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Lecture 4-3 Other Micromachining Methods !! Non-conventional machining techniques

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!! LIGA (X-ray lithographie, galvanoformung, abformtechnik, means X-ray lithography, electrodeposition, molding):

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!! LIGA examples:

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!! Microelectric discharge machining (MEDM), Wire electrodischarge grinding (WEDG): Resolution depends on wire size, typically 5 µm in diameter and 50 µm in length.

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!! Laser Machining: Eximer laser

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!! Laser-assisted etching (LAE): 1.! Laser irradiation in liquid with etchant or in a gas gives rise to

reactive ions or plasma 2.! The reactive ions or the plasma combine with the material or

with the reactive atmosphere surrounding the material and change the material into a soluble or vaporized form.

3.! The laser power applied is very low, for only activating an opto- or thermochemical reaction, different from traditional laser machining with high temp process, which causes melting and evaporation of material and limits the resolution and surface finish

4.! Can be used in materials of ceramic (Al2O3, TiC), semiconductor, metal and polymer.

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!! Micro-Stereolithography:

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!! Microdrip fabrication:

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!! Spatial forming

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!! Photosensitive glass micromachining

!! Manufacturing using scanning probe microscopes and electron

microscopes !!

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!! Microparticle handling by laser tweezers

!! Laser-assisted Chemical Vapor Deposition (LCVD)

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!! Ultrasonic Machining

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!! Focused Ion-Beam Milling

!! Electroplating: through mask, instant mask

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!! Localized Electrochemical Deposition:

!! EFAB (Electrochemical Fabrication)

References: 1.! Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 2.! Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford

Science Publication, 1996 3.! Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill,

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Appendix: Comparisons of Precision/Micromachining techniques:

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