256x256 3D Image Reconstruction - CERN Indico

256x2563DImageReconstruction

©2019EdoardoCharbon 99

A.R.Ximenes,P.Padmanabhanetal.,ISSCC,2018

!

SPADsAreNowinProducts


+72brands

•  ASPADcomponentineversmartphoneby2018•  ASPADcomponentineverycarby2020

Perspectivesfor2020•  Sub-65nmCMOS•  Large,scalabledesigns(Lego™approach)•  Backsideillumination(BSI)3DIC•  NewMaterials(InP,GaAs,Ge,polymers)•  Smallpixels,lownoise,µlenses


Sammak,Aminian,Charbon,Nanver,IEDM11

Tosietal,2012

CTRL

PLL

Individual FOM improved by 10·log10 (M)

Overall constant FOM

Sun,Ishihara,Charbon,IISW,2017Ximenes,Padmanabhan,Charbon,IISW,2017

TheSimplestDetector•  23pixels,independentlyaccessible•  AnFPGAconnectedtoitwithprogrammable

countersandTDCs•  Easytosynchronize•  Easytouse


I.M.Antolovicetal.,OpticsExpress,2018

Conclusions

Take-homeMessages

•  SPADimagesensorpeculiaritiesandarchitectures

•  Modularityisanimportantingredienttolargephotonicsystemsandeventhetechnologyofacellphonecamerawilldo

•  Onecanactuallymakeaproduct(andmoney)outofSPADimagesensors


Acknowledgements

105©2019EdoardoCharbon

SwissNationalScienceFoundationEuropeanSpaceAgencyFP6andFP7NCCR-MICSNWO-STW

http://aqua.epfl.ch

©2017EdoardoCharbon

SelectedLiterature

Peer-ReviewedJournalandProceedingsArticles•  A.Rochasetal.,“Singlephotondetectorfabricatedinacomplementarymetal–oxide–semiconductorhigh-voltage

technology”,IEEERev.Sci.Instr.,74(7),pp.3263-70,2003•  C.Niclass,A.Rochas,P.A.Besse,E.Charbon,“Towarda3-DCameraBasedonSinglePhotonAvalancheDiodes”,IEEEJournal

ofSelectedTopicsinQuantumElectronics,10(4),pp.796-802,Jul./Aug.2004•  C.Niclass,A.Rochas,P.A.Besse,andE.Charbon,“DesignandCharacterizationofaCMOS3-DImageSensorbasedonSingle

PhotonAvalancheDiodes”,IEEEJournalofSolid-StateCircuits,40(9),pp.1847-1854,Sep.2005•  H.Finkelsteinetal.,STI-boundedSingle-PhotonAvalancheDiodeinaDeep-SubmicrometerCMOSTechnology,IEEEElectron

DeviceLetters,2006•  C.Niclass,M.Gersbach,R.K.Henderson,L.Grant,E.Charbon,“ASinglePhotonAvalancheDiodeImplementedin130nm

CMOSTechnology”,IEEEJournalofSelectedTopicsinQuantumElectronics,13(4),pp.863-869,July/Aug.2007•  L.Pancherietal.,“Low-noiseCMOSSingle-PhotonAvalancheDiodeswith32nsDeadTime”,ESSDERC,2007•  C.Niclass,C.Favi,T.Kluter,M.Gersbach,andE.Charbon,“A128x128Single-PhotonImageSensorwithColumn-Level10-bit

Time-to-DigitalConverterArray”,IEEEJournalofSolid-StateCircuits,43(12),pp.2977-2989,Dec.2008•  E.Charbon,“TowardsLargeScaleCMOSSingle-PhotonDetectorArraysforLab-on-ChipApplications”,J.Phys.D:Applied

Physics,Vol.41,N.9,May2008•  M.Gersbach,D.L.Boiko,C.Niclass,C.Petersen,E.Charbon,“FastFluorescenceDynamicsinNonratiometricCalcium

Indicators”,OpticsLetters,34(3),pp.362-364,Feb.2009•  C.Niclass,C.Favi,T.Kluter,F.Monnier,andE.Charbon,“Single-PhotonSynchronousDetection”,IEEEJournalofSolid-State

Circuits,44(7),pp.1977-1989,July2009•  D.L.Boiko,N.Gunther,B.N.Benedict,E.Charbon,“OntheApplicationofaMonolithicArrayforDetectingIntensity-

CorrelatedPhotonsEmittedbyDifferentSourceTypes”,OpticsExpress,17(17),pp.15087-15103,Aug.2009•  L.PancheriandD.Stoppa,“ASPAD-basedPixelLinearArrayforHigh-SpeedTime-GatedFluorescenceLifetimeImaging”,

IEEEEuropeanSolid-StateCircuitsConference(ESSCIRC),Sep.2009•  M.A.Karami,L.Carrara,Y.Maruyama,M.W.Fishburn,andE.Charbon,“RTSNoiseCharacterizationinSinglePhoton

AvalancheDiodes”,ElectronDeviceLetters,31(7),pp.692-694,Jan.2010•  E.CharbonandS.Donati,“SPADSensorsComeofAge”,Optics&PhotonicsNews(OPN),21,pp.35-41,Feb.2010



•  D.-U.Li,J.Arlt,J.Richardson,R.Walker,A.Buts,D.Stoppa,E.Charbon,R.,Henderson,“Real-timeFluorescenceLifetimeImagingSystemwitha32x320.13umCMOSLowDark-countSingle-photonAvalancheDiodeArray”,OpticsExpress,18(10),pp.10257-10269,May2010

•  M.A.Karami,M.Gersbach,H.J.Yoon,andE.Charbon,“ANewSingle-photonAvalancheDiodein90nmStandardCMOSTechnology”,OpticsExpress,18(21),Oct.2010

•  M.W.FishburnandE.Charbon,“SystemTradeoffsinGamma-RayDetectionUtilizingSPADArraysandScintillators”,Trans.Nuc.Sci.,57(5),pp.2549-2557,Oct.2010

•  G.Giraud,H.Schulze,D.-U.Li,T.T.Bachmann,J.Crain,D.Tyndall,J.Richardson,R.Walker,D.Stoppa,E.Charbon,R.,Henderson,J.Arlt,“FluorescenceLifetimeBiosensingwithDNAMicroarraysandaCMOS-SPADImager”,BiomedicalOpticsExpress,1(5),pp.1302-1308,Dec.2010

•  R.J.Walker,J.A.Richardson,R.K.Henderson,“A128×96PixelEvent-DrivenPhase-Domain∆Σ-BasedFullyDigital3DCamerain0.13μmCMOSImagingTechnology”,IEEEISSCC,Feb.2011

•  E.Charbon,“EvolvingCMOSTechnologyforHigh-PerformanceSingle-PhotonDetection”,Optics&PhotonicsNews(OPN),22,May2011

•  M.Fishburn,Y.Maruyama,E.Charbon,“ReductionofFixed-PositionNoiseinPosition-Sensitive,Single-PhotonAvalancheDiodes”,IEEETrans.ElectronDevices,54(8),pp.2354-2361,Aug.2011

•  D.D.-U.Li,J.Arlt,D.Tyndall,R.Walker,J.Richardson,D.Stoppa,E.Charbon,R.K.Henderson,“Video-RateFluorescenceLifetimeImagingCamerawithCMOSSingle-PhotonAvalancheDiodeArraysandHigh-SpeedImagingAlgorithm”,JournalofBiomedicalOptics,16(9),096012,Sep.2011

•  J.Blacksberg,Y.Maruyama,E.Charbon,G.Rossman,“FastSingle-PhotonAvalancheDiodeArraysforLaserRamanSpectroscopy”,OpticsLetters,36(18),pp.3672-3674,Sep.2011

•  S.MandaiandE.Charbon,“AWideSpectralRangeSingle-PhotonAvalancheDiodeFabricatedinanAdvanced180nmCMOSTechnology”,OpticsExpress,20(3),pp.5849-57,Mar.2012

•  M.Gersbach,Y.Maruyama,M.W.Fishburn,D.Stoppa,J.Richardson,R.Walker,R.Henderson,E.Charbon,“ATime-resolved,Low-noiseSingle-PhotonImageSensorFabricatedinDeep-submicronCMOSTechnology”,IEEEJournalofSolid-StateCircuits,47(6),pp.1394-1407,June2012

•  S.MandaiandE.Charbon,“A128-Channel,8.9psLSBColumn-ParallelTwo-StageTDCBasedonTimeDifferenceAmplificationforTime-ResolvedImaging”,IEEETrans.Nuc.Sci.,59(5),pp.2463-2470,Oct.2012


•  R.J.Walker,E.A.G.Webster,J.Li,N.Massari,andR.K.Henderson,"HighFillFactorDigitalSiliconPhotomultiplierStructuresin130nmCMOSImagingTechnology”,IEEENuclearScienceSymposiumandMedicalImagingConference(NSS/MIC),Oct.2012

•  E.A.G.Webster,L.A.GrantandR.K.Henderson,"AHigh-PerformanceSingle-PhotonAvalancheDiodein130-nmCMOSImagingTechnology”,IEEEElectronDeviceLetters,33(11),pp.1589-1591,Nov.2012

•  D.Tyndall,B.R.Rae,D.Li,J.Arlt,A.Johnston,J.A.Richardson,R.K.Henderson,“AHigh-ThroughputTime-ResolvedMini-SiliconPhotomultiplierWithEmbeddedFluorescenceLifetimeEstimationin0.13µmCMOS“,IEEETrans.BiomedicalCircuitsandSystems,6(6),pp.562-70,Dec.2012

•  L.H.Braga,L.Gasparini,L.Grant,R.K.Henderson,N.Massari,M.Perenzoni,D.Stoppa,R.Walker,“A8×16pixel,92kSPADsTime-ResolvedSensorwithon-pixel64ps12bTDCand100Msamples/sReal-timeEnergyHistogrammingin0.13μmCISTechnologyforPET/MRIApplications”,IEEEInternationalSolid-StateCircuitsConference(ISSCC),Feb.2013

•  Y.Maruyama,J.Blacksberg,andE.Charbon,“A1024×8700psTime-GatedSPADLineSensorforLaserRamanSpectroscopyandLIBSinSpaceandRover-BasedPlanetaryExploration”,IEEEInternationalSolid-StateCircuitsConference(ISSCC),Feb.2013

•  R.K.Henderson,E.A.G.WebsterandL.A.Grant,"ADual-JunctionSingle-PhotonAvalancheDiodein130-nmCMOSTechnology”,IEEEElectronDeviceLetters,34(3),pp.429-431,Mar.2013

•  S.MandaiandE.Charbon,“A3.3-to-25Vall-digitalchargepumpbasedsystemwithtemperatureandloadcompensationforavalanchephotodiodecameraswithfixedsensitivity”,JournalofInstrumentation(JINST),8(3),Apr.2013

•  M.W.Fishburn,H.Menninga,andE.Charbon,“A19.6ps,FPGA-BasedTDCwithMultipleChannelsforOpenSourceApplications”,IEEETrans.Nuc.Sci.,60(3),pp.2203-2208,June2013

•  E.Charbonetal.,“SPADnet:Afully-Digital,NetworkedApproachtoMRICompatiblePETSystemsBasedonDeep-SubmicronCMOS”,IEEENuclearScienceSymposiumandMedicalImagingConference,Oct.2013

•  J.M.Pavia,M.Wolf,E.Charbon,“MeasurementandModelingofMicrolensesFabricatedonSPADArraysforFillFactorRecovery”,OpticsExpress,22(4),Feb.2014

•  S.MandaiE.Venialgo,andE.Charbon,“TimingOptimizationUtilizingOrderStatisticsandMultichannelDigitalSiPMs,OpticsLett.,39(3),pp.552-554,Feb.2014

111

Theses•  C.Niclass,“Single-PhotonImageSensorsinCMOS:PicosecondResolutionforThree-

DimensionalImaging”,Ph.D.Thesis,Lausanne,2009•  M.Gersbach,“Single-PhotonDetectorArraysforTime-resolvedFluorescenceImaging”,

Ph.D.Thesis,Lausanne,2009•  C.Favi,“Single-photonTechniquesforStandardCMOSDigitalICs”,Ph.D.Thesis,

Lausanne,2010•  J.Richardson,“TimeResolvedSinglePhotonImaginginNanometerScaleCMOS

Technology”,Ph.D.Thesis,Edinburgh,2010•  M.A.Karami,“Deep-submicronQuantumSensingandInformationTransmission”,Ph.D.

Thesis,Delft,2011•  M.W.Fishburn,“FundamentalsofCMOSSingle-PhotonAvalancheDiodes”,Ph.D.Thesis,

Delft,2012•  R.J.Walker(R.K.Henderson),“AFullyDigital,Phase-DomainΣΔ3DRangeImageSensor

in130nmCMOSImagingTechnology”,Ph.D.Thesis,Edinburgh,2012•  E.A.G.Webster(R.K.Henderson),“Single-PhotonAvalancheDiodeTheory,Simulation,

andHighPerformanceCMOSIntegration”,Ph.D.Thesis,Edinburgh,2013•  D.Tyndall(R.K.Henderson),“ACMOSSensorforHighThroughputFluorescenceLifetime

SensingusingTimeCorrelatedSinglePhotonCounting”,Ph.D.Thesis,Edinburgh,2013•  S.Mandai,“MultichannelDigitalSiPMsforTOFPETSystems”,Ph.D.Thesis,Delft,2014EditedBooks•  E.Charbon,“HighlySensitiveArraysofNano-sizedSingle-PhotonAvalancheDiodesfor

IndustrialandBioImaging”inNano-net,4thInternationalICSTConference(LectureNotesoftheInstituteforComputerSciences,SocialInformaticsandTelecommunicationsEngineering),Ed.A.Schmidetal.,pp.161-168,Oct.2009

•  E.CharbonandY.Maruyama,“Nano-metricSingle-photonDetectorforBiochemicalChips”,inNano-Bio-Sensing,Ed.S.Carrara,2010

•  E.Charbon,L.Carrara,C.Niclass,N.Scheidegger,H.Shea,“Radiation-TolerantCMOSSingle-PhotonImagersforMulti-RadiationDetection”,inRadiationEffectsinSemiconductors:Devices,Circuits,andSystems,Ed.K.Iniewski,2010

•  E.CharbonandM.W.Fishburn,“MonolithicSingle-PhotonAvalancheDiodes:SPADs”,inSingle-PhotonImaging,Ed.P.SeitzandA.Theuwissen,pp.123-156,Sep.2011

P.Seitz&A.TheuwissenEds.,“Single-PhotonImaging”,Springer2011.

©2019EdoardoCharbon

BACKUP

SPADsUnderHeavyIrradiation

Max: 30Mrad

L Carrara, E. Charbon, et al., ISSCC 2009

Protons

Gamma


BacktoourLaserPhotonBunchProblem


fk:n (t) = nn−1k −1

"

#$

%

&' f (t)F(t)k−1(1−F(t))n−k

fk:n(t): k-thorderstatistics f(t):probabilitydensityfunctionF(t):cumulativedensityfunction

Assumptions:•  Eachphotonisstat.independent•  ThepulsehasaGaussianp.d.f.

Mandai,Charbon,OpticsLetters39(3),552-554(2014)

Photondistributioninalaserbunchfollowsorder-statistics

256x256 3D Image Reconstruction - CERN Indico

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