1i \ J 19" Half Rack Mount

1 Line Digital Display NO Interface Module Cards

•

Series 274 UHV Nude Ion Bayard-Alpert Gauge Electron Bombardment Degas Remote Input/Output Interface Reads in Torr, 1 15 VAC (for other configurations see below)

UHV N ude ion Gauge

SERI Es 350 Measures only high to ultra high pressures no roughing pressures. Bayard-Alpert UHV Gauge Controller operates a

Series 274 Nude Bayard-Alpert type ionization gauge in a compact halfrack design. The hot cathode ion gauge measures high vacuum pressure from 1 Q-3 to 1 Q-1 1 Torr. Cables, I on Gauge Tubes and Interface Module

I DEAL VACUUM GP p . *

Cards are available but sold separately.

P/N P/N nee P1 04940 350501 -0-T1 $ 1 ,702.50

Other Configu rations for 1 Line Display 350 UHV Control ler (Ca l l for Price) 1 9" H a lf-Rack Mount

Left Mount for 1 9" Rack

Center Mount for 1 9" Rack

W i t h I n te rfa ce M o d u l e Cards N O N E RS-232 RS232 or RS-485 switchab l e w/ 4 setpoi nts 2 setpoint relays for the ion ization gauge

M e a s u re m e n t: U n it:s Torr m b a r pascal

Power Co rd O p t i o n s North American 1 1 5 VAC North American 240 VAC U niversal Eu rope 220 VAC U n ited Kingdom 240 VAC

Emission Range .0 1 rnA to 0 . 1 rnA I 0.1 rnA to 1 rnA 1 1 rnA to 1 0 rnA 1 x 1 0-9 to 1 x 1 0-2 Torr 1 x 1 0-1 0 to 1 x 1 0-3 Torr 1 x 1 0-1 1 to 1 x 1 0-4 Torr

Readable to 1 x 1 0-1 0 Torr 1 x 1 0-1 1 Torr 1 x 1 0-12 Torr

lon Gauge Sens it ivity 2/Torr to SO/Torr (factory setting is 25/Torr

Emission Current 10 uA to 1 Om A in 3 decade ranges (from factory 1 mA)

Collector Potential OV

Grid Potential + 1 80V during normal operation

+530V during degas operation

Filament Potential +30V

Degas EB 40 watts approx. with 1 5 min. turn off timer

Analog Output 0-1 OV; Logarithmic; 1 V/decade

GRANVI LLE P H I LL I PS P/N

350501 - # - # #

350502 - # - # #

350503 - # - # #

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2 3 �------------------------------� 4

Optional Interface Module Cards for 1 -Line Display UHV 350

I D E A L GP I n t e rfa c e M o d u l e C a r d s P / N P/N Price*

RS-232 computer Interface* P1 04941 R5232 or RS-485 switchable w/ 4 setpoints* Pl 04942 2 setpoint relays for the ionization gauge* Pl 04943

* Only one card can be used with the 3 card option

P1 04942

350003 $466.25 350027 $686.25 350002 $ 3 7 5.50

* Catalog Pricing Subject to Change

(505)872-0037

Vacuum Pressure Measurement f]) Pressure &auges Hot cathode Ion

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Granville Phillips Jf p p J;l J Ultra High Vacuum t'1¥ltkl1 I Ion Gauge Control ler

SERIES 3 5 Q Bayard-Alpert U H V Gauge Controller operates a Series 274 Nude Bayard-Alpert type ionization gauge and dual convectron gauges in a compact half-rack design. The hot cathode ion gauge measures high vacuum pressure from 1 o-3 to 1 o-1 1 Torr and the convectron sensors typical ly measure atmosphere to 1 Q-4 Torr. Cables, lon Gauge Tubes, Convectron Sensors and Interface Cards are available but sold separately.

Configured For: ' \ ,, 19" Half Rack Mount 3 Line Digital Display NO Interface Module Cards Series 274 UHV Nude Ion Bayard-Alpert Gauge Dual Convectron Gauge Operation Electron Bombardment Degas Remote Input/Output Interface Reads in Torr, 1 15 VAC (for other configurations see below) vectron

Gauges

Measures roughing, high and ultra high pressures.

I D EAL VACU U M G P p .

* P/N P/N nee P1 04939 350507-0-T1 $2,271 .25

Other Configurations for 3 Line Display 350 UHV Control ler (Ca l l for Price) 1 9" H a lf-Rack Mount

Left Mount for 1 9" Rack

Center Mount for 1 9" Rack

With I n terfa ce Mod u l e Cards N O N E RS232 or RS-485 switcha b l e w / 4 setpoints

M e a s u re m ent U n its Torr m b a r pascal

Power Cord Options North American 1 1 5 VAC North American 240 VAC U niversal Eu rope 220 VAC U n ited Kingdom 240 VAC

Emission Range .0 1 rnA to 0 . 1 rnA I 0.1 rnA to 1 rnA 1 1 rnA to 10 rnA 1 x 1 0-9 to 1 x 1 0-2 Torr 1 x 1 0-1 0 to 1 x 1 0-3 Torr 1 x 1 0-1 1 to 1 x 1 0-4 Torr

Readable to 1 x 1 0-1 0 Torr 1 x 1 0-1 1 Torr 1 x 1 0-12 Torr

lon Gauge Sensitivity 2/Torr to SO/Torr (factory setting is 25/Torr

Emission Current 10 uA to 1 Om A in 3 decade ranges (from factory 1 mA)

Collector Potential OV

Grid Potential + 1 80V during normal operation

+530V during degas operation

Filament Potential +30V

Degas EB 40 watts approx. with 1 5 min. turn off timer

Analog Output 0-1 OV; Logarithmic; 1 V/decade


G RANVI LLE P H I LL IPS P/N

350507 - # - # #

350508 - # - # #

350509 - # - # #

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4 Optional Interface Module Card for 3-Line Display UHV 350

I D E A L G P I n t e rfa c e M o d u l e C a r d s P/N P/N Price*

RS232 or RS-485 switchable w/ 4 setpoints P1 04942 350027 $686.25

This Card

www.idealvac.com (505)872-0037 10·16

fD Vacuum Pressure Measurement Pressure &auges Hot cathode Ion

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Granville Phillips f!tJQIXIflll G��gb�l��n c�:��o��r

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This is a 370 Stabil-lon Gauge Controller and PS side by side for a 1 9" rack mount with RS232, Dual Convectron Gauges with 6 Set points, reading Torr. GP Part No. 370501-A 1 B-Tl STANDARD model does not come with dual convectron option.

3 70 U HV Contro l ler Tec h n i ca l S P E C I FI CATI O N S Control ler measuring range for N2 or air

UHV Stabil-lon Gauge (with convectron)

Torr 2x 1 0-1 1 to 999 Torr

mbar 2 x 1 Q·1 1 to 1 .33 x 1 03 mbar

Pa 2 x 1 Q·9 to 1 .33 x 1 oS Pa

Extended Range Stabil-lon Gauge (with convectron)

Torr 2x 1 0·1 0 to 999 Torr

mbar

Pa

2 x 1 0-1 0 to 1 .33 x 1 03 mbar

2 X 1 Q·B to 1 .33 X 1 OS Pa

Accuracy for N2 ± 4% of reading from 1 x 1 Q·B Torr to 1 X 1 Q·4 Torr

Repeatability ± 3% of reading from 1 x 1 Q·B Torr to 1 X 1 Q·4 Torr

Emission Current 0.1 mA and 4.0 mA

Stabil-lon analog output 1 volt/decade, logarithmic, 0 to 10 Vdc

Degas

Power required

Operating temp.

Non-operating temp.

Display

Digital Interface options

Electron bombardment, 40W, 1 to 30 min. adjustable

90 to 1 30 Vac, or 1 80 to 250 Vac, 50/60 Hz, 220W max

0' C to 40' C ambient, non-condensing

-40' C to 70'(

3 digits, plus exponent, green LED, Torr, mbar, or Pa

RS-232, RS-485 or IEEE-488

Convectron gauge option Operates 2 gauges

Analog output 1 volt/decade, logarithmic, 0 to 7 Vdc

Setpoint options

Configuration

Contact rating

2 relays for Stabil-lon gauge or 6 relays (2 per channel)

Single pole, double throw (SPOT)

5 A at 250 Vac, SA at 40 Vac, resistive load

Stab i l- lon Gauge Measuring range for N 2 o r a ir

0. 1 mA emission 4 x 1 Q·9 to 2 x 1 Q·2 Torr, 5 to 3 x 1 Q·7 Pa, 5 x 1 Q·9 to 3 x 1 Q·2 mbar

4.0 mA emisson (UHV) 2 x 1 0-1 1 to 5 x 1 Q·4 Torr, 3 x 1 Q·9 to 7 x 1 Q·2 Pa, 3 x 1 Q·1 1 to 7 x 1 Q·4 mbar

4.0 mA emission (ext.) 2 x 1 Q·1 0 to 5 x 1 Q·4 Torr, 3 x 1 Q·B to 7 x 1 Q·2 Pa, 3 x 1 Q·1 0to 7 x 1 Q·4 mbar

X-ray limit (UHV) 2 x 1 0· 1 1 Torr, 3 x 1 Q·9 Pa, 3 x 1 Q·1 1 mbar

Materials exposed to gas Al l vacuum fired, UHV compatible

Gauge operating temp. 0' C to 50' C ambient, non condensing

Internal volume 73.0 cm3, (4.45 inch3) to the port screen

Gauge bakeout temp. 450' C maximum (non-operating, cable removed)

Max. gauge cable length 61 meters (200 ft.)

Convectron Gauge (Optiona l ) Range for N 2 o r a ir 1 X 1 Q·4 t o 999 Torr, 1 X 1 o-2 t o X 1 .33 1 OS Pa, 1 X 1 Q·4 t o 1 .33 X 1 03 mbar

Mounting position Horizontal preferred, with port down

Sensor material Gold plated tungsten

Materials exposed to gas 304 stainless steel, nickel iron alloy, borosilicate glass polymide

Internal volume 33 cm3 (2. 1 4 inch3)

Gauge operating temp. 0' C to 50' C ambient, non condensing

Gauge bakeout temp. 1 50'( maximum, non-operating, cable disconnected

Cable bakeout temp. 1 05' C maximum

Max. gauge cable length 1 52 meters (500 feet)

(505)872-0037 * Catalog Pr icing

Subject to Change


Granville Phillips E14Q1XIflll G��gb�l��n c�:��o��r

•

•••

Configured For: 19" Rack Mount w/side by side PS 3 Line Digital Display RS232, 6 Set Points GP Stabii-Ion Gauge GP Dual Convectron Gauge (Optional) Electron Bombardment Degas Remote Input/Output Interface Reads in mbar, 1 1 5 VAC (see below for other pressure readout)

I D EAL VACU U M G P p .

* P/N P/N nee • � t Sta b i l - lon

t Gauge C o��t!o n P1 04976 370501 -000-M1 $2,956.80 SERI ES 3 7 0 The Granvi lle-Phil l ips Stabil-lon Vacuum Gauge and Controller combine the latest technology in ionization gauges and control electronics, giving you the most reliable and accurate vacuum pressure measurements for your systems and research. Bright LEOs display the pressures read by the Stabil-lon and Convectron Gauges. The flexible, modular design offers a range of computer interfaces, setpoint control relays, dual Convectron Gauge operation, and digital display in Torr, Mi l l ibar, or Pascal to meet your specific requirements. Other features include analog output, selectable em ission current, degas timer, and selectable N2/ Ar gas for Convectron. STANDARD Model does not include Dual Convectron.

3 Line Display 370 UHV Control ler (Ca l l for Price) Confi g u ration Options: G RANVILLE P H I LL IPs PIN 3 70 # # # - # # # - # # Left mount Half rack mo Interface Opt

side by side with Power Supply for 1 9 .. rack t unt with remote Power Supply

ions (Slot X) N O N E 0 RS232 A RS-485 B I EEE-488 c

ns (Slot Y) o l N O N E

G a u g e Optio

Dual Convectron Gauge 1 I Setpoint Opt ions (S lot Z)

N O N E 0 2 setpoint relays for Stabi l- lon Gauge A 6 setpoint relays, 2 per channel B

Display Optio ns Torr T m b a r M Pa p

Power Cord 0 ptions North America 1 1 5vac & Japan 1 OOvac 1 North America 240vac 2

U niversal Eu rope 220vac 3 U n ited Kingdom 240vac 4

ards Select up to three option cards - one for Interface Module C each slot. The con installed. The card

troller will be assembled with the option cards


s are also sold separately see side box.

1-

50 1 1 502

Interface Module Cards · =.Jl GP PIN IDEAL P/N Price* RS·232 computer interface 370 1 1 0

RS-485 computer interface I 370 1 50

IEEE·488 computer interface I •J • 3701 1 1 -

Dual Convectron Gauge ;t f 370 1 06

Process control w/ 2 set point relays for ion gauge •!:::::, 370 1 08

Process control w/ 6 set point relays, 2 per channels te 1 05349 3701 07 $565.60

Call 505-872-0037 for Prices

Idea( www.idealvac.com 505 872-0037 _. vacuum roducts ( p 1 0·18

fD Vacuum Pressure Measurement Pressure &auges Hot cathode Ion sTAN DARD M O D E L """""'"""""'"""""'"""""'"""""'"""""'"""""'"""

li .11 ph .11. Dual Ion Vacuum Gauge Controller ranvl e I IPS f.1qMLtkJ1ll ll (Can be ordered with Optional INTERFACE MODULE CARDS)

2 lon Gauges Glass Tubes or

N ude, (not UHV) one at a time

c�0r?t��r SP ECI FICATIONS Display Unit

Controller Pressure Range

Emission Current

Ionization Gauge

Standard Electrometer

Operating Temp.

Green LED, Torr, mbar, Pa (1 unit per controller)

Lower - 1 X l Q-1 1 Torr I Upper - 1 X 1 o-1 Torr

Controlled, adjustable from 0.01 to 1 O.OmA

Analog, (B-A) and other compatible ion gauges

Sensitivity and emission adjustments for IG tube

40' C maximum ambient

Power Required 90 to 1 30VAC, or 1 80 to 250Vac, 50/60, 220W max.

Additional Module and Function Specifications

Available Interfaces

High Performance UHV

Electrometer

Convectron Gauge

Thermocouple Gauge

Capacitance Manometer

Process Controls

2 I on Gauge Operation

Remote Input/Output

Degas

IEE-488, RS232 or RS485, Pressure Data & Set Points

Remote ON/OFF control for I G 1 , IG2 and degas

Extends pressure to 2 X 1 0-1 1 Provides Electron Bombardment power adj. control

Sensitivity adj. & independent control for 2 ion gauges

Pressure 1 x 1 o-4 to 990 Torr with two GP 275 Tubes

Pressure 1 x l Q-3 to 990 Torr with two GP 270 Tubes

Max. capacitance range 1 - 1 0 -1 00 - 1 000 Torr

Two channel (for IG on ly). Six channel (all gauges)

Two tube sequential operation, Hot B/A Type

Provides status relay contacts for IG1 , IG2 fault

detection, ON/OFF Controls, & lock out switches

This is the STAN DARD MODEL Th ree Line Display Dual Hot Cathode I on Vacuum Gauge Control ler and P.S. side by side for a 1 9" rack mou nt. Measures Two ionizaiton gauges ( I G) GlassTubu lated or Nude (NOT U HV) one at a ti m e i n Torr. Ideal Vacuu m Part Nu mber P1 04901

Optional I nterface Modu le Cards for 3-Line Display 307 VGC I n te rfa c e M o d u l e C a r d s I D E AL G P & M o u n t i n g H a rd w a r e P / N P / N Price*

Dual Convectron Gauges P 1 04902 30701 3 $ 5 7 6 . 2 5

D u a l Thermocouple Gauges P 1 04903 30701 4 $ 72 5 . 0 0

Process Control with 6 set points P 1 04904 3070 1 7 $ 5 3 1 . 2 5

Process Control with 2 set points P 1 04905 3070 1 8 $ 2 3 3 . 75

Dual lon Gauge I EEE 488 P 1 04906 307020 $ 5 6 3 . 7 5

Convectron & Capacitance Diaphragm P 1 04907 307026 $ 7 7 6 . 2 5

Linear Analog Output I Thermocouple & I o n P 1 04908 307 1 00 $ 2 7 2 . 5 0

Remote Input/Output for I on Gauge status P 1 04909 30701 2 $ 1 42 . 5 0

RS-232 Computer Interface Module P 1 04900 3070 1 9 $ 4 8 5 . 0 0

Mount Hardware for 1 or 2 P.S. 1 9" rack P 1 049 1 0 307008 $ 94 . 5 0

P . S. cable a n d plate for side b y side 1 9" rack P 1 049 1 1 307009 $ 94 . 5 0

Mounts control u n it on left or right 1 9" rack P 1 049 1 2 3070 1 0 $ 94 . 5 0

Mounts control u n it i n center o f 1 9" rack P 1 049 1 3 3070 1 1 $ 94 . 5 0

Mounts 2 control u n its side b y side 1 9" rack P 1 049 1 4 30702 1 $ 94 . 5 0

Half rack panel for mounting Power Supply P 1 049 1 5 3071 1 4 $ 94 . 5 0


(505)872-0037


Granville Phillips E14RIXfiltll vacu��aJ:�;ec��rol ler Configured For: 19" Half Rack Mount 3 Line Digital Display 274 g lass turbulated or nude NOT UHV BA gauges Electron Bombardment Degas Remote Input/Output Interface Reads in Torr, 1 1 5 VAC (for other configurations see

2 Convectron Gauges 2 Thermocouple Gaug (with optional card) (with optional card)

I D E AL G P p .

* P / N P/N nee NUDE • ! P1 04901 307502-000-Tl $ 1 992 50 t G LASS 1 •

SERI Es 307 Standard model runs 2 ion gauges (1 at a time)

The Granville-Phi l l ips Dual lon Gauge Controller combines the latest technology in ionization gauges and control electronics, giving you the most reliable and accurate vacuum pressure measurements for your systems and research. Bright LEOs display the pressures read by the lon Gauges, Convectron Gauges and Thermocouple Gauges {depending on modules}. The flexible, modular design offers a range of computer interfaces, setpoint control relays, dual Convectron Gauge operation, and digital display in Torr, Mil libar, or Pascal to meet your specific requirements. With available modules, controls four gauges, measuring pressure from 2 x 1 o·l l Torr to atmosphere, with none, two or six process control set points.

Options for 3 Line Display 307 VGC Control ler (Ca l l for Price) Configu red for Series 274 glass tubu lated or nude (NOT UHV) Bayard Alper gauges with resistive degas G RANVI LLE P H I LL I PS P/N

_Le_ft_m_o_u_n_t s_id_e_b�y_s_id_e_w_it_h_Po_w_e_r_Su�p�p�ly_fo_r_1_9'_' r_ac_k __ 30_7_5_0_2 ____________ _ # # # - # #

Half rack mount with remote Power Supply 30750 1 I nterface Options (S lot X)

NONE RS232 RS-485 I EEE-488 Linear Analog Output

Gauge Options (Slot Y) NONE Dual Convectron Gauge Convectron I Capacitance Diaphragm Dual Thermocouple Gauge Opt ion s (Slot Z) NONE 2 setpoint relays for ion gauge 6 setpoint relays, 2 per channel 6 setpoint relays, user configurable

Display Options Torr mbar Pa

Power Cord O ptio n s


North America 1 1 5vac & Japan 1 00 vac North America Universal Europe 220vac United Kingdom 240vac

0 A

--------------------------

8 �------------------------� c D

0 1 �--------------------------� 2 3

0 A �----------------------------� B c

T l � �r-----------------------------� 1 2 �--------------------------------� 3 4

www.idealvac.com (505)872-0037 10·20

fD Vacuum Pressure Measurement Pressure &auges combination

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""

AlillENT rarian l/ltlll1tltl Combination Vacuum Gauge Controller

Features Include: (with OPTIONAL Interface

Operates up to 12 gauges Displays up to 8 gauges at once 8 gauge set points Ful ly programmable RS232/485

FRG-nomo User Configurable Pressure units Torr, Mbar, Pa Operates ALL Agilent Vacuum Gauges:

• Convection (thermocouple & ConvecTorr) • Hot filament ion gauges • Inverted magnetron

(cold cathode or Penning) I ""��.,li 4

ConvecTorr '1

Measures atmosphere to 1 x 10-11 Torr depending on module card and gauge type.

XGS-600 The Agilent Technologies Com bination Vacuum al lows up to s ix interface cards to be installed. This makes for practically any combination to suit your particular vacuum needs. This yields maximum flexibi l ity for different types of vacuum sensor/gauges to be used. The XGS-600 control ler a l lows for sim ultaneous operation of up to 1 2 gauges and can display readings for up to 8 gauges at any one time. Al l settings are stored in flash memory, so no worry about reprogramming after a power outage. Al l interface cards, cables and sensor/gauges so ld separately.

- ---------

PVG-500 IMG-1 00

XGS-600 S PECI FICATIO N S 'onal lnterface Module Cards & Instal l Hardware for XGS-600

User Interface

Display Capa bility

auge Capa bility

LCD monochrome dot matrix, 240 X 1 28, white back l ight, 5

button keypad

Up to eight s imultaneous channels of pressure measureme Dual Convectron Gauge Card R3084301 up to a 5 character user label for each, up to two channels Dual Analog Input Card R3487301

in a large font, readable from 25 ft., updates every 200 msec Profibus DP Interface Card R3494301

Up to 4 Hot filament BA gauges including metal, glass, and R;=a-=;ck.:..CM�ou::..:n;..:.t;.::in"'g-,;1.;;.

9 '"'

' O�Fc...:.F.;:=C:.:e::.c.n.:.:te"::

r:-';1 o,P:..::I ac:.:te=----::P...!.1.:c-04_,_1,_4,_,0'---;:Lc:-647:2�2::-;30:-;1- -7$�9�9�. 99 Rack Mounting 1 9" On Center 2 Plates P 1 041 4 1 L6423301 $99.99

nude U H V types using t h e H F I G cards, up t o S IMG's using the Tilt Stand for XGS-600 Accessory p1 041 42 R31 24301 $99.99 IMG cards, u p to 1 2 r o u g h gauges u s i n g t h e D u a l Convectron

Gauge Cards, u p to 1 2 Active Gauges using Dual Analog

Input Cards

Measurement Range 1 x 1 o-1 1 Torr to Atm depending o n card and gauge type

Setpoints Eight normally open set points ( open col lector), with

independently programmable ON and OFF delays,

Setpoint Response

Serial Comm. Analog Outputs

1/0 Control

Power

manual override

20 msec. max. (with delay set to 0.0 sees.)

RS232 and RS485, Profibus DP (optional)

1 v/dec LOG, 0-1 OVFS, o n each card with 200 msec update

HFIG card, Remote gauge ON/OFF, F 1 1 select, degas ON/OFF

inputs, Status Output IMG card, Remote gauge ON/OFF

Status Output Dual Convection Card, Remote CAL inputs,

Status Outputs Dual Analog I n put Card, Remote CAL inputs,

Status Output

Universa1 1 00-240 VAC, 2 50/60hz

(505)872-0037 * Catalog Pricing

Subject to Change

Vacuum Pressure Measurement f]) Pressure &auges combination

------"""""""'

AlillENT rarian J '(tf,'JqtJ/) Combination Vacuum I ' Gauge Controller

User configurable with 4 (optional) interface cards for the fol lowing Agi lent pressure sensor I gauges.

��dusle Types of Sensor Gauges Pressure Range in Torr [ ConvecT orr Gauges atm to 1 x 1 Q-4

53 1 /536 Thermocouple Gauges atm to 1 x 1 o-3 ConvecT orr Simulator ��7�i;;;ison 760 to 1 o-4 Thermocouple Simu lator ��7�;::;1'on 760 to 1 o-4 [ 572 B/ A Glass I on Gauges 1 0-3 to 2 x 1 0-1 o 57 1 B/A Glass I on Gauges 1 x 1 0-3 to 2 x 1 0-1 o 563 B/ A Glass I on Gauges 1 x 1 0-3 to 2 x 1 0-1 o M BA 1 00/200 B/A Metal ion Gauges 1 x 1 0-2 to 2 x 1 0-9 UHV-24/P B/A Nude I on Gauges 1 x 1 o-3 to 2 x 1 o-1 1

c IMG-1 00 Inverted Magnetron Gauge 1 x 1 o-3 to 5 x 1 o-9 IMG-300 Inverted Magnetron Gauge 1 x 1 o-3 to 2 x 1 o-1 1 [ CT-1 00 Active Rough Vacuum Gauges 1 00 to 1 x 1 o-4 PVG-500/500S/502S Pi rani Gauges 7 50 to 3 . 7 5 x 1 o-4 CDG-500 Capacitance Diaphragm 1 000 to 1 PGC-750/PCG-752 Pi rani Gauges 1 1 25 to 3.8 x 1 o-s FRG-700/FRG-702 Full Range Gauges 760 to 3 .8 x 1 o-9 FRG-720/FRG-730 Pi rani & B/A Sensor 760 to 3.8 x 1 o- 1 0

P1 041 22 XGS600HOMOCOA 1 (With Analog Card) $1 ,480.00 A l l these sensor gauges a re ava i l ab le th roug h P 1 041 2 1 XGS600HOMOCO (No cards Insta l led) $1 ,077.34 th i s cata log or ju st ca l l u s at 505-872-0037.

*Construct the Part Number with al l your requirements, then call us and we wil l g ive you a price. Configuration Part Numbers for 8 Line Display XGS-600 Control ler

For particular Interface Module Cards see opposite page Ag i l ent PIN XGS-600 Combi nation Control ler, w/1 Dual Analog I n put Card (see pic a bove)

Configure you r XGS-600 Control ler with ca rds, constructi ng you r part n u mber

Choose the n u m ber H F IG** Cards you want, from 0 to 4

X G S 6 0 0 H O M O C O A 1 X G S 6 0 0 H _ Mfr_ p

Choose the n u m ber of I MG* (cold cathode) Ca rds you want, from 0 to 5

Choose the n u m ber of Dual Convectron Gauge Cards, each ca rd runs 2 convection type gauges, from 0 to 6

Choose the n u m ber of Active Gauge Cards (Analog I n put) each card runs 2 Active Gauges, from 1 to 6 ---------------------'

If o rdering Profibus DP Option, Add a "P"------------------------' NOTE:

• The XGS-600 has 6 gauge ca rd slots permitting a total of 6 ca rds.

• Up to fou r s lots can be used for H F IG** Cards. If Four of t hese are chosen, one IMG* card or up to two Dual Convection Cards may be selected a lso.

• Up to five s lots can be used for IMG* Cards. If five of these a re chosen, no addit iona l gauge cards may be selected.

• All s ix s lots may be used for Dual Convection Gauge Cards or Dual Analog Input Cards.

• H FIG**, I MG*, and Dual Convection Cards can be used with Dual Analog Input Cards.

*IMG- Inverted Mag netron Gauge **H FIG - Hot F i l a ment ion Gauge


I nterface Module Cards N eeded for Different Sensor Gauges � Dual Convectron Gauge Card @ Hot Fi lament ion Gauge (HF IG} Card @ Inverted Magnetron ion Gauge ( IMG} Card ® Dual Analog Input Card


"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""

AGILENT llarian lll$f,itlll Sensors/Gauges and Cables Combination Vacuum

Gauge Controller

Sensors/Gauges (Other Gauges are Available

for the XGS-600, J ust Call Us at 505-872-0037)

Type Gauge Size Range in Torr IDEAL P/N Agi lent P/N Price* FRG-700 Pirani/lnverted Magnetron Combination Gauge P1 03349 FRG700KF25 FRG-700 Pirani/lnverted Magnetron Combination Gauge P1 03350 FRG700CF35 IMG 1 00 Cold Cathode Inverted Magnetron Gauge P 1 04 147 R031 0301 IMG 1 00 Cold Cathode Inverted Magnetron Gauge P 1 04 148 R031 0302 IMG 1 00 Cold Cathode Inverted I

ion B/A Singl Gauge NWKF40 1 X 1 to 2 x 1 MBA 1 00 Hot Cathode ion B/A Single Iridium Filament Gauge 2.75" CF 1 x 1 o-2 to 2 x 1 o-9 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge NWKF25 1 x 1 o-2 to 2 x 1 o-9 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge NWKF40 1 x 1 o-2 to 2 x 1 o-9 $335_00 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge 2.75" CF 1 x 1 o-2 to 2 x 1 o-9 P 1 04 163 R1 1 70 123 $387.50 ConvecT orr Convection Type Tube Sensor, Platinel Filament 1/8" M-NPT atm to 1 x 1 0-4 P 1 04150 L9090301 $1 85.00 ConvecT orr Convection Type Tube Sensor, Platinel Filament 1 .33" CF atm to 1 x 1 0-4 P 1 04 15 1 L9090302 $1 89.95 ConvecT orr Convection Type Tube Sensor, Platinel Filament NWKF16 atm to 1 x 1 0-4 P 1 04 152 L9090305 $1 99.95 ConvecT orr Convection Type Tube Sensor, Platinel Filament NWKF25 atm to 1 x 1 0-4 P 1 04153 L9090306 $21 2.50 ConvecT orr Convection Type Tube Sensor, Platinel Filament 4 VCR-F atm to 1 x 1 0-4 P 1 04 154 L9090303 $200.37 ConvecT orr PType Simulator Reference Tube atm to 1 x 1 0-4 P 1 0461 7 L7382301 $339.60 CDG-500 Capacitance Dia hragm Gauge (No Set points) P1 04769 CDGSOOT0001KF16 $1 ,800.00 CDG-500 Capacitance Diaphragm Gauge (No Set points) P1 04772 CDGSOOT001 OKF1 6 $1 ,800.00 CDG-500 CaEacitance DiaEhragm Gauge (No Set EOints) P1 04776 CDGSOOT01 OOKF1 6 CDG-500 i i 04750 CDGSOOTl OOOKF1 6 PVG-500 Active Pi rani Gauge 750 to 3 . 75 x 1 o-4 P1 04000 PVGSOOKF16 PVG-500 Active Pi rani Gauge Tungsten Filament has setEoints 7 50 to 3 . 75 x 1 o-4 na PVGSOOK16S CALL PVG-500 Active Pi rani Gauge nickel Filament /setpoints (corrosive) NWKF16 7 50 to 3 . 75 x 1 o-4 na PVG502KF16S CALL

Signal Cables for XGS-IiOO Sensors/Gauges Cable Type and Controller it Fits IDEAL P/N Agi lent P/N Price*

Thermocouple Gauge Controller Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. ConvecT orr Gauge Controller Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. IMG1 00 I nverted Magnetron Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. IMG300/IMG-UHV Inverted Magnetron Cable, for XGS-600, Mu lti-Gauge, Senn Torr Controllers, 1 0 ft. Nude I on Gauge UHV-24/24E, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. (Agilent Only Bakeable) Nude I on Gauge UHV-24/24p, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. (Agilent Only Non-Bakeable) MBA 100/200 Meta l ion Gauge Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. B/A I on Gauge Glass Tubes 563, 564, 571, 572, for XGS-600, Multi-Gauge, Senn Torr Controllers, 1 0 ft. FRG-720 B/A Pirani, with OEen active Eort, for XGS-600 Controllers, 1 0 ft. PVG-500 Active Pi rani IMG with open active ports, for XGS-600, AGC-100, AGD-100 Controllers, 1 0 ft. XGS-600 cable with flying leads, for XGS-600 Controller, 1 0 ft. XGS-600 cable with flying leads, for XGS-600 Controller, 25 ft. XGS-600 cable with flying leads, for XGS-600 Controller, 50 ft.

(505)872-0037

INFICDN


Combinat ion Vacuum Gauge Contro l ler Gauges and Cables

��--::::_--:::_--::::_-:::;_-:::;_-:::;_-:::;_� ��--::::_--:::_--::::_-:::;_-:::;_-:::;_-:::;__� __ _ �� • •

2 J 4 5 6 , , , , , ,

� ,- ,-M 1I CI � C ,-,

,- ,,-, o � c ,-,

� ,- ,-• ,-, o � c ,-, I

8 8 8

2 J 4 ' ' ' ' � ,- ,-M ,-, c, � c ,-, � ,- ,-1 ,-, o =• c ,-,

8 8 8

Measures 1 125 to 1 x 10-10 Torr depending on gauge type.

,-, ,-, Ct Ct Ct � :B -Ct. Ct. u. u. '-'

.... � A.R lf( HV OR )f'-'

8 88 VGC403 _.:::� VGC402 _.:::� VGC40 1

IDEAL VACUUM lnficon Price* P/N P/N P1 04438 398-021 $2,1 87.90

IDEAL VACUUM lnficon Price* P/N P/N P1 04437 398-020 $ 1 ,772.55

VGC400 SerieS The VGC400 Series is your complete solution for process pressure measurement and control. Com patible with all I N F ICON active pressure gauges, the VGC400 controllers can monitor the entire pressure range from (1 1 25 to 1 Q-1 0 Torr) and the set point status. Features Incl ude: Auto ID of connected IN FICON gauges, User selectable measurement unit (mbar, Torr, Pascal, micron), High resolution - 1 6 bit AID converter, Up to six adjustable setpoints with adjustable hysteresis may be assigned to any channel (depending on model), Progra mmable 0 to 1 0 V chart recorder output with logarithmic I l inear characteristics for each gauge or gauge combination (VGC402/403 only), Firmware upgrades avai lable on-line and easily downloaded via the RS232 interface. Compact bench-top model design can easi ly be mounted in a panel or 19 inch rack, Wide range power su pply 90 to 250V, 50 to 60Hz.

VGC400 5 · S P E C I F I C A T I 0 N S e r I e 5 VGC401 VGC402 VGC403

Measurement Channels/Displays Display Pressure Range

Setpoints Setpoint Relays Channel Asignment Adjustment Range Hysteresis Relay Contact Connector

Analog Output Range Programmable Analog Output Connector

Interface RS232 Connector


Torr

1

LED

1 1 25 to 1 .5 X 1 0-10

Sensor dependent

Adjustable potential free charge

over contact

D-sub, 9 pin, male

0 .. 1 0 volt, sensor analog output signal

D-sub, 9 pin, male

D-sub, 9 pin, male

2

LCD

1 1 25 to3.75 x 1 o-1o

4

1 or 2

Sensor dependent


over contact

D-sub, 25 pin, female


1

D-sub, 9 pin, male

D-sub, 9 pin, male

3

LCD

1 1 25 to3.75 x 1 o-1o

6

1 /2 or 3

Sensor dependent


over contact

D-sub, 25 pin, female


D-sub, 9 pin, male

D-sub, 9 pin, male

IDEAL VACUUM lnficon p • * P/N P/N nee P1 04436 398-0 1 0 $ 1 ,088.81

Features Include: •Auto ID of a l l INFICON Gauges •1, 2 or 3 l ine LED/LCD displays •User selectable (mbar, Torr, Pascal) •High resolution 16 bit A/D Converter •Up to six adjustable setpoints with

adjustable hysteresis may by assigned to any channel

•Programmable 0 to 10 V chart recorder output with logarithmic/linear characteristics for each gauge or gauge combination (VGC402/403 only)

•Firmware ungradable via RS232 •Easily mounted in panel or 19" rack •Power range 90-250 VAC 50/60hz

www.idealvac.com (505)872-0037 10·24


..............................................

Theses Gauges work with ANY vacuum

INFICDN GautilesepanedaccabYes For VGC4DD Series Vacuum Controllers

LCD Screen 2- Set poi nts

INFICON MPG401 Pi rani & Cold Cathode INFICON PCG 550 Pi rani Capacitance Inverted Magnetron Gauge - CF 2.75" Diaphragm, Tungsten Filament - KF16 Operating range o f 7 x1 o-9 Torr Operating ra nge of 3 .8 x1 o-5 Torr

P/N P1 04439 Price $1 ,801 .80 P/N P1 04923 Price $81 0.00

INFICON Gauge Cable, D-sub 15 pin female/ INFICON Gauge Cable, Connector FCC I FCC, 15 pin male, 1Oft. 1 0ft. Connects a l l the CDG, BAG, BPG, BCG, HPG Connects a l l the PCG, PEG, MPG Gauges to VCG400 Series Controllers Gauges to VCG400 Series Controllers

P/N P1 04427 Price $1 98.40 P/N P1 04428 Price $ 1 8 1 . 1 5

wit�1�:s�n��!:dTh��gh INFICON MPG401 Gauge All metal seals Repair Kit contains: Pi rani element, INFICON M.PG�Ol Gauge All metal screw & copper fitting, anode ext. piece, anode seals

_ Repair K1t

. . .

. . com plete ignition air seal & centering ring Contams: Centenng rmg, seal, 1gn1t10n a1ds

P/N P1 04431 '

Price $51 4.80 P/N P1 04432 Price $228.1 5

FPM Sea led INFICON MPG400 Pi rani & Cold Cathode INFICON MPG400 Pi rani & Cold Cathode Inverted Magnetron Gauge - NWKF25 Inverted Magnetron Gauge - NWKF40 Operating range of 7 x1 o-9 Torr Operating range of 7 x1 o-9 Torr

P/N P1 04425 Price $1 ,292.85 P/N P1 04424 Price $1 ,41 5.70

LCD Screen NO- Set poi nts

INFICON COG Capacitance Diaphragm INFICON PCG 550 Pi rani Capacitance Gauge Cable, D-sub 15 pin female/FCC,! Oft. Diaphragm, Tungsten Filament - KF16 Connects a l l the SKY CDG Gauges t o VCG400 Operating ra nge of 3 .8 x1 o-5 Torr Series Controllers P/N P1 04435 Price $735.00 P/N P1 04426

INFICON MPG400 Gauge FPM-Sealed Repair Kit Conta ins : P i ra n i e lement, s upport ring, 2-0-Rings, ign ition aids, anode complete

P/N P1 04430 Price $51 4.80

( 1 O) l g n i t ion Aids

I NFICON M PG400/401 Gauge Ignition Aids Contains: 1 0 ignition aids

P/N P1 04433 Price $1 04.20

INFICON MPG400 Gauge FPM-Sealed Repair Kit Conta i n s: Support ring, 2-0-Rings, I g n ition aids P/N P1 04429 Price $99.50

(1 )Mounting Tool for Ign ition Aids

I NFICON M PG400/401 Gauge Mounting Tool for ignition aids Conta ins : 1 tool t o replace t h e ign ition aids

P/N P1 04434 Price $42.25


(505)872-0037


M .s PDR900 Vacuum Measures 1500 to 1 x 10-10 Torr depending on gauge type.

_ Gauge con�roller Features Incl ude: • LCD menu d lspl�y

_for easy

_ Interface

• Alarm sounds for vacuum l ine or venting fai lure • Easy to

_read 5 d ig it LED

_Dis

• Code for unauthorized access to critical settings • Three high power set pomt relays

. . • Calibrate transducers quickly and easily • Auto setup �or plug and play fun

_ctlona l i�

• Easy output of analog output and communication • Leak dete�t1on tool for system d1a�no

_st1cs

• Compact for bench or rack mounting • Data loggmg tool for process momtonng . . . .

S.

1-f· d t d f.

f t d • Alummum hous1ng su1ted for field serv1ce apps.

• Imp I le se up a� con lg o rans ucers • Power 100 to 240 VAC/ 50-60hz

• Front panel set pomt relay status • RoHS

'and CE compliance

Measures ALL MKS 900 Series Vacuum Transducers PDR 900 s p E c I F I c A T I 0 N s

MKS PDR9QQ The PDR900 power su pply and readout unit is a stand alone, single channel controller for use with the Series 900 MKS digital vacuum transducers. The instrument sets new standards for vacuum gauge controllers and can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM appl ications. The PDR900 controller is the ideal solution for vacuum measurement, configuration of digita l transducers and advanced system diagnostics. The control ler features an easy to use menu-driven user interface, which guides the user through setup and configuration of remote transducer parameters. The readout unit communicates digitally with the transducer which el iminates analog measurement noise coupling via transducer cables. The unit automatically detects the transducer type, and can be used with both RS232 and RS485 transducers.

I D EAL VAC U U M M KS p . * PIN P/N nee

P1 02879 PDR900-1 2-US $778.00

�.-.,.) �_::?

Display Range Pressure Units Operating Temperature Storage Temperature Power User Interface Relays Relay Contact Rating Display Weight Compatible MKS Transducers

Series909AR MIG

Transducer "

Transducers and Signal Cables for MKS PDR900 MKS Type Gauge Size** Range in Torr IDEAL P/N MKS P/N Price*

HPS 901 P Plus MicroPirani Piezo Load lock Transducer (RS232) NWKF25 1 000 to 1 X 1 o-s P102866 901 P-21030 $632.50 HPS 902 Absolute Piezo Transducer (RS232) NWKF 16 1 000 to 1 0·1 P102872 902-1 1 1 3 $563.00 HPS 909AR Digital and Analog Hot Cathode Transduce (RS232) NWKF40 1 0·2 to 1 o-9 P102873 909AR-51 $ 1 ,221 .00 HPS 910 Dua iTrans MicroPirani Absolute Piezo Transducer (RS232) NWKF 16 1 500 to 1 o-s P102871 910-1 1 $635.00 HPS 925 MicroPiraini Transducer (RS232) NWKF25 atm to 1 o-5 P102867 925-21030 $560.00 HPS 971 UniMag Transducer (RS232) NWKF25 1 x 1 0·3 to 5 x 1 o-s P102868 971-21020 $71 0.00 HPS 974 Quad Mag MicroPirani Piezo Cold Cathode Trans. (RS232) NWKF40 1 000 to 1 X 1 0-8 P102870 974-91020 $1 ,325.00 HPS 9798 MicroPirani or Hot Cathode Transducer (RS232) NWKF40 atm to 1 0·10 P102874 9798-51 $1 ,543.00 HPS 999 Quattro Mu lti-Sensor Hot Cathode Transducer (RS232) NWKF40 atm to 1 0·10 P102875 999-51 $1 ,954.70 Cable, PDR900 to 901 P/909AR/910/925/971/972/974/9798/999, 15 Pin, 10ft., R5232 NA NA P102878 100013620 $85.00 Cable, PDR900 to 902, 9 Pin, 1 0 ft., RS232 NA NA P102877 10001 361 3 $85.00

** M any other flange inlet sizes of each tra n sducer a vailable, j u st call


1 500 to 1 X 1 0-1 0 Torr, mbar, Pascal 5' to 40C (41 to 1 04F) -1 0 to 55'( (1 4'to 1 3 1 'F) 1 00-240 VAC, 50-60 hz, 25W RS232/RS485 & analog output Up to 3 relays, SPDT 4 A @ 250 VAC, resistive 5 digit, 1 4.2mm, green LED 1 .4 1bs. 901 P, 902, 909AR, 925, 925C, 9 19, 971 , 972, 973, 974, 979, 999 Not compatible with 909/909A or 903 analog tansducer

i)llj : ��.:: .�:��:!uc:e< , .... � __ ,..,

fD Vacuum Pressure Measurement Pressure &auges combination """""'"""""'"""""'"""""'"""""'"""""'"""""'"""

PFEIFFER 1 , 2 , or G Cha n net��!!ro�J t�3�!t�o!l�forr��p��n��n1g!!�,e�s Features Include· llaffJ11ll�l ///// 1//llil i i i i i l i

I ------

A'h- ///// HI/Ill i l l i i i i

Operates up to 1 2 or 6 gauges • - ///// /Ill I II i i i i i i i ' Max1Gauge -_,,,,, '''1'1111 J i i i i i i Measure to 3.75 x 10-1 1 Torr ,,,,// u, Easy to operate - ///// //IIIII ill l u i Nonvolatile parameter memory Set points

P F E I F F E R

Interface RS232/422 Pressure units Torr, Mbar, Pa Operates ALL Pfeiffer Vacuum Gauges: 1 CH 1 4. 1 E -06 mbar �j

F• • PIRANI - TPR 261, TPR 265, TPR 280, TPR 281 l'l l l Node • PIRANI CAPACITANCE - PCR 260 • COLD CATHODE - IKR 251, IKR 261, IKR 270 • FULL RANGETM cc - PKR 251, PKR 261 • PROCESS ION - IMR 265

MaxiGaugeTM

• FULL RANGETM BA - PBR 260 • CAPACITANCE - CMR 261 - CMR 275

I DEAL VAC U U M Pfe i ffer Maxi G a u g e p . * P/N TPG 256A P/N nee

• PIEZO - APR 250 thru APR 267 P1 0341 6 PTG28760 Transmitters/Sensors lor Control Units

Pfeiffer Type Gauge/Transmitter Size** Range in Torr IDEAL P/N Pfeiffer P/N Price* Compact Full Range Gauge PKR 251 NWKF25 1 00 to 1 x 1 0-9 P 103214 PTR2600 $ 1 ,399.95 Compact Full Range Gauge PKR 251 CF 2.75 in. 1 00 to 1 x l Q-9 P1 032 15 PTR2602 $ 1 ,595.00 Compact Pirani Capacitance Combo Gauge PCR 260 NWKF16 1 000 to 1 0-4 P 10341 3 PTR26850 $634.00 Compact Pirani Hot Cathode Combo Gauge PBR 260 NWKF25 750 to 1 x 1 0-10 P 103414 PTR27000 $ 1 ,281 .00 Sensor/Transmitter Signal Cable 1 Oft. na na P 10321 6 PT448250T $ 1 42.50

** Other sizes and types of transmitters/sensors available

P F E I F F E R S P E C I F I C A T I O N S T P G S e r i e s TPG261 TPG262 TPG2S6A

Auto changeover, Pi rani-cold cathode 6x1 0 x 1 Q-3Torr

Connections for transmitter 2 6 max.

Display rate 10 1 /s 10 1/s 4 1 /s

Error signal: Working contact 1 piece 1 piece 1 piece

Filter time constant 1 .2/0.4/0.02 s 1 .2/0.4/0.02 s 2.1 /0.32/0.1 s

Interface RS-232-C RS-232-C RS-232-C/RS422

Voltage 90-250 Vac, 50/60hz 90-250 Vac, 50/60hz 90-250 Vac, 50/60hz

Measurement range max. 41 253 Torr 41 253 Torr 41 253 Torr

Measurement range min. gauge depenaent 3.75 x 10-1 1 Torr 3.75 x 1 0-1 1 Torr 3.75 x 1 0-1 1 Torr

Set point: Changeover contact 2 pieces 4 pieces 6 pieces

Set point: Current max. 1 A 1 A 3 A

Set point: Voltage max. 60 VDC 60 VDC 60 VDC

Signal Output 0-1 0 V 0-1 0 V 0-1 0 V

Weight 1 .1 kg (2.5 lbs.) 1 . 1 kg (2.5 1bs.) 2.1 kg (4.75 1bs.)


I I I I I I I l l I l l I I I I I\ I I I I I \ 1 1 1 1 1 1

PFEIFFER VACUUM Dua/Gauge

AR E - :8 ,-, ,-, ,-, ,-, ,-, - CJ. Cl. 0. Cl. 0

• 1 ON DE<" C.AL OFS SP SP< •2 ON OEG c•. OFS SP3 SP•

TPG 262 IDEAL VACUUM PIN

P 1 0341 5 PFEIFFER PIN PTG28280

Controls up to 2 Transmitters

Price $1 ,995.99

$2,650.00

I I I I I I I l l I ll I I I I I\ I I I I I \ 1 1 1 1 1 1

PFEIFFER VACUUM 5/ng/eGauge

AR E - :8 ,-, ,-, ,-, ,-, ,-, -CJ. Cl. Cl. Cl. 0

0,_ SP SPI

TPG 261 IDEAL VACUUM P/N

P 1 0321 3 PFEIFFER P/N

PTG28030 Controls up to 1 Transm itter

Price $ 1 ,225.00


Vacuum Pressure Measurement f]) Pressure &auges Thermocouple

..............................................

Teledyne Hastings IHIRMDCDUPLI control lers and Gauges Features Include: Measures 10-2 to 10-4 Torr depending on gauge type. VI Digita l Gauge control ler Meters: VI Ana log

• Thermocouple Range 10-2 to lQ-4 Torr • Bright easy to read Digital or Analog Readings • Available in Torr, mbar or Pascal • Compatible with large selection of Thermocouple

Tubes and Calibration Reference Tubes • 6 ft. power cable & 8 ft. sensor cable included

Thermocouple Vacuum Tubes: • Thermocouple Range 10-2 to lQ-4 Torr • Corrosion-Resistant

• Non-Contaminating

• Stable Calibration • Color Coded for Easy Identification

• Rugged Under Demanding Conditions

VT Digital and Analog Vacuum Gauge Meters/Control lers VT Gauge Meters/Controllers Digital a n d Analog Range in Torr IDEAL P/N Teledyne PIN Price*

Digital Thermocouple Gauge Controller for DV-4 Tubes 0. 1 - 20 Torr ( 1 0-2) Analog Thermocouple Gauge Controller for DV-4 Tubes 0. 1 - 20 Torr ( 1 0-2) Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-4 Tubes 0. 1 - 20 Torr ( 1 0-2) Digital Thermocouple Gauge Controller for DV-6 Tubes 1 - 1 000 mTorr ( 1 0-3) Analog Thermocouple Gauge Controller for DV-6 Tubes 1 - 1 000 mTorr ( 1 0-3) Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-6 Tubes 1 - 1 000 mTorr ( 1 0-3) Analog Thermocouple Gauge Controller w/2 set point relays panel mount for DV-6 Tubes 1 - 1 000 mTorr ( 1 o-3) Analog Thermocouple Gauge Controller for DV-5 Tubes 0. 1 - 1 00 mTorr ( 1 0-4) Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-5 Tubes 0. 1 - 1 00 mTorr ( 1 0-4) Hand Held Portable Thermocouple Vacuum Gauge Controller for DV-4 or DV-6 Tubes 0. 1 - 1 000 mTorr ( 1 0-3)

VT Thermocouple Gauge Tubes DV-4, DV-5, DV·B

P1 02050 P1 02052 P1 02053 P1 02051 P1 02055 P1 02056 P 1 04917 P1 02054 P1 02057 P1 02058

55-288DV4 VT-4-X-Y

VT-4B-X-Y 55-288DV6

VT-6-X-Y VT-6B-X-Y

CVT26A-O-O VT-5A-X-Y

VT-5AB-X-Y HPM 4/6

$545.00 $535.00 $61 1 . 1 6 $545.00 $535.00 $709.84 $899.96 $775.00 S875·00 Analog Controller w/enclosed cabinet $860.64

VT Thermocouple Gauge Tubes Size Range in Torr IDEAL P/N Teledyne PIN Price*

DV-4D Thermocouple Gauge Tube 1 /8 in. MNPT 0.1 - 20 Torr ( 1 o-2) P1 02048 55- 19 $97.68 DV-4R Ruggedized Thermocouple Gauge Tube 1 /8 in. MNPT 0.1 - 20 Torr ( 1 o-2) P1 02047 55-1 9R $1 30.68 DV-4D Thermocouple Gauge Tube NWKF- 16 0.1 - 20 Tor r ( 1 o-2) P 1 0261 2 55-258 $253.44 DV-4D Thermocouple Gauge Tube NWKF-25 0.1 - 20 Torr (1 o-2) P 1 0261 3 55-266 $253.44 DV-4D Thermocouple Gauge Tube 4-VCR 0.1 - 20 Tor r (1 o-2) P 1 02614 55-227 $238.92 DB- 16D Reference Tube For DV-4 Tubes na 0.1 - 20 Torr ( 1 o-2) P 1 05 1 76 DB-16D $402.50 DV-6M Thermocou�le Gauge Tube 1 /8 in. MNPT 1 - 1 000 mTorr p o-3) P1 02046 55-38 $91 .08 DV-6R Ruggedized Thermocouele Gauge Tube 1 /8 in. MNPT 1 - 1 000 mTorr ( 1 0-3) P1 02045 55-38R $1 04.28 DV-6M Thermocouple Gauge Tube NWKF- 16 1 - 1 000 mTorr 1 0-3 P 10261 6 55-251 $242.88 DV-6M Thermocou�le Gauge Tube NWKF-25 1 - 1 000 mTorr ( 1 0-3) P 1 02617 55-267 $242.88 DV-6M Thermocou�le Gauge Tube 4-VCR 1 - 1 000 mTorr ( 1 0-3) P 1 02618 55-283 $ 1 9 1 .40 DV-6R Thermocou�le Gauge Tube CF 1 .33 in. 1 - 1 000 mTorr ( 1 0-3) P1 04376 55-38R-CF $272.55 DV-65 Ruggedized Thermocou�le Gauge Tube with ca� 1 /8 in. MNPT 1 - 1 000 mTorr(1 0-3) P 1 05 1 74 DV-65 $21 0.00 DB- 16D Reference Tube For DV-6 Tubes na 1 - 1 000 mTorr (1 0-3) Cal l DB-20 $402.50 DV-5M Thermocou�le Gauge Tube 1 /8 in. MNPT 0.1 - 1 00 mTorr ( 1 0-4) P1 02049 67-6 $1 50,48 DV-5M Thermocou�le Gauge Tube 4-VCR 0.1 - 1 00 mTorr ( 1 0-4) P 1 02615 55-230 $275.88 DB-18 Reference Tube for DV-5M Tubes na 0. 1 - 1 00 mTorr ( 1 0-4) Cal l DB- 18 $402.50 DB-31 Reference Tube for DV-8M Tubes na 0 - 1 0 mTorr Cal l DB-31 $402.50


fD Vacuum Pressure Measurement Pressure &auges Thermocouple

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""

AlillENT rarian THERMOCOUPLE Control lers and Gauges Cost Effective Contro l lers for Pressure Measurement. The RGC1 00 and RGC 1 50 i nc ludes the Thermocoup le Tube and Cable to provide a pre-ca l ibrated turnkey rough vacu u m solution. ..

9 Measures 760 to 10-3 Torr e dependi on gauge type.

RGC-100 AgilentTechnologies

Torr

I DEAL VACUUM Agi lent Price* P/N P/N

P1 05092 RGC1 50 P1 05091 (Ethernet) RGC1 50E

$896.50 $ 1 ,283.50

RGC1 00/1 50 S P E C I F I C A T I 0 N S Measurement Range Vacuum Fitting Interface Cable

760 to 1 .5 X 1 Q-3 Torr 1 /8 inch MNPT

1 0 ft. Sensor Agilent 531 TC gauge tube Display 6 Digit LED

Analog Output 0-SVDC

Voltage 1 00-240 VAC, 50-60 hz Setpoints Yes on RGC1 SO I Optional on RGC1 00 Optional Communication Yes P1 01 659 (Torr) RGC1 OOT

P1 05090 (Mbar) RGC1 OOM $565 .00 $565 .00 Other Configurations Ava i l able, Call (505) 872-0037 for a Quote.

Replacement SENSORS

Agilent 536 Thermocouple Gauge Tube, Stainless Steel, with a baffle, 1 /8 inch MNPT Agilent 531 Thermocouple Gauge Tube, 1/8 inch MNPT Agilent 536 Thermocouple Gauge Tube, Stainless

Steel, with a baffle, 4 VCR Operating range of 2 to 1 x 1 Q-3 Torr

P/N P1 041 1 7 (536) P/N P101658 (531 )

Price $ 146.50 Operating range of 2 to 1 x 1 o-3 Torr

Price $80.50 P/N P1 041 1 6

Agilent 536 Thermocouple Gauge Tube, Stainless Agilent 536 Thermocouple Gauge Tube, Stainless Steel, with a baffle, 1 .33 inch CF Conflat Steel, with a baffle, NWKF16 Operating range of 2 to 1 x 1 o-3 Torr Operating range of 2 to 1 x 1 o-3 Torr

P/N P1 041 1 8 Price $1 69.95 P/N P1 04171 Price $1 39.95

Price $1 39.95

Agilent 536 Thermocouple Gauge Tube, Stainless Steel, with a baffle, NWKF25 Operating range of 2 to 1 x 1 o-3 Torr

P/N P�l\:\!291 ,995.99 Price l!rl�ii��5


Vacuum Pressure Measurement f]) Pressure &auges convectron

""""'""""'""""'""""'""""'""

Granville Phillips FiaQtilltl71 c:::��·�:�.��m Measures atmosphere to 10-4 Torr depending on gauge type.

Features Include: • Convectron range atmosphere to 1 x l0-4 Torr • Built in Convectron simulator for self calibration • N2, Ar, He, Co2 curves are stored in memory for

accurate pressure measurements • Compatible with large selection of Convectron Tubes • Self diagnosis

Optional : AC Power su • AC to 24VDC Converter Power Supply in 110 or 220 VAC Signal Cable or • Signal Cable to Convectron Sensors 27S Convectron Sensors • All GP 275 Convectron Gauge Sensors NOT INCLUDED

Replaces Older Model GP37S Controller

GP 475 Control lers & Power Supp l ies 5 Year Manufacture warranty G P 475 CONVECTRON Gauge Control lers & Power Suppl ies IDEAL P/N GP P/N Price*

GP 475 Convectron Vacuum Pressure Gauge Control l e r ( no set po ints ) P1 03969 475001 -00-T $629.95 GP 475 Convectron Vacuum Pressure Gauge Control l e r (2 set points ) P1 03970 475001 -A2-T $868.75 GP Power Supply for GP 475 Gauge Contro l l e r, 1 Oft., ( 1 1 0-1 20 VAC) P 1 041 1 2 475008-1 $ 1 26.25 GP Power Supply for GP 475 Gauge Contro l l e r, 1 Oft., (220-240 VAC) P 1 041 1 3 475008-2 $ 1 26.25 GP Power Supply for GP 475 Gauge Contro l l e r, 1 Oft., (220 VAC Eu rope) P 1 041 89 475008-3 $ 1 26.25 GP Power Supply for GP 475 Gauge Contro l l e r, 1 Oft., (240 VAC UK) P 1041 90 475008-4 $ 1 36.25 GP Power Supply for GP 375 (Legacy) Gauge Contro l l e r, 1 Oft., ( 1 1 0-1 20 VAC) P1 02692 375006 $85.00 G P Power Supply for GP 375 (Legacy) Gauge Contro l l e r, 1 Oft., (220-240 VAC) P1 02693 375007-2 $ 1 35.00

GP Convectron Gauge Sensors & S igna l Cab les G P 275 CONVECTRON Gauge Sensors F lange Type T IDEAL P/N GP P/N p · * Capatible with 275, 375, 475 Convectron Controllers orr nee

GP 275 Convectron Vacuum Pressure Gauge Sensor 1 /8 in . MNPT atm to 1 x 1 0·4 P 1 0 1 660 275071 $ 1 62.50 GP 275 Convectron Vacuum Pressure Gauge Sensor 1 .33 in . CF atm to 1 x 1 0·4 P1 02578 275256 $245.00 GP 275 Convectron Vacuum Pressure Gauge Sensor 2 .75 in . CF atm to 1 x 1 0-4 P1 02684 275238 $ 1 99.00 GP 275 Convectron Vacuum Pressure Gauge Sensor 8 VCR 1 /2 in. atm to 1 x 1 0-4 P1 02685 275282 $224.95 GP 275 Convectron Vacuum Pressure Gauge Sensor 4 VCR 1 /4 in. atm to 1 x 1 0-4 P1 02686 275 185 $ 1 95.00 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF 1 6 atm to 1 x 1 0-4 P1 02687 275203 $ 1 89.95 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF25 atm to 1 x 1 0-4 P1 02579 275 196 $ 1 99.95 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF40 atm to 1 x 1 0-4 P1 02580 2753 1 6 $245.00 GP 275 Ca l i brat ion Gauge Zero Pressure S imu lator na atm to 1 x 1 0-4 P1 04898 275243 $21 5.00 GP 275 Ca l i brat ion Gauge VARIABLE Pressure S imu lator na atm to 1 x 1 0-4 P1 04899 275244 $225.00 GP 475 or 375 Convectron Control ler S ignal Cab le 1 0 ft . na P 1 041 1 1 47501 2-1 0 $ 1 26.25 GP 475 or 375 Convectron Control ler S i gna l Cab le 25 ft. na P 1 04184 47501 2-25 $ 1 55.00 GP 475 or 375 Convectron Control ler S ignal Cab le so ft. na P 1 04185 47501 2-50 $ 1 82.50 GP 475 or 375 Convectron Control ler S igna l Cable 1 00 ft . na P 1 041 86 47501 2-100 $243.75 GP 475 or 375 Convectron Control ler S i gna l Cab le 2 00 ft. na P 1 04187 47501 2-200 $400.00 GP 375 (Legacy) Convect ron Contro l l e r S i gna l Cab le 1 0 ft . na P1 02850 37501 2-1 0 $99.50 GP 275 (Legacy) Convect ron Contro l l e r S ignal & Power Cable 1 0 ft . na P1 02691 275-TC-CABLE $ 1 99.95 GP 307 Convectron & Capacitance Contro l ler S igna l Cab le 1 0 ft . na P1 04873 307027 $220.00


fD Vacuum Pressure Measurement Pressure &auges convectron

""""""""""""""""""""""""""""""""""""""""""""""

Granville Phillips MHS EiaQtialfla� II; I I c-::::::n Measures atmos to 10-4 Torr depending on gauge type.

Features Include:

All i n One MINI Convectron Module

Pressure Gauge with Digita l or Light

Readout with MINI Convectron

275 Gauge Sensor Built In A C Power Supply transformer is not incl uded

• Range atmosphere to 1 x lQ-4 Torr • Programmable functions

• Individual ca l ibration • Replaceable MINI 275 Gauges

• All metal package • Wide selection of in let connectors • Dig ital 3 figure LED or vacuum l ight • AC Power Transformer not included Replacement M I N I 2

• . Convectron

Process set pomts Gauge sensor

G P M KS 275 M I N I M o d u l e s & M I N I C o nvectron S e n so rs

NWKF40 P1 05661 275808-EU 2759 13 -EU-T

27581 7

27581 8

AC Transformer For ALL Model 275 Mini Convectron Mod ule Gauge s P1 05340 275933 $97.50


Vacuum Pressure Measurement f]) Pressure &auges convectron

��

MIS EiJQI41flt1 Convectron Pirani Gauge Contro l ler

Micron, Pascal and Mbar readouts available

I DEAL VACUUM MKS Price* P/N P/N

Pl 03326 ( 1 1 Svac/Torr) 947-A- 1 20-TR ca l l

317 Convection lnhanced Pirani Sensors Measures 1000 to 10-3 Torr depending on gauge type.

Featu res Include: • Convectron range 1Q+3 to 1Q-3 Torr • Fewer controls for simpl ified operation and lower cost • LED digital display for wider angle viewing & large readout • Compatible with large selection of Series 317 Convection

Pirani sensors (shielded) • Rapid responsiveness for appl ication pressures • Two independent relay set points for process control • LED set point status indicators • Series 317 Sensors highly reliable with repeatable presssures • Gas-type sensitivity useful for leak detection • CE Compliant

M Ks 94 7 The Series 947 Convection-Enhanced Pi rani Controller offers many standard features at a low price, and is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller. With a wide

measurement range to 1 Q-3 Torr, the H PS® Series 947 Convection-Enhanced Pi rani Controller is ideal for rough to medium vacuum applications. This includes measurement of roughing and foreline pressures, activation of high vacuum sensors, or start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control environments. The 947 can also use a wide selection of MKS 3 1 7 Convection Pirani Sensors for accurate pressure measurements. Comes with Torr readings, two setpoints and power cord. A convectron signal cable is optional but is avai lable from this website. See listings below.

S e ries MKS 317 S h i e lded Co nvect ion P i r a n i S e n s o rs MKS 3 1 7 Convection Pi ran i Sensor (Shielded) S ize Range in Torr IDEAL P/N MKS PIN Price*

Ser ies 3 1 7 Sensor, S h ie lded NWKF16 1 0+3 to 1 0-3 P1 03327 103170010SH $282.40 Ser ies 3 1 7 Sensor, S h ie lded NWKF25 1 0+3 to 1 0-3 P1 03328 1 031 70027SH $288.00 Ser ies 3 1 7 Sensor, S h ie lded 1 /8 inch MNPT 1 0+3 to 1 0-3 10317001 1 SH Ser ies 3 1 7 Sensor, S h ie lded 8 VCR 1 0+3 to 1 0-3 10317001 2SH Ser ies 3 1 7 Sensor, S h ie lded 4 VCR 1 0+3 to 1 0-3 1 031 70029SH Ser ies 3 1 7 Sensor, S h ie lded CF 1 .33 in. 1 0+3 to 1 0-3 10317001 3SH Ser ies 3 1 7 Sensor, S h ie lded CF 2.75 in. 1 0+3 to 1 0-3 1 031 70014SH Ser ies 3 1 7 Sensor, S h ie lded 1 5mm Tube 1 0+3 to 1 0-3 103170016SH Ser ies 3 1 7 Sensor, S h ie lded 1 8mm Tube 1 0+3 to 1 0-3 103170018SH Ser ies 3 1 7 Sensor S i g na l c ab l e 1 0 ft. na P1 03329 1 031 70006SH $95.00 Ser ies 3 1 7 Sensor S i g na l c ab l e 25 ft. na 1 031 70007SH


www.idealvac.com (505)872-0037 10·32

fD Vacuum Pressure Measurement Pressure &auges cold cathode

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""

MilS EiaQlili!�£1 cold cathode Vacuum Gauge

Measures 10-2 to 1 0-10 Torr depending on gauge type.

MKS 423 1-Mag Cold Cathode Sensor

KF25

943 Features Include: • Wide pressure measurement range 10-2 to 10-10 Torr • Digital LED display with set point status indicators • Large choice of cold cathode sensors 423 or 421 I-Mag • Fast system control with two setpoints • Sensor tubes may be mounted in any position • No filaments to burn out • No need to degas the gauge • No adjustment in emission current or filament voltage required • Cleaning of sensor is easy with a demountable tube

Does not come with Cold Cathode Signal Cable or 423 1-Mag Sensors

I DEAL VACUUM MKS Price* • Sensor tube less susceptible to contamination

due to isolated collector

P/N P/N

P1 03330 ( 1 1 5vac/Torr) 943-1 20V60-TR-PC $940.00 220VAC, mbar, pascal models also available

M KS 943 The 943 Cold Cathode vacuum gauge system is well-suited for industrial, process and analytical appl ications

including pressure measurement of high vacuum chambers and control of high vacuum systems. Areas of appl ications may include high energy physics, analytical instruments, laser production, ion implantation, mass spectrometry, or PVD. The 943 digital controller features two standard independent relay set points, which al lows you to confidently control your process. Adjust the set points from the front panel whi le viewing the display. Red LEDs indicate set point activation status. The Series 943 displays pressure from 10-2 to 10-10 Torr using a high visibil ity LED display. Two types of analog output are standard, for remote monitoring of pressure. An internal converter provides output that al lows a simple log conversion from voltage to pressure over the entire operating range. A fast responding, buffered analog output is also provided through the 15 pin accessory connector on the rear panel. Front panel functions allow the user to �::::!��Pib disable the high voltage, as well as set a pressure at which the cold cathode wil l automatically turn off. This prevents the controller from displaying incorrect readings when the pressure goes above the operating range of the sensor.

MKS 423 1 -Mag Co ld Cathode Sensors M KS 423 1-Mag Sensors S ize Range in Torr IDEAL P/N MKS P/N Price*

4 2 3 1 -Mag Senso r NWKF25 1 0-2 to 1 0-10 P 103331 1 04230004 $385.00 4 2 3 1 -Mag Senso r NWKF40 1 0-2 to 1 0-lo na 1 04230001 $425.00 4 2 3 1 -Mag Sensor CF 2.75 in. 1 0-2 to 1 0-10 na 1 04230002 $485.00 Co ld Cathode S i gna l Cab le 1 0 ft. na P1 03332 1 00007873 $245.00 Co ld Cathode S i g n a l Cab le 50 ft. na P1 03370 1 00002395 $325.00


Subject to Change

Vacuum Pressure Measurement f]) Pressure &auges Capacitance Manometers

..............................................

MKS D ig ita l Power Supp ly and Readout PDR2000 Measures Capacitance Manometers

Measures .02 to 25000 Torr depending on gauge type.

I D EAL VAC U U M M KS p . * P/N P/N nee

P1 02062 PDR2000AO CALL

C A B LES for PDR2000 IDEAL P/N M KS P/N Price* 626/627/628/722 with 1 5 pin to PDR2000 P 1 02063 (820005-1 -Ml $ 1 45.00 722/750/850/852 with 9 pin to PDR2000 P 1 02061 (820005-2-Ml $ 1 45.00

P D R 2000 s p E c I F I c A T I 0 N s Display Type Display Range Channels Relay Trip Points Outputs

Ana log Digita l

Controls

4 digits (9999) Red LED 0.01 mtorr to 1 0.00 ktorr 2 2, assignable to either channel

Continuous 0-SVDC, 0-1 OVDC each channel RS232 Gauge Select, Full Scale Adj., Calibrate, Zero, Setpoint l low or high, Setpoint 2 1ow or high, Torr/mbar select

Weight l ib. Voltage 1 00-240 VAC 50-60hz Compatible MKS Baratrons 626, 627, 628, 722 with 1 5 pin cable


722, 750, 850, 852 with 9 pin cable

The PDR 2000 is a versatile, low cost solution for powering and d isplaying the M KS Baratron fami ly of transducers. This unit can del iver up to 0 .75

Amps of ± 15 VDC to operate one or two heated or unheated units. Both units are simu ltaneously powered, so the user may a lternate between

readings by pressing a front panel select button . The readings are a lso avai lable on demand v ia the RS-232 interface. Two process relay trip points are

ava i lable and may be assigned to either manometer. U pper and lower settings a l low the user complete control over the hysteresis of the

control trip point. The relays have isolated outputs and are rated for 2 Amps at 240 VAC. The advanced power supply design operates on any i nput from 100 VAC to 240 VAC. Selection of engineering unit is a lso avai lable for Torr/mtorr, or mbar/microbar. It is a lso CE marked, making it a universal instrument for i nternational appl ications.

f.D. Vacuum Pressure Measurement Pressure liauges Capacitance Manometers

"""""'"""""'"""""'"""""'"""""'"""""'

M KS j_}_lli I W1fH Jjn}'.Jlf(! w Cal l Us For P R I C E 6290 Capacita n ce M a n o m eters

H EATED Baratron Part Number

The 6290 (9pin} can be had at either temperature range 45°( or 100°( and uses a 9-pin D-subminiature electrical connector for "drop-in" compatibil ity with many competitive products. Temperature controlled capacitance manometers are much less affected by ambient temperature changes than the unheated Baratrons. Heating the sensor also reduces or eliminates the possibil ity of process byproducts depositing inside the manometer to cause drift, which can have a significant effect on system availability and repeatability. The Type 629D also offers an optional external zero set capability, al lowing its zero to be set remotely - a major advantage in many process tools that do not permit easy access to the Absolute Baratron Capacitance Manometer.

Baratron works with M KS PDR-C-1, PDR-C-2, PR4000, 6608, PDR2000 Power Suppl ies

Ordering Part Nu mber EXAMPLE 6290 1 1 T B ( J 4 B CODE EXAMPLE

Absol ute Ca pacitance Manometers

9 -p i n D - con n e ctor, s ta n d a rd s en so r 629D 629D Pressure Ranges Fu l l Scale (Torr)

0 . 0 2 ( ava i l a b l e on 4 5 ' mode l s o n ly) U2T 0 . 0 5 U5T 0 . 1 0 .1T 0 . 2 5 RET 1 on 2 02T 1 0 1 1T 1 1T 2 0 21T 1 0 0 12T 1 00 0 1 3T Fitting Sizes

1 /2 i n c h O .D . ( 1 2 . 7mm) t ube (no f itt ing,_,_)---------;;-

-----::-

-

Swage l o k 8 VCR , f ema l e B 1 .3 3 i n c h O .D . C onf lat , rotat a b l e

45'( 1 00'( Options

Standard confi g u rat ion, vertical ca l ibration 1 Heater status ind ication, vert ica l ca l ibrat ion 2 External zero, vertical ca l (N/A for 0.02 Torr or 1 OO'C/0.05 Torr products 3 Heater status, external zero, vertical cal 4 (N/A for 0.02 Torr or 1 OO'C/0.05 Torr products) Standard confi g u ration , horizontal ca l ibrat ion (< 1 Torr on ly) 5 Heater status ind ication, horizontal ca l ibration (< 1 Torr only) 6 External zero, ho rizontal ca l (45'( products with 0.05, 0 . 1 0, 0.25 Torr ranges; 7 1 00oC products with 0 . 1 0 a nd 0.25 Torr ranges) Heater status, external zero, horizontal ca l 8 (45'( products with 0.05, 0. 1 0, 0.25 Torr ranges; 1 00'( products with 0 . 1 0 and 0.25 Torr ranges) Connector

9-p i n D-connector, t h read locks B 9-p in D-connector, s l i d e locks p

c

4

B


facuum Pressure Measurement f]) Pressure &auges Capacitance Manometers

MKS ! t f r' 1 LJ[JJLftJ :-tJIBJLW UJ Ca l l Us For """""""""""""""""

-� _:_;u. P R I C E 6228 & 6268 -- Capacita n ce M a n o m eters Part Number

Ambient Temperature 8aratrons ordering Part N umber EXAMPLE 6270 1 1 T B c 1 B cooE EXAMPLE

The 6228 (terminal block) and the 6268 (15pin) are unheated and are the most economical of al l the 600 series of Baratrons. They are available in full scale pressure vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research appl ications.

6270 & 6280 -

H EATEO 8aratrons

Absol ute Ca pacitance Manometers

Am b ien t t emp ; t e rm ina l b l o ck c o n n ector , s t anda rd s en so r Am b i en t t emp ; 1 5- p i n D - con necto r; s t anda rd senso r 45 '( s en so r; 1 5- p i n D - con necto r; s t anda rd senso r 1 O O ' C s en s o r; 1 5 - p i n D - connector; sta nda rd sen so r Pressure Ranges Fu l l Scale (Torr)

6228 6268 627D 628D

0.02 ( ava i l a b le o n 6 2 7D o n ly) U2T 0.05 (ava i l a b le o n 6 2 7D and 6 2 8D on l y) U5T

The 6270 (45oC) and the 6280 (lOOoC) (15pin) are 0 . 1 0 (not a v a i l a b l e o n 6 2 28 )

R.1ETT 0 .25 (not a v a i l a b l e o n 6 2 28 )

temperature controlled capacitance manometers that 1 on are much less affected by ambient temperature changes 2 02T than the unheated Baratrons. Heating the sensor also reduces 1 o 1 1T or eliminates the possibility of process byproducts depositing 20 21T inside the manometer to cause drift, which can have a 1 oo 12T

significant effect on system availability and repeatability. 200(ava i l a b l e o n 6 2 7D, 6 2 8D on l y ) 22T

They are available in lower ful l scale pressure ranges than ��0 �� unheated products, which permits their use in more 2000 ( ava i l a b l e o n 6 2 70, 6 2 80 o n l y) 23T demanding processes. Al l of the models are internally 5000 ( ava i l a b l e o n 627D , 6 2 8 D o n l y) 53T regu lated to their specified operating tem perature. 1 0 ,000 ( ava i l a b le o n 6 2 7D, 6 2 8 D on l y) 14T

627D

1 1 T

Baratrons work with MKS PDR-C-1, PDR-C-2, 1 5,000 ( ava i l a b le o n 6 2 7D, 6 2 8 D on l y ) R8T

PR4000, 6608, PDR2000 Power Supply Controllers --,-20'-'-,,o_oo:-'-(a'--va'--i l-,-a b-:-'-le--'-o n-'-6

-,-2 7-:-'-D,-'-6 2

,-:-8-::-D o-'-n-:-'-'lyl'----------

-----:-:c24T

==---__

2 5,000 ( ava i l a b le o n 6 2 7D, 6 2 8 D on l y ) RCT


Fitting Sizes

1 /2 i n c h O .D . ( 1 2 . 7mm) t ube (no fitt i n g,_,_) -------'::-A-------=--Swage l o k 8 VCR , fema l e 8 8 1 .3 3 i n c h O .D . C onf lat , rotat a b l e ( 1 ) C NW KF 1 6 (2 ) D NW KF25 (2 ) Q Swage l o k 8 VCO, F ema l e E 2 . 7 5 i n c h O .D . C onf lat , rotat a b l e ( 1 ) L Accuracy (o/o of Reading)

0 . 1 2% (627D 1 Torr range and h i g h er) c 0 . 1 5% (62 7 D i n 0 .25 , 0 . 1 0, 0.05 Tor r r anges ) D 0 .25% (62 2 8, 6 2 6 8, 628D , 6 2 7D in 0.02 To r r r ange ) 0 . 50% ( 628D i n 0 .25 , 0 . 1 0, 0 .05 Tor r r anges ) Options

Standard Configuration, Vertical Ca l i b ration, 627D, 628D, 1 Torr & h igher 1 Temp/Heater Status, Vertical Cal ibration, 627D, 628D, 1 Torr & h igher 2 Connector

1 5-p in D-connector, t h read locks (627D, 628D on ly ) 8 1 5-p in D-connector, s l ide locks (627D, 628D on l y) p

(1) Available only on ranges of 1 000 Torr and less.

c

8

(2) Available only on ranges of 5000 Torr and less, and 2000 & 5000 Torr ranges use an ove rpressure ring.

fD Vacuum Pressure Measurement Pressure &auges Ion Gauges

��==

Granville Phill ips 274 ��:� and Idea l Vacuum These Glass Tu bes typica l ly work with

I on GaUge 'u be S Gra.nv i l le P h i l l ips, M KS, Perkin El mer,

Vanan and Veeco P ressure Contro l lers

DUAL Tu ngsten F i l aments with two opposing hel ica l fi laments having six leads

3/4 in.

GP 274 DUAL Tungsten, 3/4 in. OD GP 274 DUAL Tungsten, 1 in. OD In let Pyrex Glass lon Gauge Inlet Pyrex Glass lon Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

PIN P1 04502 274012 Price $145.00 P/N P1 04505 274015 Price $1 58.00

CF 2.75 3/4"0.0.

3/4 in.

GP 274 DUAL Tungsten, 3/4 in. OD Kovar Metal Pyrex Glass I on Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 04503 27401 3 Price $1 64.00

CF 2.75 1 "0.0.

GP 274 DUAL Tungsten, 1 5m m OD In let Pyrex Glass lon Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P104510 274037 Price $1 72.00

GP 274 DUAL Tungsten, 1 in. OD Kovar Metal Pyrex Glass lon Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 04504 274016 Price $1 78.00

1 in .

GP 2 7 4 DUAL Tungsten, CF 1 .33 in. 3/4 in. In let Pyrex Glass lon Gauge

Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 04524 274021 Price $232.00

GP 274 DUAL Tungsten, CF 2.75 in. 3/4 in. Inlet Pyrex Glass I on Gauge Operating range of 1 x1 o-3 to 2 x 1 o-9 Torr

P/N P1 04506 274017 Price $250.00

GP 274 DUAL Tungsten, CF 2.75 in. IDEAL VAC DUAL Tungsten, 1 in. OD

KF25

1 in. Inlet Pyrex Glass I on Gauge Inlet Pyrex Glass I on Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 04507 274018 Price $255.00 P/N P1 02041 Price $ 1 1 5.00

CF 1 .33 3/4"0.0. -----

IDEAL VAC DUAL Tungsten, KF25 1SO IDEAL VAC DUAL Tungsten, KF40 ISO IDEAL VAC DUAL Tungsten, CF 1 .33 in. IDEAL VAC DUAL Tungsten, CF 2.75 in. NW25 Inlet Pyrex Glass I on Gauge NW40 Inlet Pyrex Glass I on Gauge 3/4 in. Inlet Pyrex Glass lon Gauge 1 in. Inlet Pyrex Glass lon Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 02042 Price $1 65.00 P/N P102040 Price $1 65.00 P/N P1 02043 Price $1 70.00 P/N P1 02044 Price $1 65.00


Granville ��:�� Phillips 274 and Ideal Vacuum Inn Gauge Tubes

I ridium Fi laments with Thoria Coating & 4 leads These Glass Tubes typica l ly work with Granville Phi l l ips, MKS, Perkin Elmer, Varian and Veeco Pressure Controllers

Vacuum Pressure Measurement f]) Pressure &auges Ion Gauges

'------" 1 5mm GP 274 Test Gauge with Single Tho ria Coated Iridium Filament Gauge

3/4 in.

I Glass tubu lated test gauge with theria-coated ir id i u m filament, p u mped down to GP 274 1ridium Filament, 1 5mm OD GP 274 1ridium Filament, 3/4 in. OD a pproximately 1 o-s Torr and sealed off. Inlet Pyrex Glass lon Gauge Inlet Pyrex Glass lon Gauge NOT to be used as a pressure reference. Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

P/N P1 04501 274031 Price $267.00 P/N P1 04508 274036 Price $184.00 PIN P1 04328 274002 Price $1 88.00

3/4 in. 1 in . --"

GP 274 1ridium Filament, 1 in. OD GP 274 1ridium Filament, 3/4 in. OD GP 274 1ridium Filament, 1 in. OD Kovar Metal Pyrex Glass I on Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr P/N P104331 274006 Price $226.00

GP 274 1ridium Filament, KF25 1SO NW25 Inlet Pyrex Glass lon Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr

Inlet Pyrex Glass lon Gauge Kovar Metal Pyrex Glass I on Gauge Operating range of 1 x 1 o-3 to 2 x 1 Q-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 Q-9 Torr

P/N P104330 274005 Price $1 99.00 P/N P1 04329 274003 Price $21 0.00

·,� CF 1 .33

I

CF 2.75 l " l n let

P/N P1 04509 274032 Price $238.00

GP 274 1ridium Filament, CF 1 .33 in. GP 274 1ridium Filament, CF 2.75 in. GP 274 1ridium Filament, CF 2.75 in. IDEAL VAC Iridium Filament, 1 in. OD 3/4 in. Inlet Pyrex Glass lon Gauge 3/4 in. Inlet Pyrex Glass I on Gauge 1 in. Inlet Pyrex Glass I on Gauge Inlet Pyrex Glass I on Gauge Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 o-3 to 2 x 1 o-9 Torr Operating range of 1 x1 o-3 to 2 x1 o-9 Torr

P/N P1 04500 274020 Price $250.00 P/N P1 04498 274007 Price $273.00 P/N P1 04499 274008 Price $273.00 P/N P1 02035 Price $145.00

'-"� �'-t� �" �r · �-'J CF 2.75

_/ _/ IDEAL VAC Iridium Filament, KF25 1SO IDEAL VAC Iridium Filament, KF40 ISO IDEAL VAC Iridium Filament, CF 1 .33 in. IDEAL VAC Iridium Filament, CF 2.75 in. NW25 Inlet Pyrex Glass I on Gauge NW40 Inlet Pyrex Glass lon Gauge 3/4 in. Inlet Pyrex Glass lon Gauge 1 in. Inlet Pyrex Glass I on Gauge Operating range of 1 x 1 Q-3 to 2 x 1 o-9 Torr Operating range of 1 x 1 Q-3 to 2 x 1 o-9 Torr perating range of 1 x 1 Q-3 to 2 x 1 o-9 Torr Operating range of 1 x l 0-3 to 2 x l 0-9 Torr

P/N P1 02036 Price $1 95.00 P/N P1 02037 Price $1 95.00 P/N P1 02038 Price $1 95.00 P/N P1 02039 Price $280.84


www.idealvac.com (505)872-0037 10·38

fD Vacuum Pressure Measurement Pressure &auges Ion Gauges

Gra_n�ille/ AliiLENT Phillips I J Baya rd Alpert

NUDE lon Gauges Single & Dual Thoria Coated I ridium

Filaments with or without pin guards These Nude Gauges typical ly work with G ra nvil le Phi l l ips, MKS, Perkin E lmer, Varian and Veeco Pressu re Control lers

UHV

GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL Thoria Coated Iridium Filament, EB Degas, Pin Guard

Operating range of 1 x1 o-3 to 2 x1 o- 1 1 Torr

PIN P 1 045 1 5 274042 Price $656.00

5 Leads

GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL Thoria Coated Iridium Filament, EB Degas Operating ran g e of 1 x 1 o-3 to 2 x 1 0 -1 1 Torr P/N P 1 0451 2 274023 Price $590.00

GP 274 NUDE B/A lon Gauge 2.75 in. CF, SINGLE Thoria Coated Iridium Filament, Pin Guard, Resistive Operating ra nge of 1 x 1 o-3 to 2 x 1 o- 1 1 Torr

P/N P1 045 1 6 274043 Price $622.00

t UHV

=

(Electron Bombardment degas on ly)

GP 274 NUDE B/A Filament Replacement Kit for GP 274 NUDE B/A lon Gauge NW KF40, DUAL NUDE DUAL Thoria Coated Iridium lon Gauges Thoria Coated Iridium Filament, EB Degas, Pin Guard This is a Kit Only, I on Gauges and Controllers sold separately.

Operating ra nge of 1 x 1 o-3 to 2 x1 o- 1 1 Torr For Granv i l l e P h i l l i p s GP274 N U D E I O N GAUGES O N LY P/N P1 04520 274058 Price $668.00 P/N P1 04522 274025 Price $275.00

Extended Range

1 x 1 o-3 to 5 x1 o- 1 2

UHV

•

GP 274 NUDE B/A lon Gauge 2.75 in. CF, SINGLE Thoria Coated Iridium Filament, Resistive Operating ra nge of 1 x 1 o-3 to 2 x 1 o- 1 1 Torr PIN P 1 045 1 3 274028 Price $544.00

GP 274 NUDE B/A lon Gauge NW KF40, SINGLE Thoria Coated Iridium Filament, Pin Guard, Resistive

Operating ra nge of 1 x1 o-3 to 2 x1 o- 1 1 Torr

P/N P 1 045 1 8 274053 Price $635.00

= NOT UHV

=

(Resistive or Electron Bombardment degas)

GP 274 NUDE B/A Filament Replacement Kit for NUDE SINGLE Thoria Coated Iridium lon Gauges

This is a Kit Only, I on Gauges and Controllers sold separately. For Granv i l l e P h i l l i p s GP274 N U D E I O N GAUGES O N LY

P/N P1 04523 274029 Price $225.00

- -- --

-=:c t ,)_ -

UHV

Agilent NUDE B/A Filament Replacement Kit Agilent UHV-24 NUDE B/A lon Gauge 2.75 in. Agi lent U HV-24P N U DE B/A lon Gauge 2.75 in. for NUDE DUAL Thoria Coated I ridium lon Gauges CFF, DUAL Thoria Coated Iridium Fi lament CFF, DUAL Thoria Coated I rid ium Filament This is a Kit Only, I on Gauges and Controllers sold separately. Operating ra nge of 1 x 1 o-3 to 2 x 1 o- 1 1 Torr Operating ra nge of 1 x 1 o-3 to 5 x 1 o- 1 2 Torr For AGI LENT U H V-24 N U D E ION GAUGES O N LY P/N P1 04144 Agilent 971 5007 Price $623.04 P/N P1 04145 Agilent 971 501 5 Price $705.64 P/N P 1 041 57 Agilent 971 0028 Price $21 5.86


Subject to Change

Vacuum Pressure Measurement f]) Pressure &auges Ion Gauges

Granvil le Phill ips 274 ��:�� NUDE I G These N U DE Gag ues typica l ly work with 0 n aug e s Gra

.nv i l le P h i l l ips, M KS, Perkin El mer,

Vanan and Veeco Pressure Control l ers

DUAL Tungsten F i laments with two oppos ing hel ica l fi laments

UHV

5 Leads

GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL Tungsten Filament, EB Degas Operating range of 1 x1 o-3 to 2 x1 o- 1 1 Torr

P/N P 1 045 1 1 2 74022 Price $545.00

UHV

5 Leads

Nude B/A lon Gauge Flange-Less Dual Tungsten GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL

F'l t 6 1 d Tungsten Filament, EB Degas, Pin Guard 1 amen - ea s 0 . f o-3 2 o- 1 1 T Operat ing ra nge of 1 x 1 o-3 to 2 x 1 o- 1 1 Torr peratmg range o 1 x 1 to x1 orr

P/N P1 05909 Price $495.00 P/N P 1 0451 4 274041 Price $622.00

UHV

5 Leads

GP 274 NUDE B/A lon Gauge NW KF40, DUAL Tungsten Filament, EB Degas, Pin Guard Operating ra nge of 1 x1 o-3 to 2 x1 o- 1 1 Torr

P/N P 1 0451 9 274057 Price $635.00


2.75 i n CF

With ca l i bration memory module. I on gauge for use with 370 Stabil- lon Gauge Controllers.

GP 370 Metal Stabil-lon Gauge Extended Range w/Dual Yttria Coated Iridium Filaments, 2.75 in. CF Operating ra nge of 99 torr to 2 x1 o- 1 1 torr

P/N P1 04666 3701 20 Price $835.00

UHV

5 Leads

GP 274 NUDE B/A lon Gauge NW KF40, DUAL Tungsten Filament, EB Degas Operating ra nge of 1 x1 o-3 to 2 x1 o- 1 1 Torr

P/N P 1 0451 7 274050 Price $557.00

E�:�A- -: -� =

GP 274 Replacement Filament for NUDE B/A ion Gauge DUAL Tungsten Filament, EB Degas Only For Gra nvi l l e Ph i l l i ps GP274 N U DE ION GAUGES O N LY This is a Kit Only, I on Gauges and Controllers sold separately.

PIN P 1 04521 274024 Price $ 1 84.00

Agilent Varian UHV-24 Replacement Filament for NUDE B/A lon Gauge DUAL Tungsten Filament This is a Kit Only, I on Gauges and Controllers sold separately. For VARIAN U H V-24 N U D E ION GAUGES O N LY P/N P 1 04156 Agilent 971 00 1 8 Price $1 53.44

fD Vacuum Pressure Measurement Pressure &auges Ion sensor cables

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""

Granville Phill ips CA B L ES for I o n Gauge Contro l lers These a re cables o n ly and do not come with ion gauge tubes

>

GP 270 & 280 ION Gauge Controller Cable, for Glass GP 340 ION Gauge Controller Cable, for glass I on GP 307 & 330 ION Gauge Controller Cable, for Glass I on Gauges 1 0 ft. long, controls a single glass ion gauge gauge tube 1 o ft. long, controls 1 glass ion tube lon Gauge 1 0 ft. long, controls a single glass ion gauge

P/N P1 02059 270007 Price $1 98.90 P/N P1 02068 303022 Price $1 89.95 P/N P1 02689 307042 Price $1 69.95

GP 307, 330, 340 ION Gauge Controller Cable, for NUDE GP 307 Gauge Controller Cable for glass lon Gauge, GP 358 Micro lon Gauge Controller Cable, for 355 Mini lon Gauge with push on pins 1 o ft. for nude ion gauge for remote mounting of PS 1 0 ft. long, controls a single lon gages 1 0 ft. long, controls 1, 35 5 mini ion gauge

P/N P1 02690 307046 Price $1 55.00 glass ion gauge P/N P104886 307030 Price $1 79.00 P/N P1 02069 35801 1 - 1 0 Price $325.00

Gauge Controller Cable for NUDE lon Gauge with GP 307, 330, 340 ION Gauge Controller Cable, for NUDE GP 307 Gauge Cable for NUDE lon Gauge, pin guard connector for remote mounting of PS lon Gauge, pin guard connector, for side by side mount with push-on pins, for remote mounting of PS 1 0 ft. long, single gauge P/N P104888 307034-CE Price $325.75 1 0 ft. long, single gauge P/N P104889 307046-CE Price $250.00 1 0 ft. long, single gauge P/N P104887 307034 Price $235.00

Gauge Controller Cable, For NUDE GP 350 U HV ION Gauge Controller Cable, For NUDE GP 270 ION Gauge Controller Cable, for NUDE Gauges 25 ft. long, controls a s ingle n ude ion gauge Gauges 50 ft. long, controls a s ingle nude ion gauge lon Gauges 1 0 ft. long, controls a s ingle nude ion gauge

P/N P1 04946 350005 Price $306.25 P/N P1 04947 350006 Price $550.00 P/N P1 02683 270009 Price $225.00


Subject to Change

Vacuum Pressure Measurement f]) Pressure &auges sensor cables

Granville Phill ips CA B L E S for Thermocoup le, Convectron, Capacitance Diaphragm and Stabi l - lon Gauge Contro l lers These a re Cables only and do not come with sensor gauges

: - : � �� !

GP 307, 3 1 6 or 358 Convectron or Capacitance GP 275 Convectron signal and power cable GP 375 or 475 Convectron signal cable Manometer Gauge Controller Cable 1 o ft.for 1 0 ft. long for legacy GP 275 Convectron Controllers 1 0 ft. long for GP 375 or 475 convectron controllers

Convect ron or Baratron P/N P1 04873 307027 Price $220.00 P/N P1 02691 2751 1 7 Price $399.95 P/N P1 041 1 1 47501 2-1 0 Price $ 1 26.95


GP 3 75 or 475 Convectron P/N P 1 041 1 1 (1 0ft.) control ler signal cable P/N P1 041 84 (25ft.) Different lengths for 375 or 475 P/N P1 041 85 (SOft.)

Granvi l le Ph i l l ips Pressu re P/N P1 041 86 (1 OOft.) Gauge Contro l le rs P/N P1 041 87 (200ft.)

P/N P1 041 88 (500ft.)


4750 1 2-1 0 47501 2-25 47501 2-50 4750 1 2-1 00 47501 2-200 47501 2-500

Price $ 1 26.95 Price $ 1 55.00 Price $ 1 82.50 Price $283.75 Price $400.00 Price $843.75

fD Vacuum Pressure Measurement Pressure &auges Bourdon

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Bourdon G a u g e 5 These Bourdon needle dial vacuum pressure gauges measure both positive pressure from 0 to 30 PSI (pounds per square inch)

Va C U U m PreSS U r e R a n g e and vacuum pressure from 0 to 30 inHg (inches of mercury). There is 760 mmHg (29.92 inHg) of atmospheric pressure at sea level. These Bourdon vacuum pressure

0 to 30 i nHG ( in of mercury) or measurement gauges are low cost ?eing qui�k and easy to us�. However, they are • very low accuracy gauges. Each tiCk mark m the vacuum IS around 25.4 Torr.

0 to 30 PSI (pounds per sq. i n .)

P 103891 P1 04860

B o u r d o n N e e d l e D i a l Vac u u m Gauges P1 03558

Bourdon Needle Valves Size Range inHG (mercury) IDEAL P/N Price* Bourdon Need le Gauge 1 /4 inch MNPT 0 to 30 inHg P1 03558 $44.99 Bourdon Need le Gauge (fitt i ng on back) 1 /4 inch MNPT 0 to 30 inHg P1 03891 $55.00 De l uxe Bou rdon Gauge ( l i g u i d f i l l ed ) 1 /4 inch MNPT 0 to 30 inHg P1 04860 $ 1 75.00 Bourdon Need le Gauge NWKF10 0 to 30 inHg P 10 1662 $ 1 2 1 .80 Bourdon Need le Gauge NWKF16 0 to 30 inHg P 10 1663 $ 1 2 1 .80 Bourdon Need le Gauge NWKF25 0 to 30 inHg P 10 1664 $ 1 27.05 Bourdon Need le Gauge NWKF40 0 to 30 inHg P 10 1665 $ 1 37.55 Bourdon Need le Gauge NWKFSO 0 to 30 inHg P 10 1666 $ 1 49.1 0



fD Vacuum Pressure Measurement

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