新技術説明会 - PowerPoint プレゼンテーション
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Transcript of 新技術説明会 - PowerPoint プレゼンテーション
© 2013 HORIBA Scientific. All rights reserved.
Ultra fast simultaneous AFM and Raman hyper-spectral imaging: chemical and physical investigation of nano-materials made fast and easy.
Emmanuel LeroyAFM-Raman Product Manager
© 2012 HORIBA Scientific. All rights reserved.
Ultra fast AFM-Raman imaging
256x256pts simultaneous topography and composite Raman image of graphene
© 2012 HORIBA Scientific. All rights reserved.
Overview
Introduction: Multi-modal imagingWhy AFM-Raman, why Tip Enhanced
Raman? Instrument combination challengesFast and simultaneous AFM and
RamanAdded advantage
© 2012 HORIBA Scientific. All rights reserved.
Multi-modal imaging
Microscopy today is much more than looking at a magnified image
© 2012 HORIBA Scientific. All rights reserved.
Multi-modal imaging
Microscopy today is much more than looking at a magnified image
It’s about multiple ways of looking at a given sample.
© 2012 HORIBA Scientific. All rights reserved.
Overview
Introduction: Multi-modal imagingWhy AFM-Raman, why Tip Enhanced
Raman? Instrument combination challengesFast and simultaneous AFM and
RamanAdded advantage
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© 2012 HORIBA Scientific. All rights reserved.
Why AFM-Raman?
Scanning Probe Microscopy (SPM) and specifically Atomic Force Microscopy (AFM) have made nanoscale imaging an affordable realityCheaper than SEM and TEMMuch less sample preparation.Very versatile
© 2012 HORIBA Scientific. All rights reserved.
SPM: much more than topography
Atomic Force Microscopy (AFM) came as an easier to use and flexible technique…With AFM’s popularity
came many more modes of operation,providing much more than topography
© 2012 HORIBA Scientific. All rights reserved.
SPM: much more than topography
Elasticity / plasticity of materials, Young’s modulus
© 2012 HORIBA Scientific. All rights reserved.
SPM: much more than topography
Conductivity/Resistivity (C-AFM), Surface Potential / Kelvin Probe (SKM,
KPFM)
Graphene on copper foil, AFM and KPFM images
© 2012 HORIBA Scientific. All rights reserved.
SPM: much more than topography
Magnetic Force (MFM)
© 2012 HORIBA Scientific. All rights reserved.
Why AFM-Raman
AFM, the most common SPM technique, is ideal for imaging physicalparameters, but lacks sensitivity to chemical structure and composition
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© 2012 HORIBA Scientific. All rights reserved.
Spectroscopy: spectra to images
Spectroscopy, especially IR and Raman, are much better suited for label-freechemical analysis
© 2012 HORIBA Scientific. All rights reserved.
Spectroscopy: spectra to images
…but spectra are still pretty obscure for most people
© 2012 HORIBA Scientific. All rights reserved.
Spectroscopy: spectra to images
People want things they can make sense of: people want images!
© 2012 HORIBA Scientific. All rights reserved.
Why AFM-Raman
AFM-Raman brings chemical imaging and nanoscale physical characteristics imaging together.
This is multi-modal imaging pushed beyond optical microscopy and to the nano scale
© 2012 HORIBA Scientific. All rights reserved.
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Why TERS?
Raman spectroscopy brings highly specific chemical information, but spatial resolution is limited by Abbe’slaw of light diffraction.
SPM techniques can provide many physical properties at the nano scale (mechanical, electrical, magnetic…), but no chemical specificity
© 2012 HORIBA Scientific. All rights reserved.
Why TERS? Super-resolution techniques
have brought chemical information down to ~30nm scale, but they all rely on fluorescent labels.
Tip-Enhanced Raman brings the prospect of label-free chemicalimaging at the nanoscale.
Deckert et al. 2008
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© 2012 HORIBA Scientific. All rights reserved.
Overview
Introduction: Multi-modal imagingWhy AFM-Raman, why Tip Enhanced
Raman? Instrument combination challengesFast and simultaneous AFM and
RamanAdded advantage
© 2012 HORIBA Scientific. All rights reserved.
Instrumental Challenges
Combining such different techniques as SPM and Spectroscopy is challenging.
The common approach has been to perform co-localized measurements in sequence: First Spectroscopy to find an area of interest, then AFM for nanoscale characterization, or vice-versa: find a physical structure of interest to determine chemical structure with spectroscopy
© 2012 HORIBA Scientific. All rights reserved.
Challenges: Optics
High Numerical Aperture (NA) optics Tighter spot on the tip = better contrastHigher collection efficiency = better signal
In order to illuminate the probe tip, there needs to be proper optical access for such high numerical aperture objective lens
© 2012 HORIBA Scientific. All rights reserved.
Challenges: Optics
High Numerical Aperture (NA) optics Tighter spot on the tip = better contrast
The spot size is directlydependent on the NA asR = 0.6*/NA
© 2012 HORIBA Scientific. All rights reserved.
Challenges: Optics
High Numerical Aperture (NA) opticsHigher collection efficiency = better signal
The collection efficiency depends on the NA2!
© 2012 HORIBA Scientific. All rights reserved.
Challenges: Optics & Sample
High Numerical Aperture (NA) optics
Best solution: Inverted microscopeSPM on top, bottom
access for High NA objective up to 1.49
Samples need to be transparent
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© 2012 HORIBA Scientific. All rights reserved.
Challenges: Optics & Sample
For opaque samples: Top illumination can accept
fairly high NA objectives (0.7)Shadowing from the
cantilever is an issueand the probe needs to be protruded
© 2012 HORIBA Scientific. All rights reserved.
Challenges: AFM diode
It is also important to note that the AFM feedback requires a diode laser, which may interfere with the spectroscopy measurements: An AFM diode in the IR is required to perform
AFM-Raman in the full range of VIS-NIR lasers available.
The diode must not use the same beam path as the spectroscopy laser, or independent alignment becomes very cumbersome
© 2012 HORIBA Scientific. All rights reserved.
Overview
Introduction: Multi-modal imagingWhy AFM-Raman, why Tip Enhanced
Raman? Instrument combination challengesFast and simultaneous AFM and
RamanAdded advantage
© 2012 HORIBA Scientific. All rights reserved.
Fast simultaneous AFM-Raman IR AFM Diode (no interference) Access to change sample and
tip without moving the head Auto-cantilever alignment and
tuning (comes back to the same place)
Top access with 0.7NA objective, side access with up to 0.7NA for TERS
Visual confirmation of alignment in all ports
© 2012 HORIBA Scientific. All rights reserved.
Fast simultaneous AFM-Raman IR AFM Diode (no interference) Access to change sample and
tip without moving the head Auto-cantilever alignment and
tuning (comes back to the same place)
Top access with 0.7NA objective, side access with up to 0.7NA for TERS
Visual confirmation of alignment in all ports
1300nm
Easy tip exchange
Auto alignment
High NA access
Video viewing of tip and laser
© 2012 HORIBA Scientific. All rights reserved.
Powerful software package
KnowItAll®HORIBA EditionFast chemical identificationHORIBA spectral database (>1750 spectra)
Integrated multivariate module
High level analysis at a touch of a button
PCA | MCR | HCA |DCA
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© 2012 HORIBA Scientific. All rights reserved.
Overview
Introduction: Multi-modal imagingWhy AFM-Raman, why Tip Enhanced
Raman? Instrument combination challengesFast and simultaneous AFM and
RamanAdded advantage
© 2012 HORIBA Scientific. All rights reserved.
Added advantage
Not only integrates a powerful, highresolution AFM, with high frequencyscanner, little sensitive to vibrationsAlso combines powerful Raman
microscope that can be used as stand-alone (3 instruments in one)
© 2012 HORIBA Scientific. All rights reserved.
Added advantage: real-time autofocus
Lipid layer: Raman and AFM topography 30x30um scan 7um topography
The AFM also acts as an autofocus in real time, therefore it is possible to measure samples with very high topography without worrying about depth of focus and the sample going in and out of focus… no need for additional pass to measure topography or additional hardware, it is all included! A nice added feature
© 2012 HORIBA Scientific. All rights reserved.
Conclusions
Tight integration between a SPMsystem designed for spectroscopy anda powerful micro-spectrometer bringsefficient, ultra fast multi-modal imagingto characterize nano materialsHigh spatial resolution and speed is
achieved thanks to open access fromthe top with high NA optics, and lack ofinterference from the AFM.
© 2012 HORIBA Scientific. All rights reserved.
Conclusions
Suited for TERS with side access portfor best polarization and collectionefficiencyLong term stability insured thanks to
rugged, inovative, automated alignmentfeatures making it easy to use.
© 2012 HORIBA Scientific. All rights reserved.
Conclusions
Experience the mostversatile, easy-to-use, andfast simultaneous AFM-Raman systemFor more information come
to our booth #
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© 2013 HORIBA, Ltd. All Right Reserved無断転載・複写複製について本資料の内容の一部あるいは全部を当社の許可なく無断で転載したり変更したりすることは、固くお断りします。