INTRODUCTION - Find The Needle

Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]

GENERAL-LIT 4/02

INTRODUCTION

Tom DeanySenior Vice President& General Manager

Craig HillPresident

This catalog contains general information about our company, product line, and facilities. For specific information on our products, suchas dimensions and pricing, refer to the appropriate product catalog. The contents of each is described on this catalog’s back cover. If youwish to receive any of these catalogs, or a binder containing all of them along with additional information, please call our corporate officeat 800-824-4166 or 530-842-4457. They will be sent to you within a few days free of charge.

It is the goal ofNor-Cal Products to be the

“BEST IN CLASS”manufacturer of vacuumequipment, producing thehighest quality componentsat competitive prices, while

meeting our customers'required delivery schedule.

We will strive for technicaland market leadership

by adding industry-drivenproducts to our catalog and

providing innovativecustomer services.


GENERAL-LIT 4/02

NOR-CAL PRODUCTS

Manufacturing, Sales and Corporate Offices, Yreka, California

Research and Development, San Diego, California

A Source of Experience

Nor-Cal Products' origin dates back to 1948when the company's predecessor began designingand manufacturing stainless steel vacuum pump-ing stations for the dairy industry. With thedevelopment of the ion pump by Varian Associatesten years later, the vacuum industry began arapid growth that has never slowed.In response to the demand for the machiningand metal forming required for vacuum applica-tions, our company underwent a reorganizationand Nor-Cal Products was formed in 1962.Since the vacuum industry's infancy we have keptabreast of the latest technologies and equipmentin order to supply our customers with reliablevacuum components at a reasonable price.Nor-Cal was mainly anOEM manufacturer forcompanies like Varian, UTI,Edwards High Vacuum andPerkin-Elmer until 1978when we produced a thirty-page catalog of standardcomponents. Our latestcatalog has more than 200pages of standard productsincluding high vacuum andultra high vacuum flanges,

fittings, valves, foreline traps, feedthroughs,manipulators and heater jackets. OEM and cus-tom products, such as vacuum chambers, stillmake up a large portion of our annual sales.Our 85,000 square foot corporate headquartersand manufacturing facility are located in Yreka,California. Approximately 200 employeesmanufacture nearly all of our products thereand manage a worldwide network of salesrepresentatives and stocking distributors.In 1997 Nor-Cal Products established a 4,000square foot research and development facilityin San Diego, California. The staff is currentlydeveloping downstream pressure control devicesfor semiconductor processes.


GENERAL-LIT 4/02

Markets Served

Over the years our customer base has been drawn from allsegments of the vacuum industry. Our components are usedin almost every phase of semiconductor processing. We area preferred supplier to several semiconductor and compoundsemiconductor equipment manufacturers and supply mechanicalcontractors during fab construction. Industrial and academicresearchers are frequent purchasers of standard, modified standardand custom components for physical, chemical and electrochemi-cal experiments. Other customers who have come to value ourexperience are involved with thin film deposition, surfaceanalysis, laser devices and aerospace.

MARKETS

Surface science research end station at Advanced Light Source, Berkeley, California

Semiconductor process equipment in the service chase of a 200mm fab

Heated forelines and pump exhaust lines in semiconductor subfab

Thin film deposition systems


GENERAL-LIT 4/02

SALES & MARKETING

Sales and Marketing

Our corporate sales, marketing and technicalsupport personnel provide prompt, honestanswers to your technical questions and canrecommend components for your particularvacuum application.Our experience with semiconductor processequipment allows us to provide customers withcomprehensive solutions to extend downstreampreventative maintenance intervals and increasethroughput dramatically.Nor-Cal Products sales representatives andstocking distributors are located throughoutthe United States, Canada, the Pacific Rimand Europe. Their locations, territories andcontact information can be found in theGeneral Information section of our bindercatalog, on our website, or you may callour corporate sales offices at 1-800-824-4166.

Back L to R: Denise Wilson, Sales Representative; Tim Nilsson, Vice President of MarketingSteve Greuel, UHV Product Manager; Monica Sorcelli, Sales Representative

Front L to R: Diana Tudor, Sales Manager; Juanita Peterson, Sales Representative Randy Michels, Thermal Applications Product Manager

Our Website

Nor-Cal Products' website features our catalog of over four thousandstandard components in Adobe Acrobat PDF format. Download the completecatalog or just the sections you need. These searchable catalogs make iteasy to locate components quickly.Other website features:• Track your Nor-Cal UPS or FedX shipments by your company's

purchase order number or your Nor-Cal Products order number• Request free catalogs in print or on CD• Make inquiries about

custom components• Download CAD

drawings of ourcomponents

• Access the latest newproduct information,technical data and pricing

• Locate the Nor-Calrepresentative in your areaand link to their website

www.n-c.com

Left to Right: Per Cederstav, Senior Product ManagerSean Mallory, Vice President Semiconductor Business Development


GENERAL-LIT 4/02

ENGINEERING

Inventor 3-D CAD model ofGenesisTM modular valve system

3D modeling of Throttling Pendulum Valveusing Inventor, state-of-the-art AutoCad program

Left to Right: Chris Thackeray, Design Engineer;Duane Petry, Engineering Manager; Preston Rosenbaum, Product Development Manager

Research & Development

In addition to developing new standard productsand improving existing ones, our Research andDevelopment departments design and testcustomer specified products for equipmentmanufacturers. Both our in-house andSan Diego R&D facilities have prototypemachining capabilities. Additionally, the SanDiego lab performs pressure, conductance andthermal characterization as well as software andelectronic development and testing.

Engineering

Nor-Cal's engineering staff can design customcomponents from customer specifications,sketches or drawings and oversee production within-house tooling and equipment. Our customersbenefit from the combined experience of our engi-neers, whose input during the design phase oftenresults in cost savings during production and asuperior product. For our customers who do nothave drafting personnel available and require acomplex assembly, we will provide complete CADdrawings for approval upon receipt of order.Nor-Cal's engineering department uses the latestversions of AutoCad drafting and Inventor solidmodeling software. You may Email drawings directto our engineering department at [email protected] file formats are DXF, DWG, and IGES,SAT and STEP. You may also download drawingsof our most commonly used standard componentsfrom our website.

Soldering Printed Circuit Boards (PCBs)

Checking wave forms on IQ Series Intellisys Throttling Valves


GENERAL-LIT 4/02

CLEANING

Cleaning

All stainless steel parts arepassivated in a light acid solu-tion to remove weld scale and oxide.A biodegradable detergent is used toremove machine lubricants before theparts are washed and rinsed with deionizedwater. Special cleaning recipes can be provided toour customer's specifications.Nor-Cal offers tumbling, bead blasting, chemcleaning and electropolishing of vacuum compo-nents in-house. Tumbling in ceramic mediadeburrs components, such as weld fittings, whileproviding a uniform finish. Glass shot cleans,hones, polishes and peens while removing scale.Some customers request bead blast on exteriorsurfaces with electropolish on the interior.Electropolishing is by far the most desirablecleaning process for stainless steel vacuum

Electropolishing vacuum chamber

surface rich in chromium and nickel, which have ex-tremely low vapor pressures. The result is the lowestoutgassing rates possible from stainless steel.Chem cleaning is typically used for productionparts such as valve bodies or "process critical"parts fabricated for semiconductor equipmentmanufacturers. The component is immersed in aseries of controlled chemical baths before deion-ized water rinse and filtered hot air dry. Chemcleaned parts are immediately packaged in sealedclean room bags.Semiconductor and UHV applications requirethat our valves and manipulators be assembledin a 3000 square foot, Class 1000 clean room.All components receive a secondary cleaningand thorough inspection to make absolutelysure they are free of dust, machine oilsand other contaminants.

Chem cleaning vacuum chambers

Valve assembly in Class 1000 clean room

components. This electrochemicalprocess benefits the finished partin a number of ways simultaneously.Deburring, passivation and stressrelieving are achieved while themachine produced surfaceroughness is eroded.Electropolishing attacks themicroscopic “peaks” of the surfacemore rapidly than the “valleys”, thereby

maintaining critical dimensionswhile improving surface fin-ishes. Normally .0003 to .0004inch is removed to lower themicro-finish from 32 to 8 RMS.Electropolishing results in a90% friction decrease over asimilar microfinish achievedmechanically, while surface areais reduced by a similar amount.This is most important for vacuumchambers because it producesfaster pumpdown and higherconductance.In addition to the improvedmechanical properties of thesurface, iron is removed electro-chemically. This leaves the


GENERAL-LIT 4/02

MANUFACTURING

Materials

Nor-Cal Products uses only the highest gradematerials for the manufacturing of vacuum compo-nents. Vapor pressure, corrosion resistance andpermeability are important considerations takeninto account during the material selection process.We start with select grade 304 stainless steeltubing, spheres or roll-ups to fabricate the vacuumvessel. If required, 304L, 316 or 316L can besupplied. Normally our standard material is in thelow carbon range for 304. Flanges and baseplatesare made from 304 that has been specially treatedto remove impurities inherent in 300 series steels.Flanges 4.50 inches OD and smaller are made from304 electroslag remelt (ESR) bar stock. ESR is arefining process that produces stainless steel withhigher purity, fewer inclusions and moreuniform grain structure to eliminatemicroscopic leak paths. Largerflanges are made from Argon OxygenDecarburization (AOD) 304 stainlesssteel. This material is certified to meetASTM-240 and has less than .01%sulfur to prevent sulfur stringers.Grain size is 3 to 6 per ASTM E-112.Maximum inclusion size is 2.5 perASTM E-45. As specials, 304L and316L material can be supplied inAOD or roll-forged rings.

Proven Performance

An independent study ranked Nor-Cal Productsnumber one in price and availability out of thefive major vacuum component manufacturers.Orders for stock items received in the morning canbe shipped that afternoon. Guaranteed overnightdelivery is available throughout the continentalUnited States from our corporate headquarters,and also from our five stocking distributors’locations. Exceptional service has won us manyloyal customers who have had an assembly linedown and been surprised to find that we wouldweld, clean, leak check and ship a non-stock itemthe same day without an expedite charge.Over the years Nor-Cal has added in-housecapabilities, such as chem cleaning andelectropolish, in order to eliminate dependenceon outside suppliers. Additionally, this hasallowed us to shorten lead times and reduceoverall manufacturing costs.

CNC Machining Center with dual spindles, live tooling and robotic gantry


GENERAL-LIT 4/02

Production Scheduling

Production scheduling and capacity planningat Nor-Cal employ a lean manufacturing techniquethat combines bottleneck management andKANBAN with traditional MRP. Small lot sizesand standardized routings maximize schedulingflexibility and increase visibility of jobs inthe manufacturing stream, while reducingmanufacturing cycle time.

MANUFACTURING

Machining

Machining procedures are consistent with goodUHV practices. Machine coolant is sulfur free toreduce outgassing. All Nor-Cal components aredesigned to minimize entrapments, which causevirtual leaks under vacuum. State-of-the-artCNC machining equipment is available toproduce parts with consistently high quality.Most valve and trap body ports and weld fittingsare die-formed using the pulled-port method. A ball is pulled through a smaller opening result-ing in a crevice-free, smooth, tapered opening.This eliminates sharp inside corners that canentrap contaminants, and allows fasterpumpdown and lower outgassing.GTAW fusion welding is used exclusively for avacuum-tight metal bond. Purging with an inertgas reduces or eliminates oxygen entrainmentand carbide precipitation, which cause outgassing.Whenever possible, welds are made on the insideor are full penetration to eliminate entrapmentsand virtual leaks.

GTAW Fusion Welding


GENERAL-LIT 4/02

QUALITY ASSURANCE

Quality Assurance

After extensive audits, Nor-Cal Products received SemitechSSQA Preferred Supplier status from two large semiconductorequipment manufacturers.An ongoing effort is made to control and improve manufacturingprocesses. Periodic defect analysis results in process improve-ments with narrower acceptable limits on subsequent productionruns. Our goal is to reach six-sigma process capability.Our quality system is ISO compliant, SSQA certified andMIL-Q-9858 and MIL-I-45208 approved.Every weld is leak checked with a helium mass spectrometerto insure a leak rate of 10-9 std. cc/sec or less. Our chamberqualification test benches can be used on components requiringlower leak rates. They were developed for customers who requestresidual gas analyzer (RGA) scans of their chambers after a24 hour vacuum bake. A test bench contains vacuum pumps,gauges, RGA, quartz heaters, nitrogen back fill and a leakdetector. Once water and other background are eliminatedby the 150°C bakeout, we can provide the customerwith customized scans to detect the slightestcontamination in the chamber.Whatever the sensitivity ofour customer’s application,we can guarantee thatcontaminants will bewithin acceptable limits.A coordinate measuringmachine (CMM) is used forin-process and final mechanicalinspections of vacuum chambersand other complex or closetolerance parts. CMM printoutsof chamber final inspectionscan be furnished upon request.

Nor-Cal Products, Inc. is dedicated to continualimprovement of our manufactured and purchasedgoods through the implementation of a carefullyplanned quality program. Quality improvementsat Nor-Cal have been mandated and implementedwith the full support of senior management.It is our belief that quality is built into a product.We will eliminate defects by reducing the variablesin all processes relating to manufacturing.We will strive to meet our primary goal of 100%customer acceptance by manufacturing defect-free

Mechanical inspection of process chamber with Coordinate Measuring Machine (CMM)

Chamber Qualification Test Bench

parts with on-time delivery, competitivepricing and the best possible customer service.Nor-Cal’s use of statistical methods inmanufacturing, training programs andcontinuous improvement of equipment areevidence of our commitment to this goal.While management takes the ultimate responsibil-ity for Nor-Cal quality, service and productivity,each employee can take credit for his or her contri-bution to our success, and is responsible for theimplementation of quality in their particular area.

Quality Statement

We are all participants in the creation of a “qualityethic.” Senior management fosters an atmosphereof cooperation not only throughout Nor-Cal,but also with customers as well as suppliers.Our purpose is to create a team dedicated to theimprovement of quality by finding creative solu-tions to our industries' manufacturing problems.Building quality into Nor-Calcomponents is our most important task.

Calibrating IntellisysTM Adaptive Pressure Controllers


GENERAL-LIT 4/02

Intellisys™ AdaptivePressure Control ComponentsIntellisys adaptive pressure controllers and throttlevalves reduce time to pressure setpoint,while increasing tool throughput withover 100,000 control resolution stepsand a 20 times valve speed increase.Non-sealing butterfly valves areavailable with or withouton-board control. Throt-tling pendulum valvesprovide unequalled pres-sure control as wellas isolation for large borehigh vacuum pumps.Heated and unheatedCapacitance DiaphragmGauges and Heater Jacketsare available as options.

Isolation ValvesNor-Cal offers vacuum isolation valves for a broadrange of sizes, pressures and applications. Our pneu-matically actuated poppet valves are the standard in thesemiconductor equipment industry because of theirrobust design and edge-welded AM 350 stainless steelbellows which provide full-opening conductance.Genesis™ valves were designed specifically forsemiconductor equipment that require million-cyclereliability, small footprint and low-cost soft start andheating options. Copper seal bonnet and manualall-metal valves are available for UHV applications.Additionally, Nor-Cal provides traditional linear aswell as low-particulate pendulum style gate valves forisolation of high vacuum pumps and UHV chambers.

Foreline TrapsWe have more than 25 year’s experience manufactur-ing foreline traps for the vacuum industry. They rangein complexity from sealed coaxial traps, which pre-vent mechanical pump oil from backstreaming to thechamber, to the three-stage LPCVD TEOS trap, whichincorporates a stainless steel gauze filter media with a10 micron fiberglass particle filter forthe removal of silicon dioxide.We have the largest selectionof standard traps, which utilizewoven metal, polyester orfiberglass gauze; molecularsieve; a liquid nitrogen reservoiror water-cooled coils to removecontaminants from the vacuumsystem or chamber.

STANDARD COMPONENTS

ViewportsZero-length viewports are offered with fully annealed7056 glass, for a large, distortion-free viewing area, orfused silica to provide superior UV radiation transmis-sion. Special materials and coatings, such as sapphireand anti-reflective (AR) coating are also available.

Thermal ProductsSilicone foam and fiberglass insulated heaters withthermostat or PID control are available to heat ourcomponents to tempera-tures up to 200ºC.Typical applications aredownstream from CVD ormetal etch systems, whereunreacted by-productscondense on the inside ofthe vacuum lines, valvesand other components.Our thermal engineerscan provide entire turn-keyheater/control systemsfor the process tool manufacturer or fab installation.

Flanges and Weld FittingsOur flanges are made from ESR or AOD 304 stainlesssteel material, which is specially processed to reduceimpurities, grain size and microscopic leak paths.They are available in all commonly used high andultra-high vacuum flange types, including ASA, KF,ISO, CF and wire seal flanges. We also offer EVACflanges with metal seals to convert a high vacuumKF flange into an ultra-high vacuum connection.Weld fittings are available with or without flanges.Fittings without flanges are typically sold to mechani-cal contractors for use during the fit up phase of newfab construction. They are available with tumbled,bead-blasted or electropolished finishes.

Sample Transfer& Positioning DevicesOur Series II sample transfer and manipulation devicesoffer the researcher a series of complimentary compo-nents that are manufactured for demanding UHVbakeouts and environments. They are guaranteed tobe free from defects in materials and workmanship forfive years. Each standard component can readily becustomized to meet specific requirements with optionssuch as sample heating and cooling, special lengthsor stepper motor drivers. Standard componentsinclude XYZ precision manipulators, magnetic linear/rotary feedthroughs, rotarymotion feedthroughs,differentially pumpedrotary seals, sampletransfer systems,alignment gimbalsand rotary wobble sticks.

Crystal Deposition Monitors,Feedthroughs & SensorsNor-Cal thin film monitors, crystal sensors andfeedthroughs, represent those most commonlyused for thermal deposition processes. A varietyof feedthrough configurations with KF or CF flangesare available for single or dual crystal sensors, withor without water-cooling and pneumatic shutters.Custom feedthroughs and bakeable sensors are alsoavailable on request. Our standard monitor measuresfilm thickness and rate or frequency from twoindependent channels. The two channels can beused to monitor different films or average readingsto providemore uniformdepositionmeasurement.The monitor isexpandable tosix channels.Controllers arealso available.

Electrical & LiquidFeedthroughsOur electrical feedthroughs are manufactured fromultra-high vacuum grade materials, such as highalumina ceramic insulators, OFHC® copper andnickel conductors, and 304 stainless steel flanges.Types include thermocouple, instrumentation,medium current, high current, BNC, and MHV feed-throughs. Liquid and liquid nitrogen feedthroughsare available with or without industry standardCajon® VCR or Swagelok® fittings.

All standard components can be modified for your specific application.


GENERAL-LIT 4/02

CUSTOM PRODUCTS & SERVICES

System IntegrationOn request, Nor-Cal can assemble an entire systemincluding chamber, frame, pumps, gauges, valves,manipulators and other components to customerspecifications. Our vacuum technicians cancomplete a thorough qualification of systemperformance, including time to base pressureand RGA scan, before the system is back filledwith nitrogen and shipped to the customer.

A list of the standard products offered by Nor-Cal Products is on the back cover of this catalog. Almost half of our annual sales are for modified standard andcustom components. This page describes a few of our custom products and services that you may not be aware of.

Thermal ProductsThe experience gained designing heatersfor our standard products has allowed us toprovide thermal products for special applications.We have drawn from a number of heating technolo-gies (silicon, fiberglass, cartridge, strip, band,tubular and thick film) in order to provide the most

cost-effective solutions. Examplesinclude heated traps, internal

heaters for vacuum chambers,gas delivery systems andion pump heaters.

Chambers

WeldmentsBecause we manufacture tees, elbows and otherweld fittings in-house, Nor-Cal can fabricateexhaust weldments for semiconductor equipmentfrom a single piece of tubing. Welds and othermanufacturing steps are eliminated, improvingcleanliness and fit while reducing cost. We havedemonstrated as much as 30% savings to ourcustomers using this technique.

TrapsWe have years of experience designing and build-ing custom foreline traps to protect pumps andeliminate buildup of condensable by-products inforelines and exhaust lines. Examples of theseinclude water-cooled and particle traps for LPCVD,PECVD, metal CVD, MOCVD and metal etch.Others are particle traps for crystal growers, liquidtraps for reclamation of photo resist and oil recla-mation traps for industrial applications. Oftentimes our customers see a 200%increase in preventativemaintenance intervalsafter installing oneof these traps.

Comprehensive Downstream SolutionsOur experience coupled with a broad product offering allows us to integratecomponents, providing comprehensive solutions to semiconductor fabsand equipment manufacturers. To improve overall system performanceand achieve customer defined goals, a thorough evaluation of the systemis conducted. A cost of ownership model can be provided showingpayback as a result of increased tool utilization and decreasedplanned and unplanned maintenance costs.Foreline traps, thermal products, IntellisysTM pressurecontrol valves, GenesisTM soft start valves andforeline weldments can be provided as turnkeyforeline modules. Thermal and vacuumcharacterization can be performed at Nor-Calbefore the assembly is supplied, leak checked,blanked off and clean room packaged.

ValvesOur valves are offered with a number of options,making it easy for our customers to specifynonstandard O-rings, actuators, fittings and airsolenoids. We also provide customer specifiedvalves with special port configurations, pumpouts,materials and other features.

We have developed areputation at nationallaboratories, universitiesand UHV equipmentmanufacturers for beingthe premier vacuum chamberfabricator. The quality,appearance and performanceof our chambers are unequaled.Some of the chambers we makeinclude load locks, samplepreparation chambers, analysischambers, monochrometers, beam linecollimators, reactors and coating chambers. We frequentlysupply cylindrical and rectangular chambers with doors, standsand water jackets. Our engineering staff can design a chamberfrom customer sketches or specifications and supply completemanufacturing drawings for customer approval.


GENERAL-LIT 4/02

ORDER INFORMATION / WARRANTY

Warranty

Products manufactured by Nor-Cal Products, Inc.(hereinafter referred to as “Nor-Cal”) are warrantedagainst defects in material and workmanship fora period of twelve (12) months from the date ofshipment from Nor-Cal to the buyer. Any modifica-tion to the product by the buyer or their agent voidsthis warranty. Liability under this warranty isexpressly, limited to replacement or repair (atNor-Cal’s option) of defective parts. Nor-Cal mayat any time discharge its warranty as to any of itsproducts by refunding the purchase price and tak-ing back the products. This warranty applies onlyto parts manufactured, and labor provided, byNor-Cal under valid warranty claims received byNor-Cal within the applicable warranty period andshall be subject to the terms and conditions hereof.Expendable items such as tubes, heaters,sources, bellows, etc., by their nature may notfunction for one year; if such items fail to givereasonable service for a reasonable period of time,as determined solely by Nor-Cal, they will berepaired or replaced by Nor-Cal at its election.All warranty replacement or repair of parts shallbe limited to equipment malfunctions which, inthe sole opinion of Nor-Cal, are due or traceableto defects in original materials or workmanship.Malfunctions caused by abuse or neglect of theequipment are expressly not covered by thiswarranty. Nor-Cal expressly disclaims responsi-bility for any loss or damage caused by the use ofits products other than in accordance with properoperating and safety procedures. Reasonable caremust be taken by the user to avoid hazards.In-warranty repaired or replacement parts arewarranted only for the remaining unexpired portionof the original warranty period applicable to theparts which have been repaired or replaced.After expiration of the applicable warranty period,the buyer shall be charged at Nor-Cal’s then currentprices for parts and labor plus transportation.Except as stated herein, Nor-Cal makes nowarranty, expressed or implied (either in fact orby operation of law), statutory or otherwise: and,except as stated herein, Nor-Cal shall have noliability for special or consequential damagesof any kind or from any cause arising out of thesale, installation, or use of any of its products.Statements made by any person, includingrepresentatives of Nor-Cal, which are inconsistentor in conflict with the terms of this warranty shallnot be binding upon Nor-Cal unless reduced towriting and approved by an officer of Nor-Cal.

Return Policy

Merchandise may be returned at the sole discretionof Nor-Cal Products, but not more than 60 daysafter shipment. A fee may be charged for restock-ing the item. An RMA number must be obtainedfrom Nor-Cal before returning any merchandise.

Cancellations

Any request by customers for cancellation in totalor part of any purchase order must be approved atthe sole discretion of Nor-Cal Products and shallbe subject to the following conditions:1. Nor-Cal must receive written notice of Request

for Cancellation, stating the reasons therefore.2. Customer shall be liable for payment of the

following charges to Nor-Cal in the eventof cancellation.A) For all charges incurred (including overhead, G&A, and profit) prior to the date thatnotice of cancellation is received by Nor-Cal forall parts peculiar to customer’s requirements.Upon payment by customer of these chargessuch parts become the property of the customer,Nor-Cal will store said parts for a reasonableperiod of time pending the receipt of customer’sinstruction for disposition. Such storage is atthe customer’s risk and may be subject tostorage charges if stored by Nor-Cal for longerthan 30 days from the cancellation date; plus:B) Charges to convert modified standardparts for return to Nor-Cal’s inventory; plusC) A restocking charge of up to 25% of thepurchase price of the cancelled item.

The following registeredtrademarks appear in this catalog:Alumel®is a registered trademark of Hoskins Mfg. Co.Cajon® is a registered trademark of The Cajon Co.Chromel® is a registered trademark of Hoskins Mfg. Co.Conflat® is a registered trademark of Varian AssociatesKalrez® is a registered trademark of DuPont Dow ElastomersKovar® is a registered trademark of Westinghouse Electric Corp.Microdot® is a registered trademark of Microdot Corp.OFHC® is a registered trademark of American Metals Climax, Inc.Omicron® is a registered trademark of Omicron Corp. GmbHPyrex® is a registered trademark of Corning Glass WorksSwagelok® is a registered trademark of Crawford Fittings Co.Teflon® is a registered trademark of DuPont Dow ElastomersVCR® is a registered trademark of The Cajon Co.Viton® is a registered trademark of DuPont Dow Elastomers

Order Information

How to place an OrderTo place an order, request catalogs or obtaininformation about our products and services call800-824-4166 or 530-842-4457. You may alsosend Email requests to [email protected] or sendus a Fax at 530-841-9189.

Minimum OrdersThe minimum order that will be processedfor domestic orders is $40.00. The minimuminternational order is $100.00.

Terms of PaymentTerms are net 30 days from the date of invoiceonce credit has been approved. Otherwiseterms are COD. Visa, Mastercard orAmerican Express charges are accepted.

Establishing CreditContact our sales department toestablish credit with Nor-Cal Products.

DiscountsOEM and quantity discounts are available toqualified customers.

FOB PointAll shipments are FOB Yreka, Californiaunless quoted otherwise.

Method of ShipmentShipments will be UPS Surface, Prepay and Add,unless quoted otherwise.

Prices and DimensionsIn order to meet the changing needs of ourcustomers we periodically make design revisionsin our standard product line. As a result, thedimensions, pricing and specifications in allcatalog sections are subject to change withoutnotice. International pricing may also vary.


Prices subject to change without notice. - International product pricing will vary. CHAMBER-LIT 4/02

NEW PRODUCTS

Utility Hat

The utility hat is used for mounting feed-throughs to the chamber when X and Ymovements of the sample will causeexcessive flexing and abrading of utilitylines. The utility hat can be mountedbetween the Precision Rotary Feed-through and the traveling flange on topof the XYZ to provide X and Y movementof utility lines with the sample. Addition-ally, the utility hat can be used on topof a Differentially Pumped Rotary Seal toallow 3600 polar rotation of utility linesalong with the sample.

Series II Manipulators

• XYZ Precision Manipulator• Magnetic Linear/Rotary Feedthroughs• Rotary Motion Feedthroughs• Differentially Pumped Rotary Seals• Sample Transfer System• Alignment Gimbals• Rotary Wobble Sticks

Nor-Cal Products is proud to introducethese new complimentary devices forsample transfer and manipulation in ultra-high vacuum systems. Combined with ourvacuum chambers, load locks, gate valves,all-metal valves, feedthroughs, viewportsand roughing accessories, we can providea complete turn-key research system.Each standard component can readily becustomized to meet our customer’s spe-cific requirements, such as sample heatingand cooling, special lengths orstepper motor drivers.

These components come with our strongassurance of their quality – a FIVE YEARGUARANTEE against defects in materialsand workmanship.

Load Lock Chamber

Nor-Cal’s electropolished load lockchamber offers a convenient method tointroduce samples into a UHV chamber.Features include a six inch CF flange formounting to a gate valve, a six inch ODhinged door with a 7056 glass viewportand three 2.75 inch CF flanged ports forattaching a linear feedthrough, pumpand other accessories, such asvacuum gauges.

Thin Film CoatingInstrumentation

Nor-Cal’s new thin film coating crystal feed-throughs, sensors, monitors and acces-sories represent those most commonlyused in thermal deposition processes.Custom feedthroughs are available with avariety of flanges in all sizes.

• Crystal Feedthroughs• Single and Dual Crystal Sensors• Multi-channel Deposition Monitors• Gold and Aluminum Alloy Quartz Crystals• Coaxial Cables, Oscillators, Connectors

and Replacement Parts



GTAW Fusion Welding

CUSTOM CHAMBERS & WELDMENTS

Chamber Fabrication

Engineering Services

As an indication of commitment to quality andcustomer satisfaction, Nor-Cal’s engineeringstaff thoroughly reviews each custom vacuumcomponent for manufacturability before theproduction process begins. All customersbenefit from the combined experience of ourengineers, whose input during the design andproduction phase often results in cost savingsand a superior product. Questions regardingdesign, specifications and testing are directedback to the customer for final approval.

Our engineers design from customer specifications, sketchesor drawings and oversee custom component production using

existing tooling and facilities. For our customers who do nothave drafting personnel available and require a complex

assembly, we can provide complete CAD drawingsfor approval upon receipt of order. Nor-Cal engineer-ing and R&D departments use the latest versions

of AutoCAD™ and Autodesk Inventor™ software.You may email drawings direct to our engineering department

at [email protected]. Acceptable exchange file formats are DXF,IGES, SAT and STEP versions. Direct formats are DWG, IDW,IPT and IAM. You may also download drawings of our mostcommonly used standard components from our web site.

General Information

Nor-Cal Products has earned a reputationas a world-class manufacturer of highand ultra-high vacuum chambers. Thequality, appearance and performance ofour chambers are unequaled. We supplyone-off chambers designed from cus-tomer specifications for university ornational laboratory research projects, aswell as production quantity chambers thatare built-to-print for equipment manufac-turers. Thin-film deposition andcompound semiconductor pro-cessing are common applicationsfor our high-vacuum,o-ring sealed chambersthat commonlyoperate at pressuresdown to 1x10-9 Torr.Vacuum fired 316Lmaterial and metal sealsare recommended for ultra-high vacuum surface sciencechambers that operate atpressures in the 1x10-11

Torr range. Nor-Cal canprovide cylindrical andrectangular chambers up to about five footsquare with doors, stands, water jacketsand Mumetal shields. (Consult the factoryfor exact capabilities.) We offer a com-plete line of vacuum chamber accessoriesthat include load locks, sample transferand positioning devices, liquid andelectrical feedthroughs, viewportsand roughing components.

Weldments

Because we manufacture tees, elbows andother weld fittings in-house, Nor-Cal can alsofabricate exhaust weldments and otherspecial assemblies for semiconductorequipment from a single piece of tubing.Welds and other manufacturingsteps are eliminated, improvingcleanliness and fit while reducingcost. We have demonstrated asmuch as 30% savings toour customers usingthis technique.

Manufacturing

Machining procedures are consistent withgood UHV practices. Machine coolant issulfur-free to reduce outgassing. All Nor-Cal components are designed to minimizeentrapments that cause virtual leaks undervacuum. State-of-the-art CNC machiningequipment is available to produce partswith consistently high quality.

GTAW fusion weldingis used exclusively for avacuum-tight metal bond.Purging with an inert gasreduces or eliminatesoxygen entrainment andcarbide precipitation thatcause outgassing.Whenever possible weldsare made on the inside orare full penetration toeliminate entrapmentsand virtual leaks.

CAD Design

Ultra High VacuumResearch System



CUSTOM CHAMBERS

Manufacturing

Machining procedures are consistent with good UHV practices. Machinecoolant is sulfur-free to reduce outgassing. All Nor-Cal components aredesigned to minimize entrapments that cause virtual leaks undervacuum. State-of-the-art CNC machining equipment is available toproduce parts with consistently high quality.

GTAW fusion welding is used exclusively for a vacuum-tight metal bond.Purging with an inert gas reduces or eliminates oxygen entrainment andcarbide precipitation that cause outgassing. Whenever possible weldsare made on the inside or are full penetration to eliminate entrapmentsand virtual leaks.

Materials

Nor-Cal Products uses only the highestgrade materials for the manufacturing ofvacuum chambers. Vapor pressure,corrosion resistance and permeability areimportant considerations taken into accountduring the material selection process. Westart with select grade 304 stainless steeltubing, spheres or roll-ups to fabricate thevacuum vessel. If required 304L, 316 or316L can be supplied. Normally our stan-dard material is in the low carbon range for304. Flanges and baseplates are made from304 that has been specially treated to re-move impurities inherent in 300 seriessteels. Flanges 4.50 inches OD and smallerare made from 304 electroslag remelt (ESR)bar stock. ESR is a refining process thatproduces stainless steel with higher purity,fewer inclusions and more uniform grainstructure to eliminate microscopic leakpaths. Larger flanges are made from ArgonOxygen Decarburization (AOD) 304 stainlesssteel. This material is certified to meetASTM-240 and has less than .01% sulfur toprevent sulfur stringers. Grain size is 3 to 6per ASTM E-112. Maximum inclusion size is2.5 per ASTM E-45. As specials 304L and316L material can be suppliedin AOD orroll-forgedrings.

UHV Research Chamber

GTAW Fusion WeldingChamber Fabrication

Ultra High VacuumResearch System



Cleaning

CUSTOM CHAMBERS

All stainless steel parts are passivated ina light acid solution to remove weld scaleand oxide. A biodegradable detergent isused to remove machine lubricants beforethe parts are washed and rinsed withdeionized water in an ultrasonic tank.Additionally, parts receive a final methanolwipe. Nor-Cal offers bead blasting,chem cleaning and electropolishingof vacuum chambers in-house.

Glass shot cleans, hones, polishes andpeens while removing scale. Some custom-ers request bead blast on the exterior of thechamber with electropolish on the interior.

Electropolishing is by far the most desirablecleaning process for stainless steel vacuumchambers. It is an electrochemical processthat benefits the finished part in a number ofways simultaneously. Deburring, passiva-tion and stress relieving are achieved whilethe machine produced surface roughness iseroded. Electropolishing attacks the micro-scopic “peaks” of the surface more rapidlythan the “valleys”, thereby maintaining criti-cal dimensions while improving surfacefinishes. Normally .0003 to .0004 incheswould be removed to lower the microfinishfrom 32 to 8 RMS. Electropolishing resultsin a 90% friction decrease over a similarmicrofinish achieved mechanically, whilesurface area is reduced by a similar amount.This is most important for vacuum cham-bers because it produces faster pumpdownand higher conductance. In addition to theimproved mechanical properties of the sur-face, iron is removed electrochemically.This leaves the surface rich in chromium andnickel which have extremely low vapor pres-sures. The result is the lowest outgassingrates possible from stainless steel.

Chem cleaning is available for medium sizechambers and can be used as a final stepafter electropolish. The chamber is im-mersed in a series of controlled chemicalbaths before deionized water rinse and fil-tered hot air dry. Chem cleaning results inthe cleanest surface possible for ultra highvacuum components.

Chem Clean Line

Electropolish



CUSTOM CHAMBERS

Process chambermechanical inspectionwith CoordinateMeasuring Machine(CMM)

Qualification of UHV System

ChamberQualificationTest Bench

Inspection

Nor-Cal uses the most up-to-date equip-ment and procedures for the inspectionof vacuum chambers. Every weld is leakchecked with a helium mass spectrometerto insure leak rates of 10-9 std. cc./sec.or less. Mechanical inspection is accom-plished with a coordinate measuringmachine (CMM). We can provide ourcustomers with CMM inspection reportsof their chambers on request.

Our chamber qualification test bench isavailable to customers who requestresidual gas analyzer (RGA) scans of theirchamber after a 24 hour vacuum bake.The test bench contains vacuum pumps,gauges, RGA, quartz heaters, nitrogenback fill and a leak detector. Once waterand other background are eliminated bythe 150°C bakeout we can provide thecustomer with customized scans to detectthe slightest contamination in the chamber.Whatever the sensitivity of our customer’sapplication, we can guarantee that con-taminants will be within acceptable limits.

System Integration

On request Nor-Cal can assemble an entiresystem including chamber, frame, pumps,gauges, valves, manipulators and othercomponents to customer specifications.After completion our vacuum technicianscan complete a thorough qualification ofsystem performance, including time tobase pressure and RGA scan, before thesystem is back filled with nitrogen andshipped to the customer.



Specifications

Cylindrical chamber bodies and portscan be made from tubing if they are lessthan 12 inches OD. Standard tube sizesfrom .75 to 12 inches OD, their respectivewall thickness and per foot price are listedin our Weld Fittings catalog. The sizesshown are stocked by Nor-Cal, so they arereadily available for use in custom vacuumchambers. If, however, a portion of achamber needs to be a diameter orwall thickness other than a standard tube,a roll-up may be ordered. Roll-ups arecylinders formed to our specifications.Hemispheres may also be ordered to meetcustomers’ requirements.

Standard tolerances for machined dimen-sions are ± .005 inch, although tolerancesof ± .002 inch are commonly held on criti-cal flange dimensions. Standard tolerancefor any welded dimension, such as a portlength or chamber height, is ± .020 inch.Closer tolerances on welded dimensionsnecessitate secondary machining of criticalsurfaces. Standard tolerance for polar andazimuthal angles is ± 1/2°.

L1

LENGTH

A

0

P

L2

HEIGHT

P = Polar Angle A = Azimuthal Angle L = Level

1. Distance from the targetto the face of the flange.

2. The polar angle, if any, betweenthe vertical axis of the chamberand the centerline of the port.

3. The azimuthal angle.Establish 00 on oneof the axes whenviewing the chamberalong its centerline.Indicate the clockwisedegree of angle from00 to the centerlineof the port.

4. The tube OD.5. The flange type

and size. Be sureto specify rotatableor non-rotatable,and if tapped flanges orblank-offs are required.

Specifying PortsWhen specifying chamber ports, first dimension the main chamber body.Secondly, dimension levels with one or more targets from one end of the chamber.This provides the machinist and inspector with a common reference point for alllevels. Once targets are established either on the centerline of the chamber orreferenced from the centerline at each level, ports may be specified.

American European

Primary Axis

A/2A

CUSTOM CHAMBERS

Bolt Pattern OrientationOur components are manufacturedwith the primary axis straddlingadjacent bolt holes on themounting flange (AmericanStandard). Most componentscan be furnished with theaxis passing through a bolthole axis (EuropeanStandard) on request.

Each port requires the following information:



Order InformationModel PumpingNumber Port Flange Price

SAC-12WS 14.62 FWS SAC-12CF 14.00 CF

Dimensions in inches

Specifications

• 304 stainless steel construction• Electropolished inside and out• Bakeable to 4500C.• Leak checked to 10-9 standard cc/sec.• Seventeen CF flanged accessory ports• Oversized 1.75 inch tubing on all

2.75 inch CF ports• 14.62 inch female wire seal or

14.00 inch CF flanged pumping port

Nor-Cal has designed a standard vacuumchamber which incorporates the featuresrequired by many of our surface sciencecustomers at an affordable price. Thechamber's geometry offers maximumflexibility, making it suitable for many typesof studies and experiments. Seventeenports can accommodate viewports, doors,feedthroughs, manipulators or analyticalinstruments. This design can be usedas a platform and modified to meet yourown specific requirements.

CAX

6.008.00

15.50

12

14

13

311

17

10

18

4

8

9

10.00

114

9 12

13

14

166

5

17

8

18 3

2

15

CAX

CAX

6.008.00

15.50

12

14

13

311

17

10

18

4

8

9

10.00

114

9 12

13

14

166

5

17

8

18 3

2

15SIDE VIEW TOP VIEW

SURFACE ANALYSIS CHAMBERS

Surface Analysis ChambersPort Flange Port Length

Number Type OD Flange Face to Target Target

1 6.00 CF 4.00 7.50 X2 8.00 CF 6.00 7.50 X3 2.75 CF 1.75 7.25 X4 8.00 CF 6.00 8.50 A5 6.00 CF 4.00 7.25 A6 4.50 CF 2.50 8.50 A7 2.75 CF 1.75 8.25 A8 2.75 CF 1.75 6.50 A9 4.50 CF 2.50 9.50 A

10 2.75 CF 1.75 7.25 CL11 8.00 CF 6.00 8.50 C12 2.75 CF 1.75 9.00 C13 2.75 CF 1.75 6.50 C14 2.75 CF 1.75 9.00 C15 4.50 CF 2.50 10.00 C16 2.75 CF 1.75 7.75 C17 14.62 FWS or 14.00 CF 12.00 8.00 X18 2.75 CF 1.75 7.25 CL




Bell Jar BaseplatesModel Nominal ASANumber Size Flange B C Price

BP-1200 12.00 ASA-9-400N 14.00 3.83 BP-1200-EP* 12.00 ASA-9-400N 14.00 3.83 BP-1800 18.00 ASA-11-800N 20.00 7.76 BP-1800-EP* 18.00 ASA-11-800N 20.00 7.76 BP-2400 24.00 ASA-11-800N 26.00 7.76 BP-2400-EP* 24.00 ASA-11-800N 26.00 7.76

*Electropolished finish. Dimensions in inches

Feedthrough Collars with O-Ring SealModel Nominal Size Number ofNumber A 2.75 CF Ports B Price

FCO-1200-6 12.00 6 14.00 FCO-1200-6-EP* 12.00 6 14.00 FCO-1800-8 18.00 8 20.00 FCO-1800-8-EP* 18.00 8 20.00 FCO-2400-12 24.00 12 26.00 FCO-2400-12-EP* 24.00 12 26.00

One Viton® O-Ring is included with all of the above. Dimensions in inches*Electropolished finish.

Stainless Steel Bell Jars with O-Ring SealModel Nominal SizeNumber A B C D Price

BJ-1200 12.00 14.00 12.00 6.00 BJ-1200-EP* 12.00 14.00 12.00 6.00 BJ-1800 18.00 20.00 30.00 12.00 BJ-1800-EP* 18.00 20.00 30.00 12.00 BJ-2400 24.00 26.00 30.00 12.00 BJ-2400-EP* 24.00 26.00 30.00 12.00

One Viton® O-Ring is included with all of the above. Dimensions in inches*Electropolished finish.

Nor-Cal offers stainless steel baseplates,feedthrough collars and bell jars as stan-dard items. Used in conjunction with ourother chamber accessories, an entire belljar system can be ordered without theexpense of design or custom fabrication.Any of the bell jar components shown maybe altered to meet the customer’s specificrequirements. Our sales staff can quicklyestimate the additional cost or savings.

effects a seal with the baseplate when theViton® O-ring provided is compressed.The feedthrough collar can be used with aglass bell jar and L-gasket or our stainlesssteel bell jar with 7056 glass viewport.Like the collar, the bell jar is provided witha Viton® O-ring and has a dovetail groovein its base. Bead-blasted finish is stan-dard. Water cooled jackets are availableupon request.

Baseplates come in a variety of sizes withsmooth faced ASA flanges to bolt directlyto the vacuum pump. They may also befurnished with other types and sizes offlanges. If feedthroughs are required, afeedthrough collar with varying numbersof 2.75 inch CF flanges may be insertedbetween the baseplate and bell jar. NWflanges can also be provided. A dovetailO-ring groove on the base of the collar

STAINLESS STEEL BELL JARS

Replacement Viton® O-RingsModel Number Price

1200-OR 1800-OR 2400-OR

D

VP-400

3.06.0

Lifting LugStandard

C

A

B

A

B

4.0

B

C

ASA

1.5



SAMPLE TRANSFER & MANIPULATION

Polar Axis

Tilt Motion

Flip Motion

TravelingFlange

Azimuthal Rotation

Base Flange(Underneath)

AzimuthalAxis

Polar Rotation

X Axis

Z Axis

Y Axis

AZIMUTHAL AXISThe azimuthal axis is perpendicularto the polar axis. Sample azimuthalrotation refers to rotation of the sampleabout an axis normal to the sample faceand perpendicular to the polar axis.

FLIP MOTIONFlip motion is the changing of an axisnormal to the sample face from parallel(or coaxial) to the polar axis to coaxialwith the azimuthal axis. The range ofthis change of axis may be 90º, 180ºor full 360º.

TILT MOTIONTilt refers to changing the polar axiswith respect to the X, Y and Z axes.This is usually done at the traveling flange

of a 3-axis manipulatoror other exterior mounting stage.Tilt range is often limited by thebellows ID and the OD of the

probe passing through the bellows.The maximum angle practical is about ±7º.When used in this manner, translation in X,Y and (slightly) Z will occur with adjust-ment of the tilt angle. Tilt stages areavailable in single or dual axis units.

Nor-Cal Products offers the researcher complimentary devicesfor sample transfer and positioning in ultra-high vacuum systems.Combined with our vacuum chambers, load locks, gate valves,all-metal valves, feedthroughs, viewports and roughing accessories,we can provide a complete turn-key research system. Each standardcomponent can readily be customized to meet our customer’sspecific requirements, such as sample heating and cooling, speciallengths or stepper motor drivers. All of Nor-Cal’s sample transferand manipulation devices are made from the highest quality materi-als and lubricants to withstand repeated UHV bakeouts. Our Series IIManipulators come with our strong assurance of their quality –a materials and workmanship FIVE YEAR GUARANTEE.

POLAR ROTATIONThe polar axis is thesame as the Z axis. Rotation about thepolar axis is commonly achieved by mountinga rotary feedthrough at the center of the travel-ing flange of a manipulator or translator.This degree of freedom can also be achievedwith a differentially pumpedrotary seal.

Terminology

MANIPULATOR (X,Y,Z)A manipulator is a 3-axis (X,Y,Z) positioningdevice. For most applications, the instrumenthardware is mounted outside the vacuumchamber, with a welded bellows providing aflexible vacuum curtain. The X axis passes infront of the vertical, mechanical structure, or“backframe,” with the Y axis moving to andaway from the backframe. The Z axis is per-pendicular to the X and Y axes and moves upand down directly against the vacuum pres-sure differential. The polar axis is the same asthe Z axis.

The limit of X and Y travel is normally acircular pattern. The range is indicatedas a vector sum. This means a ± .50 inchrange of X and Y allows the polar axisto be moved anywhere inside a 1.00 inchdiameter circle. The sum of the X and Yvectors is limited to .50 inch. Squarepattern XY stages are available asoptions on some models.

TRANSLATOR (Z)A translator is a single axispositioning device, utilizinga bellows as a vacuum seal.They are also referred to as a“Z only” stage. This axis isnormally perpendicular to thechamber. This causes theZ axis to work directly against theforce from the pressure differential.

XY STAGEThe XY stage provides the X and Y axesonly. No Z motion is available.




1.50" OD3.50"

5.25" 8.00"

6.00" door with Viewport

4.00" OD

3.25"

2.75"

Load Lock Model Number Price

LL-600-ADV-150-3

Docklockingfingers

Sampledock

Sample mount

Ceramics for electrical orthermal isolation

Linear-rotary shaft

Clamp

Transfer fork

Finger locationduring transfer

Finger location inlock position

Sample

Sampleclips

Lockingfingers3 each

Sample platen

Transfer axis

Azimuthal rotationFlip

Polar axisPolar rotation

Sample Transfer SystemModel Sample MinimumNumber OD Port OD Price

STS-050 0.50 1.50 STS-100 1.00 1.50 STS-200 2.00 2.50 STS-300 3.00 4.00


STS Sample Transfer Systems aremanufactured and protected under thefollowing patent: 5,705,128.

Nor-Cal’s sample transfer system allowssample plate transfer from a rotary/linearfeedthrough to the sample dock mountedinside the chamber. Systems are availablefor sample sizes ranging from 0.5 inchesto 3.0 inches. Each system includes adock assembly custom fitted to placethe sample on target in your particularchamber, a transfer fork assembly whichmounts to a rotary/linear device and twostainless steel sample plates.

Nor-Cal’s load lock chambersare provided with a six inchCF flange for mounting tothe gate valve, a six inchAdd-A-Door with 7056glass viewport, a2.75 inch CF flangefor attachmentof the linearfeedthrough,and two 2.75inch CF flangesfor pumping.Standard finish iselectropolished.Custom sizes can besupplied upon request.



Add-A-Doors with Viewport - Fused SilicaModel Number Flange Type D V B Price

ADVQ-450 4.50 CF 2.435 1.40 .74 ADVQ-600 6.00 CF 3.917 2.69 1.02 ADVQ-800 8.00 CF 5.875 3.88 1.21 ADVQ-1000 10.00 CF 7.875 5.38 1.28


Add-A-Doors with Viewport - 7056 GlassModel Number Flange Type D V B Price

ADV-450 4.50 CF 2.435 1.49 .69 ADV-600 6.00 CF 3.917 2.65 1.00 ADV-800 8.00 CF 5.875 3.88 1.20 ADV-1000 10.00 CF 7.875 5.60 1.30


Add-A-DoorsModel Number Flange Type D B Price

AD-275 2.75 CF 1.380 .500 AD-450 4.50 CF 2.435 .687 AD-600 6.00 CF 3.917 .781 AD-800 8.00 CF 5.875 .875 AD-1000 10.00 CF 7.875 .968


This hinged, Viton® sealeddoor is quickly bolted to anexisting Conflat® flangedchamber port. The door isopened easily by turning aknurled knob. These doorsare available for 2.75 to 10.00inch OD flanges with a solidmetal door (Model AD). Theyare also available with a 7056glass viewport (ADV) or aquartz viewport (ADVQ) for4.5 to 10 inch OD flanges.

Existing Port

Add-A-Door

B

Open DiameterD

D

V

B

Open Diameter

View Diameter

D

V

B

Open Diameter

View Diameter

Viewport Optical

Transmission Curves

Fused Silica

Fused Quartz

Wavelength in Microns

% Tr

ansm

issi

on

100

0

90

80

70

60

50

40

30

20

10

.10 .20 .30 .40 .50 .60 .80 1.0 2.0 3.0 4.0 5.0 6.0 10.08.07056 Glass




OPTIONS:

• Micrometer adjustment providesrepeatability of alignment (1 or 2 axes)

SPECIFICATIONS:

• 1.5 inch ID bellows• 2.75 inch tapped CF flanges• Knob adjust on two axes• ± 50 range• Roller bearing pivots

suitable for horizontalmounting of payloads

• Bakeout temperature 2000C maximum

2.75" diametermounting flangeAdjustable

linear limits

3.47"

8.04" + stroke11.04" + stroke (-LT)

6.87" (-LT)

Magnet assembly

3.5"

.5"

MLR Linear Rotary Feedthroughs are manufacturedand protected under the following patent: 5,514,925

OPTIONS:

• Light-touch magnet assemblyutilizes dynamically loadedfullbearing support to increasetactile feedback and heavy-dutymagnets to increase linearforce to 20 lbs.

SPECIFICATIONS:

• Rare Earth magnets• 24 or 36 inch linear travel• 3600 continuous rotation• 2.75 inch CF mounting flange• Bakeout temperature 2000C maximum

with magnets removed

• Torque is 150 oz. inch minimum• Linear force is 4 lbs. standard• Adjustable stops• 0.5 inch OD stainless steel tubular probe• 00 to 3600 rotary indication is standard

Magnetic Linear/Rotary FeedthroughModel Number Description Price

MLR-275-050-24 24 inch stroke MLR-275-050-36 36 inch stroke Light-touch Magnet Assembly Option Add (Add -LT to model number)

Nor-Cal’s magnetic linear/rotary feedthroughs utilizepolished ID stainless tubing and eight stainless steel bearingsfor smooth actuation and a trouble-free life. Increase linear force

and sensitivity with heavy-duty linear driver magnetsand full-bearing support by adding

the “light-touch” option to thebasic model.

7.20

" Typ

.6.

60" T

yp.

2.75 Flange detail tapped

2.75 Flange tapped

4.50

"

±5.50

2.63

"

Alignment GimbalsModel Number Price

AG-275-150 Micrometer Option Add/each (add -M1 or -M2 to model number)


Alignment gimbals are mountedbetween the linear feedthrough flangeand the load lock to compensate fordroop in long linear feedthrough probes.(Shown here with micrometer option -M2)



XYZ Precision Manipulator Model Number Price

PMXYZ-600-1.87-2 Support Tube Option Add

(Add -ST.25 or -ST.38 to model number)

SPECIFICATIONS

• 1.87 inch ID bellows• ± .50 inch X and Y travel, circular

pattern, pre-loaded micrometerstage coupling, .0001 inch micrometerdivisions (with large micrometers)

• 2 inch Z travel, Acme drive,.10 inch /turn

• 2 inch diameter drive knob• Dual .75 inch OD hardened

stainless steel Z guide rods• 6.00 inch CF base flange,

clearance holes, with 5 mini flanges• 2.75 inch CF traveling flange, tapped• Bakeout temperature,

2000C maximum fully assembled• Hardened X and Y cross roller guides

• Aluminum stage construction• Operates in any orientation• Only UHV materials exposed to vacuumOPTIONS

• Support tube with .75 inch OD and endbearing support increases rigidity onlonger .25 and .38 inch OD rotary shafts

4.13".0001" divisions

Traveling flange2.75" diameter tapped

Z adjust

7.52" ±.50"

7.52

" ±.5

0"

10.2

3"

Base flange6" diameter with5 mini ports8.

76" t

o 10

.76"

1.75"1.33"

or 2.75"

3.27" 3.26"

.25"

8-32 tapped hole for attachment

4.7" 9.0" to 24"

.375" O.D. shaft

Drum dialPosition lock

.75"

36003.13"

OPTIONS

• Customshaft lengthsavailable from9 to 23 inches


Typically used for polar rotationon top of an XYZ manipulator

3/8” Precision Rotary Motion FeedthroughModel Number Price

PRM-275-038-24 Custom Shaft Length Option

(Specify length in inches when ordering)

SPECIFICATIONS

• Bakeable to 2000 C• 750 RPM maximum• 50 oz. in. maximum torque• 3600 graduations on knob• Locking screw

SPECIFICATIONS

• 2.75 inch conflat mounting flange• 0.10 resolution

(10 graduations on dial)• 150 oz. inch maximum torque• Position lock• .375 inch OD shaft, 24.00 inch

long from flange face to tip• Bakeout temperature 2000C maximum

1/4” Precision Rotary Motion Feedthroughs Model Number Flange Price

PRM-133 1.33 CF PRM-275 2.75 CF




Utility Hat Model Number Price

UH-175-2-133-4

1st StageRoughing

PortVernierScale

E

B

H

D

CGF

A

Fixed Flange

Rotating Flange

GraduatedDial

2nd StageHigh Vacuum

PortGraduated Dial

SPECIFICATIONS

• Rotational and stationaryflanges, tapped

• Two stage differentially pumped.• Base pressures 10-11 Torr range• Bakeout temperature 1500C maximum• 3600 vernier scale, standard• “T” wrench for adjustment, standard

Utility hat shownwith differentially pumped rotary seal

450

5.00

"

4.40

"

2.2Typical

450

.75 ODFour Plcs

OPTIONS

• Manually operated worm drive (-W).• Digital counters, stepper motors and

other sizes available on request

Differentially Pumped Rotary SealsModel Payload*Number ID OD A B C D E F G H Vertical Horizontal PriceRS-150 1.53 2.75 4.50 2.99 1.00 3.18 2.75 .49 .13 600 54 lbs. 30 lbs. RS-150-W 1.53 2.75 5.13 3.38 1.00 4.95 2.75 .49 .37 600 54 lbs. 30 lbs. RS-250 2.53 4.50 5.75 3.64 1.36 3.58 4.50 .49 .03 450 90 lbs. 38 lbs. RS-250-W 2.53 4.50 6.38 4.20 1.36 6.11 4.50 .49 .41 450 90 lbs. 38 lbs. RS-400 4.03 6.00 7.75 4.57 1.68 4.34 6.02 .37 .06 450 144 lbs. 66 lbs. RS-400-W 4.03 6.00 8.50 8.25 1.68 9.28 6.02 .37 .54 450 144 lbs. 66 lbs.

Dimensions in inches * Standard maximum payloads with center of gravity within 10% of the RS ID from the RS centerlinewhen vertical, within one ID of the RS from the RS flange face when horizontal,

and certain other size restrictions are met - consult factory.

Utility feedthroughs can be mounted to thebase flange of the XYZ Manipulator or to autility hat. The utility hat is the preferredmethod when x and y movements of thesample will cause excessive flexing andabrading of utility lines in vacuum. Theutility hat can be mounted between thePrecision Rotary Feedthrough and thetraveling flange on top of the XYZ to pro-vide X and Y movement of utility lines withthe sample. Additionally, the utility hat canbe used on top of a Differentially PumpedRotary Seal to allow 3600 polar rotation ofutility lines along with the sample.

The standard utility hat comes with a 1.75 inch tube,two 2.75 inch CF flanges and four 1.33 inch CF portsfor mounting feedthroughs. Standard finish iselectropolished. Custom sizes can be suppliedupon request.




Bulkhead or BaseplateNW Flange

Bulkhead Clamps NW Centering Ring

10-32 x 5/8" Screws

A2.75" CF Flange

Four10-32holes

1.30"

B

A

B

SPECIFICATIONS

• Bakeable to 3500C• Available with 1.33 and

2.75 inch CF flanges• 3600 graduations laser

engraved on the barrel

Linear Motion ThimblesModel Minimum - MaximumNumber A B ID Price

LMT-133 1.75 1.800 - 2.800 .54 LMT-275 3.25 3.060 - 5.060 1.43


NW Bulkhead ClampsModel Number of Through HoleNumber A B C Screws Diameter Price

NW-16-BCP 2.00 1.50 .361 6 .90 NW-25-BCP 2.37 1.89 .387 6 1.26 NW-40-BCP 2.94 2.44 .366 6 1.84 NW-50-BCP 3.75 3.25 .404 8 2.35


B

A

C

Aluminum


Heavy-Duty Push-PullLinear Motion Feedthroughs

Model Minimum - MaximumNumber A B Price

HLM-275-2 1.1 - 3.1 6.75 HLM-275-3 1.4 - 4.4 8.07 HLM-275-4 1.7 - 5.7 9.38

Dimensions in inchesSPECIFICATIONS

• Bakeable to 2500C.• 20 lbs. maximum lateral load• Welded bellows seal• Position lock

Bulkhead clamps provide a simple means offastening an NW flange to a baseplate. Eachaluminum clamp is sold with stainless steel sockethead cap screws and washers for attachment.Leave .075 inch minimum between the bottom ofthe tapped hole and the inside of the chamber wall.



Wobble SticksModel Flex Min.-Max.Number Flange Angle A B C Price

WBL-133 1.33 CF ± 220 6.00 .12 3.00- 3.50 WBL-275 2.75 CF ± 300 10.00 .25 3.75 - 6.00WBL-NW-16 NW-16 ± 220 6.00 .12 3.00 - 3.50 WBL-NW-40 NW-40 ± 300 10.00 .25 3.75 - 6.00


• Bakeable to 4500C• Available with CF

and NW flanges• Welded bellows• Mating flange

may restrictflex angle

BC

A

Rotary Wobble SticksModel Number Price

RWS-275-4 RWS-275-8 Single Jaw Pincer Option (Add -PS to model number)

Rotary position lock

35°Samplehook

Chamber flange

Clearance required forfull 44° working angle

Linear position lockLinear limit adjust

Push knob for pincer release(pincer option)

1.50" minimum

1.16"

.85"

Sample Plate

Pincer Option

2.63"

44°SPECIFICATIONS

• 2.75 inch conflat mounting flange• ± 220 angular range• 4.00 or 8.00 inch Z stroke• 3600 probe rotation via

rotary motion feedthrough• Independent bellows for Z and theta• Bakeout temperature 2000C maximum• Rotational and Z travel position lock• Tip prefitted with hook

OPTIONS

• Single-jaw pincer• Double-jaw Omicron®

and other pincers upon request


Simple meansof positioningsamples in vacuum

Inexpensive alternativefor sample introductionand manipulation



VIEWPORTS

Viewport Weld Stubs - Fused QuartzModel Flange View DiameterNumber OD B C V Price

VPQ-250 4.47 2.88 2.50 2.37 VPQ-400 5.97 2.88 4.00 3.83 VPQ-600 7.97 2.88 6.00 5.83


Viewport Weld Stubs - 7056 GlassModel Flange View DiameterNumber OD B C V Price

VP-250 4.47 2.88 2.50 2.37 VP-400 5.97 2.88 4.00 3.83 VP-600 7.97 2.88 6.00 5.83


Nor-Cal Products offers a complete lineof viewports for vacuum chambers withNW, ISO and CF flanges. CF flangedviewports are available with fully annealed7056 glass or fused quartz. Special materi-als and coatings, such as sapphire andanti-reflective (AR) coating, are availableon request. Glass provides a large distor-tion free viewing area at low cost. Quartzprovides superior ultraviolet radiationtransmission and resistance to thermalshock. Glass CF flanged viewports canwithstand repeated bakeout cycles to4000C and vacuum pressures to 10-11 Torr.Quartz CF flanged viewports should not bebaked above 2000C. NW and ISO flangedviewports can withstand 2000C bakeoutsand pressures to 10-9 Torr.

Weld stub viewports are provided with atube for welding onto an existing chamber.They are available with Viton® O-ring sealed7056 glass or fused quartz. Maximumbakeout temperature is 2000C.

V

B

C

VP and VPQ


% T

rans

mis

sion

100

0

90

80

70

60

50

40

30

20

10

.10 .20 .30 .40 .50 .60 .80 1.0 2.0 3.0 4.0 5.0 6.0 10.08.0

Viewport Optical Transmission Curves7056 GlassFused Quartz Fused Silica



VP-NW-16 and 25

V

B

VIEWPORTS

NW Viewports-7056 GlassModel Flange View DiameterNumber Type B V Price

VP-NW-16 NW-16 .385 .62 VP-NW-25 NW-25 .385 .62 VP-NW-40 NW-40 .554 1.49 VP-NW-50 NW-50 .554 1.49


NW Zero Length Viewports - Fused QuartzModel Flange VNumber Type View Diameter Price

ZV-NW-40A NW-40 1.26 ZV-NW-50A NW-50 1.63 ZV-NW-40 NW-40 1.26 ZV-NW-50 NW-50 1.63


ZV-NW-40 and ZV-NW-50

Nor-Cal’s zero length view ports have an innovative design whichplaces the viewing glass inside the centering ring. The clear, polishedquartz can be removed for cleaning or replacement. Zero length viewports are available for NW-40, NW-50 or other ISO-KF compatibleflanges of the same size. Also available are 7056 glass viewports in aone-piece assembly. This viewport replaces a blank off cap and usesa standard NW centering ring assembly and clamp for sealing.

Inner O-ring

Outer Flange

Bearing Washer

Quartz Glass

Outer O-ring

Retainer Ring

ZV-NW-40A and ZV-NW-50A

NW Clamp

NW Butt Weld Flange

NW Viewport

NW ZERO LENGTH VIEWPORTS

VP-NW-40 and 50

B

V



VIEWPORTS

CF Zero Length Viewports - Fused SilicaModel Flange View DiameterNumber OD V Price

ZVQ-150 2.75 1.40 ZVQ-200 3.38 1.40 ZVQ-250 4.50 2.69 ZVQ-300 4.62 2.69 ZVQ-400 6.00 3.88 ZVQ-500 6.75 3.88 ZVQ-600 8.00 5.37 ZVQ-800 10.00 7.78


CF Zero Length Viewports - 7056 GlassModel Flange View DiameterNumber OD V Price

ZV-075 1.33 .62 ZV-100 2.12 .62 ZV-150 2.75 1.49 ZV-200 3.38 1.49 ZV-250 4.50 2.66 ZV-300 4.62 2.66 ZV-400 6.00 3.97 ZV-500 6.75 3.97 ZV-600 8.00 5.60 ZV-800 10.00 5.60


ISO Viewports - 7056 GlassModel Flange View DiameterNumber OD V Price

ZV-ISO-63-OF ISO-63-OF 1.49 ZV-ISO-80-OF ISO-80-OF 1.49 ZV-ISO-100-OF ISO-100-OF 2.66 ZV-ISO-160-OF ISO-160-OF 3.97 ZV-ISO-200-OF ISO-200-OF 5.60


V

V

V

V



ELECTRICAL FEEDTHROUGHS

Nor-Cal’s extensive line of electricalfeedthroughs are manufactured fromultra-high vacuum grade materials suchas high alumina ceramic insulators, OFHC®

copper and nickel conductors, and 304stainless steel flanges. These robustceramic to metal feedthroughs haveelectrical ratings for operation with oneside in dry atmosphere while the oppositeend is in a stable vacuum. They are used inultra high vacuum systems with CF flangesor high vacuum systems with NW flanges.CF feedthroughs can be baked to 4500Cand NWs to 2040C with maximum systempressure of 1 x 10-4 Torr. Our product lineconsists of the most commonly requiredfeedthroughs for general vacuum applica-tions. Customs designs or modifiedstandards can readily be supplied.

SPECIFICATIONS

• Vacuum rated to 10-10 Torr• Type K thermocouple• Chromel® / Alumel® material• Yellow plug color• Plugs, screws and nuts for vacuum and atmosphere lead attachment included• Bakeable to 4500 with plug disconnected

Thermocouple feedthroughs carryinstrumentation signals while providingelectrical isolation and hermetic sealing.They are leak free in high and ultra highvacuum environments and are composedof only inorganic materials. The insulatorsare made of high purity, high strength,low-loss alumina ceramic.

Thermocouple FeedthroughsModel Number Flange A B C Price

TC-NW-16-1 NW-16 2.4 3.0 4.0 TC-NW-25-1 NW-25 2.0 3.4 4.4 TC-NW-40-1 NW-40 1.9 3.5 4.5 TC-NW-50-1 NW-50 1.9 3.5 4.5 TC-075-1 1.33 CF 2.4 3.0 4.0 TC-150-1 2.75 CF 1.9 3.5 4.5


B

A

CF

EngagedC

NW

C

B

AEngaged




A B

BA

1.0.25

.25

.875Typ

NW

CF

SPECIFICATIONS

• Vacuum rated to 10-10 Torr• Voltage rating 12KV DC• Current 150 Amps• Internal pressure 250 PSIG @ 200C• External pressure 250 PSIG @ 200C• Conductor OFHC® copper rod• Use with vacuum connector MCF-VC

(See page 25)

Copper Medium Current FeedthroughsModel NumberNumber Flange Feedthroughs A B Price

MCF-NW-16-1 NW-16 1 3.23 4.03 MCF-NW-25-1 NW-25 1 3.23 4.03 MCF-NW-40-1 NW-40 1 3.23 4.03 MCF-NW-40-2 NW-40 2 3.23 4.03 MCF-NW-40-3 NW-40 3 3.23 4.03 MCF-NW-40-4 NW-40 4 3.23 4.03 MCF-NW-50-1 NW-50 1 3.23 4.03 MCF-NW-50-2 NW-50 2 3.23 4.03 MCF-NW-50-3 NW-50 3 3.23 4.03 MCF-NW-50-4 NW-50 4 3.23 4.03 MCF-075-1 1.33 CF 1 3.21 4.05 MCF-150-1 2.75 CF 1 3.18 4.08 MCF-150-2 2.75 CF 2 3.18 4.08 MCF-150-3 2.75 CF 3 3.18 4.08 MCF-150-4 2.75 CF 4 3.18 4.08


8-Pin Instrumentation FeedthroughsModel Number Flange A B Price

IFT-NW-16-8P NW-16 1.32 1.18 IFT-NW-25-8P NW-25 .92 1.58 IFT-NW-40-8P NW-40 .82 1.68 IFT-NW-50-8P NW-50 .82 1.68 IFT-075-8P 1.33 CF 1.32 1.18 IFT-150-8P 2.75 CF .87 1.63

Dimensions in inches A

B

A

.51

.51

B

.032 OD

.032 ODNW

CFSPECIFICATIONS

• Vacuum rated to 10-10 Torr• Current 2 Amps• Voltage 500 V DC• Internal pressure 250 PSIG @ 200C• External pressure 250 PSIG @ 200C• Conductor.032 OD nickel wire• Use with vacuum connector IFT-VC

(See page 25).

Multipin instrumentation feedthroughsare typically used to transmit signalvoltages and currents. Such applicationsas electron beam evaporation, electronmicroscopy and surface science analysisutilize these feedthroughs to controlprocesses.

These electrical feedthroughs transmiteither high voltage, high current or acombination of both. They are used forsample heating, in-vacuum coating,electron beam evaporation, sputteringand other high vacuum applications.High-purity, high-strength, low-lossalumina ceramic surfaces maximize strikeand creep distances. The air-side ceramicsurfaces have a high temperature glasscoating which reduces surface roughnessand contamination.




A B

BA

1.0.25

.25

.875Typ

NW

CF

SPECIFICATIONS

• Voltage rating 3 KV DC• Current 600 Amps• External pressure 100 PSIG @ 200C• Internal pressure 20 PSIG @ 200C• Conductor OFHC® copper tube

Water Cooled Copper Medium Current FeedthroughsModel NumberNumber Flange Feedthroughs A B Price

MCF-NW-16-1W NW-16 1 3.23 4.03 MCF-NW-25-1W NW-25 1 3.23 4.03 MCF-NW-40-1W NW-40 1 3.23 4.03 MCF-NW-40-2W NW-40 2 3.23 4.03 MCF-NW-40-3W NW-40 3 3.23 4.03 MCF-NW-40-4W NW-40 4 3.23 4.03 MCF-NW-50-1W NW-50 1 3.23 4.03 MCF-NW-50-2W NW-50 2 3.23 4.03 MCF-NW-50-3W NW-50 3 3.23 4.03 MCF-NW-50-4W NW-50 4 3.23 4.03 MCF-075-1W 1.33 CF 1 3.21 4.05 MCF-150-1W 2.75 CF 1 3.18 4.08 MCF-150-2W 2.75 CF 2 3.18 4.08 MCF-150-3W 2.75 CF 3 3.18 4.08 MCF-150-4W 2.75 CF 4 3.18 4.08


A B

BA

1.0.25

.25

.875Typ

NW

CF

SPECIFICATIONS

• Voltage rating 12 KV DC• Current 75 Amps• External pressure 500 PSIG @ 200C• Internal pressure 150 PSIG @ 200C• Nickel rod conductor• Use with vacuum connector

MCF-VC (Page 25).

Nickel Medium Current FeedthroughsModel NumberNumber Flange Feedthroughs A B Price

MCF-NW-16-1N NW-16 1 3.23 4.03 MCF-NW-25-1N NW-25 1 3.23 4.03 MCF-NW-40-1N NW-40 1 3.23 4.03 MCF-NW-40-2N NW-40 2 3.23 4.03 MCF-NW-40-3N NW-40 3 3.23 4.03 MCF-NW-40-4N NW-40 4 3.23 4.03 MCF-NW-50-1N NW-50 1 3.23 4.03 MCF-NW-50-2N NW-50 2 3.23 4.03 MCF-NW-50-3N NW-50 3 3.23 4.03 MCF-NW-50-4N NW-50 4 3.23 4.03 MCF-075-1N 1.33 CF 1 3.21 4.05 MCF-150-1N 2.75 CF 1 3.18 4.08 MCF-150-2N 2.75 CF 2 3.18 4.08 MCF-150-3N 2.75 CF 3 3.18 4.08 MCF-150-4N 2.75 CF 4 3.18 4.08


These watercooled electrical feedthroughstransmit power and coolants simulta-neously. They conduct higher current loadsthan solid rod conductors of equal sizewhen properly cooled. Grounding of systemis necessary for safety.

The nickel rod conductors on theseelectrical feedthroughs offer an alternativeto copper for use in environments andprocesses that attack copper surfaces.



Copper Single High Current FeedthroughsModel Number Flange A B Price

HCF-NW-40-1 NW-40 3.81 4.13 HCF-NW-50-1 NW-50 3.81 4.13 HCF-150-1 2.75 CF 3.86 4.08


SPECIFICATIONS

• Current rating 600 amps• Voltage 3 KV Peak• Conductor OFHC® copper rod


A

1.0

.75

B

A

1.0

.75

B

NW

CF

A

1.0

.75

B

A

1.0

.75

B

NW

CF

SPECIFICATIONS

• Peak voltage 500V @10-4 Torr• Current 3 Amps• Electrical rating 500VDC• Atmosphere connector included• Use vacuum connector BNC-VC

(See page 25)

BNC Coaxial FeedthroughsModel NumberNumber Flange Feedthroughs A B C Price

BNC-NW-16-1 NW-16 1 1.43 .32 - BNC-NW-25-1 NW-25 1 1.43 .32 - BNC-NW-40-1 NW-40 1 1.33 .42 - BNC-NW-40-2 NW-40 2 1.33 .42 .75 BNC-NW-40-3 NW-40 3 1.33 .42 .75 BNC-NW-40-4 NW-40 4 1.43 .32 .90 BNC-NW-50-1 NW-50 1 1.33 .42 - BNC-NW-50-2 NW-50 2 1.33 .42 .75 BNC-NW-50-3 NW-50 3 1.33 .42 .75 BNC-NW-50-4 NW-50 4 1.33 .42 .90 BNC-075-1 1.33 CF 1 1.41 .34 - BNC-150-1 2.75 CF 1 1.38 .37 - BNC-150-2 2.75 CF 2 1.38 .37 .95 BNC-150-3 2.75 CF 3 1.38 .37 .95 BNC-150-4 2.75 CF 4 1.38 .37 .95

Dimensions in inchesThe BNC (Bayonet Naval Connection)electrical feedthrough consists of two con-centric conductor paths which are separatedand insulated with high-purity aluminaceramic. It is commonly used in 50 to 70ohm low power instrumentation lines.

BA

Atmosphere Plug Included

NW

CF

.50Ref.

.50Ref.

C

These electrical power feedthroughs accommodate ahigher electrical current due to the size of the copper rod.

Water Cooled Copper Single High Current FeedthroughsModel Number Flange A B Price

HCF-NW-40-1W NW-40 3.81 4.13 HCF-NW-50-1W NW-50 3.81 4.13 HCF-150-1W 2.75 CF 3.86 4.08


• Voltage 3 KV Peak• Conductor OFHC® Copper Tube

These watercooled electrical feedthroughsconduct the highest current loads whenproperly cooled. Grounding of system isnecessary.




SPECIFICATIONS

• Peak voltage 500V• Vacuum 10-4 Torr• Current 3 Amps• Atmosphere connector included• Use vacuum connector

MHV-VC (see page 25)

MHV Coaxial FeedthroughsModel NumberNumber Flange Feedthroughs A B C Price

MHV-NW-16-1 NW-16 1 1.43 .25 - MHV-NW-25-1 NW-25 1 1.43 .25 - MHV-NW-40-1 NW-40 1 1.33 .35 - MHV-NW-40-2 NW-40 2 1.33 .35 .75 MHV-NW-40-3 NW-40 3 1.33 .35 .75 MHV-NW-40-4 NW-40 4 1.43 .25 .90 MHV-NW-50-1 NW-50 1 1.33 .35 - MHV-NW-50-2 NW-50 2 1.33 .35 .75 MHV-NW-50-3 NW-50 3 1.33 .35 .75 MHV-NW-50-4 NW-50 4 1.33 .35 .90 MHV-075-1 1.33 CF 1 1.41 .27 - MHV-150-1 2.75 CF 1 1.38 .30 - MHV-150-2 2.75 CF 2 1.38 .30 .95 MHV-150-3 2.75 CF 3 1.38 .30 .95 MHV-150-4 2.75 CF 4 1.38 .30 .95


The MHV (Miniature High Voltage orHigh Voltage BNC) electrical feedthroughsoperate in medium to high power withhigher voltage requirements. MHV andBNC feedthroughs look similar but are verydifferent in electrical rating. They shouldnever be cross-mated since their electricalratings are not compatible.

BA

Atmosphere Plug Included

NW

CF

.50Ref.

.50Ref.

C

Electrical Feedthrough ConnectorsModel Use Max. CurrentNumber With Material (Amps) Quantity Price

MCF-VC Medium Current Beryllium Copper with SS Screws 100 10 per Pkg. BNC-VC BNC and MHV Beryllium Copper with SS Screws 15 10 per Pkg. IFT-VC 8-Pin Instrumentation Beryllium Copper 10 10 per Pkg.


.260

1.00

.50 Accepts wire up to .050 Diameter

Medium Current Connector BNC & MHV Connector

Socket accepts .094 Diameter Pin

Socket accepts .032 Diameter Pin

.69 .62

.25 Diameter

Accepts wire up to .032Diameter

.062Diameter

8-Pin InstrumentationConnector

MCF-VC BNC-VC IFT-VC



Nor-Cal’s product line of liquid and liquidnitrogen feedthroughs includes the mostcommonly required for general, high andultrahigh vacuum applications. Tubing is.25 and .375 inch OD, type 304 stainlesssteel with CF or NW flanges. They areavailable without fittings or terminatedwith industry standard Swagelok® orCajon® VCR tube fittings. Maximumbakeout with CF flanges is 4500C and2040C with NWs. Vacuum ranges are10-11 Torr and 10-8, respectively.

Watercooled liquid feedthroughs are acost-effective and reliable way to introducewater into a vacuum system. The .035inch single wall tube construction isdesigned for the transmission of wateras a cooling agent.

Liquid nitrogen feedthroughs areconstructed with dual and coaxial tubegeometries. This thermal barrier effec-tively reduces condensation and icebuildup on the atmosphere side of the

LIQUID FEEDTHROUGHS

feedthrough around the mounting flangeinterface, protecting the seal’s integrity.This is necessary because of the extremethermal gradients encountered withliquid nitrogen.

Swagelok® stainless steel tube compres-sion fittings provide a leakproof, torque-free vacuumseal by swagingthe stainlesssteel tube towhich they aremated. Theyrequire nogaskets.

Cajon® VCRstainless steeltube compres-sion fittingsproperly handlerapid makeup intube, pipe andwelded vacuum

systems. These zero clearance fittingsmake them the perfect installation solutionwhen space is a problem. Compression ofa removable copper gasket creates avacuum seal between air andprocess sides.

CF

BA

NW

BA

Single Liquid FeedthroughsModel Number Flange Tube Fittings Tube OD A B Price

LFT-NW-16-1-025 NW-16 None .250 3.00 4.00 LFT-NW-25-1-025 NW-25 None .250 3.00 4.00 LFT-NW-25-1-025-2SW NW-25 2 Swagelok® .250 3.91 4.91 LFT-NW-25-1-025-2MVCR NW-25 2 MVCR .250 4.03 5.03 LFT-NW-40-1-025 NW-40 None .250 3.00 4.00 LFT-NW-40-1-025-2SW NW-40 2 Swagelok® .250 3.91 4.91 LFT-NW-40-1-025-2MVCR NW-40 2 MVCR .250 4.03 5.03 LFT-NW-40-1-038 NW-40 None .375 3.00 4.00 LFT-NW-50-1-025 NW-50 None .250 3.00 4.00 LFT-NW-50-1-025-2SW NW-50 2 Swagelok® .250 3.91 4.91 LFT-NW-50-1-025-2MVCR NW-50 2 MVCR .250 4.03 5.03 LFT-NW-50-1-038 NW-50 None .375 3.00 4.00 LFT-075-1-025 1.33 CF None .250 3.00 4.00 LFT-075-1-038 2.75 CF None .375 3.00 4.00 LFT-150-1-025 2.75 CF None .250 3.00 4.00 LFT-150-1-025-2SW 2.75 CF 2 Swagelok® .250 3.91 4.91 LFT-150-1-025-2MVCR 2.75 CF 2 MVCR .250 4.03 5.03 LFT-150-1-038 2.75 CF None .375 3.00 4.00




LIQUID FEEDTHROUGHS

Dual Liquid FeedthroughsModel Number Flange Tube Fittings Tube OD A B Price

LFT-NW-40-2-025 NW-40 None .250 3.00 4.00 LFT-NW-40-2-025-4SW NW-40 4 Swagelok® .250 3.91 4.91 LFT-NW-40-2-025-4MVCR NW-40 4 MVCR .250 4.03 5.03 LFT-NW-50-2-025 NW-50 None .250 3.00 4.00 LFT-NW-50-2-025-4SW NW-50 4 Swagelok® .250 3.91 4.91 LFT-NW-50-2-025-4MVCR NW-50 4 MVCR .250 4.03 5.03 LFT-150-2-025 2.75 CF None .250 3.00 4.00 LFT-150-2-025-4SW 2.75 CF 4 Swagelok® .250 3.91 4.91 LFT-150-2-025-4MVCR 2.75 CF 4 MVCR .250 4.03 5.03 LFT-150-2-038 2.75 CF None .375 3.00 4.00


Single Liquid Nitrogen FeedthroughsModel Number Flange Tube Fittings Tube OD A B Price

LNF-NW-16-1-025 NW-16 None .250 5.50 4.40 LNF-NW-25-1-025 NW-25 None .250 5.50 4.50 LNF-NW-25-1-025-2SW NW-25 2 Swagelok® .250 6.41 5.41 LNF-NW-25-1-025-2MVCR NW-25 2 MVCR .250 6.53 5.53 LNF-NW-40-1-025 NW-40 None .250 5.50 4.50 LNF-NW-40-1-025-2SW NW-40 2 Swagelok® .250 6.41 5.41 LNF-NW-40-1-025-2MVCR NW-40 2 MVCR .250 6.53 5.53 LNF-NW-40-1-038 NW-40 None .375 5.50 4.50 LNF-NW-50-1-025 NW-50 None .250 5.50 4.50 LNF-NW-50-1-025-2SW NW-50 2 Swagelok® .250 6.41 5.41 LNF-NW-50-1-025-2MVCR NW-50 2 MVCR .250 6.53 5.53 LNF-NW-50-1-038 NW-50 None .375 5.50 4.50 LNF-075-1-025 1.33 CF None .250 5.50 4.50 LNF-075-1-038 1.33 CF None .375 5.50 4.50 LNF-150-1-025 2.75 CF None .250 5.50 4.50 LNF-150-1-025-2SW 2.75 CF 2 Swagelok® .250 6.41 5.41 LNF-150-1-025-2MVCR 2.75 CF 2 MVCR .250 6.53 5.53 LNF-150-1-038 2.75 CF None .375 5.50 4.50


CF

BA

NW

BA

NWCF

A BA B



LIQUID FEEDTHROUGHS

Dual Liquid Nitrogen FeedthroughsModel Number Flange Tube Fittings Tube A B C D Price

LNF-NW-40-2-025 NW-40 None .250 6.50 3.50 5.50 4.50 LNF-NW-40-2-025-4SW NW-40 4 Swagelok® .250 7.41 4.41 6.41 5.41 LNF-NW-40-2-025-4MVCR NW-40 4 MVCR .250 7.53 4.53 6.53 5.53 LNF-NW-50-2-025 NW-50 None .250 6.50 3.50 5.50 4.50 LNF-NW-50-2-025-4SW NW-50 4 Swagelok® .250 7.41 4.41 6.41 5.41 LNF-NW-50-2-025-4MVCR NW-50 4 MVCR .250 7.53 4.53 6.53 5.53 LNF-150-2-025 2.75 CF None .250 6.50 3.50 5.50 4.50 LNF-150-2-025-4SW 2.75 CF 4 Swagelok® .250 7.41 4.41 6.41 5.41 LNF-150-2-025-4MVCR 2.75 CF 4 MVCR .250 7.53 4.53 6.53 5.53 LNF-150-2-038 2.75 CF None .375 6.50 3.50 5.50 4.50


A

C D

B A

C D

BNWCF



THIN FILM COATING INSTRUMENTATION

MonitorSource Shutter

Sensor

Ground Wire

10' CableOscillator

Holder & Crystal

In-Vac Cable

Feedthrough

6" Cable

Cabling from Oscillator to Sensor must not exceed 48"(See page 32 for cable selections)

Typical Thin FilmCoating System

SPECIFICATIONS

• Temperature Range 100 to 400C• Frequency Range 6.0 to 4.0 MHz• Aluminum die-cast material• BNC connectors

3.82

MonitorBNC Connection (Male)

FeedthroughBNC Connection (Female)

2.25

.88Remote

Oscillator

Remote OscillatorModelNumber Description Price

CO-A Remote Oscillator for use with rate and thickness deposition monitor


MONITORSPECIFICATIONS

• RS232 port connects to PC• Windows based software included• Easy to read alphanumeric LED display• Programmable frequency 6.0 to 4.0 MHz• Rate averaging

1 to 20 readings• Measurement rate 0.15 to 2 seconds• Frequency resolution 0.1 Hz• Thickness resolution 1 A

0

• Rate resolution selectable0.1 or 0.01 A

0

/s• Measurement rate 0.15 to 2 seconds• Input/Output, 4 relays and

4 input control• 120/240 VAC 20 VA power• Mounting brackets included• Width/Height - 8.375 x 3.50

Depth - 7.75• 9 layers recorded

Nor-Cal offers an extensive selection ofcommonly used quartz crystal feedthroughs,sensors and multi-channel monitors, cables,quartz crystals, accessories and replacementparts for use in semiconductor, optical andindustrial thermal deposition processes.Custom feedthroughs are available with avariety of flanges in all sizes.

Our coating instrumentation productssupport one of the more popular methodsof thin film measurement and rate control _

the crystal monitor, which utilizes the piezo-electric properties of a quartz crystal.

The electrical characteristics of the crystal,which is held in place by the sensor, changeduring deposition. Single sensors aregenerally used for short deposition runs,whereas, dual sensors allow for longer runs.Dual sensors require an airline to operate apneumatic shutter which covers one crystalat a time. The sensor is either welded to thefeedthrough or attached with connectors.Most sensors are available with cooling lines.

The application determines the correctchoice of sensor. The sensor determinescompatible feedthroughs and cabling.The chamber determines the appropriatefeedthrough and flange. For applicationtemps up to 1500C, electrical connectionbetween the sensor and feedthrough isaccomplished with a vacuum coaxial cable.A bakeable, one piece sensor/feedthroughreplaces the standard in-vac cable with astainless steel high-temp coaxial line forhigh temperature applications up to 3000C.

The feedthrough is the air-to-vacuumconnection between the sensor and theoscillator. The feedthrough transfers thequartz crystal’s piezo-electric vibrations tothe oscillator via a short coaxial cable.The oscillator conditions the signals andtransfers them to the monitor via anothercoaxial cable. The monitor then measures,interprets and displays the thickness, rateand frequency of deposition. Nor-Cal’s thinfilm deposition monitors are available withup to six independent channels to read sixsingle sensors or three dual sensorssimultaneously. Each sensor requires itsown cabling and oscillator. Contact oursales staff for help with your systemconfiguration.

Our deposition monitor measures filmthickness/rate or frequency using crystalsas the sensor device. Independent chan-nels monitor different films or averagedifferent sensors together to provide amore uniform deposition measurement.

Deposition MonitorsModelNumber Description Price

CM-2 Two Channels CM-6 Six Channels




CF Flanged Crystal FeedthroughsModel CF FlangeNumber Size Description Price

CF-133-1 1.33 1 Microdot® to BNC CF-275-1-W 2.75 1 Microdot® to BNC, 2 cooling lines CF-275-1-WC 1.33 1 Microdot® to BNC, 2 cooling lines with compression fittingsCFP-275-2-W 2.75 1 Microdot® to BNC, 2 cooling lines, 1 air line


SPECIFICATIONS

• Operating temperature up to 1500C• Vacuum Leak Rate <10-9 Atm

cc/sec Helium• 304 stainless steel, TIG welded• 1.00 inch max. baseplate thickness• 1.25 inch bolt feedthroughs available

SPECIFICATIONS

• Operating temperature up to 1500C• Vacuum Leak Rate <10-9 Atm

cc/sec Helium• 304 stainless steel, TIG welded• NW, ISO and ASA flanged

feedthroughs available

Gold and aluminum alloy crystals, crystal holders, cables and reducing union connectors available on page 32.

1” Bolt Crystal FeedthroughsModelNumber Description Price

CF-100-1 1 Microdot® to BNC CF-100-1-W 1 Microdot® to BNC, 2 cooling lines CF-100-1-WC 1 Microdot® to BNC, 2 cooling lines with compression fittings CFP-100-2-W 2 Microdot® to Microdot®, 2 cooling lines, 1 air line


1.33 CF Mini Flange

Microdot® Connector

2.50

BNC Connector

CF-133-1


1/8" Compression Fittings

2.00

1.10

2.75 CF Flange

BNC Connector

CF-275-1-W

9.002.50

2 Microdot® Connectors

2 BNC Connectors

2.75 CF Flange

2.75 CF Flange

SS Tubes: 3/16 OD .128 ID

4.00

CFP-275-2-W

9.002.00


BNC Connector

2.75 CF Flange

2.75 CF Flange


4.00

CF-275-1-WC

1.70 Microdot® Connector

BNC Connector

1.50 Hex

1.00

CF-100-1

12.00


BNC Connector

1.70 5.30


1.50 Hex1.00

CF-100-1-W

1.70

5.013.70

1/8" CompressionFittings

BNC Connector


1.50 Hex

1.00CF-100-1-WC


12.00"

Microdot® Connectors


1.70

5.301.00

1.5 Hex1.00

CFP-100-2-W




1.10

.975

Crystal Sensor Mounting Holes

Crystal Sensor

30.00

30.00

Microdot® Connector 1.00

.57

1.00

Back Cover Plate

Two Cooling Lines(.125 OD SS Tube)


Crystal SensorsModelNumber Description Price

CS-1 Compact single sensor with mounting bracket included CS-1-W Single sensor, water cooled CS-1-W-RA Single sensor at 900 angle, water cooled CSP-2-W Dual sensor, pneumatic shutter, water cooled CSP-2-W-RA Dual sensor at 900 angle, pneumatic shutter, water cooled CSH-275-1-W Single sensor with feedthrough, bakeable to 3000C, water cooled


Microdot® Connector1.10

Cooling LinesCrystal Sensor (.125 OD SS Tube)

SPECIFICATIONS

• Fast, easy crystal replacement• 6 MHz gold and aluminum alloy crystals• TIG welded, robust 304

stainless steel construction• Operating temperature up to 2250C• Vacuum Leak Rate <10-9 Atm

cc/sec Helium• Custom lengths and bends available

CS-1

CS-1-W

CS-1-W-RA

30.00


Crystal Sensor

1.03

1.29

2.60

Shutter Actuator

Air Line

Two Cooling Lines

Shutter

(.125 OD SS Tube)

(.125 OD SS Tube)Deposition Shield for Actuator Piston

CSP-2-W

CSH-275-1-W

Gold and aluminum alloy crystals,crystal holders, cables and reducing union

connectors available on next page.

30.00


1.35

Air Line

3.75

Shut

ter E

xten

ded Cooling Line

Cooling Line

Pneumatic Actuator

(.125 OD SS Tube)

(.125 OD SS Tube)

(.125 OD SS Tube)

CSP-2-W-RA

Specify length and bend

4.25

BNC Connector

.25 Rigid 304 SS Coaxial Tube

2.75 CF Flange

3.50

Crystal Sensor




Cables and ConnectorsModelNumber Description Length Price

CCV-MM-30* Microdot® to Microdot® in-vacuum coaxial cable, metal sheath. Connects feedthrough to sensor. 30.75 CCV-MM-30T* Microdot® to Microdot® in-vacuum coaxial cable, Teflon coated metal sheath. Connects feedthrough to sensor. 30.75 CCA-BB-6 BNC to BNC cable (Male to Female). Connects feedthrough to oscillator. 6.00 CCA-BM-6 BNC to Microdot cable. Connects feedthrough to oscillator. 6.00 CCA-BB-10 BNC to BNC cable (Male to Male). Connects oscillator to monitor. 120.00 CRU-1 Reducing union tube connector 3/16 to 1/8. Connects cooling and air lines between feedthough and sensor Each

*Add $13.00 for special lengths Dimensions in inches

Quartz Crystals and AccessoriesModelNumber Description Quantity Price

CQ-G 6MHz gold, .550 diameter Pkg. of 10 CQ-A 6MHz aluminum alloy, .550 diameter Pkg. of 10 CH-1 Replacement crystal holder Each


Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 4/03

NEW PRODUCTS

Manual Ball ValvesBall valves are a low cost, manually operated, straightthrough isolation device. Their simple, robust designprovides high reliability in “dirty” applications. Theyare commonly used on MOCVD and CVD equipmentdownstream from the chamber or vacuum pump toisolate traps or abatement tools. A forged 316Lstainless steel body and Teflon® seat make thesevalves ideal for corrosive environments. Otherapplications include vacuum and other facilitiesrequirements. A quarter-turn of the handle quicklyswitches the valve from open to close. Nor-Cal BallValves are available with NW-16 through 50 flangesas standards. Call for other flange configurations.

IQ Series Intellisys Throttling ButterflyValve with On-Valve ControllerNor-Cal Products’ IQ-Series IntellisysTM Throttling Butterfly Valve with on-valve control features the same patented closed loop motor control andproven adaptive pressure control algorithm found in Nor-Cal’s stand-alone pressure controller. The high performance controller/valve willrotate from fully open to closed in 1/8 second with over 100,000 steps ofaddressable control resolution. Wafer through-put increases of 5 to 15%with 2 to 10 fold reductions in wafer scrap are possible. The IQ valve’sfootprint is smaller by over 90% than typical “buried box” controllers andby over 60% than competitive “integral controller” products. DeviceNETTM,RS-232 serial or RS-485 MODBUS communication. For more informationrefer to the separate Intellisys Adaptive Pressure Control brochure locatedin the Valves section of this binder.



GENERAL INFORMATION

BakeabilityStandard valves are bakeable to 204˚C forintermittent periods. However, the Viton®

O-rings begin to take a set at 150˚C. Hightemperature Kalrez® O-rings are available asan option and allow these valves to be bakedto 316˚C for intermittent periods and 280˚C forextended periods. Bakeable all-metal poppetvalves are offered for 400˚C bakeouts.Heater jackets are available for all valves.

Valve ActuationManually operated valves, available with portODs up to 3 inches, utilize Acme threads and aself-lubricating bronze nut for fewer turns andsmooth, trouble-free operation.Pneumatic valves are normally air-to-open,spring-to-close in port ODs through 2 inchesfor immediate closure in case of electricalor air failure. Larger valves are air-to-open,air-to close as are all valves as an option.Fail-Safe valves are air-to-open, spring-to-close and are available in 2.5, 3 and 4 inchsizes. Most sizes are available with air-toopen, air-to-close with spring assist as anoption. Operating air pressure for allpneumatic valves is 60 to 80 psig.

Poppet Valve Conductance Liters per second Angle or Tee Angle-In-Line In-Line Straight-Through

OD Viscous Molecular Viscous Molecular Viscous Molecular Viscous Molecular

0.50 4 3 - - 3 2 - -0.75 9 5 8 4 7 4 6 41.00 26 12 19 9 18 8 - -1.12 - - - - - - 29 111.50 128 37 88 25 84 24 80 232.00 311 65 230 48 207 44 - -2.50 820 136 499 83 506 84 - -3.00 1580 217 835 115 948 130 - -4.00 3856 396 - - 2299 236 - -


ConstructionOur poppet valves are fully opening for highconductance and to prevent bellows andpoppet contamination in semiconductorapplications. Bodies are die-formed from304 stainless steel to eliminate sharp insidecorners and improve conductance. Thevalves are electropolished for faster pump-down, lower outgassing and better corrosionresistance. The welded bellows are madefrom AM-350 stainless steel to providecorrosion resistance and excellent flexibility.They are designed with additional segmentsto provide extended life. Nor-Cal valves canbe operated in any position and actuators canbe removed quickly for routine inspectionwithout disassembling the system.

ModelsNor-Cal’s poppet valves are available inmost port configurations from .38 to 4.0 inchODs with CF, NW, ISO or ASA flanges. Angle,Angle-In-Line, In-Line, Tee and Straight-Through valves through 3 inch OD's are allavailable with manual or pneumatic actuatorsand Viton® or copper seal bonnets. Sizes 4.0inches and larger are available with pneu-matic actuators only.Bakeable all-metal valves with right angleport configuration are manufactured with.75 to 2.5 inch OD ports and CF flanges.Gate valves are available with nominal IDs of1.5 to 12 inches with CF, NW, ISO and ASAflanges. Bonnets are either copper or Viton®

sealed with manual or pneumatic actuators.(See gate valve specifications on Page 27.)

Since we have been improving our designs and expanding our product line in order to offer the vacuum industry stainless steel valves foralmost every application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and com-pound semiconductor processing.

Vacuum RangePoppet seals and welds have helium leakrates of 10-9 std. cc./sec. or less. Viton®

sealed valves can be used in the 10-9 Torrrange, while copper seal valves are suited foruse in the 10-10 range. Bakeable All-Metalvalves are vacuum rated to below 10-10 Torr.

The conductance values in the adjacenttable have been calculated for air at roomtemperature using the formulas for tubesand elbows presented in the third edition ofRoth's, Vacuum Technology: Cv=12(D4/L') for viscous flow or Cm=12(D3/L') for molecular flow L'=Laxial +1.33(0/180)D for elbowsPort lengths without flanges and inner diameters forthe valve sizes and configurations were used. Thismethod is an approximation, use values accordingly.

Copper Seal BonnetsCopper seal bonnet valves with CF flangesprovide metal seals between the inside of thevalve and the atmosphere. They are availablein all standard sizes and port configurations.

Poppet ValveGeneral Specifications

• Electropolished 304 stainlesssteel die-formed body

• 15 micron filter on air cylinder exhaust• Full opening• Viton® poppet O-ring, standard• .38 to 4.0 inch port ODs• Helium leak rate 10-9 std. cc./sec. or less• Viton® Seal Bonnet:

10-9 Torr vacuum rating,Bakeable to 204˚C intermittent,CF, NW, ISO and ASA flanges

• Copper Seal Bonnet:10-10 Torr vacuum rating, CF flanges,bakeable to 204˚C intermittent

• Pneumatically Operated: Normally closed,60 to 80 psig operating air pressure

• Maximum differential pressure20 psi across valve seat

• External differential presures greaterthan 5 psi on the bellows may resultin premature bellows failure

Options

• Micro-switch• Actuators• O-rings

• Fittings• Air Solenoids• Heater Jackets



OPTIONS

Actuator OptionsAll pneumatically actuated valves with air-to-open, spring-to-close actuators (port ODsthrough 2 inches) can be furnished with air-to-open, air-to-close actuators at no extra charge.Air-to-open, air-to-close actuators with a spring assist can be furnished for an additional $25.00.

O-ring OptionsStandard Nor-Cal valves use chemical resistant Viton® O-rings for closure. Viton O-ringsshould not be heated to above 204˚C. Even prolonged exposures of 150˚C may degradethe O-rings. The following special O-rings can be provided as options:

• High temperature Kalrez® O-rings allow the valve to be baked to 316˚C intermittentlyor 280˚C for prolonged periods where the O-ring is allowed to expand.

• Silicone O-rings provide adequate sealing performance in thermal cycling from -65˚C to 232˚C.

• Chemical resistant Kalrez® and Chemraz® are also available.

Micro-Switch OptionsThe Micro-Switch Option is available on all pneu-matically actuated Nor-Cal valves. Add $100.00to valve cost. A pair of 5-amp micro-switchesare opened or closed by the movement of the valvestem. One switch closes when the valve is fullyopen and the other when it is fully closed. Thesecan be connected to control panels with alarms orlights for positive position indication. Normally,electrical leads are approximately ten inches long,but may be cut to any length upon request.

PortOD A

.38 2.06

.50 2.06

.75 2.061.00 2.061.50 3.292.00 3.543.00 3.544.00 5.01


A

C

Micro-Switch Position Indicator

How to Specify OptionsSeveral options are available on poppetvalves. The options are described indetail on these two pages. One or moreoptions can be added to a particular valveby adding the option suffix to the basicvalve model number.

Please add option suffixesin the following order:

1. Actuator: "-A"= air-to-open, air-to-close "-AS"= air-to-open, air-to-close with spring assist "-SA"=spring-to-open, air-to-close

2. Micro-switch: "-M"

3. O-ring: "-KT" = high temp Kalrez®

"-KC" = chemical resistant Kalrez®

"-CR" = Chemraz®

"-S" = Silicone

4. Angle Valve Fitting: (see table below)

5. Air Solenoid: (see table next page)

Examples of modelnumbers with options: ESVP-1502-CF-AS-M-S11 or CAIVP-3002-ISO-S-S32 or CSV-1002-NW-CR-F2

Right Angle Valve Fitting OptionsAll Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models)are available with the six fitting options described in the followingtable. These options are designed to make it easy for our customersto retrofit our valves with thermocouple gauges, leak valves, up-to-airvalves or gas introduction lines. Other fittings or configurations areavailable upon request.

PortOD A.75 1.501.00 1.221.50 1.622.00 2.252.50 2.253.00 2.44 4.00 3.22Dimensions

in inches

Add toOption Profile Description Ports Valve Price

F1 Left 1⁄4 Female VCR Both F2 Left 3⁄8 Female VCR Both F3 Left 1⁄8 Female NPT Bottom F4 Right 1⁄4 Female VCR Both F5 Right 3⁄8 Female VCR Both F6 Right 1⁄8 Female NPT Bottom

Note: Available on ESV, ESVP, CSV and CSVP models only. Dimensions in inches

A

A

A

A

Right ProfileLeftProfile



OPTIONS

Thermal ProductsAll Nor-Cal poppet valves and gate valves can be provided withsilicone foam or fiberglass insulated heater jackets to reduceresident time of corrosives or particle buildup in semiconduc-tor applications. These jackets are available with PID control-lers or thermostats with high temperature shutoffs. Jacketand control specifications can be tailored to meet your specificneeds. Call for price and model number. Refer to the ThermalProducts catalog located in this binder for more information.

Air Solenoid OptionsAll pneumatic poppet valves can be provided with air solenoids with several current ratingsfor electropneumatic actuation. (Gate valves come standard with a 120V, 50/60Hz airsolenoid valve. See solenoid chart for gate valves on page 27) Valves with air-to-open,spring-to-close actuation require three-way air solenoids, while air-to-open, air-to-closeactuators require four-way solenoids (see table above). Both three and four-way airsolenoids are available in four current ratings. A pneumatic valve ordered with this optionwill arrive with an air solenoid installed. Fourteen inch long electrical leads are providedfor connection to the power supply. Air solenoids can be purchased separately in a kitcomplete with instructions for installation by the customer. When placing your orderplease specify the model number of the valve that the air solenoid will be installed on,so that our sales staff can confirm whether a three-way or four-way solenoid is required.

Port OD Option Kit Description Price

.38 through 2.0 S11 S11-K 3-way 120V AC, 50/60 Hz S21 S21-K 3-way 24V DC S31 S31-K 3-way 240V AC, 50/60 Hz S41 S41-K 3-way 24V AC, 50/60 Hz

2.5 thru 4.0* S12 S12-K 4-way 120V AC, 50/60 Hz S22 S22-K 4-way 24V DC S32 S32-K 4-way 240V AC, 50/60 Hz S42 S42-K 4-way 24V AC, 50/60 Hz

* Use 4-way solenoid option for 1.12 and 1.5 OD STVP and CSTVP models. Dimensions in inches

and all Fail-Safevalve sizes*



Manually Operated Viton Seal Angle ValvesModel PortNumber OD Description A B C D Price

ESV-038 .38 No Flanges 1.50 4.06 4.44 2.25 ESV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.54 2.25 ESV-0382-NWB NW-10B on Both Ports 1.65 4.21 4.59 2.25 ESV-050 .50 No Flanges 1.50 4.06 4.56 2.25 ESV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.66 2.25 ESV-0502-NWB NW-10B on Both Ports 1.65 4.21 4.71 2.25 ESV-075 .75 No Flanges 2.00 4.56 5.31 2.25 ESV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 5.06 5.81 2.25 ESV-0752-NWB NW-16B on Both Ports 2.15 4.71 5.46 2.25 ESV-100 1.00 No Flanges 1.88 4.32 5.32 2.25 ESV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 4.49 5.49 2.25 ESV-1002-NWB NW-25B on Both Ports 2.03 4.47 5.47 2.25 ESV-150 1.50 No Flanges 2.25 5.63 7.13 3.00 ESV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 5.84 7.34 3.00 ESV-1502-NWB NW-40B on Both Ports 2.40 5.78 7.28 3.00 ESV-200 2.00 No Flanges 3.25 7.85 9.85 3.50 ESV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 8.08 10.08 3.50 ESV-2002-NWB NW-50B on Both Ports 3.40 8.00 10.00 3.50 ESV-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 8.10 10.10 3.50 ESV-250 2.50 No Flanges 3.00 8.27 10.77 4.00 ESV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 8.65 11.15 4.00 ESV-2502-ISO ISO-63-250-OF on Both Ports 3.25 8.52 11.02 4.00 ESV-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 8.52 11.02 4.00 ESV-300 3.00 No Flanges 3.25 8.68 11.68 4.50 ESV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 8.96 11.96 4.50 ESV-3002-ISO ISO-80-300-OF on Both Ports 3.50 8.93 11.93 4.50 ESV-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 8.93 11.93 4.50


MANUALLY OPERATED ANGLE VALVES

Specifications

• Electropolished 304stainless steel body

• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton® Seal Bonnet:

10-9 Torr vacuum rating,CF, NW, ISO and ASA flanges

Options

• Fittings• O-rings• Heater Jackets

Bored NW FlangesISO, CF or ASA Flanges

A

A

CB

D

A

A

A

A

ESV O-Ring Kits Port OD Model Number Price

.38-1.0 ESV-075-95 1.5 ESV-150-95 2.0 ESV-200-95 2.5 ESV-250-95 3.0 ESV-300-95




MANUALLY OPERATED ANGLE VALVES

Manually Operated Copper Seal Bonnet Angle Valves Model Port Number OD Description A B C D Price

CSV-038 .38 No Flanges 1.50 4.06 4.44 2.73 CSV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.54 2.73 CSV-050 .50 No Flanges 1.50 4.06 4.56 2.73 CSV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.66 2.73 CSV-075 .75 No Flanges 2.00 4.56 5.31 2.73 CSV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 5.06 5.81 2.73 CSV-100 1.00 No Flanges 1.88 4.32 5.32 2.73 CSV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 4.49 5.49 2.73 CSV-150 1.50 No Flanges 2.25 5.63 7.13 3.25 CSV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 5.84 7.34 3.25 CSV-200 2.00 No Flanges 3.25 7.85 9.85 4.05 CSV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 8.08 10.08 4.05 CSV-250 2.50 No Flanges 3.00 8.27 10.77 4.61 CSV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 8.65 11.15 4.61 CSV-300 3.00 No Flanges 3.25 8.68 11.68 5.62 CSV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 8.96 11.96 5.62


Specifications

• Electropolished 304 stainless steel body• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Copper Seal Bonnet: 10-10 Torr

vacuum rating, CF flanges

Options

• Fittings• O-rings• Heater Jackets

CSV O-Ring and Gasket Kits Port OD Model Number Price

.38-1.0 CSV-075-95 1.5 CSV-150-95 2.0 CSV-200-95 2.5 CSV-250-95 3.0 CSV-300-95


A

A

CB

D

A

A

RotatableCF Flanges



PNEUMATICALLY ACTUATED ANGLE VALVES

Pneumatically Actuated Viton Seal Angle ValvesModel PortNumber OD Description A B C D Price

ESVP-038 .38 No Flanges 1.50 3.62 5.77 2.25 ESVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 3.72 5.87 2.25 ESVP-0382-NWB NW-10B on Both Ports 1.65 3.77 5.92 2.25 ESVP-050 .50 No Flanges 1.50 3.62 5.77 2.25 ESVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 3.72 5.87 2.25 ESVP-0502-NWB NW-10B on Both Ports 1.65 3.77 5.92 2.25 ESVP-075 .75 No Flanges 2.00 4.12 6.26 2.25 ESVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 4.62 6.76 2.25 ESVP-0752-NWB NW-16B on Both Ports 2.15 4.27 6.41 2.25 ESVP-100 1.00 No Flanges 1.88 3.88 6.02 2.25 ESVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 4.05 6.19 2.25 ESVP-1002-NWB NW-25B on Both Ports 2.03 4.03 6.17 2.25 ESVP-150 1.50 No Flanges 2.25 4.98 7.56 3.00 ESVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 5.19 7.77 3.00 ESVP-1502-NWB NW-40B on Both Ports 2.40 5.13 7.71 3.00 ESVP-200 2.00 No Flanges 3.25 6.74 11.23 3.50 ESVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 6.97 11.46 3.50 ESVP-2002-NWB NW-50B on Both Ports 3.40 6.89 11.38 3.50 ESVP-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 6.99 11.48 3.50 ESVP-250 2.50 No Flanges 3.00 7.18 10.10 4.00 ESVP-2502-CF 4.50 CF on Both Ports 3.38 7.56 10.48 4.00 .ESVP-2502-ISO ISO-63-250-OF on Both Ports 3.25 7.43 10.35 4.00 ESVP-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 7.43 10.35 4.00 ESVP-300 3.00 No Flanges 3.25 7.62 11.00 4.50 ESVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 7.90 11.28 4.50 ESVP-3002-ISO ISO-80-300-OF on Both Ports 3.50 7.87 11.25 4.50 ESVP-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 7.87 11.25 4.50 ESVP-400 4.00 No Flanges 4.22 9.55 14.99 6.50 ESVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 9.99 15.43 6.50 ESVP-4002-ISO ISO-100-400-OF on Both Ports 4.47 9.80 15.24 6.50 ESVP-4002-ASA Rotatable ASA-7.5-400R on Both Ports 4.47 9.80 15.24 6.50


ESVP O-Ring Kits Port OD Model Number Price

.38-1.0 ESVP-075-95 1.5 ESVP-150-95 2.0 ESVP-200-95 2.5 ESVP-250-95 3.0 ESVP-300-95 4.0 ESVP-400-95


A

A

C

B

D

Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38 to 4 inch port ODs• .38 to 2 inch OD: air-to-open,

spring-to-close• Over 2 inch OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚C intermittent• Viton® Seal Bonnet:


Options• Fittings, O-rings and Air Solenoids• Micro-Switch and Actuators • Heater Jackets



PNEUMATICALLY ACTUATED ANGLE VALVES

Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38 to 4 inch port ODs• .38 to 2 inch OD: air-to-open,

spring-to-close• Over 2 inch OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚C intermittent• Copper Seal Bonnet:

10-10 Torr vacuum rating, CF flanges

Options• Fittings, O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets

Pneumatically Actuated Copper Seal Bonnet Angle ValvesModel PortNumber OD Description A B C D Price

CSVP-038 .38 No Flanges 1.50 3.75 5.77 2.73 CSVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 3.85 5.82 2.73 CSVP-050 .50 No Flanges 1.50 3.75 5.77 2.73 CSVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 3.85 5.82 2.73 CSVP-075 .75 No Flanges 2.00 4.25 6.26 2.73 CSVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 4.75 6.76 2.73 CSVP-100 1.00 No Flanges 1.88 4.00 6.02 2.73 CSVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 4.17 6.19 2.73 CSVP-150 1.50 No Flanges 2.25 4.98 7.56 3.25 CSVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 5.19 7.77 3.25 CSVP-200 2.00 No Flanges 3.25 6.62 11.23 4.05 CSVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 6.85 11.45 4.05 CSVP-250 2.50 No Flanges 3.00 7.18 10.10 4.61 CSVP-2502-CF Rotatable 4.50 CF on Both Ports 3.38 7.56 10.48 4.61 CSVP-300 3.00 No Flanges 3.25 7.62 11.00 5.62 CSVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 7.90 11.28 5.62 CSVP-400 4.00 No Flanges 4.22 9.55 14.99 6.73 CSVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 9.99 15.43 6.73


A

A

C

B

D

CSVP O-Ring & Gasket Kits Port OD Model Number Price

.38-1.0 CSVP-075-95 1.5 CSVP-150-95 2.0 CSVP-200-95 2.5 CSVP-250-95 3.0 CSVP-300-95 4.0 CSVP-400-95




MANUALLY OPERATED ANGLE-IN-LINE VALVES

Specifications

• Electropolished 304 stainless steel body• .75 to 3.0 inch port OD's• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton Seal Bonnet:

10-9 Torr vacuum rating,CF, NW and ISO flanges

Options

• O-rings• Heater Jackets

Manually Operated Viton Seal Angle-In-Line Valves Model Port Number OD Description A B C D Price

AIV-075 .75 No Flanges 3.70 3.47 4.01 2.25 AIV-0752-CF Rotatable 1.33 CF on Both Ports 4.70 3.47 4.01 2.25 AIV-0752-NWB NW-16B on Both Ports 4.00 3.47 4.01 2.25 AIV-100 1.00 No Flanges 3.90 3.42 4.14 2.25 AIV-1002-CF Rotatable 2.12 CF on Both Ports 4.23 3.42 4.14 2.25 AIV-1002-NWB NW-25B on Both Ports 4.20 3.42 4.14 2.25 AIV-150 1.50 No Flanges 4.82 4.55 5.61 3.00 AIV-1502-CF Rotatable 2.75 CF on Both Ports 5.24 4.55 5.61 3.00 AIV-1502-NWB NW-40B on Both Ports 5.12 4.55 5.61 3.00 AIV-200 2.00 No Flanges 6.70 6.19 9.15 3.50 AIV-2002-CF Rotatable 3.38 CF on Both Ports 7.15 6.19 9.15 3.50 AIV-2002-NWB NW-50B on Both Ports 7.00 6.19 9.15 3.50 AIV-250 2.50 No Flanges 7.75 6.99 10.31 4.00 AIV-2502-CF Rotatable 4.50 CF on Both Ports 8.50 6.99 10.31 4.00 AIV-2502-ISO ISO-63-250-OF on Both Ports 8.25 6.99 10.31 4.00 AIV-300 3.00 No Flanges 10.05 7.71 11.38 4.50 AIV-3002-CF Rotatable 4.62 CF on Both Ports 10.61 7.71 11.38 4.50 AIV-3002-ISO ISO-80-300-OF on Both Ports 10.55 7.71 11.38 4.50


Bored NW FlangesISO or CF Flanges

B

A

C

D

A A

AIV O-Ring Kits Port OD Model Number Price

.38 - 1.0 ESV-075-95 1.5 ESV-150-95 2.0 ESV-200-95 2.5 ESV-250-95 3.0 ESV-300-95




MANUALLY OPERATED ANGLE-IN-LINE VALVES

CF Flanges

Manually Operated Copper Seal Bonnet Angle-In-Line ValvesModel PortNumber OD Description A B C D Price

CAIV-075 .75 No Flanges 3.70 3.47 4.01 2.73 CAIV-0752-CF Rotatable 1.33 CF on Both Ports 4.70 3.47 4.01 2.73 CAIV-100 1.00 No Flanges 3.90 3.42 4.14 2.73 CAIV-1002-CF Rotatable 2.12 CF on Both Ports 4.48 3.42 4.14 2.73 CAIV-150 1.50 No Flanges 4.82 4.55 5.61 3.25 CAIV-1502-CF Rotatable 2.75 CF on Both Ports 5.24 4.55 5.61 3.25 CAIV-200 2.00 No Flanges 6.70 6.19 9.15 4.05 CAIV-2002-CF Rotatable 3.38 CF on Both Ports 7.15 6.19 9.15 4.05 CAIV-250 2.50 No Flanges 7.75 6.99 10.31 4.61 CAIV-2502-CF Rotatable 4.50 CF on Both Ports 8.50 6.99 10.31 4.61 CAIV-300 3.00 No Flanges 10.05 7.71 11.38 5.62 CAIV-3002-CF Rotatable 4.62 CF on Both Ports 10.61 7.71 11.38 5.62


A

Specifications

• Electropolished 304 stainless steel body• .75 to 3.0 inch port OD's• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Copper Seal Bonnet:

10-10 Torr vacuum rating, CF flanges

Options


CAIV O-Ring and Gasket Kits Port OD Model Number Price

.38 - 1.0 CSV-075-95 1.5 CSV-150-95 2.0 CSV-200-95 2.5 CSV-250-95 3.0 CSV-300-95


B

A

C

D



PNEUMATICALLY ACTUATED ANGLE-IN-LINE VALVESPneumatically Actuated Viton Seal Angle-In-Line Valves

Model Port Number OD Description A B C Price

AIVP-075 .75 No Flanges 3.70 4.32 2.25 AIVP-0752-CF Rotatable 1.33 CF on Both Ports 4.70 4.32 2.25 AIVP-0752-NWB NW-16B on Both Ports 4.00 4.32 2.25 AIVP-100 1.00 No Flanges 3.90 4.27 2.25 AIVP-1002-CF Rotatable 2.12 CF on Both Ports 4.23 4.27 2.25 AIVP-1002-NWB NW-25B on Both Ports 4.20 4.27 2.25 AIVP-150 1.50 No Flanges 4.82 5.69 3.00 AIVP-1502-CF Rotatable 2.75 CF on Both Ports 5.24 5.69 3.00 AIVP-1502-NWB NW-40B on Both Ports 5.12 5.69 3.00 AIVP-200 2.00 No Flanges 6.70 7.94 3.50 AIVP-2002-CF Rotatable 3.38 CF on Both Ports 7.15 7.94 3.50 AIVP-2002-NWB NW-50B on Both Ports 7.00 7.94 3.50 AIVP-250 2.50 No Flanges 7.75 7.64 4.00 AIVP-2502-CF Rotatable 4.50 CF on Both Ports 8.50 7.64 4.00 AIVP-2502-ISO ISO-63-250-OF on Both Ports 8.25 7.64 4.00 AIVP-300 3.00 No Flanges 10.05 8.70 4.50 AIVP-3002-CF Rotatable 4.62 CF on Both Ports 10.61 8.70 4.50 AIVP-3002-ISO ISO-80-300-OF on Both Ports 10.55 8.70 4.50


AIVP O-Ring Kits Port OD Model Number Price

.38 - 1.0 ESVP-075-95 1.5 ESVP-150-95 2.0 ESVP-200-95 2.5 ESVP-250-95 3.0 ESVP-300-95


Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .33 straight-through ID for high

conductance• .75” to 3” inch port ODs• .75” to 2” OD: air-to-open, spring-to-

close. Over 2” OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚C• Viton® Seal Bonnet: 10-9 Torr vacuum

rating, CF, NW and ISO flanges

ISO or CFFlanges

Bored NWFlanges

A

B

D

A A

Options• O-ring• Air Solenoid• Micro-Switch

• Actuator• Heater Jackets



PNEUMATICALLY ACTUATED ANGLE-IN-LINE VALVES

Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .33 straight-through ID for high

conductance• .75 to 3 inch port ODs• .75 to 2 inch OD: air-to-open,

spring-to-close• Over 2 inch OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚C• Copper Seal Bonnet: 10-10 Torr


Options

• O-ring• Air Solenoid• Micro-Switch• Actuator• Heater Jackets

Pneumatically Actuated Copper Seal Bonnet Angle-In-Line Valves Model PortNumber OD Description A B C Price

CAIVP-075 .75 No Flanges 3.70 4.32 2.73 CAIVP-0752-CF Rotatable 1.33 CF on Both Ports 4.70 4.32 2.73 CAIVP-100 1.00 No Flanges 3.90 4.27 2.73 CAIVP-1002-CF Rotatable 2.12 CF on Both Ports 4.48 4.27 2.73 CAIVP-150 1.50 No Flanges 4.82 5.69 3.25 CAIVP-1502-CF Rotatable 2.75 CF on Both Ports 5.24 5.69 3.25 CAIVP-200 2.00 No Flanges 6.70 7.94 4.05 CAIVP-2002-CF Rotatable 3.38 CF on Both Ports 7.15 7.94 4.05 CAIVP-250 2.50 No Flanges 7.75 7.64 4.61 CAIVP-2502-CF Rotatable 4.50 CF on Both Ports 8.50 7.64 4.61 CAIVP-300 3.00 No Flanges 10.05 8.70 5.62 CAIVP-3002-CF Rotatable 4.62 CF on Both Ports 10.61 8.70 5.62


CF Flanges

A

CAIVP O-Ring & Gasket Kits Port OD Model Number Price

.38 - 1.0 CSVP-075-95 1.5 CSVP-150-95 2.0 CSVP-200-95 2.5 CSVP-250-95 3.0 CSVP-300-95


A

B

D



Manually Operated Viton Seal In-Line ValvesModel PortNumber OD Description A B C D E F Price

ILV-038 .38 No Flanges 1.50 .94 1.50 4.06 2.25 4.44 ILV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 4.06 2.25 4.44 ILV-0382-NWB NW-10B on Both Ports 1.65 .94 1.50 4.06 2.25 4.44 ILV-050 .50 No Flanges 1.50 1.00 1.62 4.19 2.25 4.69 ILV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 4.19 2.25 4.69 ILV-0502-NWB NW-10B on Both Ports 1.65 1.00 1.62 4.19 2.25 4.69 ILV-075 .75 No Flanges 2.00 1.12 1.87 4.44 2.25 5.19 ILV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.44 2.25 5.19 ILV-0752-NWB NW-16B on Both Ports 2.15 1.12 1.87 4.44 2.25 5.19 ILV-100 1.00 No Flanges 1.88 1.37 2.25 4.69 2.25 5.69 ILV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.69 2.25 5.69 ILV-1002-NWB NW-25B on Both Ports 2.03 1.37 2.25 4.69 2.25 5.69 ILV-150 1.50 No Flanges 2.25 1.88 3.12 6.52 3.00 8.02 ILV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 6.52 3.00 8.02 ILV-1502-NWB NW-40B on Both Ports 2.40 1.88 3.12 6.52 3.00 8.02 ILV-200 2.00 No Flanges 3.25 2.62 4.12 8.73 3.50 10.73 ILV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 8.73 3.50 10.73 ILV-2002-NWB NW-50B on Both Ports 3.40 2.62 4.12 8.73 3.50 10.73 ILV-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 2.62 4.12 8.73 3.50 10.73 ILV-250 2.50 No Flanges 3.00 3.12 4.93 10.20 4.00 12.70 ILV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 10.20 4.00 12.70 ILV-2502-ISO ISO-63-250-OF on Both Ports 3.25 3.12 4.93 10.20 4.00 12.70 ILV-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 3.12 4.93 10.20 4.00 12.70 ILV-300 3.00 No Flanges 3.25 3.68 5.62 11.04 4.50 14.04 ILV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.68 5.62 11.04 4.50 14.04ILV-3002-ISO ISO-80-300-OF on Both Ports 3.50 3.68 5.62 11.04 4.50 14.04 ILV-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 3.68 5.62 11.04 4.50 14.04


MANUALLY OPERATED IN-LINE VALVES

Specifications

• Electropolished 304 stainless steel body• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton® Seal Bonnet: 10-9 Torr vacuum

rating, CF, NW, ISO and ASA flanges

Options

• O-rings • Heater Jackets

ISO, ASA or CF Flanges

C

A

B

FD

A

E

AA

BoredNW Flanges

AAILV O-Ring Kits Port OD Model Number Price

.38-1.0 ESV-075-95 1.5 ESV-150-95 2.0 ESV-200-95 2.5 ESV-250-95 3.0 ESV-300-95




CILV O-Ring and Gasket KitsPort OD Model Number Price



MANUALLY OPERATED IN-LINE VALVES

Manually Operated Copper Seal Bonnet In-Line ValvesModel PortNumber OD Description A B C D E F Price

CILV-038 .38 No Flanges 1.50 .94 1.50 4.06 2.73 4.44 CILV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 4.06 2.73 4.44 CILV-050 .50 No Flanges 1.50 1.00 1.62 4.19 2.73 4.69 CILV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 4.19 2.73 4.69 CILV-075 .75 No Flanges 2.00 1.12 1.87 4.44 2.73 5.19 CILV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.44 2.73 5.19 CILV-100 1.00 No Flanges 1.88 1.37 2.25 4.69 2.73 5.69 CILV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.69 2.73 5.69 CILV-150 1.50 No Flanges 2.25 1.88 3.12 6.52 3.25 8.02 CILV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 6.52 3.25 8.02 CILV-200 2.00 No Flanges 3.25 2.62 4.12 8.73 4.05 10.73 CILV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 8.73 4.05 10.73 CILV-250 2.50 No Flanges 3.00 3.12 4.93 10.20 4.61 12.70 CILV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 10.20 4.61 12.70 CILV-300 3.00 No Flanges 3.25 3.62 5.55 11.04 5.62 14.04 CILV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.62 5.55 11.04 5.62 14.04


Specifications

• Electropolished 304 stainlesssteel body

• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Copper Seal Bonnet:

10-10 Torr vacuum rating,CF flanges

Options


C

A

B

FD

A

E



PNEUMATICALLY ACTUATED IN-LINE VALVES

Pneumatically Actuated Viton Seal In-Line ValvesModel PortNumber OD Description A B C D E F Price

ILVP-038 .38 No Flanges 1.50 .94 1.50 3.62 2.25 5.76 ILVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 3.62 2.25 5.76 ILVP-0382-NWB NW-10B on Both Ports 1.65 .94 1.50 3.62 2.25 5.76 ILVP-050 .50 No Flanges 1.50 1.00 1.62 3.75 2.25 5.89 ILVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 3.75 2.25 5.89 ILVP-0502-NWB NW-10B on Both Ports 1.65 1.00 1.62 3.75 2.25 5.89 ILVP-075 .75 No Flanges 2.00 1.12 1.87 4.00 2.25 6.14 ILVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.00 2.25 6.14 ILVP-0752-NWB NW-16B on Both Ports 2.15 1.12 1.87 4.00 2.25 6.14 ILVP-100 1.00 No Flanges 1.88 1.37 2.25 4.25 2.25 6.39 ILVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.25 2.25 6.39 ILVP-1002-NWB NW-25B on Both Ports 2.03 1.37 2.25 4.25 2.25 6.39 ILVP-150 1.50 No Flanges 2.25 1.88 3.12 5.86 3.00 8.45 ILVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 5.86 3.00 8.45 ILVP-1502-NWB NW-40B on Both Ports 2.40 1.88 3.12 5.86 3.00 8.45 ILVP-200 2.00 No Flanges 3.25 2.62 4.12 7.62 3.50 12.11 ILVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 7.62 3.50 12.11 ILVP-2002-NWB NW-50B on Both Ports 3.40 2.62 4.12 7.62 3.50 12.11 ILVP-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 2.62 4.12 7.62 3.50 12.11 ILVP-250 2.50 No Flanges 3.00 3.12 4.93 9.11 4.00 12.03 ILVP-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 9.11 4.00 12.03 ILVP-2502-ISO ISO-63-250-OF on Both Ports 3.25 3.12 4.93 9.11 4.00 12.03 ILVP-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 3.12 4.93 9.11 4.00 12.03 ILVP-300 3.00 No Flanges 3.25 3.68 5.62 9.98 4.50 13.38 ILVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.68 5.62 9.98 4.50 13.38 ILVP-3002-ISO ISO-80-300-OF on Both Ports 3.50 3.68 5.62 9.98 4.50 13.38 ILVP-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 3.68 5.62 9.98 4.50 13.38 ILVP-400 4.00 No Flanges 4.22 4.88 7.38 12.83 6.50 18.27 ILVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 4.88 7.38 12.83 6.50 18.27 ILVP-4002-ISO ISO-100-400-OF on Both Ports 4.47 4.88 7.38 12.83 6.50 18.27 ILVP-4002-ASA Rotatable ASA-7.5-400R on Both Ports 4.47 4.88 7.38 12.83 6.50 18.27


C

A

B

FD

A

E

Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38” to 6.0” inch port ODs• .38” to 2.0” OD: air-to-open, spring-to-close• Over 2” OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum


Options

• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets

ILVP O-Ring KitsPort OD Model Number Price





PNEUMATICALLY ACTUATED IN-LINE VALVES

Specifications

• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38” to 6.0” inch port ODs• .38” to 2.0” OD: air-to-open, spring-to-close• Over 2” OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Copper Seal Bonnet: 10-10 Torr


Options


CILVP O-Ring and Gasket Kits Port OD Model Number Price



C

A

B

FD

A

E

Pneumatically Actuated Copper Seal Bonnet In-Line ValvesModel PortNumber OD Description A B C D E F Price

CILVP-038 .38 No Flanges 1.50 .94 1.50 3.74 2.73 5.76 CILVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 3.74 2.73 5.76 CILVP-050 .50 No Flanges 1.50 1.00 1.62 3.88 2.73 5.89 CILVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 3.88 2.73 5.89 CILVP-075 .75 No Flanges 2.00 1.12 1.87 4.12 2.73 6.14 CILVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.12 2.73 6.14 CILVP-100 1.00 No Flanges 1.88 1.37 2.25 4.38 2.73 6.39 CILVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.38 2.73 6.39 CILVP-150 1.50 No Flanges 2.25 1.88 3.12 5.86 3.25 8.44 CILVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 5.86 3.25 8.44 CILVP-200 2.00 No Flanges 3.25 2.62 4.12 7.50 4.05 12.11 CILVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 7.50 4.05 12.11 CILVP-250 2.50 No Flanges 3.00 3.12 4.93 9.11 4.61 12.03 CILVP-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 9.11 4.61 12.03 CILVP-300 3.00 No Flanges 3.25 3.62 5.55 9.98 5.62 13.38 CILVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.62 5.55 9.98 5.62 13.38 CILVP-400 4.00 No Flanges 4.22 4.88 7.38 12.83 6.73 18.27 CILVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 4.88 7.38 12.83 6.73 18.27




MANUALLY OPERATED TEE VALVES

Specifications

• Electropolished 304 stainless steel body• Vacuum port on bottom• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Viton® Seal Bonnet:


Options


Manually Operated Viton Seal Tee Valves Model Port Number OD Description A B C D Price

ESV-038T .38 No Flanges 1.50 4.06 4.44 2.25 ESV-0383T-CF Rotatable 1.33 CF on All Ports 1.60 4.16 4.54 2.25 ESV-0383T-NWB NW-10B on All Ports 1.65 4.21 4.59 2.25 ESV-050T .50 No Flanges 1.50 4.06 4.56 2.25 ESV-0503T-CF Rotatable 1.33 CF on All Ports 1.60 4.16 4.66 2.25 ESV-0503T-NWB NW-10B on All Ports 1.65 4.21 4.71 2.25 ESV-075T .75 No Flanges 2.00 4.56 5.31 2.25 ESV-0753T-CF Rotatable 1.33 CF on All Ports 2.50 5.06 5.81 2.25 ESV-0753T-NWB NW-16B on All Ports 2.15 4.71 5.46 2.25 ESV-100T 1.00 No Flanges 1.88 4.32 5.32 2.25 ESV-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.49 5.49 2.25 ESV-1003T-NWB NW-25B on All Ports 2.03 4.47 5.47 2.25 ESV-150T 1.50 No Flanges 2.25 5.63 7.13 3.00 ESV-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.84 7.34 3.00 ESV-1503T-NWB NW-40B on All Ports 2.40 5.78 7.28 3.00 ESV-200T 2.00 No Flanges 3.25 7.85 9.85 3.50 ESV-2003T-CF Rotatable 3.38 CF on All Ports 3.48 8.08 10.08 3.50 ESV-2003T-NWB NW-50B on All Ports 3.40 8.00 10.00 3.50 ESV-2003T-ASA Rotatable ASA-5-200R on All Ports 3.25 8.10 10.10 3.50 ESV-250T 2.50 No Flanges 3.00 8.27 10.77 4.00 ESV-2503T-CF Rotatable 4.50 CF on All Ports 3.38 8.65 11.15 4.00 ESV-2503T-ISO ISO-63-250-OF on All Ports 3.25 8.52 11.02 4.00 ESV-2503T-ASA Rotatable ASA-5-250R on All Ports 3.25 8.52 11.02 4.00 ESV-300T 3.00 No Flanges 3.25 8.68 11.68 4.50 ESV-3003T-CF Rotatable 4.62 CF on All Ports 3.53 8.96 11.96 4.50 ESV-3003T-ISO ISO-80-300-OF on All Ports 3.50 8.93 11.93 4.50 ESV-3003T-ASA Rotatable ASA-6-300R on All Ports 3.50 8.93 11.93 4.50


A

A

CB

A

DESV-T O-Ring Kits

Port OD Model Number Price

.38-1.0 ESV-075-95 1.5 ESV-150-952.0 ESV-200-95 2.5 ESV-250-95 3.0 ESV-300-95




MANUALLY OPERATED TEE VALVES

Manually Operated Copper Seal Bonnet Tee Valves Model Port Number OD Description A B C D Price

CSV-038T .38 No Flanges 1.50 4.06 4.44 2.73 CSV-0383T-CF 1.33 Rotatable CF on All Ports 1.60 4.16 4.54 2.73 CSV-050T .50 No Flanges 1.50 4.06 4.56 2.73 CSV-0503T-CF 1.33 Rotatable CF on All Ports 1.60 4.16 4.66 2.73 CSV-075T .75 No Flanges 2.00 4.56 5.31 2.73 CSV-0753T-CF 1.33 Rotatable CF on All Ports 2.50 5.06 5.81 2.73 CSV-100T 1.00 No Flanges 1.88 4.32 5.32 2.73 CSV-1003T-CF 2.12 Rotatable CF on All Ports 2.05 4.49 5.49 2.73 CSV-150T 1.50 No Flanges 2.25 5.63 7.13 3.25 CSV-1503T-CF 2.75 Rotatable CF on All Ports 2.46 5.84 7.34 3.25 CSV-200T 2.00 No Flanges 3.25 7.85 9.85 4.05 CSV-2003T-CF 3.38 Rotatable CF on All Ports 3.48 8.08 10.08 4.05 CSV-250T 2.50 No Flanges 3.00 8.27 10.77 4.61 CSV-2503T-CF 4.50 Rotatable CF on All Ports 3.38 8.65 11.15 4.61 CSV-300T 3.00 No Flanges 3.25 8.68 11.68 5.62 CSV-3003T-CF 4.62 Rotatable CF on All Ports 3.53 8.96 11.96 5.62


Specifications

• Electropolished 304 stainless steel body• Vacuum port on bottom• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Copper Seal Bonnet:

10-10 Torr vacuum rating,CF flanges

Options


CSV-T O-Ring & Gasket Kits Port OD Model Number Price



A

A

CB

A

D



Pneumatically Actuated Viton Seal Tee Valves Model Port Number OD Description A B C D Price

ESVP-038T .38 No Flanges 1.50 3.62 5.77 2.25 ESVP-0383T-CF Rotatable 1.33 CF on All Ports 1.60 3.67 5.87 2.25 ESVP-0383T-NWB NW-10B on All Ports 1.65 3.77 5.92 2.25 ESVP-050T .50 No Flanges 1.50 3.62 5.77 2.25 ESVP-0503T-CF Rotatable 1.33 CF on All Ports 1.60 3.67 5.87 2.25 ESVP-0503T-NWB NW-10B on All Ports 1.65 3.77 5.92 2.25 ESVP-075T .75 No Flanges 2.00 4.12 6.26 2.25 ESVP-0753T-CF Rotatable 1.33 CF on All Ports 2.50 4.62 6.76 2.25 ESVP-0753T-NWB NW-16B on All Ports 2.15 4.27 6.41 2.25 ESVP-100T 1.00 No Flanges 1.88 3.88 6.02 2.25 ESVP-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.05 6.19 2.25 ESVP-1003T-NWB NW-25B on All Ports 2.03 4.03 6.17 2.25 ESVP-150T 1.50 No Flanges 2.25 4.98 7.56 3.00 ESVP-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.19 7.77 3.00 ESVP-1503T-NWB NW-40B on All Ports 2.40 5.13 7.71 3.00 ESVP-200T 2.00 No Flanges 3.25 6.74 11.23 3.50 ESVP-2003T-CF Rotatable 3.38 CF on All Ports 3.48 6.97 11.46 3.50 ESVP-2003T-NWB NW-50B on All Ports 3.40 6.89 11.38 3.50 ESVP-2003T-ASA Rotatable ASA-5-200R on All Ports 3.50 6.99 11.48 3.50 ESVP-250T 2.50 No Flanges 3.00 7.18 10.10 4.00 ESVP-2503T-CF Rotatable 4.50 CF on All Ports 3.38 7.56 10.48 4.00 ESVP-2503T-ISO ISO-63-250-OF on All Ports 3.25 7.43 10.35 4.00 ESVP-2503T-ASA Rotatable ASA-5-250R on All Ports 3.25 7.43 10.35 4.00 ESVP-300T 3.00 No Flanges 3.25 7.62 11.00 4.50 ESVP-3003T-CF Rotatable 4.62 CF on All Ports 3.53 7.90 11.28 4.50 ESVP-3003T-ISO ISO-80-300-OF on All Ports 3.50 7.87 11.25 4.50 ESVP-3003T-ASA Rotatable ASA-6-300R on All Ports 3.50 7.87 11.25 4.50 ESVP-400T 4.00 No Flanges 4.22 9.55 14.99 6.50 ESVP-4003T-CF Rotatable 6.00 CF on All Ports 4.66 9.99 15.43 6.50 ESVP-4003T-ISO ISO-100-400-OF on All Ports 4.47 9.80 15.24 6.50 ESVP-4003T-ASA Rotatable ASA-7.5-400R on All Ports 4.47 9.80 15.24 6.50


PNEUMATICALLY ACTUATED TEE VALVES

A

A

C

B

A

DSpecifications• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• Vacuum port on bottom• .38 to 6 inch port ODs• .38 to 2 inch ODs: air-to-open,

spring-to-close• 2 to 4 inch ODs: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum


Options• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets

ESVP-T O-Ring Kits Port OD Model Number Price





Pneumatically Actuated Copper Seal Bonnet Tee Valves Model Port Number OD Description A B C D Price

CSVP-038T .38 No Flanges 1.50 3.75 5.77 2.73 CSVP-0383T-CF Rotatable 1.33 CF on All Ports 1.60 3.85 5.82 2.73 CSVP-050T .50 No Flanges 1.50 3.75 5.77 2.73 CSVP-0503T-CF Rotatable 1.33 CF on All Ports 1.60 3.85 5.82 2.73 CSVP-075T .75 No Flanges 2.00 4.25 6.26 2.73 CSVP-0753T-CF Rotatable 1.33 CF on All Ports 2.50 4.75 6.76 2.73 CSVP-100T 1.00 No Flanges 1.88 4.00 6.02 2.73 CSVP-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.17 6.19 2.73 CSVP-150T 1.50 No Flanges 2.25 4.98 7.56 3.25 CSVP-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.19 7.77 3.25 CSVP-200T 2.00 No Flanges 3.25 6.62 11.23 4.05 CSVP-2003T-CF Rotatable 3.38 CF on All Ports 3.48 6.85 10.58 4.05 CSVP-250T 2.50 No Flanges 3.00 7.18 10.10 4.61 CSVP-2503T-CF Rotatable 4.50 CF on All Ports 3.38 7.56 10.48 4.61 CSVP-300T 3.00 No Flanges 3.25 7.62 11.00 5.62 CSVP-3003T-CF Rotatable 4.62 CF on All Ports 3.53 7.90 11.28 5.62 CSVP-400T 4.00 No Flanges 4.22 9.55 14.99 6.73 CSVP-4003T-CF Rotatable 6.00 CF on All Ports 4.66 9.99 15.43 6.73


PNEUMATICALLY ACTUATED TEE VALVES

Specifications• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• Vacuum port on bottom• .38 to 6 inch port ODs• .38 to 2 inch ODs: air-to-open,

spring-to-close• 2 to 4 inch ODs: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Copper Seal Bonnet: 10-10 Torr


Options


CSVP-T O-Ring & Gasket Kits Port OD Model Number Price



A

A

C

B

A

D



Manually Operated Copper Seal Bonnet Straight-Through ValvesModel Port PortNumber ID* OD Description A B C D Price

CSTV-075 .65 .75 No Flanges 5.00 3.51 4.71 2.73 CSTV-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.51 4.71 2.73

CSTV-150 1.38 1.50 No Flanges 7.00 5.47 7.69 4.05 CSTV-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 5.47 7.69 4.05

* Full opening straight-through diameter Dimensions in inches

Specifications

• Electropolished 304 stainless steel body• Full-opening, straight-through ID• .75, 1.13 and 1.5 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum

rating, CF and NW flanges• Copper Seal Bonnet: 10-10 Torr vacuum

rating, CF flanges

Options

• O-rings • Heater Jackets

MANUALLY OPERATED STRAIGHT-THROUGH VALVES

Manually Operated Viton Seal Straight-Through ValvesModel Port PortNumber ID* OD Description A B C D Price

STV-075 .65 .75 No Flanges 5.00 3.30 4.50 2.25 STV-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.30 4.50 2.25 STV-0752-NWB .65 .75 NW-16B on Both Ports 5.30 3.30 4.50 2.25

STV-112 1.00 1.12 No Flanges 5.50 3.86 5.15 3.00 STV-1122-CF 1.00 1.12 Rotatable 2.12 CF on Both Ports 5.83 3.86 5.15 3.00 STV-1122-NWB 1.00 1.12 NW-40B on Both Ports 5.80 3.86 5.15 3.00

STV-150 1.38 1.50 No Flanges 7.00 5.47 7.69 3.50 STV-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 5.47 7.69 3.50 STV-1502-NWB 1.38 1.50 NW-25B on Both Ports 7.30 5.47 7.69 3.50


C B

D

A Bored NWFlanges

A

CF Flanges

A

STV O-Ring Kits Port OD Model Number Price

.75 ESV-075-95 1.12 STV-112-95 1.50 STV-150-95


CSTV O-Ring & Gasket Kits Port OD Model Number Price

.75 CSV-075-95 1.50 CSTV-150-95




PNEUMATICALLY ACTUATED STRAIGHT-THROUGH VALVES

CF Flanges

Specifications• Electropolished 304 stainless steel body• Full-opening, straight-through ID• .75, 1.13 and 1.5 inch ODs• .75 inch OD: air-to-open, spring-to-close• 1.13 and 1.5 inch OD: air-to-open/close• 60 to 80 psig operating air pressure• Bakeable to 204˚C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum

rating, CF and NW flanges• Copper Seal Bonnet: 10-10 Torr


Options• O-rings • Air Solenoids• Micro-switch • Actuators• Heater Jackets

Pneumatically Actuated Viton Seal Straight-Through Valves Model Port Port Number ID* OD Description A B C Price

STVP-075 .65 .75 No Flanges 5.00 3.92 2.25 STVP-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.92 2.25 STVP-0752-NWB .65 .75 NW-16B on Both Ports 5.30 3.92 2.25 STVP-112 1.00 1.12 No Flanges 5.50 5.10 3.00 STVP-1122-CF 1.00 1.12 Rotatable 2.12 CF on Both Ports 5.83 5.10 3.00 STVP-1122-NWB 1.00 1.12 NW-40B on Both Ports 5.80 5.10 3.00 STVP-150 1.38 1.50 No Flanges 7.00 6.11 3.50 STVP-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 6.11 3.50 STVP-1502-NWB 1.38 1.50 NW-40B on Both Ports 7.30 6.11 3.50


Pneumatically Actuated Copper Seal Bonnet Straight-Through Valves Model Port Port Number ID* OD Description A B C Price

CSTVP-075 .65 .75 No Flanges 5.00 3.92 2.73 CSTVP-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.92 2.73 CSTVP-150 1.38 1.50 No Flanges 7.00 6.11 4.05 CSTVP-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 6.11 4.05


B

C

AA A

BoredNW Flanges

CSTVP O-Ring & Gasket Kits Port OD Model Number Price

.75 CSVP-075-95 1.50 CSTVP-150-95


STVP O-Ring KitsPort OD Model Number Price

.75 ESVP-075-95 1.12 STVP-112-95 1.50 STVP-150-95




Nor-Cal’s new series of metal sealangle valves are intended for use inUHV or cryogenic applications wheretemperature extremes preclude the useof our elastomer seal valves. Approvedfor use in beamline facilities, thesevalves have a temperature operatingrange from 400˚C to -250˚C.

Maximum temperature bakeouts mayrequire poppet seal replacement after 50cycles, while hundreds of cycles arepossible with moderate bakeouts. A dialindicator at the top of the valve indicatesthe proper torque for closure and alsowhen the seal should be replaced.

The poppet seal is easily replaced with aslotted screw driver. After seal replacementthe valve must be torqued to a higher valuethan during normal operation to make itseat. (See torque specifications table onthis page) After closing the valve to itsnormal torque value loosen the set screwbelow the closure nut, rotate the indicatorto the furthest counter-clockwise line ontop of the valve and retighten the set screw.The valve may be closed to this markindefinitely. Periodic checks with a torquewrench will indicate seat wear and theproper mark to use for alignment. Whenthe indicator has reached the last mark werecommend seal replacement. Do notexceed the maximum torque specifications.

SEALING MECHANISM

Specifications• Bakeable to 400°C open, 300°C closed• Operable at cryogenic temperatures• Vacuum rated to below 10-10 Torr• Beamline approved• All stainless steel construction• Electropolished surfaces• Extended life stainless steel bellows• Easily replaceable copper poppet seal• Pulled port body for higher

conductance• Clean room assembled• Leak rate 10-10 std. cc./sec. or less• DiaI indicator for closure• Heater Jackets available

BAKEABLE ALL-METAL VALVES

Manually Operated All-Metal Angle ValvesModel Port (Open)Number OD Description A B C Price

AMV-0752-CF .75 Rotatable 1.33 CF on Both Ports 1.50 5.40 1.50 $ 495.00AMV-1502-CF 1.50 Rotatable 2.75 CF on Both Ports 2.45 6.87 1.50 $ 520.00

Port lengths that match other manufacturers' products are available upon request. Dimensions in inches

Torque Specifications (Inch Pounds)

Model Number Seating Normal Maximum

AMV-075-CF 60 50 120 AMV-150-CF 120 100 200

Replacement Poppet SealsPort OD Model Number

.75 AMV-075-95 1.50 AMV-150-95


B

A

A

C

Stainless Steel Bellows

Stainless Steel Knife Edge Seat

OFHC® Copper Poppet Seal



GATE VALVES

Specifications• 304 SS vacuum furnace brazed body• Electropolished inside and out• Welded AM-350 bellows• Viton gate O-ring, standard• 1.5 to 12 inch nominal IDs• Helium leak rate 2x10-9 std. cc./sec.• Maximum Pressure Differential:

At Opening:4 inch ID or smaller:

760 Torr on gate side,20 torr on carriage side

Greater than 4 inch ID:20 Torr either direction

Closed: 760 Torr in either direction• Viton Seal Bonnet: 10-9 Torr

vacuum rating, Bakeable to 150˚C• Copper Seal Bonnet: 10-10 Torr vacuum

rating, Bakeable to 200˚C with CF flangesand gate in open position

• Pneumatically Actuated: Normally closed120V, 50/60Hz air solenoid, standard,Maximum 80 psig operating airpressure, standard. (Higher operatingpressures available upon request)Reed-switch position indicator, standard

• Manually operated:Acme threads for fewer turns

General InformationNor-Cal stainless steel gate valves sharewith our poppet valves the innovativedesign, highest grade materials andsuperior workmanship that has made us amajor supplier of valves to the vacuumindustry. The estimated service interval onthese valves is 100,000 cycles, dependingon the application.

Our gate valves have an ultra-slim profilewhich makes them perfect for applicationswhere space is limited, and their smallervolume results in lower outgassing andfaster pumpdown. Larger sizes have aunique feature in the actuator whichdampens the vibration which can arisewhen the gate is opened. This makes thesevalves ideal for semiconductor and othervibration sensitive processes. The carriageassembly and actuator can be removedwithout disassembling the body from thesystem for easy maintenance. The 304stainless steel bodies are vacuum furnacebrazed to 1100°C at 10-6 Torr before beingelectropolished inside and out. The weldedAM-350 bellows have a short stroke for alonger cycle life.

Nor-Cal gate valves are available withNW(ISO-KF), ISO(clamp and bolt type),CF and ASA flanges in port sizes from1.5 to 12 inches. Larger sizes are availableupon request. Choose from manual orpneumatic actuation and Viton® orcopper seal bonnet.

BakeabilityNor-Cal gate valves with Viton® sealbonnet and gate and standard Reed-switchposition indicators are bakeable to 150˚C,as long as the actuator is not baked above60˚C. A gate valve with copper sealbonnet, Viton® gate and micro-switchoption can be baked to 200˚C, except forthe actuator. With the air solenoid andposition indicators removed, a copper sealbonnet valve with high temperature Kalrez®

gate O-ring can be baked to 250˚C with thegate in the open position. Silicone heaterjackets for bakeouts up to 200˚C can beprovided. Please ask your Nor-Calrepresentative for pricing.

How to Specify OptionsOne or more options can be ordered byadding the option suffix to the basic valvemodel number. Please add the optionsuffixes in the following order:

1. Micro-switch: "-M" (Add $300 to price)2. O-ring: "-KT" = high temp Kalrez

"-KC"= chemical resistant Kalrez "-CR"= Chemraz " -S "= Silicone

3. Air Solenoid: (See table below)Examples of model numbers with options: GVP-4002-ISO-M-S32 GVMP-4002-CF-KT-S22

Air Solenoid OptionsAll pneumatic gate valves come standard with a 4-Way, 120V, 50/60Hz air solenoid. Solenoidsare mounted on all Viton seal bonnet gate valves with four inch ID and larger. Solenoids forViton seal bonnet gate valves with under four inch ID and all sizes of copper seal gate valves areshipped unmounted with the valve. Solenoids for these valves can be provided mounted withan optional mounting bracket for an additional $55.00. Specify when ordering. Specify otherAir solenoid options by adding the correct suffix to model number. See chart below. Example:GVMP-1502-CF-S22. Air Solenoids can be ordered separately. Call for price and part number.

Options

• Micro-switch• O-rings• Air Solenoids• Heater Jackets

Option Description Price

(standard) 4-way, 120V AC, 60 Hz S22 4-way, 24V DC S32 4-way, 240V AC, 50/60 Hz S42 4-way, 24V AC, 50/60 Hz




MANUALLY OPERATED GATE VALVES

Specifications

• 1.5 to 12 inch nom. IDs• Acme threads for

fewer turns• Viton Seal Bonnet:

10-9 Torr vacuumrating, Bakeable to 150˚C,CF, NW, ISO and ASA flanges

Options


NW or ISO FlangesNon-rotatable CF or ASA Flanges

E

G

B A

E

C

DF

G

B A

F

C

D

Handles extend on

all 10" and 12" manual gate valves

Manually Operated Viton Seal Gate Valves Nom Model Flange Conductance ID Number Type (molecular-l/sec.) A B C D E F G Price

1.5 GV-1502-NW NW-40 130 4.69 3.40 1.99 2.00 3.61 3.31 2.45 GV-1502-CF 2.75 CF 130 4.69 3.40 2.03 2.00 3.61 3.31 2.45

2.0 GV-2002-NW NW-50 220 5.60 4.12 1.99 2.00 3.61 3.81 2.96 GV-2002-CF 3.38 CF 300 5.60 4.12 2.28 2.00 3.61 3.81 2.96

2.5 GV-2502-CF 4.50 CF 520 6.50 4.81 2.40 2.00 3.61 4.37 3.52 GV-2502-ASA ASA-6* 610 6.50 4.81 2.03 2.00 3.61 4.37 3.52 GV-2502-ISO ISO-63 610 6.50 4.81 2.03 2.00 3.61 4.37 3.52 GV-2502-ISO-OF ISO-63-OF 320 6.50 4.81 3.46 2.00 3.61 4.37 3.52

3.0 GV-3002-CF 4.62 CF 840 7.70 5.77 2.53 2.00 3.61 4.94 4.28 GV-3002-ASA ASA-7.5* 1070 7.70 5.77 2.03 2.00 3.61 4.94 4.28 GV-3002-ISO ISO-80 1070 7.70 5.77 1.97 2.00 3.61 4.94 4.28 GV-3002-ISO-OF ISO-80-OF 550 7.70 5.77 3.84 2.00 3.61 4.94 4.28






*Without O-ring grooves. Grooves can be provided on request. Dimensions in inches.



MANUALLY OPERATED GATE VALVES

Specifications

• 1.5 to 12 inch nominal IDs• Acme threads for fewer turns• Copper Seal Bonnet:

10-10 Torr Vacuum rating,Bakeable to 200˚C with CF flanges

Options


Manually Operated Copper Seal Bonnet Gate ValvesNom Model Flange ConductanceID Number Type (molecular-l/sec.) A B C D E F G Price

1.5 GVM-1502-CF 2.75 CF 130 4.69 3.40 2.03 2.00 3.57 3.31 2.45 2.0 GVM-2002-CF 3.38 CF 300 5.60 4.12 2.28 2.00 3.61 3.81 2.96 2.5 GVM-2502-CF 4.50 CF 520 6.50 4.81 2.40 2.00 3.61 4.37 3.52 3.0 GVM-3002-CF 4.62 CF 840 7.70 5.77 2.53 2.00 3.61 5.24 4.28 4.0 GVM-4002-CF 6.00 CF 1700 10.76 8.13 2.97 3.11 7.90 7.00 5.65 6.0 GVM-6002-CF 8.00 CF 5400 14.07 10.64 3.17 3.11 7.90 8.75 7.55 8.0 GVM-8002-CF 10.00 CF 12200 18.42 13.93 3.35 3.11 7.90 11.25 10.02

10.0 GVM-10002-CF 12.00 CF 24900 24.04 18.30 3.65 8.98 12.12 13.44 11.99 12.0 GVM-12002-CF 14.00 CF 34600 28.89 22.03 3.89 8.98 12.12 15.90 14.28

Larger sizes are available upon request Dimensions in inches

GVM O-Ring and Gasket Kits Nom. ID Model Number Price

1.5 GVM-150-95 2.0 GVM-200-95 2.5 GVM-250-95 3.0 GVM-300-95 4.0 GVM-400-95 6.0 GVM-600-95 8.0 GVM-800-95

10.0 GVM-1000-95 12.0 GVM-1200-95


GV O-Ring KitsNom. ID Model Number Price

1.5 GV-150-95 2.0 GV-200-95 2.5 GV-250-95 3.0 GV-300-95 4.0 GV-400-95 6.0 GV-600-95 8.0 GV-800-95

10.0 GV-1000-95 12.0 GV-1200-95


Non-Rotatable CF Flanges

G

B A

E

C

DF

Handles flip out on all 10" and 12" manual gate valves



PNEUMATICALLY ACTUATED GATE VALVES

Pneumatically Actuated Viton Seal Gate ValvesNom Model Flange ConductanceID Number Type (molecular-l/sec.) A B C D E F G Price

1.5 GVP-1502-NW NW-40 130 4.69 3.40 1.99 2.00 5.29 3.31 2.45 GVP-1502-CF 2.75 CF 130 4.69 3.40 2.03 2.00 5.29 3.31 2.45

2.0 GVP-2002-NW NW-50 220 5.60 4.12 1.99 2.00 5.29 3.81 2.96 GVP-2002-CF 3.38 CF 300 5.60 4.12 2.28 2.00 5.29 3.81 2.96

2.5 GVP-2502-CF 4.50 CF 520 6.50 4.81 2.40 2.00 5.29 4.37 3.52 GVP-2502-ASA ASA-6* 610 6.50 4.81 2.03 2.00 5.29 4.37 3.52 GVP-2502-ISO ISO-63 610 6.50 4.81 2.03 2.00 5.29 4.37 3.52 GVP-2502-ISO-OF ISO-63-OF 320 6.50 4.81 3.46 2.00 5.29 4.37 3.52

3.0 GVP-3002-CF 4.62 CF 840 7.70 5.77 2.53 2.00 5.29 4.94 4.28 GVP-3002-ASA ASA-7.5* 1070 7.70 5.77 2.03 2.00 5.29 4.94 4.28 GVP-3002-ISO ISO-80 1070 7.70 5.77 1.97 2.00 5.29 4.94 4.28 GVP-3002-ISO-OF ISO-80-OF 550 7.70 5.77 3.84 2.00 5.29 4.94 4.28






*Without O-ring grooves. Grooves can be provided on request. Dimensions in inches.

Specifications

• 1.5 to 12 inch nominal IDs• Normally closed• 4 way, 120V, 60Hz air solenoid, standard• Reed-switch position indicator, standard• 60 to 80 psig operating air pressure• Viton Seal Bonnet: 10-9 Torr vacuum

rating, Bakeable to 150˚C, CF, NW,ISO and ASA flanges

Options

• O-rings• Micro-Switch• Air Solenoids• Heater Jackets

Non-Rotatable CF or ASA Flanges

G

B A

E

C

DF

NW or ISO Flanges

G

B A

F

E

C

D

NOTE: Solenoids for Viton seal bonnet gate valves with under four inch ID and all sizes of copperseal gate valves are shipped unmounted with the valve. Solenoids for these valves can be providedmounted with an optional mounting bracket for an additional $55.00. Specify when ordering.



PNEUMATICALLY ACTUATED GATE VALVES

Specifications

• 1.5 to 12 inch nominal IDs• Normally closed• 4-way, 120V, 60Hz air solenoid, standard

Solenoid is bagged and shippedunmounted with valve

• Reed-switch position indicator, standard• 60 to 80 psig operating air pressure• Copper Seal Bonnet:

10-10 Torr Vacuum rating,Bakeable to 200˚C with CF flanges

Pneumatically Actuated Copper Seal Bonnet Gate ValvesNom. Model Flange Conductance

ID Number Type (molecular-l/sec.) A B C D E F G Price

1.5 GVMP-1502-CF 2.75 CF 130 4.69 3.40 2.03 2.00 5.29 3.31 2.45 2.0 GVMP-2002-CF 3.38 CF 300 5.60 4.12 2.28 2.00 5.29 3.81 2.96 2.5 GVMP-2502-CF 4.50 CF 520 6.50 4.81 2.40 2.00 5.29 4.37 3.52 3.0 GVMP-3002-CF 4.62 CF 840 7.70 5.77 2.53 2.00 5.29 5.24 4.28 4.0 GVMP-4002-CF 6.00 CF 1700 10.76 8.13 2.97 2.97 6.95 7.00 5.65 6.0 GVMP-6002-CF 8.00 CF 5400 14.07 10.64 3.17 2.97 6.95 8.75 7.55 8.0 GVMP-8002-CF 10.00 CF 12200 18.42 13.93 3.35 2.97 6.95 11.25 10.02

10.0 GVMP-10002-CF 12.00 CF 24900 24.04 18.30 3.65 4.75 9.47 13.44 11.99 12.0 GVMP-12002-CF 14.00 CF 34600 28.89 22.03 3.89 4.75 9.47 15.90 14.28

Larger sizes are available upon request. Dimensions in inches

GVP O-Ring Kits Nom. ID Model Number Price

1.5 GVP-150-95 2.0 GVP-200-95 2.5 GVP-250-95 3.0 GVP-300-95 4.0 GVP-400-95 6.0 GVP-600-95 8.0 GVP-800-95

10.0 GVP-1000-95 12.0 GVP-1200-95


GVMP O-Ring & Gasket Kits Nom. ID Model Number Price

1.5 GVMP-150-95 2.0 GVMP-200-95 2.5 GVMP-250-95 3.0 GVMP-300-95 4.0 GVMP-400-95 6.0 GVMP-600-95 8.0 GVMP-800-95

10.0 GVMP-1000-95 12.0 GVMP-1200-95


Non-Rotatable CF Flanges

G

B A

E

C

DF

Options

• O-rings• Micro-Switch• Air Solenoids• Heater Jackets

NOTE: Solenoids for Viton sealbonnet gate valves with under fourinch ID and all sizes of copper sealgate valves are shipped unmountedwith the valve. Solenoids for thesevalves can be provided mountedwith an optional mounting bracketfor an additional $55.00.Specify when ordering.



MANUAL BALL VALVES

E

AB

C

D

Port Model Valve FlangeID Number ID A B C D E Type Price

.75 BV-0752-NWB .75 3.82 3.12 .98 2.88 4.75 NW-16 1.00 BV-1002-NWB 1.00 4.80 3.85 1.20 3.75 5.41 NW-25 1.50 BV-1502-NWB 1.50 5.87 5.20 1.67 4.42 7.00 NW-40 2.00 BV-2002-NWB 1.50 5.69 5.03 1.53 4.42 7.00 NW-50


Specifications• Viton stem seal• Teflon ball seal• 316L forged stainless steel body• Leak tested to 1x10-9 std.

cc/sec. (helium)• Typical pressure range: 45 psi

to 1x10-9 Torr• Bakeable to 150ºC• Heater jackets are available on request

Manual Ball ValvesBall valves are a low cost, manually operated, straight throughisolation device. Their simple, robust design provides high reliabil-ity in “dirty” applications. They are commonly used on MOCVD andCVD equipment downstream from the chamber or vacuum pump toisolate traps or abatement tools. A forged 316L stainless steel bodyand Teflon seat make these valves ideal for corrosive environments.Other applications include vacuum and other facilities requirements.A quarter-turn of the handle quickly switches the valve from open toclose. They are available with NW-16 through 50 flanges asstandards. Call for other flange configurations.



Kalrez® is a registered trademark of DuPont Dow Elastomers.Viton® is a registered trademarks of DuPont Dow Elastomers.Chemraz® is a registered trademark of Green Tweed Co.Genesis™ is a registered trademark of Nor-Cal Products, Inc.Intellisys™ is a registered trademark of Nor-Cal Products, Inc.DeviceNet™ is a registered trademark of Open DeviceNet VendorAssociation

FLANGE DIMENSIONS

This table provides general specificationson standard flanges for specific valve sizes.For specific information on a particularflange refer to the appropriate catalog.Again, these are standard flanges only.Other sizes or types of flanges forNor-Cal valves are available uponrequest. Call your Nor-Cal Productsrepresentative for more information.

Flange DimensionsNom Flange No. Holes/ Thread BoltID Type Clamps Size Circle OD

1.5 NW-40 - - - 2.162.75 CF 6 1/4 - 28 2.312 2.75

2.0 NW-50 - - - 2.953.38 CF 8 5⁄16 - 24 2.850 3.37

2.5 4.50 CF 8 5⁄16 - 24 3.628 4.47ASA-6* 4 3⁄8 - 16 4.750 6.00ISO-63 4 M8 - 1.25 4.330 5.12

ISO-63-OF 3-4 - - 3.743.0 4.62 CF 10 5⁄16 - 24 4.030 4.62

ASA-7.5* 4 3⁄8 - 16 6.000 6.00ISO-80 8 M8 - 1.25 4.920 5.71

ISO-80-OF 4-8 - - 4.334.0 6.00 CF 16 5⁄16 - 24 5.128 6.00

ASA-9* 8 3⁄8 - 16 7.500 9.00ISO-100 8 M8 - 1.25 5.710 6.50

ISO-100-OF 4-8 - - 5.126.0 8.00 CF 20 5⁄16 - 24 7.128 8.00

ASA-11* 8 3⁄4 - 10 9.500 11.00ISO-160 8 M10 - 1.50 7.870 9.00

ISO-160-OF 4-8 - - 7.098.0 10.00 CF 24 5⁄16 - 24 9.128 10.00

ASA-11* 8 3⁄4 - 10 9.500 11.00ISO-200 12 M10 - 1.50 10.240 11.25

ISO-200-OF 6-12 - - 9.4510.0 12.00 CF 32 5⁄16 - 24 11.181 12.00

ASA-16* 12 3⁄4 - 10 14.250 16.00ISO-250 12 M10 - 1.50 12.200 14.00

ISO-250-OF 6-12 - - 11.4212.0 14.00 CF 30 3⁄8 - 24 12.810 14.00

ASA-16* 12 3⁄4 - 10 14.250 16.00ISO-320 12 M12 - 1.75 15.550 16.73

ISO-320-OF 8-12 - - 14.57

*Without O-ring groove. Grooves can be provided on request. Dimensions in inches


Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02

100%

0%10%20%30%40%50%60%70%80%90%

0

0

100200300400500600700800

8070605040302010

VALVE ANGLE (% Open)

PRESSURE (mTorr)

TIMESeconds

1 2 3 4 5 6STEPS

Pressure Set PointCompetitor ACompetitor BNor-Cal Intellisys

mTorr

The Fastest, Most Precise Pressure Control System

ADAPTIVE PRESSURE CONTROL TECHNOLOGY

Due to Nor-Cal’s continued improvement program, pricingand specifications are subject to change without notice.

Intellisys SystemIncreases Throughput

Using a typical semiconductor process “recipe”,the performance of an Intellisys pressure controllerand throttling butterfly valve is compared to twocompetitive brands. During the tests, pressureand valve plate angle are recorded simultaneouslyfor each of the three brands.Nor-Cal’s valve closes completely in 0.125 seconds,as compared to 1.7 and 1.8 seconds, achievingpressure set point three seconds sooner. The othervalves’ slower speeds necessitate gradual rampsand partial openings to avoid set point undershootor overshoot. With our advanced algorithm theIntellisys system can essentially achievepressure step transitions.The Nor-Cal Intellisys system shaved off over tenseconds from the closest competitors’ time, withan average of about two to three seconds savedper pressure transition. This example representsa 15% increase in throughput.

TM

Nor-Cal Products offers unequalled performance with the Intellisysdownstream pressure control system, providing measurable processbenefits through higher resolution, speed and reliability.

Adaptive Pressure ControllerThe Intellisys Adaptive Pressure Controller (APC) mergesclosed loop motor control with adaptive pressure controlto provide advanced control system performance.An advanced adaptive algorithm eliminates pressureovershoot or gradual ramps during pressure transi-tion. A Digital Signal Processor (DSP) enablesDeviceNet™ communications protocol andprogramming flexibility for customer orprocess specific requirements.

Throttling Butterfly ValvesIntellisys motor control technologyeliminates belts, gears and positionswitches, improving reliability,while increasing speed by at least afactor of twenty. High-torquegeared drives are also available asan option. Standard sizes rangefrom one to twelve inches.

NEW! IQ-Series Butterfly ValvesSubstantial cost and space savings can be realized with the IQ-Series butter-fly valves. All the control electronics are incorporated on to the valve motor

drive, resulting in a compact size that is easy to integrate on any system.

Capacitance Diaphragm GaugesNor-Cal Capacitance Diaphragm Gauges (CDG) feature aceramic diaphragm designed to help stabilize output noisedue to thermally induced variations found in other metaldiaphragm designs. Heated, non-heated and DeviceNet™compatible gauges are available with several tube fittingsand in standard pressure ranges from 0.1 to 1000 Torr.

Universal Valve DriveOur Universal Valve Drive (UVD) easily replaces olderdrive technology found on other manufacturers’ pressure

control valves. When usedwith our APC, the universalvalve drive can upgradea competitive valve toapproach Intellisysperformance levels.

Intellisys and PMI are registered trademarks of Nor-Cal Products, Inc.DeviceNet is a trademark of the Open DeviceNet Vendor Association (ODVA)Viton is a registered trademark of DuPont Dow Elastomers.Kalrez is a registered trademark of DuPont Dow Elastomers.Chemraz is a registered trademark of Green Tweed Co.

Visit www.n-c.comfor more detailedinformation



Specifications

Compatible Controllers: All Nor-CalAPC ControllersMaterials: Wetted materials316 stainless steel, Viton®

Seals: Viton® (standard); other materialsavailable upon requestLeak Rate: 1 x 10–9 atm.scc/sec HeTime Open-to-Close: 125 -250 millisecond,depending on sizeControl Resolution: 3.2 arc secondValve Position: Visual IndicatorDifferential Pressure: 15 psi maximumacross valve plateCycle Life: 1 million open-close cyclesHeat Capabilities: Up to 200ºC withoptional heater kitsAmbient Operating Temp. Range: 0–50ºCCE Certified: Machinery and EMC Directives

Visual Throttle Plate Indicator

Hard Stop

Direct-drive Motor

Oldham Coupling

Precision Shaft Bearings

Precision Shaft Bearings

Optional Heater Jacket Special Flush NW Clamps

Dual O-rings

Dual O-rings

High Efficiency Thermal Insulator

Motor Drive toValve Body Interface

Optimally DesignedThrottle Plate

}

}

Features and Benefits

• Higher system throughput• Optimally designed throttle

plate for improved control linearity• Smallest footprint available• Direct-drive motor eliminates

belts, gears and micro-switches• Fully serviceable valve motor subassembly• Easy installation and replacement• 316 stainless steel and Viton®

O-rings on all wetted parts• High open conductance• Low closed conductance

The Intellisys throttling butterfly valve’smicro-stepped, direct-drive motor eliminatesbelts, gears and limit switches, extendingMTBF while reducing the complexity and sizeof the drive assembly. High-torque, gear drivesare also available in all sizes as an option.All wetted parts are made from 316 stainlesssteel for corrosion resistance.Combined with a Nor-Cal APC, the high speedvalve drive enables systems to reach processpressures sooner, reducing cycle time andincreasing yield. The TBV can cycle fromopen to closed in 125 milliseconds,providing faster time to set point.Competing valves cycle in 1.6 to7.5 seconds. The optimallydesigned throttle plateprovides improved controllinearity, higher openconductance leading tocontrol accuracy within0.25% of set point.(See chart to right)

THROTTLING BUTTERFLY VALVES

Double O-rings on the top and bottomshaft seals ensure vacuum integrity,even during cycling.Intellisys Throttling Butterfly Valves arenow available in a full range of standardsizes from one to twelve inch IDs.Low cost, direct-drive valves are offered withNW-25, 40 and 50 flanges as well as ISO-63,

80, 100 and 160 flanges.High-torque geared drivesare available as an option.Other options include alumi-num valve bodies, heatersfor up to 200ºC internaltemperatures and specialO-ring materials, such asKalrez® or Chemraz®.

Intellisys Throttling Butterfly Valves (TBV)

4.00

3.50

3.00

2.50

2.00

1.50

1.00

0.50

0.00

-0.50

0 10 20 30 40 50 60VALVE ANGLE (Degrees Open)

CONT

ROL

ACCU

RACY

(%

Dev

iatio

n fro

m S

etpo

int)

CONTROL RESOLUTION Comparison of 4" TBV against

Competitors' Models

Maximum Deviation .04%

Competitor ACompetitor BNor-Cal Products



CLOSED

OPEN

VALV

E CON

TROL

LER

2.38

5.89

2.53

3.21

IntellisysTMTHROTTLING BUTTERFLY VALVE

.23

IntellisysTM

THROTTLING BUTTERFLY VALVE

THROTTLING BUTTERFLY VALVES & UNIVERSAL VALVE DRIVE

TBV Order InformationModel FlangeNumber A B C D E Type Price

TBV-100-NW-25 2.25 2.75 6.26 4.15 .87 NW-25 TBV-150-NW-40 2.25 2.75 6.26 4.15 1.39 NW-40 TBV-200-NW-50 2.00 3.36 6.57 4.15 1.98 NW-50 TBV-250-ISO-63 1.00 5.12 7.02 4.15 2.44 ISO-63 TBV-300-ISO-80 1.00 5.71 7.34 4.15 2.94 ISO-80 TBV-400-ISO-100 1.00 6.50 7.77 4.15 3.85 ISO-100 TBV-600-ISO-160 1.62 8.90 9.04 4.15 5.87 ISO-160 TBV-800-ISO-200 1.62 11.22 10.20 4.15 7.88 ISO-200 TBV-1000-ISO-250 1.62 13.19 11.14 4.15 9.88 ISO-250 TBV-1200-ISO-320 1.62 16.73 12.98 4.15 12.42 ISO-320

Includes Viton O-rings. All valves are available in aluminum construction Dimensions in inchesand/or with JIS or ASA flanges as well as with high-torque gear drives. Call for part numbers and pricing.

CLOSED

OPEN

VA

LVE

CO

NT

RO

LLER2.38

2.53

3.21

1.91 1.28

FLOWIntellisysTMTHROTTLING BUTTERFLY VALVE

A

.23

D

C

B

E

CLOSED

OPEN

VA

LVE

CO

NT

RO

LLER

FLOWIntellisysTMTHROTTLING BUTTERFLY VALVE

2.38

2.53

3.21

1.91 1.28

D

C

AB

.23

E

TBV O-ring OptionsOption Description Price

KT High Temperature Kalrez®

KC Chemical Resistant Kalrez®

CR Chemraz®

Viton® O-rings are standard. As an option, other O-ringscan be provided. Add the desired option suffix to the mainpart number. EXAMPLE: TBV-200-NW-50-KT

APC to Valve CableModel Number Length Price

TBV-CRD-10 10 feet

Other cable lengths are available upon request.

Universal Valve Drive (UVD)Our Universal Valve Drive can easily replace the older drive technologyfound on other manufacturers’ pressure control valves. When combinedwith our Intellisys adaptive pressure controller, the valve drive canupgrade a competitive valve to nearly the same performance levelsprovided by Intellisys. Drive-to-valve adapters for mostmanufacturers’ valves are available from stock. Custominterfaces can quickly be designed for your specificapplication. The UVD can be customized to fit anymanufacturer’s throttle valve. Call for more details.

Double Claw Clamp KitsModel Kit FitsNumber Valve Sizes Price

TBV-ISO-100-DCP 2.5, 3.0 and 4.0 TBV-ISO-160-DCP 6.0, 8.0 and 10.0

Kits contain a set of four clamps. Dimensions in inches

CLOSED

OPEN

VA

LVE

CO

NT

RO

LLE

R

2.38

5.89

2.53

3.21

IntellisysTMTHROTTLING BUTTERFLY VALVE

.23

IntellisysTM

THROTTLING BUTTERFLY VALVE



IQ SERIES THROTTLING BUTTERFLY VALVES

Specifications

Construction:Wetted Materials: 316 stainless steel, Viton®

Seals: Viton® standard, other materialsare available upon request

Operation:Power Input: 24 VDC, 100 W max., 60 Wnominal (with one heated gauge connected)Differential pressure: 15 psi maximumacross the valve plateHeating capabilities: Up to 150ºC withoptional heater jacketsAmbient Operating Conditions: 0 to 45ºC @0 to 95% humidity, non condensingLeak Rate: 1 x 10-9 atm·scc/sec He

Peripheral I/O:DeviceNet Communications:Micro-style 5-pin male connectorSerial Communication: RS-232 or RS-485on DB-15 female “Auxiliary” connectorCapacitance Diaphragm Gauge:One or two gauge operation.Second gauge requires external powerAnalog / TTL: Two each, analog andopen collector outputs

Inherent Performance:Maximum speed: 125 msec open to closedControl Plate Resolution: 3.2 arc secondsMaximum torque: 280 in-oz

Pressure Control Performance:Accuracy: The greater of 5 mV or 0.25% ofreadingRepeatability: Within 2.5 mV or0.12% of readingControl Range: 0.5% to 100% ofthe vacuum gauge range

Reliability:O-ring Cycle life: 1 million open-close cyclesMTBF: > 10,000 hours continuous operation

2.702.85

4.40

1.90

TMTHROTTLING BUTTERFLY VALVE

A

.62

5.91

C

B

D

IQ SERIES

AUXILIARY GAUGE

TM

TMModel FlangeNumber A B C D Type

TBV-IQ-100-NW-25 2.25 2.75 8.02 .87 NW-25TBV-IQ-150-NW-40 2.25 2.75 8.02 1.39 NW-40TBV-IQ-200-NW-50 2.00 3.36 8.33 1.98 NW-50TBV-IQ-250-ISO-63 1.00 5.12 8.78 2.44 ISO-63TBV-IQ-300-ISO-80 1.00 5.71 9.10 2.94 ISO-80TBV-IQ-400-ISO-100 1.00 6.50 9.53 3.85 ISO-100TBV-IQ-600-ISO-160 1.62 8.90 10.08 5.87 ISO-160TBV-IQ-800-ISO-200 1.62 11.20 13.85 7.87 ISO-200

Other sizes, flanges and materials of construction are available. Call for pricing Dimensions in inches

Nor-Cal Products’ new IQ-Series ThrottlingButterfly Valve with on-valve control is theideal choice for leading edge 200mm and300mm tools with DeviceNetTM communica-tions networks. In addition, IQ-TBVs can helpthe system designer meet continually scruti-nized tool footprint allotments. With itscompact, low cost design, the IQ valve isspecifically produced with the system designerin mind. One of the unique features of the IQvalve is that the pressure control electronicsare integrated on the valve. As a result, con-troller space requirements are reduced byover 80% compared to typical “buried box”controllers and by almost 50% compared tocompetitive “integral controller” products.Furthermore, all interface and communicationsconnections are made directly to the valvegreatly simplifying interconnecting cableinstallations.

The same patented closed loop motor controltechnology and proven adaptive pressure controlalgorithm found in Nor-Cal’s stand-alone pressurecontroller is included in the IQ valve. As a result,the valve moves from the fully open to closed posi-tion in 1/8 second while offering over 100,000steps of addressable control resolution throughoutthe stroke. In comparison, other standard “inte-gral controller” products require nearly 8 secondsto actuate while only providing 10,000 controlsteps. Due to the IQ valve’s fast speed and ultra-fine resolution, throughput increases of 5 to 15%with 2 to 10 fold reductions in wafer scrap are pos-sible.

As with the traditional Intellisys downstreampressure control products, the IQ valve can beoperated in a number of modes. The closedloop pressure control mode is enabled when-ever the valve is allowed to modulate the valveplate position automatically so as to cause thechamber pressure to match the system pres-sure set point. Alternatively, the IQ valve canbe operated in valve position control mode inwhich the tool software commands the valve to

IQ Series Throttling Butterfly Valves

a series of predetermined angles. A “slowmode” is also available, which is ideally suitedfor applications in which the rate of pressurechange has to be controlled precisely.Operation in any of these three modes can beaccessed and enabled “on the fly” or throughactivation of one of five pre-programmableset points stored in the IQ valve’s non-volatilememory. Last, the popular PMI™ functioncan also be used with the IQ-series valves.This function allows the user to monitor thetorque produced by the motor as it actuatesthe valve. Over time, as process by-productscondense on the inner surfaces of the valvebore and plate, the torque profile will increaseand register as a percentage of maximumtorque. Needed valve maintenance can thenbe performed on a scheduled basis ratherthan running the valve until failure.



Specifications

Power Input:3-pin 100-240 VAC Input Connector

System Interface:Serial Connector: DB-9 receptacle for RS-232 DCE or RS-485/ Modbus serial interface.TTL Connector: DB-37 receptacle containsall TTL and analog I/OAnalog Set Point: 0-10 and 0-5 VDC linearlyproportional to pressure or valve positionPressure Output: 0-10 VDC analog outputsignals proportional to pressure, one foreach vacuum gauge attachedValve Angle Output: 0-10 and 0-5 VDCproportional to valve position, 0 V isclosed, 10 V(5V) is openSignal Interface: 9 digital (TTL) controlinput signals to operate the APC. 4 opencollector status outputs, 2 process limitrelays, Form C contacts

Device Interface:Gauge Connector: Two DB-9 receptaclesprovide ±15 VDC @ 800mA for one or twovacuum gauges with differential signal inputfor increased noise immunityPressure Input: 0-10 VDC linearlyproportional to pressureValve Connector: DB-15 receptacleprovides power to operate the highperformance valve

Approvals:CE (EMC and Low Voltage Directives)

Operating Range:0 to 400C @ 0-95% humidity noncondensing

Weight: 3 lbs. 8 oz. (1.7 Kg)Valve Performance:

(when operated with an Intellisys APC)Control Range: From 0.5% to100% of the vacuum gauge rangeAccuracy: The greater of 5 mVor 0.25% of readingRepeatability: Within 2.5 mVor 0.25% of readingMaximum Speed: 0.125 to 0.250seconds open-to-closedControl Resolution: 100 thousandto 1.5 million steps

ADAPTIVE PRESSURE CONTROLLER

��

yyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyy

100-240V~50-60Hz

RS-232SW1

CDG2

CDG1

TTL I/0

VALVE

POWER

FAULT CONTROL

ON

OFF

POWER VALVE

IntellisysTMADAPTIVE PRESSURE CONTROLLER

PREVENTATIVEMAINTENANCE

INDICATOR

OPEN

CLOSE

3.46

2.75

7.00 10.60

6.50

The Intellisys Adaptive Pressure Controller(APC) provides advanced control systemperformance by combining closed loopmotor control with adaptive pressure control.The Intellisys APC system provides more than100,000 control steps in the typical throttlingbutterfly valve operating range - a 60 timesimprovement over existing technology.The adaptive algorithm eliminates pressureovershoot, undershoot and gradual rampsduring pressure transitions. Moreover, DigitalSignal Processing (DSP) enables DeviceNet™communications protocol and programmingflexibility for customer or process specificrequirements. When used with an Intellisysvalve, the APC provides at least a twentytimes increase in throttle valve speedover competitive products. An industryfirst preventative maintenanceindicator (PMI™), reducesunscheduled maintenanceand downtime by alertingthe user when the throttleplate and bore should becleaned. This is madepossible by the APC’s abilityto sense changes in motortorque from condensable

by-product buildup in the valve. As a safetyfeature, the PMI will automatically stop themotor when maximum torque is reached,preventing damage to the valve.The user can program up to five pressurecontrol or valve position set points storedin non-volatile memory, while monitoringsystem pressure and valve position. Adjust-able soft start routines can be programmedto reduce particle disturbance within theload lock or chamber.The versatile auto-sensing power supply forthe APC accepts 100-240 VAC input providingpower to the valve, as well as filtered ±15 VDCfor up to two heated CDGs. Flexible RS-232 andTTL/analog interface allows compatibility withmost host controllers.

Adaptive Pressure Controller (APC)

APC Order InformationModel Number Description Price

APC-001-B.1 For Gear Drive Throttling Valve. Buried Box. APC-001-B.2 For Direct Drive Throttling Valve. Buried Box.

Includes 6 foot power cord. Other power cord lengths available upon request.

APC Cables Model Number Description Length Connectors Price

TBV-CRD-10 APC to Valve Cable 10 feet CDG-CRD-10 APC to Gauge Cable 10 feet Bare Leads CDG-CRD-DB9-10 APC to Gauge Cable 10 feet DB-9 gauge CDG-CRD-DB15-10 APC to Gauge Cable 10 feet DB-15 gauge

Other lengths available on request.



CAPACITANCE DIAPHRAGM GAUGES

Nor-Cal Capacitance Diaphragm Gauges (CDGs) complement Intellisys adaptive pressure control-lers and throttle valves with vacuum pressure measurements of superior accuracy and repeatability.The CDG’s ceramic diaphragm helps minimize zero drift and stabilizes output noise due to thermallyinduced variations. 45ºC heated and non-heated (temperature compensated) devices are availablewith several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. The unheated CDGachieves an accuracy of 0.2%, while the 45ºC heated CDG achieves 0.15% accuracy.Improved thermal and mechanical diaphragmproperties reduce problems associated with metaldiaphragms, such as hysteresis, non-linear motionrange, temperature induced changes, material im-perfections and corrosiveness.The gauge’s aluminum oxide ceramic diaphragm

is created with no internal stress, surface tension ripples, grain or imperfections. The diaphragmreturns quickly and accurately to the same position for a given pressure, so measurements remainrepeatable over time. And, because the diaphragm isn’t damaged by exposure to atmosphericpressure or repeated cycling, there is no need for isolation valves. The corrosion resistant ceramicdiaphragm improves process consistency and prolongs sensor life. All CDG parts that come intocontact with process gasses are made from inert materials to ensure consistent performance andlong life in corrosive environments.The Intellisys CDG is 100% electrically and mechanically compatible with competitive gauges foreasy replacement installations. DeviceNet™ compatible gauges can also be ordered as an option.Please call for more information.

CDG Specifications CR090 MODELS (Unheated) CR091MODELS (45ºC Heated)

Pressure Range: 1, 10, 100, 1000 Torr 0.1, 1, 10, 100, 1000 Torr1.33, 13.3, 133, 1330 mbar 0.133, 1.33, 13.3, 133, 1330 mbar133, 1330, 13,300, 133,000 Pascal 13.3, 133, 1330, 13,300, 133,000 PascalFull scale (FS) Full scale (FS)

Accuracy: 0.2% of reading ± temperature effects 0.15% of reading Materials Exposed to Gases: Ceramic (AlO2), 316 Stainless Steel Max. Overrange Pressure: 1000 Torr for 0.1, 1, 10 & 100 Torr sensors

1500 Torr for 1000 Torr sensor Resolution: 0.0025% of Full Scale for 0.1/1 Torr sensors

0.0015% of Full Scale for 10/100/1000 Torr sensors Sensor Temp. Effects: 0.1-Torr 1/10/100/1000 Torr Zero Coefficient 0.005% of Full ScaleS/ºC 0.005% of FS/ºC 0.0025% of FS/ºC Span Coefficient 0.01% of reading/ºC Time Constant: <30 ms Operating Temps.: 5ºC to 50ºC 15ºC to 40ºC Power: 23 mA 300 mA Weight: 0.57 lbs. 1.07 lbs. Internal Volume: 6 cc 7 cc

APC to CDG CablesModel Number Connectors Price

CDG-CRD-10 Bare Leads CDG-CRD-DB9-10 DB-9 gauge CDG-CRD-DB15-10 DB-15 gauge

10 foot standard length. Other lengths available.

CDG ---- - --- - --{ { {

090 Non-heated091 Heated (45ºC)091D Heated with

DeviceNet

PRODUCT FAMILY

31 1000 Torr21 100 Torr11 10 Torr01 1 TorrM11 0.1 Torr*

RANGE

*Not available in 090 Family

TUBE FITTING OPTION(Blank) Bare TubeVCR Female 1/2" VCRCF CF-16 NW KF-16

CDG PricingPart Number Price

CDG090 CDG091 (except M11 Range) CDG091D (except M11 Range CDG091-M11 CDG091D-M11

Use part-tree to select family, range and fitting. Bare tubefitting is standard. For VCR, CF or NW fitting option add$60 to cost. Example Part number: CDG091-M11-VCR

Capacitance Diaphragm Gauges

IntellisysTM

CAPACITANCE DIAPHRAGM GAUGE

IntellisysTM

CAPACITANCE DIAPHRAGM GAUGE

1/2 FVCR

1.33 CFNW-16

1.93

3.15

1.85

.50

3.09

6.08

2.05

2.48

5.45

Heated CDG UnheatedCDG

1

0

-1200 300 400 500 600100

Drift

(mV)

Time (Hours)

Ceramic Diaphragm Zero Drift vs. Hours of Operation



HEATER JACKETS & CONTROLLERS

TIME (Minutes)

TEM

PERA

TURE

(Cen

tigra

de)

1800

1600

1400

1200

1000

800

600

400

200

00

0 30 60 90 120 150 180 210 240

Inside BoreValve BodyPlate CenterHeater Jacket Skin

Thermal Profile of Throttling Butterfly Valves(Thermocouple test sites and temperatures)

TBV Heater Jackets with ThermostatsModel Use with TBVNumber Part Number Voltage Price

HT-TBV-100-150-1* TBV-100-NW-25 120 VAC HT-TBV-150-150-1* TBV-150-NW-40 120 VAC HT-TBV-200-150-1* TBV-200-NW-50 120 VAC HT-TBV-250-150-1 TBV-250-ISO-63 120 VAC HT-TBV-300-150-1 TBV-300-ISO-80 120 VAC HT-TBV-400-150-1 TBV-400-ISO-100 120 VAC HT-TBV-600-150-1 TBV-600-ISO-160 120 VAC

Set point 150ºC. 2000C manually resetable over-temp. Includes a 12“ power cordwith AMP connector. 240 VAC Option: Change “-1” at end of part number to “-2.”Example: HT-TBV-100-150-2. Call for larger sizes and for temps. below 150ºC.For temps. up to 200ºC a PID controlled heater jacket is recommended.* Includes two special NW clamps.

TBV Heaters and Controllers

Many semiconductor processes are carriedout in vacuum chambers with internal tem-peratures in the 700ºC range. Processby-products exit the chamber in vapor phase,but sublimate in the foreline and vacuum pumpexhaust when gas temperatures drop suffi-ciently for them to form solids. The resultantbuildup can increase wafer defects fromparticle backstreaming, reduce throughputof vacuum lines, impede the function ofthrottle valves and isolation valves, damagesome dry pumps and reduce the efficiencyof the scrubber. This buildup can be reducedor eliminated by heating vacuum lines andassociated components from the chamberto the scrubber, or by using a combinationof heaters and foreline traps, which collectthe by-products, preventing them fromcontinuing downstream.A CE certified, thermostat controlled heaterjacket is available for Intellisys TBV’s for 150ºCinternal temperatures. For temperatures up to200ºC a CE certified heater and PID controllerprovide precise temperature control. Heatersfor all TBV valves cover the valve body as wellas the mating flanges. Heaters for TBV valveswith NW flanges are provided with specialaluminum clamps. Standard sizes areavailable up to six inches. Larger sizesare available on request.

TBV Heater Jackets for PID ControlModel Use with TBVNumber Part Number Voltage Price

HC-TBV-100-200-1* TBV-100-NW-25 120 VAC HC-TBV-150-200-1* TBV-150-NW-40 120 VAC HC-TBV-200-200-1* TBV-200-NW-50 120 VAC HC-TBV-250-200-1 TBV-250-ISO-63 120 VACHC-TBV-300-200-1 TBV-300-ISO-80 120 VAC HC-TBV-400-200-1 TBV-400-ISO-100 120 VAC HC-TBV-600-200-1 TBV-600-ISO-160 120 VAC

Maximum temperature 200ºC. Includes 12” power cord with AMP connector and twobuilt-in type K thermocouples with 6’ lead and mini-connector.240 VAC Option: Change “-1” at end of part no. to “-2.” Example: HC-TBV-100-200-2.* Includes two special NW clamps.

Typical Heated Line Configurations

1. Heated foreline to pump and heated exhaust lineto scrubber. No foreline trap.

2. Heated foreline to foreline trap before pump.3. Heated foreline to pump and heated exhaust to foreline

PID Heater Controller

The HC-935A-1-1 features single temperature sensor input from athermocouple or RTD sensor, and dual control outputs. The outputsmay operate in a variety of modes including: heat, cool, alarm andtimer. The timer function operates in a choice of delay-ON, delay-OFF,signal-ON or signal-OFF modes. Front panel lock capability and aLED display round out the feature set. Other HC-935 controllersare available for one, two and four zones. Call for pricing.

Model Max. OutputNumber Watts Zones Price

HC-935A-1-1 960 @ 120V 1

Features• 1/32 DIN package• NEMA 4X• Countdown timer• Programmable alarms• Universal power supply• Small panel footprint• ±0.25% accuracy• Worldwide flexibility• Low cost multi-zone

temperature control



TECHNICAL INFORMATION

Pin Assignments for the Intellisys TBV and TBV-IQ Valves, CDG and APC Controller

Active High Output SignalsActive Low Output SignalsActive Low Input Signals

View or download technical bulletins, frequently asked questions,PDF catalogs and operator’s manuals for Intellisys adaptive

pressure control products at www.n-c.com.

Call 1-800-824-4166 for Intellisys Technical Support.

Intellisys is a trademark of Nor-Cal Products, Inc.Penduroll is a registered trademark of V-Tex Corporation

ADAPTIVE PRESSURE CONTROLTM

General Features and Benefits

• Space saving, low cost design

• Low particle generation

• High reliability

• Easy maintenance, split body allows O-ringreplacement without removing valve from system

• Body can be heated to 150ºC with optional heater jackets

• Available in ISO and JIS flange styles

General Specifications

ConstructionWetted Materials:

Body: Cast aluminum AC4CHValve plate: Aluminum A5052Other parts: A 6061, A7075, SS304 and SS316, Viton®

Seals: Viton® standard, other materials available upon request

Body and plate surface treatment:Bare aluminum standard, hard anodizing optional

Valve DesignOperating Pressure: 3.8 x 10-8 to 760 Torr (5 x 10-8 to 1000 mbar)

Maximum Differential Pressure(while opening valve): 200mm - 20 Torr (26 mbar)

250mm - 24 Torr (32 mbar)350mm - 29 Torr (38 mbar)

Heating or Bakeout Capabilities:Body: 150ºC max with optional heater jackets

Actuator: 60ºC maximum

Ambient Operating Conditions: 0 to 60ºC

Leak Rate: 1 x 10-9 atm·scc/sec He across seatand to atmosphere (bare aluminum body)

Service Life : 200,000 cycles - Open to Fully Closed (All valves)1 million cycles - Open to Partially Closed (3-position valves)1 million cycles - Open to Control Closed Position (TPV)

Throttling PendulumValves and AdaptivePressure Controllers

Intellisys throttling pendulum valves provide equipment manufac-turers with unmatched pressure control performance and lowparticle generation. Other pendulum valves use one actuationmethod to move the gate and another method to seal, creating an“out of control” area near the closed position. To compensate forthis, system designers often add secondary bypass lines withcostly throttling butterfly valves for high pressure, high flowregimes, such as NF3 cleans. Intellisys pendulum valves utilizeexclusive closed-loop motor control and a patented Penduroll®actuator mechanism to move the sealing gate rapidly across thevalve bore and transition to the axial direction. The result is pre-cise pressure control over the entire valve stroke, most notablynear the closed position. The Intellisys control system is the onlychoice for demanding 300mm Etch and CVD applications whichrequire fast, accurate pressure control across the entire rangeof critical process flows and chamber pressures.Nor-Cal Products’ closed-loop motor control monitors andcontrols the exact position of the valve’s gate mechanism.The adaptive pressure controller provides over eight million stepsof addressable resolution to position the gate exactly where itneeds to be to control pressure or to seal. In addition, the Nor-Calcontrol system’s speed of actuation is unequaled in providing opti-mal transient response, pressure set-point stability, and overallprocess improvement. The APC’s adaptive algorithm outperforms“learn modes” by optimizing phase and gain settings in real timeduring varying chamber pressure and flow conditions.

Isolation Pendulum ValvesNor-Cal Products’ pneumatically actuated isolation pendulumvalves contain the same patented Penduroll™ mechanism that isfound in the Intellisys™ throttling pendulum valves. These valvesoffer the user a compact and low cost alternative to competitivedesigns. In addition, the smooth actuation results in low particlegeneration and rapid open-to-close speeds.In-situ serviceability of the valve is made possible throughthe incorporation of a removable bonnet cover. The entire gateassembly and sealing O-ring can be accessed without removingthe valve from the system, making regular inspections,cleanings and O-ring replacements quick and easy.


E C

D

B

A

F

Maintenance Space

E C

D

F

B

A

G

Maintenance Space

PENDULUM VALVES

Nom. ID Part Number A B C D E F Weight8.00 TPV-800-ISO-200 3.46 3.78 19.90 14.40 6.50 9.29 49 lbs. (22 Kg)

10.00 TPV-1000-ISO-250 3.94 3.78 23.80 16.60 8.46 9.49 62 lbs. (28 Kg)12.00 TPV-1200-ISO-320 4.72 4.06 30.20 22.00 10.60 12.80 123 lbs. (56 Kg)14.00 TPV-1400-JIS-350 4.92 4.06 32.30 22.00 12.20 12.80 143 lbs. (65 Kg)

Other sizes and flange configurations available. Call for details. Dimensions in inches

Specifications

Compressed air source: CDA or equivalent at 65 to 85 psigMaximum speed: 3 seconds open to closed

(250 mm size and below)

Specifications

Power Input: 36 VDC to valve supplied from APC. Customer supplied4.5 to 16 VDC to optional position sensor

Performance: (when operated with an Intellisys APC Controller)Control Range: From .5% to 100% of the vacuum gauge rangeAccuracy: The greater of 5 mV or 0.25% of readingRepeatability: Within 2.5 mV or 0.12% of readingMaximum Speed: 1 to 3 seconds open-to-closedControl resolution: 8 million to 20 million steps

Options:High Temperature: Heated and insulated valve body

with PID or thermostat controlsPosition Indicators: Open/closed optical valve position indicator with LED’sSafety Lock: Closed position safety lock pin. Operated by a spring-to-

close electric solenoid. (Requires customer supplied24-76 VDC relay and power, relay logic signal from APC)

Rough Pump Port: NW-25 roughing port on main casting allowspump-down of chamber prior to opening pendulum valve

Intellisys Throttling Pendulum Valves

Isolation Pendulum ValvesNom. ID Model Number A B C D E F G Weight6.00 IPV-600-ISO-160 3.15 3.78 15.90 12.20 5.32 5.87 8.50 40 lbs. (18 Kg)8.00 IPV-800-ISO-200 3.46 3.78 19.90 14.40 6.50 5.28 9.29 49 lbs. (22 Kg)

10.00 IPV-1000-ISO-250 3.94 3.78 23.80 16.60 8.46 5.47 9.49 62 lbs. (28 Kg)12.00 IPV-1200-ISO-320 4.72 4.06 30.20 22.00 10.60 7.24 12.80 123 lbs. (56 Kg)14.00 IPV-1400-JIS-350 4.92 4.06 32.30 22.00 12.20 7.64 12.80 143 lbs. (65 Kg)16.00 IPV-1600-ISO-400 5.91 5.00 36.00 24.70 12.80 7.83 15.00 231 lbs. (115 Kg)

Other sizes and flange configurations available. Call for details. Dimensions in inches


Call for Pricing. - International product pricing will vary.

Features and Benefits

• Unique Preventative Maintenance Indicator (PMI™)reduces unscheduled maintenance and downtime

• Patented motor control technology senses increasedtorque in throttle gate for improved diagnostics

• Autosensing 90-240 VAC power supply• Flexible analog and digital system interfacing• Buried box model saves valuable rack space

Specifications

Power Input: 3-Pin 100-240VAC Input ConnectorSystem Interface:

Serial Connector: DB-9 receptacle for RS-232 DCE orRS-485/ Modbus serial interface

TTL Connector: DB-37 receptacle contains allTTL and analog I/O

Analog Setpoint: 0-10 and 0-5 VDC linearly proportionalto pressure or valve position

Pressure Output: 0-10 VDC analog output signalsproportional to pressure, one foreach vacuum gauge attached

Valve Angle Output:0-10 and 0-5 VDC proportional to valveposition, 0V is closed, 10V(5V) is open

Signal Interface: 9 digital (TTL) control input signalsto operate the APC. 4 open collectorstatus outputs, 2 process limit relays,Form C contacts

Device Interface:Gauge Connector: Two DB-9 receptacles provide

±15VDC @ 800mA for 1 or 2 vacuumgauges with differential signal inputfor increased noise immunity

Pressure Input: 0-10 Volts DC linearly proportionalto pressure

Valve Connector: DB-15 receptacle provides power tooperate the high performance valvestepper motor

Approvals: CE (EMC and Low Voltage Directives)Operating Range: 0 to 400C @ 0-95% humidity

noncondensingWeight: 3 lbs. 8 oz. (1.7 Kg)

��

yyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyy

100-240V~50-60Hz

RS-232SW1

CDG2

CDG1

TTL I/0

VALVE

POWER

FAULT CONTROL

ON

OFF

POWER VALVE

IntellisysTMADAPTIVE PRESSURE CONTROLLER

PREVENTATIVEMAINTENANCE

INDICATOR

OPEN

CLOSE

3.46

2.75

7.00 10.60

6.50

Model Number Description

APC-001-PM.2 Full functionality including RS-485/Modbus serial interface. Allows up to 16controllers on one communications line.

APC-001-P.2 Full functionality includingRS-232 DCE serial interface.

ADAPTIVE PRESSURE CONTROLLERS

Intellisys Pendulum Valve ControllersThe Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provideadvanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps duringpressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibilityfor customer or process specific requirements.


Call for Pricing. - International product pricing will vary.

Scale in MilliTorr

Scal

e In

Tor

r Sc

ale

in M

illiT

orr

Time in Seconds

Perc

ent V

alve

Ang

le

1.5

1.0

0.5

2.02.5

0102030405060708090

100

0

10

30

20

40

50

0 10 20 30 40 50 60

STEP 1 STEP 2 STEP 3 STEP 4 STEP 5

Scale In Torr

VALVE ANGLE

SYSTEM PRESSURE

Set-Point

Nor-Cal Competitor

A

Competitor's time to reach set-point lags due to inability to close gate completely.

Competitor never reaches set-point due to high "closed" position conductance. Note that competitor remains at 0% valve angle.

Flow rate is increased to 2 slm which causes a sudden jump in base pressure.

A

B

C

B C

Most dry etch processes and manyadvanced CVD applications require theuse of a wide range of operating pres-sures, including some low pressureconditions that are well into the mo-lecular flow regime. That is, in part,driving OEM’s to use large diameterpump stacks with high capacity turbopumps. This means that the days ofinserting a simple butterfly valvebetween the chamber and the pump aregone due to the limited control rangeand non-sealing nature of large diam-eter butterfly valves, as well as to thespace they consume in the pump stack.To address these problems, OEM systemdesigners turned their attention to the useof throttling gate or pendulum valves,thereby addressing the pressure controland isolation valve issue with a singlesolution. Until now, controlling the large,heavy gate proved slow and cumbersome.Metal-to-metal contact of structural partsoften resulted in particle generation andmechanism failure causing havoc withprocess yields. Finally, existing valvedesigns are unable to provide the full rangeof pressure and mass flow requirementsdue to their inability to control pressurein the near closed position.Specifically, designers have hadto counteract the “low controllableconductance” limitation by inserting anadditional throttle valve in the by-passline around the throttling gate valve.(See illustration below.) In othercases, forcing the system through timeconsuming control learn algorithmsfor every new process condition hasbecome necessary. In either case, acompromise involving valuable space,cost or process performance has oftenbeen the only solution until now.

The high speed, ultra-high resolutionand exclusive actuation method ofIntellisys throttling pendulum valveseliminate the previous products’shortcomings. Using a simulated semi-conductor process, the Intellisys pendu-lum valve system was compared with asimilar system from, historically, thesole manufacturer of such valves. (Seechart above) In both cases, the testused the following abbreviated processrecipe with a 40 liter chamber connectedto an 1800 lps, ISO-250 turbo pump.

Step 1 Pump system to base pressureStep 2 Flow 80 sccm N2 & command

system to a process set-pointof 50 mTorr

Step 3 Evacuate system tobase pressure

Step 4 Flow 2 slm N2 and commandsystem to a cleaning steppressure of 2.5 Torr

Step 5 Evacuate system tobase pressure

The graph clearly illustrates significantperformance differences between thetwo valves. During the initial ramp frombase pressure to 50 mTorr, the Intellisyssystem drives the pendulum gate to apoint where the sealing O-ring is just

in contact with the sealing surface,whereas the competitive valve cannotand exhibits a significant leak-by in theclosed position. (See Step 2.) As a re-sult, the rate of pressure change wascompromised and the time taken toreach set-point more than doubled.Furthermore, using the competitivevalve led to pressure oscillations thatmeasured ±8% of set-point lasting3 to 4 seconds.Another noteworthy observationoccurred in the cleaning step.(See Step 4.) The Intellisys valveefficiently reached the target pressureof 2.5 Torr in approximately 3 seconds.However, even though the competitivevalve traveled completely closed andremained closed for the duration of theprocess step, the maximum achievablepressure leveled out at just over 2 Torr.This phenomenon is, again, attributableto the high leak rate of the competitivevalve when in the closed position.Inherent valve design and pressurecontrol performance limitations,such as these, have a direct effect onvacuum system design complexity. Inthe past, processes that required opera-tion over a wide range of flow rates andpressures essentially dictated that thetool vacuum foreline be complex. Eventhough it was only for use during certainoperations the added control valve by-pass took up space and could add upto $5,000 in system cost for everychamber. In contrast, the Intellisyspendulum valve system enables fullcommand of all control applicationswith just one valve and associated pres-sure controller, thereby saving extraspace, cost and integration efforts.

Simplified SystemDesign with SingleValve Approach

Chamber

Competitor's Throttling Pendulum Valve

HighVacuumPump

HighVacuumPump

To Rough Pump

To Rough Pump

Throttling Butterfly Valve with Controller

Isolation Valve

IsolationValve

TM

Nor-Cal'sIntellisysThrottling Pendulum Valve

Throttling Butterfly Valve and Controller eliminated with Intellisys TPVsystem.

Savings of approximately $5000.00

Chamber



Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02

GenesisTM

Due to Nor-Cal’s continuing improvement program, pricing and specifications are subject to change without notice.

GENERAL INFORMATION

The Genesis modular vacuum valve system provides semiconductor equipmentdesigners with unlimited possibilities for downstream vacuum subassemblies.Nippleless valve bodies and block fittings can be assembled by two attachmentmethods using universal ISO-KF centering ring/O-ring hardware, providing maxi-mum flexibility and the smallest footprint possible.

Simple and robust, Genesis valves are ratedat one million cycles before service. Duringtesting, these valves were cycled millionsof times while maintaining vacuum integrity.The welded bellows is AM-350 for corrosionresistance, longevity and flexibility. The bel-lows fully retracts from the side port when thevalve is open, eliminating buildup of processby-products on the bellows and subsequentparticle generation during operation. Valvecenter plates have been eliminated in order toprovide precise alignment between the poppetand valve seat. A composite stem bushingresists wear even at high temperatures.Valve return springs are shot peened in order

Soft Start Valve ActuatorFor reduced particle contamination in loadlocks and process chambers, Genesis valvescan be provided with a patented low cost softstart actuator with no increase in valve size. Adouble-acting air piston, opens a soft start cir-cuit inside the valve when air is supplied to thetop of the air cylinder. The soft start by-passopening can be provided fully open or with aspecified orifice, depending on the desiredpump down. (See charts page 4 and below)

After the chamber has been pumped fromatmosphere to the desired cross overpressure, the main valve circuit is opened bysupplying air to the bottom of the air cylinder.Each circuit can be operated independantlyand is air-to-open, spring-to-close.

Open/Closed Position IndicatorThe Genesis valve can be provided withCE certified proximity open/closed positionindicators. These proximity indicators detectthe position of the piston in the air cylinder.The technician has a visual indication ofpower to the circuit and the position ofthe valve, as does the operator watchingthe panel. With the soft start option onlyone position indicator can be providedfor the fully open position.

Air SolenoidAs an option, low 1.8 wattage, CE certifiedair solenoids in several current ratings canbe provided on the valve, ready to attach tothe house air supply. One three-way air sole-noid is required for a standard Genesis valveand two three-way air solenoids are requiredfor a soft start version. Air solenoids canalso be supplied as a kit with assemblyhardware and instructions.

O-ringsStandard Genesis valves are furnished withViton® O-rings. They are resistant to mostchemicals, but should not be heated to tem-peratures in excess 204ºC. Even prolongedexposures of 150ºC may begin to degrade theO-rings. The following O-rings can be pro-vided as options. High temperature Kalrez®

O-rings allow the valve to be heated to 316ºCintermittently or 280ºC for prolonged periodswhere the O-ring is allowed to expand.Chemical resistant Kalrez and Chemraz®

are also available.TIME (Seconds)

Cha

mbe

r P

ress

ure

(Tor

r)

800

700

600

500

400

300

200

100

0

0 5 10 15 20 25 30 35 40 45

Typical 30 Liter Chamber Pump-Down with Soft-Start

Open 1.5" valveat desired

cross-over pressure

Open soft-start with 0.070" orifice

Main ValveOnly

Features and Benefits• Million cycle reliability• Low cost soft start option• Low cost heated option• Smallest footprint available• Modular design• Corrosion resistant

to provide millions of cycles without loss offorce. Teflon® coated air cylinders feature a15 micron air filter to prevent particlemigration either into or out of the air cylinder.

Genesis valves and fittings have a patentednippleless body, which provides the highestconductance and smallest footprint available.Air solenoids, open/closed position indicators,and soft start actuators can be added with noaddition to size. All valves are designed foreasy O-ring or bellows replacement. Designsymmetry allows the air actuator to be orientedat 90º increments for easy access to the airsolenoid and visibility of position indicators.

Valve Options

Teflon Coated Air Cylinder

Main Valve Stem

Double ActingAir Piston

Soft Start Stem

High Temp.CompositeStem Bushing

Interchangeable Orifice

Welded AM-350 Bellows

Nickel CoatedAluminumBody

Genesis valve bodies and fittings are electro-less nickel coated aluminum for excellentthermal characteristics and corrosion resis-tance. Components are machined from solid6061-T6 aluminum to eliminate welds, leakpaths and entrapments. All tapped holes aresupplied with stainless steel threaded insertsfor long term serviceability.

Genesis Valves



GENERAL INFORMATION

Block Subassemblieswith Double Stud FastenersSpecial subassemblies, such as diverter valvesor roughing/high vacuum circuits can be as-sembled quickly using double stud fastenerswith valves and block fittings. These subas-semblies can be provided as a unit fromNor-Cal or you may choose to assemble themfrom individual components. They are ideal forlimited space installations, such as on clustertool frames, and provide highest conductance,while eliminating unnecessary hardware.Double stud fasteners can be used to make abulkhead attachment from a valve directly toa chamber. Stud fasteners can be installedusing a jeweler’s screwdriver and an ignitionwrench. An installation tool for stud fastenersis provided with each stud fastener kit orassembly, or one can be purchased separately.

Modular Valve System

Finger ClampComponent AssemblyElbows, reducers, chamber ports, roughinglines, or other vacuum components can beattached directly to valve bodies or fittings withfinger clamps. Unnecessary valve ports havebeen eliminated, shortening the gas path andincreasing system conductance.For ultimate versatility standard nipples andelbows can be attached with finger clamps inorder to make a drop-in replacement valve,such as an angle-in-line or tee valve. Once thefinger clamp bolt is loosened it can be pivotedout of the way in order to remove or install theflange and centering ring. The finger clampdoes not need to be removed from the valve orfitting. The clamp is self-aligning when tight-ened, for ease of flange installation.

Bulkhead Attachment to Chamber with Double Stud Fasteners Optional

Modular Heater

Genesis Valve with Soft Start Actuator

Genesis Tee Fitting

VCR Test Portattached withFinger Clamps

Finger ClampAttachment

Foreline to Vacuum Pump

Heaters and Insulators

A unique, UL listed modular heater provides 120ºC or150ºC internal temperatures in valves or fittings at afraction of the cost of a silicone heater. Genesis heatersuse thick film technology to provide uniform heatthroughout the component. Each heater containsa control set point and a resetable high tempera-ture shut off. The 1.5 and 2.0 inch sizes alsohave a low temperature alert that can be con-nected to a remote alarm. Each thermostatcan be replaced without destroying the heater.The same heater can be attached to a valvebody or fitting with two screws. A trim-to-fit,molded insulator covers the heated componentand mating flanges. These clean room compat-ible insulators are constructed of .50 inch thickmolded silicone. When in use, the exteriorsurface remains touch-safe. Insulators meetUL 94 V-O requirements. Insulators for othercomponents are available upon request.

Molded Insulator

Modular Thick Film Heater

ResetableHigh Temp.Thermostat

Replaceable Set Point Thermostat

Genesis is a registered trademarks of Nor-Cal Products, Inc.Teflon is a registered trademark of DuPont de Nemours & Co., Inc.Viton is a registered trademark of DuPont Dow Elastomers.Kalrez is a registered trademark of DuPont Dow Elastomers.Chemraz is a registered trademark of Green Tweed Co.



GENESIS VALVES & VALVE OPTIONS

Follow the part tree to add one or more options to a particular Genesis valve. Add option suffixes to the basic valve part number in the order show bypart tree. EXAMPLES: GNV-152-S2-P1-KT-B21, GNV-102-P2-A11 & GNV-202-S0-P1

C

A

B

D

Genesis Modular ValvesValve Model Bolt Size Number Flange A B C D Thread Circle Price

0.75 GNV-072 NW-16 1.15 2.31 3.04 1.46 12-24 2.031 1.00 GNV-102 NW-25 1.06 2.13 3.14 1.46 12-24 2.031 1.50 GNV-152 NW-40 1.25 2.50 3.71 1.88 12-24 2.616 2.00 GNV-202 NW-50 1.63 3.25 4.44 2.25 1/4-20 3.406

3” and 4” Genesis valves available upon request. Call for pricing and information. Dimensions in inches

O-ring OptionOption Description Price

KT 4079 High Temperature Kalrez KC 2051 Chemical Resistant Kalrez CR 513 Chemraz S Silicone

A

C

B

D

Air Solenoid andPosition Indicator DiagramSIZE A B C D

.75 2.55 4.82 3.76 1.661.0 2.55 4.82 3.76 1.661.5 2.73 5.31 4.06 1.822.0 3.11 6.05 4.42 2.03


GNV-152 - -- - ---

Soft Start Position Indicator

- -- -

O-ring Air Solenoid

---

SPECIFICATIONS• Million cycle service interval• Electroless nickel coated aluminum bodies• TeflonTM coated aluminum air cylinder• Welded AM-350 bellows• Viton O-rings standard• High temperature composite stem bushing• Air-to-open, spring-to-close actuation• 60-80 psi required air pressure• Helium leak rate 1x10-9 Torr standard

cc./sec. maximum• Differential pressure, 25 psi maximum• 5/32 inch One-Touch air fittings standard.

Other sizes are available in US andMetric tubing diameters

• Larger valve sizes available. Call for details.

Position Indicator OptionActuator Option Description Add to Price

Soft Start/Standard P1O One position indicator - main valve open only Standard P1C One position indicator - main valve closed only Standard P2 Two position indicators - main valve open and closed

Refer to diagram at left for dimensions.

Viton Replacement O-rings,Bellows Assemblies and Valve

Rebuild Kits are available on Page 5

SPECIFICATIONS

Air Solenoid OptionActuator Option Kit Quantity Description Price

Standard A11 A11-K 1 120 VAC, 50/60 Hz A21 A21-K 1 24 VDC A31 A31-K 1 240 VAC, 50/60 Hz A41 A41-K 1 24 VAC, 50/60 Hz

Soft Start B11 B11-K 2 120 VAC, 50/60 Hz B21 B21-K 2 24 VDC B31 B31-K 2 240 VAC, 50/60 Hz B41 B41-K 2 24 VAC, 50/60 Hz

Refer to diagram at left for dimensions.

Valve Options

SPECIFICATIONS

• 12 to 24 VDC• Normally open

• -25ºC to 70ºC temperature range• Not available on heated valves

• CE certified• Shielded• M5 threads x 30mm long

• 5/32 inch One-Touch air fittings supplied• Remote mount on heated valves

• 24 inch long electrical leads with quick disconnect• 1.8 watt power consumption



SOFT START OPTIONS & ASSEMBLY HARDWARE

800

700

600

500

400

300

200

100

0

TIME (Seconds)

Cham

ber P

ress

ure

(Tor

r)

0 30 60 90 120 150 180 210

(1.5" Valve on 30 Liter Chamber)

Pump-Down with Various Soft-Start Orifices

No Orifice0.147" Orifice0.109" Orifice0.070" Orifice

Assembly Hardware

Double Stud FastenersValve ModelSize Number Thread A Price

.75–1.5 GNSF-150 12-24 .625 GNSF-150-K 12-24 .625

2.0 GNSF-200 1/4-20 .730 GNSF-200-K 1/4-20 .730

To order Stud Fastener Tool separately - order Model Number GNSF-T. Price $5.00. Dimensions in inchesB

A0.15

0.375

A

Double stud fasteners allow two Genesiscomponents to be connected using a standardISO-KF centering ring and O-ring. Each kitcontains four double stud fasteners for oneconnection and an installation tool.

DIMENSIONSfor Modular Valve Joining

with Double Studs Fasteners

NOM. ID A B 1.0 2.28 4.40 1.5 2.65 5.15 2.0 3.40 6.65


Soft Start Orifice KitsModel Number Contents PriceGNV-075-SO-K 3 orifice sizes and a 1/8 inch allen wrench for installation GNV-075-SO-1 0.070 orifice GNV-075-SO-2 0.109 orifice GNV-075-SO-3 0.147 orifice GNV-075-SO-T 1/8 inch allen wrench for orifice installation


Finger ClampsValve ModelSize Number Material Bolt Torque Price

.75–1.5 GNCP-150-S Stainless 12-24 x 7/8 60 in. lbs. 2.0 GNCP-200-S Stainless 1/4-20 x 7/8 100 in. lbs.

Dimensions in inchesFinger Clamps allow a standard ISO-KF flange to be attached directly to a Genesis valve or fittingusing a standard ISO-KF centering ring and O-ring. Each kit contains four finger clamps, hexhead bolts and washers for one connection.

Two fastening systems are available forGenesis valves and fittings providing maximumflexibility and the smallest footprint possible.Nippleless valve bodies and block fittings canbe assembled with finger clamps or doublestud fasteners using universal ISO-KF center-ing ring/O-ring hardware, providing maximumflexibility and the smallest footprint possible.

Soft Start Actuator OptionOption Description Add to Price

S0 Soft start actuator - no orifice. For 1”, 1.5” and 2” valves. S1 Soft start actuator with 0.147 orifice installed. For 1”, 1.5” and 2” valves. S2 Soft start actuator with 0.109 orifice installed. For 1”, 1.5” and 2” valves. S3 Soft start actuator with 0.070 orifice installed. For 1”, 1.5” and 2” valves.

Refer to the “Pump Down Curves” graph to right. Dimensions in inchesSoft start actuators for larger valves available. Call for information.

Finger ClampAssembly

Double StudFastener Assembly



GENESIS HEATERS INSULATORS & ACCESSORIES

Valve HeatersValve Model SetSize Number Point Watts A Price

.75 & 1.0 HT-GN-100-120-1 120ºC 120 2.13 HT-GN-100-150-1 150ºC 120 2.13

1.5 HT-GN-150-120-1 120ºC 120 2.50 HT-GN-150-150-1 150ºC 120 2.50

2.0 HT-GN-200-120-1 120ºC 160 3.25 HT-GN-200-150-1 150ºC 160 3.25

Dimensions in inchesSPECIFICATIONS• Compact, modular design• 120 VAC, 240 VAC available upon request• 120ºC or 150ºC set points, standard• Manually resetable 200ºC

over temperature shutoff, standard

Genesis heaters use thick film technology to provide uniform heat throughout the component. Each heater contains a control set point and aresetable high temperature shut off. The 1.5 and 2.0 inch sizes also have a low temperature alert that can be connected to a remote alarm.Each thermostat can be replaced without destroying the heater. The same heater can be attached to a valve body or fitting with two screws.

• Low temperature alert, standardon 1.5 and 2.0 inch

• 12 inch power cord with AMP 3-pin connector• Two 12 inch low temperature alert cords

with AMP MR connectors, standard on1.5 and 2.0 inch

• UL listed. CE certification pending

Heater Power CordsModel Number Length PriceHT-GN-PCD-6 6 ft. HT-GN-PCD-12 12 ft.

Fused 120 VAC power cords. Other length power cordsare available on request. Call for price.

F

D

A

A

0.75

EC

B

0.75

Optio

nal H

eate

r

Heater and InsulatorDimensions Diagram

Viton O-ringsIncludes bellows O-ring and poppet O-ring.Other O-ring materials available. Call for pricing.

Valve ModelSize Actuator Number Price

.75 & 1.0 Standard GNV-100-95 Soft Start GNV-100-95-S0

1.5 Standard GNV-150-95 Soft Start GNV-150-95-S0



Genesis Valve Repair Kits

First maintenance is recommended at one million cycles, depending on the cleanliness of the process. Typical service will require O-ring replacement.

Bellows AssemblyBellows, top flange and poppet weldmentassembly. Requires O-ring kit to seal.






Valve RebuildIncludes all valve parts except the body and position indicator.*






Valve Heater InsulatorsValve ModelSize Number B C D E F Price

.75 & 1.0 HI-GNV-100 6.00 4.50 3.13 2.50 3.64 1.5 HI-GNV-150 6.63 5.00 3.63 2.88 4.25 2.0 HI-GNV-200 8.00 5.88 4.38 3.31 5.00


• Touch safe exterior• .50 inch thick molded silicone construction• Trimable

• Clean room compatible• Meets UL 94 V-O• Insulators for other components available

* Position indicator type must be specified when ordering. See page 3.

Example: GNV-150-99-S0-P10



GENESIS MODULAR FITTINGS

SPECIFICATIONS• Electroless nickel coated 6061 T-6 aluminum• Stainless steel threaded inserts• Attach to standard components with finger clamps• Optional modular heater available• Attach to Genesis valves and fittings with double stud fasteners

Genesis fittings provide the most compact, highest conductance, corrosion resistantvacuum connection available when used with Genesis valves, fittings and double stud fasteners.These fittings can also attach with finger clamps to standard ISO-KF components with universalO-rings, which are also available from Nor-Cal Products.

90º ElbowValve Model Bolt Size Number A B Thread Circle Price

1.0 GNF-102 2.125 1.063 12-24 2.031 1.5 GNF-152 2.500 1.250 12-24 2.616 2.0 GNF-202 3.250 1.625 1/4-20 3.406

Fittings for .75 inch valves are available on request. Call for pricing and information. Dimensions in inches

TeeValve Model Bolt Size Number A B Thread Circle Price

1.0 GNF-103 2.125 1.063 12-24 2.031 1.5 GNF-153 2.500 1.250 12-24 2.616 2.0 GNF-203 3.250 1.625 1/4-20 3.406


4-Way CrossValve Model Bolt Size Number A B Thread Circle Price

1.0 GNF-104 2.125 1.063 12-24 2.031 1.5 GNF-154 2.500 1.250 12-24 2.6162.0 GNF-204 3.250 1.625 1/4-20 3.406



1.0 GNF-105 2.125 1.063 12-24 2.031 1.5 GNF-155 2.500 1.250 12-24 2.616 2.0 GNF-205 3.250 1.625 1/4-20 3.406



1.0 GNF-106 2.125 1.063 12-24 2.031 1.5 GNF-156 2.500 1.250 12-24 2.616 2.0 GNF-206 3.250 1.625 1/4-20 3.406


BTYP

ATYP

OPTI

ONAL

HEA

TER

OPTI

ONAL

HEA

TER

0.750BTYP

ATYP

BTYP

ATYP

BTYP

ATYP

BTYP

ATYP


Prices subject to change without notice. - International product pricing will vary. TRAPA-LIT 7/02

2

GENERAL INFORMATION & OPTIONS

General Information

Since 1962, Nor-Cal Products has been designing and building standard and cus-tom foreline traps for the vacuum industry. These traps range in complexity fromthe sealed coaxial traps, which prevent oil backstreaming, to the triple-pass watercooled traps, which remove condensable gasses that contaminate mechanicalpump oil or other parts of the system. Typically, our customers realize a 200%improvement in preventative maintenance intervals after installingone of these traps.All traps dissemble easily with a Viton® O-ring and V-clamp, with the exceptionof our sealed coaxial metal sieve traps which have a one piece body. The two piecebody allows for easy removal for cleaning or replacement. Standard finish for alltraps is beadblast. Electropolish finish is available on request.

When ordering a trap with options, please follow the option order sequence belowwhen buiding the part number. For example, when ordering a particulate trap with anISO flange body and fiberglass, high capacity filter, the part number would read:FTPA-6-2002-NWB-BF-L7

Options

* Available only on four, six and eight inch diameter bodies** "L7" 0ption available only with six inch bodies# Not available with 4.5” bodies

OPTIONS PART NUMBER CONFIGURATION MATRIX

INLET

OUTLETFiberglass Particulate

Filter Option “-F”This filter is recommended for

temperatures up to 370ºC.Add

Copper Sieve Option “-CS”The standard metal sieve filter is stainlesssteel. Copper metal sieve filters are avail-able at no additional cost for all sealed and

two-piece metal sieve traps.

Quick Disconnect Option “-QD”Immediately shut off water flow from

both directions for single-handed, no-spillremoval of a water cooled trap from thesystem for preventative maintenance or

O-ring replacement.Add

High Capacity ParticulateFilter Option “-L7”

This fiberglass filter provides a reservoir forapplications with heavy particle loads that

might block the inlet. Available on 6” bodiesonly. See diagram at right.

Add

HighCapacityParticulateTrap

240 Volt Heater Option “-240V”The standard molecular sieve trap regen-eration heater is 120V. 240V heaters are

available as an option at no additional cost.Other voltages are also available.

ISO Body Flange Option “-BF”All 4, 6 and 8 inch OD trap bodies can besupplied with ISO clamp style flanges as

an alternative to V-clamps.

4” Body .................. Add 6” Body .................. Add8” Body .................. Add

XXX-X-TCFXXX-X-TCXXX-X-ATF

F*BF*BF*B

SCSCSC

XXX-X-SWTFXXX-X-AWTF

F #BF #B

DQDQ

XXX-X-APTFXXX-X-SPTF

FBFB

F or L7**

XXX-X-NTFXXX-X-ANTFXXX-X-DTNXXX-X-ADTN

FBFBFBFB

----

XXX-X-MTFXXX-X-AMTFXXX-X-SMTF

FBFBFB

V042V042V042

METAL SIEVE

WATER COOLED

PARTICULATE

LIQUIDNITROGEN

FORELINETRAP TYPE

MOLECULARSIEVE

PARENTPART NUMBER OPTION 2OPTION 1

F or L7**



ParticalFilterfor Metals

WaterCoils for Sulphur

INLET

OUTLET

NEW PRODUCTS & CUSTOM FORELINE TRAPS

High Capacity Water CooledSemiconductor CVD equipment manufac-turers require high wafer counts betweenpreventative maintenance. Unlike othermanufacturers who offer one solution tofit a number of applications, Nor-Cal willdesign high-capacity water-cooled trapsto achieve specific customer-stated goals.Port geometry, capacity, conductanceand efficiency are adjusted in order toproduce the optimal design for theapplication. Examples of processes wehave provided solutions for include TiNbarrier layer deposition, LPCVD Nitrideand III-Vs MOCVD.

Custom Foreline Traps

Standard trap designs are readily altered or custom models are designed and fabricated to improve performance for your specificapplication. Some examples are described below. Call for more information or to discuss your application requirements.

Multistage TrapsMulti-stage traps can be furnished forprocesses that require a combination oftrap media, such as water-cooling andparticle filtration. The trap shown herewas developed for a GaAs MOCVDprocess. The first stage particle filterremoves heavy metals, while the watercooled second stage collects sulfur.

Liquid Nitrogen TrapsHigh capacity liquid nitrogen traps canbe furnished for customers who requirelarger LN2 capacity to extend the timebetween refills or larger trapping capacityfor condensable by-product.

Single and Multistage LPCVD-TEOS TrapsIncrease your system’s throughput and extend preventative maintenance intervalsby two times or more with Nor-Cal Products’ multistage LPCVD-TEOS foreline traps.All three traps have a stainless steel gauze filter to collect crystalline TEOS before itreaches downstream components. The two and three stage traps also have a fiber-glass filter to remove silicon dioxide. The three stage trap’s final stage is a reservoirto collect liquid TEOS without restricting foreline conductance. Coaxial or rightangle bodies are available with 3 or 4 inch port sizes. See page 11.

Oil Mist EliminatorsDuring rotary vane pump operation, oil mist escapes from the exhaustport; mainly when pumping between atmospheric pressure and 1 mbar.Oil mist eliminators retain oil mist contained in the exhausted gaseswith a high level of separation; an internal over pressure valve preventsexceeding the maximum permissible exhaust pressure. See page 16.

Liquid Recovery TrapsNor-Cal has provided many types ofcondensation traps for liquid collectionbefore they enter the pump. Often theyhave valves or drains to allow the liquid tobe collected and reused. Some of theliquids collected include photo resist,oil and tantalum.

High Capacity Particulate TrapsNor-Cal can provide high-capacity particletraps with several liter capacities for applica-tions with large particle loads, such as siliconwafer processing.

New Products

Three StageLPCVD/TEOSForeline Trap

Electropolish orNickelplate FinishElectropolish finish inside and out isavailable upon request for all standardand custom traps. Electropolishedtraps are easier to clean because thesurface is more highly polished than thestandard beadblast finish. Nickleplatingis available upon request foradditionalcorrosion resistance. Call for pricing.

CustomHigh CapacityParticulateTrap

MultistageGaAs Trap



Our experience coupled with a broadproduct offering allows us to integratecomponents, providing comprehensivesolutions to semiconductor fabs andequipment manufacturers. To improveoverall system performance and achievecustomer defined goals, a thoroughevaluation of the system is conducted.A detailed worksheet is posted on ourwebsite for you to download. Filling outthis worksheet will greatly assist us incalculating your cost of ownership model.A cost of ownership model can show pay-back as a result of increased tool utilizationand decreased maintenance costs.Foreline traps, thermal products, IntellisysTM

pressure control valves, GenesisTM soft startvalves and weldments can be provided asturnkey modules. Thermal and vacuumcharacterization can be performed at Nor-Calbefore the assembly is supplied, leak check-ed, blanked off and clean room packaged.

APPLICATIONS & COMPREHENSIVE DOWNSTREAM SOLUTIONS

Solid Phase

Vapor Phase

Foreline Trap Selection Table

sselniatSleetS reppoC etiloeZ NL 2 H20 retseyloP ssalgrebiF

maertskcaBliO + ++ ++ +++ropaVretaW ++ +++

scinagrO ++ +sropaVdicA ++Cº941< + + +++ +++Cº073< + + +++

woLropaV oerusserP eru

++ ++ +++ +++

hgiHropaVersserP u

+ + +++ +

Parti

cles

Cond

ensi

bles

Metal Sieve ParticulateMolecular ColdPART

NOITACILPPA

Download aComprehensive Downstream

Solutions Worksheetfrom our website at

www.n-c.com/nctraps.htmComplete worksheet and

fax to 530-842-9130.

Temperature Guide for Specific Semiconductor Processes



Sealed traps contain a fibrous stainless steel sieve which eliminates hydrocarbons backstreaming toward the chamber when the mechani-cal pump oil is at it’s vapor pressure. Copper sieve can also be provided as an option at no additional cost. The unibody constructionrequires removal of the trap from the system for cleaning. The two inch OD body size is available from stock with port ODs from .50 to oneinch, while the four inch is available with port ODs from .75 to two inches. Larger body sizes, CF and ASA flanges are available on request.Standard finish is beadblast. Electropolish is also available. Call for pricing.

SEALED METAL SIEVE TRAPS

Sealed Coaxial Metal Sieve TrapsBody Model PortOD Number Flanges A OD Price

2.00* CT-2-050 - 8.07 .50 CT-2-0502-NWB NW-10B 8.37 .50 CT-2-075 - 8.07 .75 CT-2-0752-NWB NW-16B 8.37 .75 CT-2-100 - 8.07 1.00 CT-2-1002-NWB NW-25B 8.37 1.00

4.00 CT-4-075 - 10.00 .75 CT-4-0752-NWB NW-16B 10.30 .75 CT-4-100 - 10.00 1.00 CT-4-1002-NWB NW-25B 10.30 1.00 CT-4-150 - 10.00 1.50 CT-4-1502-NWB NW-40B 10.30 1.50 CT-4-200 - 10.00 2.00 CT-4-2002-NWB NW-50B 10.30 2.00

* ISO body flange option not available for 2” trap bodies Dimensions in inches

A

INLET

OUTLET

Options (See page 2)

• Copper Sieve Filters



Nor-Cal metal sieve traps are provided with a fibrous stainless steel sieve for removal of hydrocarbons which backstream towardthe chamber when the mechanical pump oil is at its vapor pressure. Copper sieve is also available as an option at no additional cost.The metal sieve trap’s two-piece clamped body design makes disassembly, cleaning and sieve replacement a simple task. For propersealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finishis also available. Larger body sizes, CF and ASA flanges are also available. Call for pricing.

METAL SIEVE TRAPS

Coaxial Metal Sieve TrapsBody Model PortOD Number Flanges OD A B Price

2.00* FCT-2-050 - .50 8.23 3.56 FCT-2-0502-NWB NW-10B .50 8.53 3.56 FCT-2-075 - .75 8.23 3.56 FCT-2-0752-NWB NW-16B .75 8.53 3.56 FCT-2-100 - 1.00 8.23 3.56 FCT-2-1002-NWB NW-25B 1.00 8.53 3.56

4.00 FCT-4-075 - .75 10.00 4.80 FCT-4-0752-NWB NW-16B .75 10.30 4.80 FCT-4-100 - 1.00 10.00 4.80 FCT-4-1002-NWB NW-25B 1.00 10.30 4.80 FCT-4-150 - 1.50 10.00 4.80 FCT-4-1502-NWB NW-40B 1.50 10.30 4.80 FCT-4-200 - 2.00 10.00 4.80 FCT-4-2002-NWB NW-50B 2.00 10.30 4.80

6.00 FCT-6-150 - 1.50 10.00 6.90 FCT-6-1502-NWB NW-40B 1.50 10.30 6.90 FCT-6-200 - 2.00 10.00 6.90 FCT-6-2002-NWB NW-50B 2.00 10.30 6.90 FCT-6-250 - 2.50 10.00 6.90 FCT-6-2502-ISO ISO-63-250-OF 2.50 10.50 6.90 FCT-6-300 - 3.00 10.00 6.90 FCT-6-3002-ISO ISO-80-300-OF 3.00 10.50 6.90 FCT-6-400 - 4.00 10.00 6.90 FCT-6-4002-ISO ISO-100-400-OF 4.00 10.50 6.90

8.00 FCT-8-200 - 2.00 13.00 9.00 FCT-8-2002-NWB NW-50B 2.00 13.30 9.00 FCT-8-250 - 2.50 13.00 9.00 FCT-8-2502-ISO ISO-63-250-OF 2.50 13.50 9.00 FCT-8-300 - 3.00 13.00 9.00 FCT-8-3002-ISO ISO-80-300-OF 3.00 13.50 9.00 FCT-8-400 - 4.00 13.00 9.00 FCT-8-4002-ISO ISO-100-400-OF 4.00 13.50 9.00


FCT-2

FCT-4, FCT-6, FCT-8

A

Air spacefor higher

conductance

BINLET

OUTLET

A

BINLET

OUTLET


• ISO Body Flanges• Copper Sieve Filters



Angle Metal Sieve TrapsBody Model PortOD Number Flanges OD A B C D Price

2.00* FTA-2-050 - .50 6.79 3.56 5.23 2.50 FTA-2-0502-NWB NW-10B .50 6.94 3.56 5.38 2.65 FTA-2-075 - .75 6.79 3.56 5.10 2.50 FTA-2-0752-NWB NW-16B .75 6.94 3.56 5.25 2.65 FTA-2-100 - 1.00 6.79 3.56 4.98 2.50 FTA-2-1002-NWB NW-25B 1.00 6.94 3.56 5.13 2.65

4.00 FTA-4-075 - .75 8.42 4.80 6.52 3.50 FTA-4-0752-NWB NW-16B .75 8.57 4.80 6.67 3.65 FTA-4-100 - 1.00 8.42 4.80 6.40 3.50 FTA-4-1002-NWB NW-25B 1.00 8.57 4.80 6.55 3.65 FTA-4-150 - 1.50 8.42 4.80 6.14 3.50 FTA-4-1502-NWB NW-40B 1.50 8.57 4.80 6.29 3.65FTA-4-200 - 2.00 8.42 4.80 5.89 3.50 FTA-4-2002-NWB NW-50B 2.00 8.57 4.80 6.04 3.65

6.00 FTA-6-150 - 1.50 8.50 6.90 5.00 4.50 FTA-6-1502-NWB NW-40B 1.50 8.65 6.90 5.15 4.65 FTA-6-200 - 2.00 8.50 6.90 4.75 4.50 FTA-6-2002-NWB NW-50B 2.00 8.65 6.90 4.90 4.65 FTA-6-300 - 3.00 8.50 6.90 4.62 4.50 FTA-6-3002-ISO ISO-80-300-OF 3.00 8.75 6.90 5.00 4.75 FTA-6-400 - 4.00 8.50 6.90 4.12 4.50 FTA-6-4002-ISO ISO-100-400-OF 4.00 8.75 6.90 4.50 4.75

8.00 FTA-8-200 - 2.00 11.50 9.00 7.63 5.50 FTA-8-2002-NWB NW-50B 2.00 11.65 9.00 7.78 5.65 FTA-8-300 - 3.00 11.50 9.00 7.13 5.50 FTA-8-3002-ISO ISO-80-300-OF 3.00 11.75 9.00 7.50 5.75 FTA-8-400 - 4.00 11.50 9.00 6.63 5.50 FTA-8-4002-ISO ISO-100-400-OF 4.00 11.75 9.00 7.00 5.75


METAL SIEVE TRAPS

Air space for higher conductance

B

C

D

INLET

A

OUTLET

FTA-2

FTA-4, FTA-6 & FTA-8

C

B

INLET

OUTLETD

A


• ISO Body Flanges• Copper Sieve Filters

Replacement Metal SievesBody ModelOD Number Description Price

2.00 FT-2-SS Stainless SteelFT-2-CS Copper

4.00 FT-4-SS Stainless Steel FT-4-CS Copper



Other replacement hardware located on page 17



WATER COOLED TRAPS

Water cooled traps protect mechanicalpumps and other downstream compo-nents from condensable process gassesand their by-products. They can extendor eliminate preventative maintenanceintervals and pump overhauls. Nor-Cal’sunique water cooled traps have up tothree coils of corrosion resistant 316stainless steel tubing to provide a largesurface area. Internal baffles combinedwith the coils create a perilous path forthe gas flow, maximizing resident timeand increasing contact between the gasand the coils. Depending on the applica-tion, house water or refrigerated watercan be used to achieve the requiredtemperature to cause by-productsto pass from gas to solid phase.A thirty to fifty psi water supply isrequired. Anticipate a 2 gpm flow rate.The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. For proper sealing,apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finish,right angle configurations, larger body sizes and CF or ASA flanges are also available. Call for pricing.Quick Disconnect Fittings immediately shut off water flow from both directions for single handed, no-spill removalof the trap from the system for preventative maintenance or O-ring replacement. Available as an option.

Coaxial Water Cooled TrapsBody Model PortOD Number Flanges OD A B Price

4.50* FTWS-4.5-150 - 1.50 9.45 5.28 FTWS-4.5-1502-NWB NW-40B 1.50 9.75 5.28 FTWS-4.5-200 - 2.00 9.45 5.28 FTWS-4.5-2002-NWB NW-50B 2.00 9.75 5.28

6.00 FTWS-6-150 - 1.50 10.00 6.90 FTWS-6-1502-NWB NW-40B 1.50 10.30 6.90 FTWS-6-200 - 2.00 10.00 6.90 FTWS-6-2002-NWB NW-50B 2.00 10.30 6.90 FTWS-6-250 - 2.50 10.00 6.90 FTWS-6-2502-ISO ISO-63-250-OF 2.50 10.50 6.90 FTWS-6-300 - 3.00 10.00 6.90 FTWS-6-3002-ISO ISO-80-300-OF 3.00 10.50 6.90

8.00 FTWS-8-200 - 2.00 13.00 9.00 FTWS-8-2002-NWB NW-50B 2.00 13.30 9.00 FTWS-8-250 - 2.50 13.00 9.00 FTWS-8-2502-ISO ISO-63-250-OF 2.50 13.50 9.00 FTWS-8-300 - 3.00 13.00 9.00 FTWS-8-3002-ISO ISO-80-300-OF 3.00 13.50 9.00 FTWS-8-400 - 4.00 13.00 9.00 FTWS-8-4002-ISO ISO-100-400-OF 4.00 13.50 9.00

* ISO flange body option not available for 4.5” trap bodies Dimensions in inches

Temperature Guide For Specific Semiconductor Processes

Solid Phase

Vapor Phase

FTWS-6 & FTWS-8

A

BINLET

OUTLET3/8" OD Tube Typ.

1" Min.

A

3/8" OD Tube Typ.B

INLET

OUTLET

1" Min.

FTWS-4.5


• ISO Body Flanges• Quick Disconnect Fittings



WATER COOLED TRAPS

Angle Water Cooled TrapsBody Model PortOD Number Flanges OD A B C D Price

4.50* FTWA-4.5-150 - 1.50 7.40 5.28 3.75 5.90 FTWA-4.5-1502-NWB NW-40B 1.50 7.55 5.28 3.90 6.05 FTWA-4.5-200 - 2.00 7.40 5.28 3.75 5.90 FTWA-4.5-2002-NWB NW-50B 2.00 7.55 5.28 3.90 6.05

6.00 FTWA-6-150 - 1.50 8.50 6.90 4.50 5.25 FTWA-6-1502-NWB NW-40B 1.50 8.65 6.90 4.65 5.40 FTWA-6-200 - 2.00 8.50 6.90 4.50 5.25 FTWA-6-2002-NWB NW-50B 2.00 8.65 6.90 4.65 5.40 FTWA-6-250 - 2.50 8.50 6.90 4.50 5.25 FTWA-6-2502-ISO ISO-63-250-OF 2.50 8.75 6.90 4.75 5.50 FTWA-6-300 - 3.00 8.50 6.90 4.50 5.25 FTWA-6-3002-ISO ISO-80-300-OF 3.00 8.75 6.90 4.75 5.50

8.00 FTWA-8-200 - 2.00 11.50 9.00 5.50 6.62 FTWA-8-2002-NWB NW-50B 2.00 11.65 9.00 5.65 6.77 FTWA-8-250 - 2.50 11.50 9.00 5.50 6.62 FTWA-8-2502-ISO ISO-63-250-OF 2.50 11.75 9.00 5.75 7.87 FTWA-8-300 - 3.00 11.50 9.00 5.50 6.62 FTWA-8-3002-ISO ISO-80-300-OF 3.00 11.75 9.00 5.75 6.87 FTWA-8-400 4.00 11.50 9.00 5.50 6.62 FTWA-8-4002-ISO ISO-100-400-OF 4.00 11.75 9.00 5.75 6.87

* ISO flange body option not available for 4.5” trap bodies Dimensions in inches

Quick Disconnect Fittings KitModel FitsNumber Tube OD Description Cost

FTW-QD .375 Two double-end shut off fittings (DESO)


• ISO Body Flanges• Quick Disconnect Fittings

FTWA-4.5

AD

3/8" OD Tube Typ.

B

INLET

OUTLET

1" Min.

C

FTWA-6 & FTWA-8

A

D

3/8" OD Tube Typ.

B

INLET

OUTLET

1" Min.

C



Standard Length Filter

High Capacity FilterOption "-L7"

INLET INLET

OUTLETOUTLET

See Page 2 for Option Ordering Instructions

Angle Particulate TrapsBody Model PortOD Number Flanges OD A B C D Price

6.00 FTPA-6-150 - 1.50 13.75 6.90 10.25 4.50 FTPA-6-1502-NWB NW-40B 1.50 13.90 6.90 10.40 4.65 FTPA-6-200 - 2.00 13.75 6.90 10.00 4.50FTPA-6-2002-NWB NW-50B 2.00 13.90 6.90 10.15 4.65

8.00* FTPA-8-150 - 1.50 13.75 9.00 10.25 5.50 FTPA-8-1502-NWB NW-40B 1.50 13.90 9.00 10.40 5.65 FTPA-8-200 - 2.00 13.75 9.00 10.00 5.50 FTPA-8-2002-NWB NW-50B 2.00 13.90 9.00 10.15 5.65

*High Capacity Filter not available for 8” body Dimensions in inches

These traps remove particles that might enter the mechanical pump andcontaminate the oil. A polyester felt filter traps particles over 10 micronsin size at 98% efficiency. Filters can be cleaned with a vacuum cleaner.Suitable for process temperatures from ambient to 149ºC.Woven 10 micron fiberglass filters are available as an option. These filtersprovide a much longer service life than the polyester. This filter is required fortemperatures greater than 149ºC. Maximum fiberglass filter temperature is370ºC. Filters with other micron ratings are available upon request.The high capacity fiberglass filter option, shown in the diagram to right,provides a reservoir for applications with heavy particle loads that mightblock the inlet. The high capacity filter option is not available for 8” bodies.The two-piece trap body and 304 stainless steel construction allow thesetraps to be easily cleaned. For proper sealing, apply a light coating ofKrytox lube when cleaning or replacing the O-ring. Standard finish isbeadblast. Electropolish finish, larger body sizes and custom flangeconfigurations available. Call for pricing.

PARTICULATE TRAPS

Coaxial Particulate TrapsBody Model PortOD Number Flanges OD A B Price

6.00 FTPS-6-150 - 1.50 16.00 6.90 FTPS-6-1502-NWB NW-40B 1.50 16.30 6.90 FTPS-6-200 - 2.00 16.00 6.90 FTPS-6-2002-NWB NW-50B 2.00 16.30 6.90

8.00* FTPS-8-150 - 1.50 16.00 9.00 FTPS-8-1502-NWB NW-40B 1.50 16.30 9.00 FTPS-8-200 - 2.00 16.00 9.00 FTPS-8-2002-NWB NW-50B 2.00 16.30 9.00

*High Capacity Filter not available for 8” body Dimensions in inches

D

INLET

A

OUTLET

B

C

BINLET

A

OUTLET

Replacement FiltersBody ModelOD Number Description Price

6.00 or 8.00 FT-6-PP 11.5” Length Polyester Felt Particulate Trap Filter 6.00 or 8.00 FT-6-PF 11.5” Length Woven Fiberglass Particulate Trap Filter

6.00 only FT-6-PF-L7 7.5” Length High Capacity Woven Fiberglass Filter

Other hardware located on page 17 Dimensions in inches


• ISO Body Flanges• Woven Fiberglass Filter• High Capacity Fiberglass Filter

Angle

Coaxial



LPCVD-TEOS SINGLE AND MULTI-STAGE TRAPS

OUTLET

A

INLETB

BOUTLET

A C

INLET

Angle

Coaxial

Increase your system’s throughput and extend preventative maintenanceintervals by two times or more with Nor-Cal Products’ LPCVD/TEOS multi-stage foreline traps. The first stage is a stainless steel gauze filter whichcollects crystalline TEOS before it reaches downstream piping and isolationvalves. The second stage is a 10 micron fiberglass filter which removessilicon dioxide which causes frequent PMs in throttling butterfly valves.The third and final stage is a reservoir which collects liquid TEOS withoutrestricting foreline conductance.The two-piece trap body and 304 stainless steel construction allow thesetraps to be easily cleaned. Standard finish is beadblasted. Electropolish isalso available on request. Call for pricing.

One Stage LPCVD-TEOS TrapsBody Model Port PortOD Number Config. Flanges ID A B C Price

8.00 FTT1S-8-3002-ISO Coaxial ISO-80 3.00 16.84 9.00 - 8.00 FTT1A-8-3002-ISO Angle ISO-80 3.00 15.09 5.75 12.06


Includes one stainless steel gauze filter Dimensions in inches

Three Stage LPCVD-TEOS TrapsBody Model Port PortOD Number Config. Flanges ID A B C Price



Includes one stainless steel gauze filter and one 10 micron fiberglass filter Dimensions in inches

Two Stage LPCVD-TEOS TrapsBody Model Port PortOD Number Config. Flanges ID A B C Price



Includes one stainless steel gauze filter and one 10 micron fiberglass filter Dimensions in inches

Replacement FiltersBody Model Filter FitsOD Number Material Traps Price

8.00 FT-8-SS Stainless Steel Gauze One stage, FTT1 FT-8-SS-5 Stainless Steel Gauze Two and three stage, FTT2 and FTT3 FT-8-PF-5 Woven Fiberglass Two and three stage, FTT2 and FTT3

Other replacement hardware is located on page 17 Dimensions in inches



LIQUID NITROGEN TRAPS

Nor-Cal’s liquid nitrogen traps are used to remove condensible gasses beforethey enter the mechanical pump and contaminate the oil. They also prevent oilvapors from the mechanical pump from contaminating the chamber. These trapsactually act as a pump producing lower base pressures and faster pump down.The dual-tube trap can be attached to an automatic fill tube, eliminating the needfor refilling the reservoir with liquid nitrogen.

The maximum duration of time between refillson the single tube models is as follows:4 inch diameter ........................ 8 hours6 inch diameter ........................ 11 hours8 inch diameter ........................ 18 hours

The two-piece trap body and 304 stainless steel construction allow thesetraps to be easily cleaned without disassembling the system. For propersealing, apply a light coating of Krytox lube when cleaning or replacing theO-ring. Coaxial port configurations, ISO, CF or ASA flanges and electropolishfinish available. Call for pricing.

In-Line Liquid Nitrogen TrapsBody Model Port LN2OD Number Flanges OD A B C Reservoir Price

4.00 FTN-4-075 - .75 11.50 7.00 3.70 .75 Liter FTN-4-0752-NWB NW-16B .75 11.50 7.30 3.70 .75 Liter FTN-4-100 - 1.00 11.50 7.00 3.70 .75 Liter FTN-4-1002-NWB NW-25B 1.00 11.50 7.30 3.70 .75 Liter FTN-4-150 - 1.50 11.50 7.00 3.70 .75 Liter FTN-4-1502-NWB NW-40B 1.50 11.50 7.30 3.70 .75 Liter

6.00 FTN-6-150 - 1.50 14.20 9.00 4.50 1.60 Liter FTN-6-1502-NWB NW-40B 1.50 14.20 9.30 4.50 1.60 Liter FTN-6-200 - 2.00 14.20 9.00 4.50 1.60 Liter FTN-6-2002-NWB NW-50B 2.00 14.20 9.30 4.50 1.60 Liter

8.00 FTN-8-150 - 1.50 15.25 11.00 5.00 4.00 LiterFTN-8-1502-NWB NW-40B 1.50 15.25 11.30 5.00 4.00 Liter FTN-8-200 - 2.00 15.25 11.00 5.00 4.00 Liter FTN-8-2002-NWB NW-50B 2.00 15.25 11.30 5.00 4.00 Liter


Angle Liquid Nitrogen TrapsBody Model Port LN2OD Number Flanges OD A B C D Reservoir Price

4.00 FTNA-4-075 - .75 13.00 4.80 7.03 3.50 .75 LiterFTNA-4-0752-NWB NW-16B .75 13.30 4.80 7.18 3.65 .75 Liter FTNA-4-100 - 1.00 13.00 4.80 6.91 3.50 .75 Liter FTNA-4-1002-NWB NW-25B 1.00 13.30 4.80 7.06 3.65 .75 Liter FTNA-4-150 - 1.50 13.00 4.80 6.65 3.50 .75 Liter FTNA-4-1502-NWB NW-40B 1.50 13.30 4.80 7.80 3.65 .75 Liter

6.00 FTNA-6-150 - 1.50 15.70 6.90 8.25 4.50 1.6 LiterFTNA-6-1502-NWB NW-40B 1.50 16.00 6.90 8.40 4.65 1.6 Liter FTNA-6-200 - 2.00 15.70 6.90 8.00 4.50 1.6 Liter FTNA-6-2002-NWB NW-50B 2.00 16.00 6.90 8.15 4.65 1.6 Liter

8.00 FTNA-8-150 - 1.50 16.75 9.00 9.00 5.50 4 Liter FTNA-8-1502-NWB NW-40B 1.50 16.90 9.00 9.15 5.65 4 Liter FTNA-8-200 - 2.00 16.75 9.00 8.75 5.50 4 Liter FTNA-8-2002-NWB NW-50B 2.00 16.90 9.00 8.90 5.65 4 Liter


1.00 OD x .87 IDFill and Vent Tube

A

B

INLETOUTLET

C

1.00 OD x .87 IDFill and Vent Tube

A

B

INLET

OUTLET

C

D


• ISO Body Flanges

Angle

In-Line



DUAL TUBE LIQUID NITROGEN TRAPS

The dual-tube design allows the liquid nitrogen reservoir to be attached to an auto-matic fill tube, reducing the amount of service required by the system. These trapsare available in in-line and right angle port configurations with 4.0, 6.0, and 8.0inch OD bodies, .75 to 4.0 inch OD ports. The two-piece trap body and 304 stain-less steel construction allow these traps to be easily cleaned. For proper sealing,apply a light coating of Krytox lube when cleaning or replacing the O-ring. ISO, CFor ASA flanges and electropolish finish available on request. Call for pricing.

In-Line Dual-Tube Liquid Nitrogen TrapsBody Model Port LN2

OD Number Flanges OD A B C Reservoir Price

4.00 NTD-4-075 - .75 11.50 3.70 7.00 .75 LiterNTD-4-0752-NWB NW-16B .75 11.50 3.70 7.30 .75 Liter NTD-4-100 - 1.00 11.50 3.70 7.00 .75 Liter NTD-4-1002-NWB NW-25B 1.00 11.50 3.70 7.30 .75 Liter NTD-4-150 - 1.50 11.50 3.70 7.00 .75 Liter NTD-4-1502-NWB NW-40B 1.50 11.50 3.70 7.30 .75 Liter

6.00 NTD-6-150 - 1.50 14.20 4.50 9.00 1.6 Liter NTD-6-1502-NWB NW-40B 1.50 14.20 4.50 9.30 1.6 Liter NTD-6-200 - 2.00 14.20 4.50 9.00 1.6 Liter NTD-6-2002-NWB NW-50B 2.00 14.20 4.50 9.30 1.6 Liter

8.00 NTD-8-150 - 1.50 15.25 5.00 11.00 4 Liter NTD-8-1502-NWB NW-40B 1.50 15.25 5.00 11.30 4 Liter NTD-8-200 - 2.00 15.25 5.00 11.00 4 Liter NTD-8-2002-NWB NW-50B 2.00 15.25 5.00 11.30 4 Liter


Angle Dual-Tube Liquid Nitrogen Traps Body Model Port LN2

OD Number Flanges OD A B C D Reservoir Price

4.00 NTDA-4-075 - .75 13.00 4.80 7.03 3.50 .75 Liter NTDA-4-0752-NWB NW-16B .75 13.15 4.80 7.18 3.65 .75 Liter NTDA-4-100 - 1.00 13.00 4.80 6.91 3.50 .75 Liter NTDA-4-1002-NWB NW-25B 1.00 13.15 4.80 7.06 3.65 .75 Liter NTDA-4-150 - 1.50 13.00 4.80 6.65 3.50 .75 Liter NTDA-4-1502-NWB NW-40B 1.50 13.15 4.80 6.80 3.65 .75 Liter

6.00 NTDA-6-150 - 1.50 15.70 6.90 8.25 4.50 1.6 Liter NTDA-6-1502-NWB NW-40B 1.50 15.85 6.90 8.40 4.65 1.6 Liter NTDA-6-200 - 2.00 15.70 6.90 8.00 4.50 1.6 Liter NTDA-6-2002-NWB NW-50B 2.00 15.85 6.90 8.15 4.65 1.6 Liter

8.00 NTDA-8-150 - 1.50 16.75 9.00 9.00 5.50 4 Liter NTDA-8-1502-NWB NW-40B 1.50 16.90 9.00 9.15 5.65 4 Liter NTDA-8-200 - 2.00 16.75 9.00 8.75 5.50 4 Liter NTDA-8-2002-NWB NW-50B 2.00 16.90 9.00 8.90 5.65 4 Liter


FillTube

Vent Tube

A

B

INLETOUTLET

C

FillTube

Vent Tube

A

B

INLET

OUTLET

C

D


• ISO Body Flanges

Angle

In-Line



MOLECULAR SIEVE TRAPS

These traps perform a dual function. A zeolite desiccant removes hydrocar-bons which backstream toward the chamber when the mechanical pump oilis at it’s vapor pressure. Also, the zeolite traps water vapor and other gassesbefore they reach the mechanical pump and contaminate the pump oil.Depending on the process this can reduce the frequency of oil changesby a significant amount.Nor-Cal’s molecular sieve foreline trap utilizes the flex trap design for ease ofmaintenance and zeolite replacement. For maximum conductance the sievematerial is contained in a suspended basket fabricated from perforated 304stainless steel. The suspended basket provides the conductance to the sieveat the top of the basket as well as around the periphery. A mid-basket bafflecauses the gas to enter one-half of the basket and to exit the other half.When initializing a new trap, replacing the sieve or when base pressurecannot be achieved, the sieve should be regenerated by turning on the heaterfor a few hours and running the mechanical pump with it’s ballast valve open.The frequency and duration of sieve regeneration is dependent upon the kindand amount of gasses produced by the particular application. To replace thesieve, remove the trap end that contains the heater and remove the nut at the endof the basket. Dump the expired sieve material, replace with new, reattach the basket/endplate then perform the regeneration process outlined in the previous paragraph.All molecular sieve traps are supplied with a molecular sieve charge and a regeneration heater. The heater is held in place with a clipallowing these traps to be mounted in any position. A 4.0 inch diameter trap heater is rated at 120V, 125W; 6.0 inch at 120V, 230W;and 8.0 inch at 120V, 350W. A 240 volt regeneration heater is available as an option. Other voltages and wattages are availableupon request. Standard trap finish is beadblasted. Electropolish finish, custom flange configurations, and larger body sizes arealso available. Call for pricing.

In-Line Molecular Sieve TrapsBody Model PortOD Number Flanges OD A B C Price

4.00 FTM-4-075 - .75 6.20 7.00 3.50 FTM-4-0752-NWB NW-16B .75 6.20 7.30 3.50 FTM-4-100 - 1.00 6.20 7.00 3.50 FTM-4-1002-NWB NW-25B 1.00 6.20 7.30 3.50 FTM-4-150 - 1.50 6.20 7.00 3.50 FTM-4-1502-NWB NW-40B 1.50 6.20 7.30 3.50

6.00 FTM-6-150 - 1.50 8.10 9.00 4.00 FTM-6-1502-NWB NW-40B 1.50 8.10 9.30 4.00 FTM-6-200 - 2.00 8.10 9.00 4.00 FTM-6-2002-NWB NW-50B 2.00 8.10 9.30 4.00

8.00 FTM-8-200 - 2.00 13.00 11.00 6.75 FTM-8-2002-NWB NW-50B 2.00 13.00 11.30 6.75 FTM-8-250 - 2.50 13.00 11.00 6.75 FTM-8-2502-ISO ISO-63-250-OF 2.50 13.00 11.50 6.75 FTM-8-300 - 3.00 13.00 11.00 6.75 FTM-8-3002-ISO ISO-80-300-OF 3.00 13.00 11.50 6.75 FTM-8-400 - 4.00 13.00 11.00 6.75 FTM-8-4002-ISO ISO-100-400-OF 4.00 13.00 11.50 6.75


C

B

INLET

OUTLET

A

Body OD Model Number Description Price

4.00 FT-4-MS 1 lb. Molecular Sieve Charge, 4 trap requires .75 lb. 6.00 FT-6-MS 2 lb. Molecular Sieve Charge, 6” trap requires 1.5 lb. 8.00 FT-8-MS 5 lb. Molecular Sieve Charge, 8” trap requires 4.75 lb.

Other replacement hardware located on page 17 Dimensions in inches

Replacement Sieves

Gas Path In

GasPathOut

AnnularBaffle

Heater

Sieve Removable End



MOLECULAR SIEVE TRAPS

Angle Molecular Sieve TrapsBody Model PortOD Number Flanges OD A B C Price

4.00 FTMA-4-075 - .75 7.70 6.40 3.50 FTMA-4-0752-NWB NW-16B .75 7.70 6.55 3.65 FTMA-4-100 - 1.00 7.70 6.40 3.50 FTMA-4-1002-NWB NW-25B 1.00 7.70 6.55 3.65 FTMA-4-150 - 1.50 7.70 6.40 3.50 FTMA-4-1502-NWB NW-40B 1.50 7.70 6.55 3.65

6.00 FTMA-6-150 - 1.50 9.60 7.60 4.50 FTMA-6-1502-NWB NW-40B 1.50 9.60 7.75 4.65 FTMA-6-200 - 2.00 9.60 7.60 4.50 FTMA-6-2002-NWB NW-50B 2.00 9.60 7.75 4.65

8.00 FTMA-8-200 - 2.00 14.50 11.38 5.50 FTMA-8-2002-NWB NW-50B 2.00 14.65 11.53 5.65FTMA-8-250 - 2.50 14.50 11.38 5.50 FTMA-8-2502-ISO ISO-63-250-OF 2.50 14.75 11.63 5.75 FTMA-8-300 - 3.00 14.50 11.38 5.50FTMA-8-3002-ISO ISO-80-300-OF 3.00 14.75 11.63 5.75 FTMA-8-400 - 4.00 14.50 11.38 5.50 FTMA-8-4002-ISO ISO-100-400-OF 4.00 14.75 11.63 5.75


Straight-In-Line Molecular Sieve TrapsBody Model PortOD Number Flanges OD A B C Price

4.00 FTMS-4-075 - .75 7.00 7.00 3.50 FTMS-4-0752-NWB NW-16B .75 7.00 7.30 3.50 FTMS-4-100 - 1.00 7.00 7.00 3.50 FTMS-4-1002-NWB NW-25B 1.00 7.00 7.30 3.50 FTMS-4-150 - 1.50 7.00 7.00 3.50 FTMS-4-1502-NWB NW-40B 1.50 7.00 7.30 3.50

6.00 FTMS-6-150 - 1.50 7.00 9.00 3.50 FTMS-6-1502-NWB NW-40B 1.50 7.00 9.30 3.50FTMS-6-200 - 2.00 7.00 9.00 3.50 FTMS-6-2002-NWB NW-50B 2.00 7.00 9.30 3.50

8.00 FTMS-8-200 - 2.00 10.00 11.00 5.00 FTMS-8-2002-NWB NW-50B 2.00 10.00 11.30 5.00 FTMS-8-250 - 2.50 10.00 11.00 5.00 FTMS-8-2502-ISO ISO-63-250-OF 2.50 10.00 11.50 5.00 FTMS-8-300 - 3.00 10.00 11.00 5.00 FTMS-8-3002-ISO ISO-80-300-OF 3.00 10.00 11.50 5.00 FTMS-8-400 - 4.00 10.00 11.00 5.00 FTMS-8-4002-ISO ISO-100-400-OF 4.00 10.00 11.50 5.00


C

B

INLETOUTLET

A

B

OUTLET

A

C

INLET

Trap OD Model Number Description Price

4.00 FT-4-HR Molecular Sieve Cartridge Heater, rated at 120V, 125W 4.00 FT-4-HR-240V Molecular Sieve Cartridge Heater, rated at 240V, 125W 6.00 FT-6-HR Molecular Sieve Cartridge Heater, rated at 120V, 230W 6.00 FT-6-HR-240V Molecular Sieve Cartridge Heater, rated at 240V, 125W 8.00 FT-8-HR Molecular Sieve Cartridge Heater, rated at 120V, 350W8.00 FT-8-HR-240V Molecular Sieve Cartridge Heater, rated at 240V, 350W

Other replacement hardware located on Page 17 Dimensions in inches

Replacement Heaters

Larger port sizes and customflange configurationsavailable on request.


• 240V Regeneration Heaters• ISO Body Flanges



OIL MIST ELIMINATORS

During rotary vane pump operation, oil mist escapes from the exhaust port; mainlywhen pumping between atmospheric pressure and 1 mbar. Safe operation of a rotaryvane pump requires an Oil Mist Eliminator (OME) to be mounted above the pump’sexhaust port. The oil mist is present in exhaust gases with a high level of separation.These mists present a potential environmental and health hazard as well as creatingan oily build-up on everything in the pump’s proximity. Misting increases as exhaustpressure increases.The OME’s filtration system contains the mist* and returns it to the pump body.The OME’s internal over-pressure valve prevents vapor explosions due to exceedingthe maximum permissible exhaust pressure.*Oil mist eliminators do not trap gas. Vent all processes properly.

ToExhaustPump

6.693.35

4.723.26

13.82

4.92

OilLevel

3/8 G Drain

3.94

FTOME-40-C2

To Exhaust Pump

13.30

5.51

FTOME-40-S

To Exhaust Pump

4.09 Square

7.87

2.24

Sight Glass

1/8 G Drain

FTOME-25-HP

1.97

1.97

5.83

4.64

2.44Square

To Exhaust Pump

4.64

FTOME-25-S

For NW clamps, O-rings and aluminum or stainless steel centering ringsplease refer to the Nor-Cal Products NW-ISO catalog.

Model Number Use with Filter Material Quantity Price

FTOME-25-S-F FTOME-25-S Epoxy/glass microfiber 1 FTOME-25-HP-F FTOME-25-HP Epoxy/glass microfiber 1 FTOME-40-S-F FTOME-40-S Epoxy/glass microfiber 1 FTOME-40-C2-F FTOME-40-C2 Polypropylene 1

Replacement Filters

Model Number Process Usage Body Flanges Price

FTOME-25-S General, non-corrosive Polyamide NW-25 FTOME-25-HP General, non-corrosive. For frequent Aluminum NW-25

cycling or high pressure operationFTOME-40-S General, non-corrosive Aluminum NW-40 FTOME-40-C2 Fluorinated, corrosive Stainless Steel NW-40

Oil Mist Eliminators

FTOME-25-HPFTOME-25-S



REPLACEMENT HARDWARE

Foreline Trap Replacement HardwareBody ModelOD Number For Use With Trap Type Description Price

All FT-CP-B All Types (except 2.00 bodies) Replacement T-Bolt and Nuts for Trap Mounting Bracket FTW-QD All Water Cooled Quick Disconnect Fittings Kit for Water Cooled Traps (DESO)

2.00 FT-2-SS Metal Sieve Stainless Steel Sieve Cartridge FT-2-CS Metal Sieve Copper Sieve Cartridge NW-50-OR-V All Types Viton® Body O-Ring NW-50-CP All Types Body Clamp

4.00 FT-4-SS Metal Sieve Stainless Steel Sieve Cartridge FT-4-CS Metal Sieve Copper Sieve Cartridge FT-4-MS Molecular Sieve 1 lb. Molecular Sieve Charge, requires .75 lb. Molecular Sieve FT-4-HR Molecular Sieve Molecular Sieve Cartridge Heater, rated at 120V, 125W FT-4-HR-240V Molecular Sieve Molecular Sieve Cartridge Heater, rated at 240V, 125W FT-4-OR All Types Viton® Body O-Ring FT-4-CP All Types Body Clamp FT-4-MB All Types Trap Mounting Bracket

4.50 FT-4.5-OR All Types Viton® Body O-Ring FT-4.5-CP All Types Body Clamp FT-4.5-MB All Types Trap Mounting Bracket FTW-4.5-OR Water Cooled Internal Viton® O-Ring

6.00 FT-6-SS Metal Sieve Stainless Steel Sieve Cartridge FT-6-CS Metal Sieve Copper Sieve Cartridge FT-6-MS Molecular Sieve 2 lb. Molecular Sieve Charge FT-6-HR Molecular Sieve Molecular Sieve Cartridge Heater, rated at 120V, 230W FT-6-HR-240V Molecular Sieve Molecular Sieve Cartridge Heater, rated at 240V, 125W FT-6-OR All Types Viton® Body O-Ring FT-6-CP All Types Body Clamp FT-6-MB All Types Trap Mounting Bracket FT-6-PP Particulate 11.5” Standard Length Polyester Felt Filter FT-6-PF Particulate 11.5” Standard Length Woven Fiberglass Filter FT-6-PF-L7 Particulate 7.5” Length High Capacity Woven Fiberglass Filter

8.00 FT-6-PP Particulate 8” Standard Length Polyester Particulate Filter FT-6-PF Particulate 8” Standard Length Woven Fiberglass Particulate Filter FT-8-SS Metal Sieve and One Stage LPCVD/TEOS 8” Standard Length Stainless Steel Sieve Cartridge FT-8-SS-5 Two and Three Stage LPCVD/TEOS 5” Length Stainless Steel Sieve Cartridge FT-8-PF-5 Two and Three Stage LPCVD/TEOS 5” Length Woven Fiberglass Particulate Trap Filter FT-8-CS Metal Sieve Copper Sieve Cartridge FT-8-MS Molecular Sieve 5 lb. Molecular Sieve Charge FT-8-HR Molecular Sieve Molecular Sieve Cartridge Heater, rated at 120V, 350W FT-8-HR-240V Molecular Sieve Molecular Sieve Cartridge Heater, rated at 240V, 125W FT-8-OR All Types Viton® Body O-Ring FT-8-CP All Types Body Clamp FT-8-MB All Types Trap Mounting Bracket


TRAP MOUNTING BRACKET


Prices subject to change without notice. - International product pricing will vary. CF/WS-LIT 11/02

CF FLANGE SYSTEM

Nor-Cal CF Flanges are compatiblewith other Conflat® style flanges and areavailable in sizes from 11/3 to 161/2 inchesOD for 1/4 to 14 inch tube.

Flanges 41/2 inches OD and smallerare made from 304 electroslag remelt(ESR) bar stock. ESR is a refiningprocess that produces stainless steelwith higher purity, fewer inclusionsand more uniform grain structure toeliminate microscopic leak paths.Larger CF flanges are made from ArgonOxygen Decarburization (AOD) 304stainless steel. This material is certifiedto meet ASTM-240 and has less than.01% sulfur to prevent sulfur stringers.Grain size is 3 to 6 per ASTM E-112.Maximum inclusion size is 2.5 perASTM E-45. Normally our standardCF material is in the low carbon rangefor 304 stainless steel. As specials 304Land 316L material can be suppliedin AOD or roll-forged rings.

Machining is consistent with good UHVpractice. Machine coolant is sulfur free toreduce outgassing. State-of-the-art CNCmachine centers are used to produceflanges with consistent high quality.Flanges are machine washed in approvedaqueous detergent after machining.Chem-cleaning and clean roompackaging are available on request.

Rotatable Flange Option

Nor-Cal offers CF flanges in rotatableas well as non-rotatable versions. Whencomponents of several systems are usedinterchangeably, use of rotatable flangesis recommended. Assembly is facilitated byrotating the receiver portion of the flange toalign its bolt holes with those of the matingflange. The insert is welded to the tube orcomponent and contains the knife edgeportion of the CF flange.

Non-rotatable CF flanges, unlike rotatable,contain both sealing surface and bolt holesin one unit. This makes the non-rotatableflange less expensive, and therefore thepreferred choice when mating componentorientation is not a concern. All fittingsare priced with a rotatable flange opposinga non-rotatable. For fittings with allnon-rotatable flanges subtract thedifference in price between a rotatableand non-rotatable flange of the desiredsize multiplied by the number ofadditional non-rotatable flanges.

AlternateFastening Hardware

CF flanges are available with UNCor UNF tapped and untapped holes.Metric tapped or helicoiled holes canbe ordered as specials. Tapped flangeshave through holes, so bolts may pro-trude slightly from the back of the flangewhen fastened to an untapped flange.Untapped CF flanges can be fastenedto each other with stainless steel boltsand hex nuts or plate nuts. Plate nutscenter themselves over two adjacentholes and can be held in place with onefinger while the bolts are tightened.They are available for most flange sizesfrom 11/3 to 10 inch ODs. As an alterna-tive to hex head bolts, 12-point boltsare available for CF flanges from 23/4 to10 inch ODs. Silver plated bolts areavailable upon request to eliminate theneed for anti-seize compound in cleanroom environments.

CF flanges utilize an OFHC® coppergasket to produce a vacuum tight sealup to 10-13 Torr, even when bakedrepeatedly to 5000C.When the coppergasket is com-pressed betweenthe knife edgesof CF flanges,its material flowslaterally to fill surfaceimperfections.

OFHC Copper GasketR

General Information

Gasket

Plate Nut

Non-Rotatable CF Flange

Insert

Receiver

Rotatable CF Flange



CF MINI-FLANGES & HARDWARE

Non-Rotatable 11⁄ 3 Inch Nominal OD CF Mini FlangesModel A B C Bolt Holes

Description Number ID OD Number Dia. or Thread Price

Non-Rotatable 133-000N Blank - - 6 .172 133-000NK Blank - - 6 .172 133-025N .255 - - 6 .172 133-038N .380 - - 6 .172 133-050N .505 - - 6 .172 133-075N .625 .755 .175 6 .172 133-075NK .625 - - 6 .172 133-075NBK .625 - - 6 .172

Non-Rotatable 133-000NT Blank - - 6 8-32 Tapped 133-000NKT Blank - - 6 8-32

133-025NT .255 - - 6 8-32 133-038NT .380 - - 6 8-32 133-050NT .505 - - 6 8-32 133-075NT .625 .755 .175 6 8-32 133-075NKT .625 - - 6 8-32 133-075NBKT .625 - - 6 8-32

R - Rotatable Dimensions in inchesN - Non RotatableT - TappedK - Weld NeckBK - Same as K without .060 Weld Prep.

CF Mini Flanges

CF mini flanges are manufacturedto the same high standard as our otherCF flanges for 1⁄4, 3⁄8, 1⁄2, and 3⁄4 inchOD tube sizes. Nor-Cal offers specialpurpose, double-sided and zero-lengthreducer mini flanges along with fittings,viewports and feedthroughs in this size,so we can supply all the componentsnecessary to build a complete table-top,small laboratory or gas handlingsystem from stock.

Non-RotatableBored Weld Neck BoredBlank

.672

.060

1.3301.062

A

.500

.750

1.3301.062

.300C

AB

1.3301.062

.300



CF MINI-FLANGES & HARDWARE

Rotatable 11⁄ 3 Inch Nominal OD CF Mini FlangesModel A B C Bolt Holes

Description Number ID OD Number Dia. or Thread Price

Rotatable 133-000R Blank - - 6 .172 133-000RK Blank - - 6 .172 133-025R .255 - - 6 .172 133-038R .380 - - 6 .172 133-050R .505 - - 6 .172 133-075R .625 - - 6 .172 133-075RK .625 - - 6 .172 133-075RBK .625 - - 6 .172

Rotatable 133-000RT Blank - - 6 8-32 Tapped 133-000RKT Blank - - 6 8-32

133-025RT .255 - - 6 8-32 133-038RT .380 - - 6 8-32 133-050RT .505 - - 6 8-32 133-075RT .625 - - 6 8-32 133-075RKT .625 - - 6 8-32 133-075RBKT .625 - - 6 8-32

R - Rotatable Dimensions in inchesN - Non RotatableT - TappedK - Weld NeckBK - Same as K without .060 Weld Prep.

.672

.060

1.3301.062

A

.500

.750

1.3301.062

.300

Rotatable

1.3301.062

.300

A

Bored Weld Neck BoredBlank

Mini Flange HardwareModel Number Description Price

G-133 (10) OFHC® Copper Gaskets G-133V (5) Viton® Gaskets

B-133 (25) Stainless Steel 8-32 x .75" Bolts, Nuts and Washers B-133T (25) Stainless Steel 8-32 x .56" Bolts and Washers

NP-075 (24) 8-32 Plate Nuts. See page 21. KNP-075 (12) Plate Nuts and (24) 8-32 x .75" Bolts




CF FLANGES

2 1⁄8 Inch Nominal OD CF FlangesModel A B C D E F Bolt Holes

Description Number OD ID Number Dia. or Thrd. Price

Non-Rotatable 212-000N 2.12 Blank - .469 - 1.625 4 .265 212-025N 2.12 .255 - .469 - 1.625 4 .265 212-050N 2.12 .505 - .469 - 1.625 4 .265 212-075N 2.12 .688 .760 .469 .167 1.625 4 .265 212-100N 2.12 .938 1.010 .469 .167 1.625 4 .265

Non-Rotatable 212-000NT 2.12 Blank - .469 - 1.625 4 1⁄4-28Tapped 212-025NT 2.12 .255 - .469 - 1.625 4 1⁄4-28

212-050NT 2.12 .505 - .469 - 1.625 4 1⁄4-28 212-075NT 2.12 .688 .760 .469 .167 1.625 4 1⁄4-28 212-100NT 2.12 .938 1.010 .469 .167 1.625 4 1⁄4-28

Rotatable 212-000R 2.12 Blank - .469 - 1.625 4 .265 212-025R 2.12 .255 - .469 - 1.625 4 .265 212-050R 2.12 .505 - .469 - 1.625 4 .265 212-075R 2.12 .688 .760 .469 .167 1.625 4 .265212-100R 2.12 .938 1.010 .469 .167 1.625 4 .265

Rotatable 212-000RT 2.12 Blank - .469 - 1.625 4 1⁄4-28 Tapped 212-025RT 2.12 .255 - .469 - 1.625 4 1⁄4-28

212-050RT 2.12 .505 - .469 - 1.625 4 1⁄4-28 212-075RT 2.12 .688 .760 .469 .167 1.625 4 1⁄4-28 212-100RT 2.12 .938 1.010 .469 .167 1.625 4 1⁄4-28


D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored

D

FA

E

BC

D

FA

Rotatable

Bored

Blank





Non-Rotatable 275-000N 2.73 Blank - .500 - 2.312 6 .265 275-025N 2.73 .255 - .500 - 2.312 6 .265 275-050N 2.73 .505 - .500 - 2.312 6 .265 275-075N 2.73 .688 .760 .500 .209 2.312 6 .265 275-100N 2.73 .938 1.010 .500 .209 2.312 6 .265 275-125N 2.73 1.188 1.260 .500 .209 2.312 6 .265 275-150N 2.73 1.438 1.510 .500 .209 2.312 6 .265

Non-Rotatable 275-000NT 2.73 Blank - .500 - 2.312 6 1⁄4-28 Tapped 275-025NT 2.73 .255 - .500 - 2.312 6 1⁄4-28

275-050NT 2.73 .505 - .500 - 2.312 6 1⁄4-28 275-075NT 2.73 .688 .760 .500 .209 2.312 6 1⁄4-28 275-100NT 2.73 .938 1.010 .500 .209 2.312 6 1⁄4-28 275-125NT 2.73 1.188 1.260 .500 .209 2.312 6 1⁄4-28 275-150NT 2.73 1.438 1.510 .500 .209 2.312 6 1⁄4-28

Rotatable 275-000R 2.73 Blank - .500 - 2.312 6 .265 275-025R 2.73 .255 - .500 - 2.312 6 .265 275-050R 2.73 .505 - .500 - 2.312 6 .265 275-075R 2.73 .688 .760 .500 .209 2.312 6 .265 275-100R 2.73 .938 1.010 .500 .209 2.312 6 .265 275-125R 2.73 1.188 1.260 .500 .209 2.312 6 .265 275-150R 2.73 1.438 1.510 .500 .209 2.312 6 .265

Rotatable 275-000RT 2.73 Blank - .500 - 2.312 6 1⁄4-28 Tapped 275-025RT 2.73 .255 - .500 - 2.312 6 1⁄4-28

275-050RT 2.73 .505 - .500 - 2.312 6 1⁄4-28 275-075RT 2.73 .688 .760 .500 .209 2.312 6 1⁄4-28 275-100RT 2.73 .938 1.010 .500 .209 2.312 6 1⁄4-28 275-125RT 2.73 1.188 1.260 .500 .209 2.312 6 1⁄4-28 275-150RT 2.73 1.438 1.510 .500 .209 2.312 6 1⁄4-28


CF FLANGES

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored

D

FA

E

BC

D

FA

Rotatable

Bored

Blank



CF FLANGES & HARDWARE



Non-Rotatable 338-000N 3.36 Blank - .687 - 2.850 8 .332 338-150N 3.36 1.438 1.510 .687 .225 2.850 8 .332 338-200N 3.36 1.938 2.010 .687 .225 2.850 8 .332

Non-Rotatable 338-000NT 3.36 Blank - .687 - 2.850 8 5⁄16-24 Tapped 338-150NT 3.36 1.438 1.510 .687 .225 2.850 8 5⁄16-24

338-200NT 3.36 1.938 2.010 .687 .225 2.850 8 5⁄16-24

Rotatable 338-000R 3.36 Blank - .687 - 2.850 8 .332 338-150R 3.36 1.438 1.510 .687 .225 2.850 8 .332 338-200R 3.36 1.938 2.010 .687 .225 2.850 8 .332

Rotatable 338-000RT 3.36 Blank - .687 - 2.850 8 5⁄16-24 Tapped 338-150RT 3.36 1.438 1.510 .687 .225 2.850 8 5⁄16-24

338-200RT 3.36 1.938 2.010 .687 .225 2.850 8 5⁄16-24

Dimensions in inches41⁄2 Inch Nominal OD CF FlangesModel A B C D E F Bolt Holes


Non-Rotatable 450-000N 4.47 Blank - .687 - 3.628 8 .332 450-150N 4.47 1.438 1.510 .687 .375 3.628 8 .332 450-200N 4.47 1.938 2.010 .687 .375 3.628 8 .332 450-250N 4.47 2.438 2.510 .687 .375 3.628 8 .332


450-200NT 4.47 1.938 2.010 .687 .375 3.628 8 5⁄16-24 450-250NT 4.47 2.438 2.510 .687 .375 3.628 8 5⁄16-24

Rotatable 450-000R 4.47 Blank - .750 - 3.628 8 .332 450-150R 4.47 1.438 1.510 .750 .375 3.628 8 .332 450-200R 4.47 1.938 2.010 .750 .375 3.628 8 .332 450-250R 4.47 2.438 2.510 .750 .375 3.628 8 .332


450-200RT 4.47 1.938 2.010 .750 .375 3.628 8 5⁄16-24 450-250RT 4.47 2.438 2.510 .750 .375 3.628 8 5⁄16-24


D

FA

E

BC

D

FA

Non-RotatableBlank

Bored

D

FA

E

BC

D

FA

Rotatable

Bored

Blank




45⁄8 Inch Nominal OD CF FlangesModel A B C D E F Bolt Holes


Non-Rotatable 462-000N 4.61 Blank - .812 - 4.030 10 .332 462-300N 4.61 2.938 3.010 .812 .281 4.030 10 .332


Rotatable 462-000R 4.61 Blank - .812 - 4.030 10 .332 462-300R 4.61 2.938 3.010 .812 .281 4.030 10 .332

Rotatable 462-000RT 4.61 Blank - .812 - 4.030 10 5⁄16-24Tapped 462-300RT 4.61 2.938 3.010 .812 .281 4.030 10 5⁄16-24


D

FA

E

BC

D

FA

Non-RotatableBlank

Bored

D

FA

E

BC

D

FA

Rotatable

Bored

Blank



63⁄4 Inch Nominal OD CF FlangeModel A B C D E F Bolt Holes







6 Inch Nominal OD CF FlangesModel A B C D E F Bolt Holes







CF FLANGES

D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored



CF FLANGES

8 Inch Nominal OD CF FlangeModel A B C D E F Bolt Holes







D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored












Non-Rotatable 1200-000N 12.00 Blank - 1.125 - 11.181 32 .332 1200-1000N 12.00 9.875 10.020 1.125 .500 11.181 32 .332

Non-Rotatable 1200-000NT 12.00 Blank - 1.125 - 11.181 32 5⁄16-24 Tapped 1200-1000NT 12.00 9.875 10.020 1.125 .500 11.181 32 5⁄16-24

Rotatable 1200-000R 12.00 Blank - 1.125 - 11.181 32 .332 1200-1000R 12.00 9.875 10.020 1.125 .500 11.181 32 .332

Rotatable 1200-000RT 12.00 Blank - 1.125 - 11.181 32 5⁄16-24 Tapped 1200-1000RT 12.00 9.875 10.020 1.125 .500 11.181 32 5⁄16-24



D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored



CF FLANGES








D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored



CF FLANGES















D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored



CF FLANGES








D

FA

E

BC

D

FA

Rotatable

Bored

Blank

D

FA

E

BC

D

FA

Non-Rotatable

Blank

Bored



CF FLANGE HARDWARE

21⁄ 8 Inch Nominal OD CF Flange HardwareModel Number Description Price


B-212 (25) Stainless Steel 1⁄4-28 x 1.25" Bolts, Nuts and Washers B-212T (25) Stainless Steel 1⁄4-28 x .875" Bolts and Washers

B-212-12 (25) Stainless Steel 12-Point 1⁄4-28 x 1.25" Bolts, Nuts and Washers B-212T-12 (25) Stainless Steel 12-Point 1⁄4-28 x .875" Bolts and Washers


2 3⁄4 Inch Nominal OD CF Flange HardwareModel Number Description Price


B-275 (25) Stainless Steel 1⁄4-28 x 1.25" Bolts, Nuts and Washers B-275T (25) Stainless Steel 1⁄4-28 x 1.00" Bolts and Washers

B-275-12 (25) Stainless Steel 12-Point 1⁄4-28 x 1.25" Bolts, Nuts and Washers B-275T-12 (25) Stainless Steel 12-Point 1⁄4-28 x 1.00" Bolts and Washers

NP-150 (24) 1⁄4-28 Plate Nuts. See Page 21. KNP-150 (12) Plate Nuts, (24) 1⁄4-28 x 1.25" Bolts and Washers KNP-150-12 (12) Plate Nuts, (24) 12-Point 1⁄4-28 x 1.25" Bolts and Washers


33⁄8 Inch Nominal OD CF Flange Hardware Model Number Description Price

G-338 (10) OFHC® Copper Gaskets G-338V (1) Viton® Gasket





41⁄2 Inch Nominal OD CF Flange HardwareModel Number Description Price










B-462 (25) Stainless Steel 5⁄16-24 x 2.25" Bolt and Nut Kit B-462T (25) Stainless Steel 5⁄16-24 x 1.25" Bolts and Washers


NP-300 (24) 5⁄16-24 Plate Nuts. See Page 21. KNP-300 (20) Plate Nuts, (40) 5⁄16-24 x 2.25" Bolts and Washers KNP-300-12 (20) Plate Nuts, (40) 5⁄16-24 x 2.25" 12-Point Bolts and Washers


6 Inch Nominal OD CF Flange Hardware Model Number Description Price


B-600 (25) Stainless Steel 5⁄16-24 x 2.25" Bolts, Nuts and Washers B-600T (25) Stainless Steel 5⁄16-24 x 1.25"Bolts and Washers


NP-400 (24) 5⁄16-24 Plate Nuts. See Page 21. KNP-400 (16) Plate Nuts (32) 5⁄16-24 x 2.25" Bolts and Washers KNP-400-12 (16) Plate Nuts (32) 5⁄16-24 x 2.25" 12-Point Bolts and Washers


6 3⁄4 Inch Nominal OD CF Flange Hardware Model Number Description Price





8 Inch Nominal OD CF Flange Hardware Model Number Description Price






CF FLANGE HARDWARE



10 Inch Nominal OD CF Flange HardwareModel Number Description Price



B-1000-12 (25) Stainless Steel 12-Point 5⁄16-24x 2.50" Bolts, Nuts and Washers B-1000T-12 (25) Stainless Steel 12-Point 5⁄16-24 x 1.75" Bolts and Washers


Dimensions in inches12 Inch Nominal OD CF Flange Hardware

Model Number Description Price

G-1200 (1) OFHC® Copper Gasket




G-1325 (1) OFHC® Copper Gasket G-1325V (1) Viton® Gasket


Dimensions in inches14 Inch Nominal OD CF Flange Hardware

Model Number Description Price




161⁄ 2 Inch Nominal OD Flange HardwareModel Number Description Price




141⁄ 2 Inch Nominal OD Flange HardwareModel Number Description Price

G-1450 (1) OFHC® Copper Gasket



CF FLANGE HARDWARE



CF SPECIAL PURPOSE FLANGES

Nor-Cal’s special purpose CF flangesare used as roughing accessories,accommodating thermocouplegauge tubes and/or up-to-air valves.Double-sided flanges areprovided with one or moreradially tapped holes.

133-STT275-STT

133-STV275-STV

1/8NPT

1/8NPT

WELD

CF Straight-Through Special Purpose Flanges Model Number Description Price

133-ST 1.33" OD Flg. with one 1⁄8" NPT Hole 275-ST 2.75" OD Flg. with features listed above

133-STT 1.33" OD Flg. with Thermocouple Gauge Tube 275-STT 2.75" OD Flg. with features listed above

133-STV 1.33" OD Flg. with Up-To-Air Valve 275-STV 2.75" OD Flg. with features listed above 133-STV-1⁄4 MVCR 1.33" OD Flg. with Up-To-Air Valve and

1⁄4" Cajon® Male VCR Fitting on Valve275-STV-1⁄4 MVCR 2.75" OD Flg. with features listed above 133-STV-1⁄4 FVCR 1.33" OD Flg. with Up-to-Air Valve and

1⁄4" Cajon® Female VCR Fitting on Valve275-STV-1⁄4 FVCR 2.75" OD Flg. with features listed above 133-STV-1⁄4 SWAG 1.33" OD Flg. with Up-To-Air Valve and

1⁄4" Swagelok® Fitting on Valve275-STV-1⁄4 SWAG 2.75" OD Flg. with features listed above


133-ST275-ST



1200

.50

.25

.75

.38

CF Double-Sided Special Purpose FlangesModel Number Description Price

133-D1 Double-Sided 1.33" OD Flg. with (1) 1⁄16" NPT Hole 275-D1 Double-Sided 2.75" OD Flg. with (1) 1⁄8" NPT Hole 133-D2 Double-Sided 1.33" OD Flg. with (2) 1⁄16" NPT Holes 275-D2 Double-Sided 2.75" OD Flg. with (2) 1⁄8" NPT Holes

133-DT Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube 275-DT Double-Sided 2.75" OD Flg. with features listed above

133-DV Double-Sided 1.33" OD Flg. with Up-To-Air Valve 275-DV Double-Sided 2.75" OD Flg. with features listed above 133-DV-1⁄4 MVCR Double-Sided 1.33" OD Flg. with Up-To-Air Valve

and 1⁄4" Cajon® Male VCR Fitting on Valve275-DV-1⁄4 MVCR Double-Sided 2.75" OD Flg. with features listed above 133-DV-1⁄4 FVCR Double-Sided 1.33" OD Flg. with Up-To-Air Valve

and 1⁄4" Cajon® Female VCR Fitting on Valve275-DV-1⁄4 FVCR Double-Sided 2.75" OD Flg. with features listed above 133-DV-1⁄4 SWAG Double-Sided 1.33" OD Flg. with Up-To-Air Valve

and 1⁄4" Swagelok® Fitting on Valve275-DV-1⁄4 SWAG Double-Sided 2.75" OD Flg. with features listed above

133-D1V Double-Sided 1.33" OD Flg. with (1) 1⁄16" NPT Hole and Up-To-Air Valve

275-D1V Double-Sided 2.75" OD Flg. with (1) 1⁄8" NPT Hole and Up-To-Air Valve

133-DTV Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube and Up-To-Air Valve

275-DTV Double-Sided 2.75" OD Flg. with features listed above 133-DTV-1⁄4 MVCR Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube

and Up-To-Air Valve with 1⁄4" Cajon® Male VCR Fitting on Valve275-DTV-1⁄4 MVCR Double-Sided 2.75" OD Flg. with features listed above 133-DTV-1⁄4 FVCR Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube and

Up-To-Air Valve with 1⁄4" Cajon® Female VCR Fitting on Valve275-DTV-1⁄4 FVCR Double-Sided 2.75" OD Flg. with features listed above 133-DTV-1⁄4 SWAG Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube and

Up-To-Air Valve with 1⁄4" Swagelok® Fitting on Valve275-DTV-1⁄4SWAG Double-Sided 2.75" OD Flg. with features listed above

275-DS-MINI Double-Sided 2.75" OD Flg. with 1.33" OD Side Port


CF SPECIAL PURPOSE FLANGES

WELD WELDWELD

133-DTV275-DTV

133-D1V275-D1V

For2.75" OD

For1.33" OD

One or two 1⁄16"NPT for 1.33" OD or

1⁄8" NPT for 2.75" OD

WELD

133-DV275-DV

133-DT275-DT

275-DS-MINI

133-D1 or D2275-D1 or D2



CF Double-Sided FlangesNominal Model Made

OD Number From B D Price

11⁄3 133-000D 133-000N Blank .300 133-025D 133-000N .255 .300 133-038D 133-000N .380 .300 133-050D 133-000N .505 .300 133-075D 133-000N .630 .300 133-000DS 133-000NS* Blank .500 133-075DS 133-000NS* .630 .500

21⁄8 212-000D 212-000N Blank .470 212-100D 212-000N 1.010 .470

23⁄4 275-000D 275-000N Blank .500 275-025D 275-000N .255 .500 275-050D 275-000N .505 .500 275-075D 275-000N .760 .500 275-100D 275-000N 1.010 .500 275-125D 275-000N 1.260 .500 275-150D 275-000N 1.510 .500 275-000DS 275-000NS* Blank .750 275-150DS 275-000NS* 1.510 .750

33⁄8 338-000D 338-000N Blank .687 338-150D 338-000N 1.510 .687 338-200D 338-000N 2.010 .687

41⁄2 450-000D 450-000N Blank .687 450-150D 450-000N 1.510 .687 450-200D 450-000N 2.010 .687 450-250D 450-000N 2.510 .687

45⁄8 462-000D 462-000N Blank .812 462-300D 462-000N 3.010 .812

6 600-000D 600-000N Blank .781 600-400D 600-000N 4.010 .781

63⁄4 675-000D 675-000N Blank .844 675-500D 675-000N 5.010 .844

8 800-000D 800-000N Blank .875 800-600D 800-000N 6.020 .875

10 1000-000D 1000-000N Blank .968 1000-800D 1000-000N 8.020 .968

131⁄4 1325-000D 1325-000N Blank 1.125 1325-1000D 1325-000N 10.020 1.125

14 1400-000D 1400-000N Blank 1.125 1400-1200D 1400-000N 12.020 1.125

*Denotes Special Flanges that are thicker than standard. Dimensions in Inches

CF DOUBLE-SIDED FLANGES & HARDWARE

Nor-Cal’s double-sided flanges areidentical to standard CF flanges except thesame gasket-sealing detail is machined intoboth faces of the flange. These flanges canbe inserted between like-sized flanges asspacers, orifice plates, or when radiallydrilled, as custom penetrations intovacuum systems.

D

B



CF Double-Sided Flange HardwareNom Model OD Number Description Price

11⁄3 G-133 (10) OFHC® Copper Gaskets G-133V (5) Viton® Gaskets B-133D (5) Stainless Steel 8-32 x 1.25" Bolts, Nuts and Washers

21⁄8 G-212 (10) OFHC® Copper Gaskets G-212V (5) Viton® Gaskets B-212D (25) Stainless Steel 1⁄4-28 x 1.75" Bolts, Nuts and Washers

23⁄4 G-275 (10) OFHC® Copper Gaskets G-275V (5) Viton® Gaskets B-275DS (25) Stainless Steel 1⁄4-28 x 2.00" Bolts, Nuts and Washers B-275D (25) Stainless Steel 1⁄4-28 x 1.75" Bolts, Nuts and Washers KNP-150D (6) Plate Nuts, 1⁄4-28 x 2.00" (12) Bolts and Washers




6 G-600 (10) OFHC® Copper Gaskets G-600V (1) Viton® Gaskets B-600D (25) Stainless Steel 5⁄16-24 x 3.00" Bolts, Nuts and Washers




131⁄4 G-1325 (1) OFHC® Copper Gaskets G-1325V (1) Viton® Gaskets


CF DOUBLE-SIDED FLANGES & HARDWARE



Plate NutsFlange Model Thread

OD Number Size A B C D Price

1.33 NP-075 8-32 .80 .3 .53 .15 2.75 NP-150 1⁄4-28 1.59 .5 1.15 .18 3.38 NP-200 5⁄16-24 1.75 .5 1.09 .22 .4.50 NP-250 5⁄16-24 2.03 .5 1.39 .22 4.62 NP-300 5⁄16-24 1.75 .5 1.25 .22 6.00 NP-400 5⁄16-24 1.75 .5 1.00 .22 8.00 NP-600 5⁄16-24 1.75 .5 1.12 .22

10.00 NP-800 5⁄16-24 1.75 .5 1.19 .22

All Plate Nuts - 24 per package Dimensions in inches

Nor-Cal manufactures plate nuts formost sizes of CF flanges from 11/3 to 10inches OD. These handy backing nutscenter themselves over two adjacent boltholes on the back side of a flange and canbe held in place with one finger while boltsare tightened with a single wrench.Plate nuts are perfect for those hard toreach (and see) spaces that areencountered during systemassembly and service.

PLATE NUTS

C

B

D

A

C

A

B

D

Plate Nut for1.33 and 2.75" Flanges

Plate Nut Assembly Kits with 12-Point BoltsFlange Model

OD Number Description Price

2.75 KNP-150-12 (12) Plate Nuts (24) 1⁄4-28 x 1.25" Bolts and Washers 3.38 KNP-200-12 (16) Plate Nuts (32) 5⁄16-24 x 1.75" Bolts and Washers 4.50 KNP-250-12 (16) Plate Nuts (32) 5⁄16-24 x 2.00" Bolts and Washers 4.62 KNP-300-12 (20) Plate Nuts (40) 5⁄16-24 x 2.25" Bolts and Washers 6.00 KNP-400-12 (16) Plate Nuts (32) 5⁄16-24 x 2.25" Bolts and Washers 8.00 KNP-600-12 (20) Plate Nuts (49) 5⁄16-24 x 2.25" Bolts and Washers

10.00 KNP-800-12 (24) Plate Nuts (48) 5⁄16-24 x 2.50" Bolts and Washers


Plate Nut Assembly Kits with Hex Head BoltsFlange Model

OD Number Description Price

1.33 KNP-075 (12) Plate Nuts (24) 8-32 x .75" Bolts and Washers 2.75 KNP-150 (12) Plate Nuts (24) 1⁄4-28 x 1.25" Bolts and Washers 3.38 KNP-200 (16) Plate Nuts (32) 5⁄16-24 x 1.75" Bolts and Washers 4.50 KNP-250 (16) Plate Nuts (32) 5⁄16-24 x 2.00" Bolts and Washers 4.62 KNP-300 (20) Plate Nuts (40) 5⁄16-24 x 2.25" Bolts and Washers 6.00 KNP-400 (16) Plate Nuts (32) 5⁄16-24 x 2.25" Bolts and Washers 8.00 KNP-600 (16) Plate Nuts (32) 5⁄16-24 x 2.25" Bolts and Washers

10.00 KNP-800 (24) Plate Nuts (48) 5⁄16-24 x 2.50" Bolts and Washers


Plate Nut forFlanges larger than 2.75”



23

CF Zero Length Reducer FlangesModel Small Flange Large FlangeNumber Detail Detail B D Price

212-133-075Z* 133-000NT 212-000NT .625 .470 275-133-075Z 133-000NT 275-000N .625 .500 275-212-100Z* 212-000NT 275-000NT 1.000 .500 338-133-075Z 133-000NT 338-000N .625 .687 338-212-100Z* 212-000NT 338-000NT 1.000 .687 338-275-150Z* 275-000NT 338-000NT 1.500 .687 450-133-075Z 133-000NT 450-000N .625 .687 450-212-100Z 212-000NT 450-000N 1.000 .687 450-275-150Z 275-000NT 450-000N 1.500 .687 450-338-200Z* 338-000NT 450-000NT 2.000 .687 462-133-075Z 133-000NT 462-000N .625 .812 462-212-100Z 212-000NT 462-000N 1.000 .812 462-275-150Z 275-000NT 462-000N 1.500 .812 462-338-200Z 338-000NT 462-000N 2.000 .812 600-133-075Z 133-000NT 600-000N .625 .781 600-212-100Z 212-000NT 600-000N 1.000 .781 600-275-150Z 275-000NT 600-000N 1.500 .781 600-338-200Z 338-000NT 600-000N 2.000 .781 600-450-250Z 450-000NT 600-000N 2.500 .781 600-462-300Z* 462-000NT 600-000NT 3.000 .781 675-133-075Z 133-000NT 675-000N .625 .844 675-212-100Z 212-000NT 675-000N 1.000 .844 675-275-150Z 275-000NT 675-000N 1.500 .844 675-338-200Z 338-000NT 675-000N 2.000 .844 675-450-250Z 450-000NT 675-000N 2.500 .844 675-462-300Z 462-000NT 675-000N 3.000 .844 675-600-400Z* 600-000NT 675-000NT 4.000 .844 800-133-075Z 133-000NT 800-000N .625 .875 800-212-100Z 212-000NT 800-000N 1.000 .875 800-275-150Z 275-000NT 800-000N 1.500 .875 800-338-200Z 338-000NT 800-000N 2.000 .875 800-450-250Z 450-000NT 800-000N 2.500 .875 800-462-300Z 462-000NT 800-000N 3.000 .875 800-600-400Z 600-000NT 800-000N 4.000 .875 800-675-500Z* 675-000NT 800-000NT 5.000 .875 1000-133-075Z 133-000NT 1000-000N .625 .968 1000-212-100Z 212-000NT 1000-000N 1.000 .968 1000-275-150Z 275-000NT 1000-000N 1.500 .968 1000-338-200Z 338-000NT 1000-000N 2.000 .968 1000-450-250Z 450-000NT 1000-000N 2.500 .968 1000-462-300Z 462-000NT 1000-000N 3.000 .968 1000-600-400Z 600-000NT 1000-000N 4.000 .968 1000-675-500Z 675-000NT 1000-000N 5.000 .968 1000-800-600Z 800-000NT 1000-000N 6.000 .968 1325-133-075Z 133-000NT 1325-000N .625 1.125 1325-212-100Z 212-000NT 1325-000N 1.000 1.125 1325-275-150Z 275-100NT 1325-000N 1.500 1.125 1325-338-200Z 338-000NT 1325-000N 2.000 1.125 1325-450-250Z 450-000NT 1325-000N 2.500 1.125 1325-462-300Z 462-000NT 1325-000N 3.000 1.125 1325-600-400Z 600-000NT 1325-000N 4.000 1.125 1325-675-500Z 675-000NT 1325-000N 5.000 1.125 1325-800-600Z 800-000NT 1325-000N 6.000 1.125 1325-1000-800Z 1000-000NT 1325-000N 8.000 1.125

*Denotes that both sets of bolts holes are tapped Dimensions in inches

Nor-Cal’s zero length reducer flangesare a convenient and inexpensive wayto reduce a large flange for smallervacuum plumbing and/or componentconnection. To list all possible reducercombinations would require excessivespace, therefore only the mostcommonly used reducers are listed.If your requirement is not listed,please inquire.

CF ZERO LENGTH REDUCER FLANGES

D

BLarge Flange

Detail

Small FlangeDetail



CF FITTINGS

B

RotatableNon-Rotatable

Nor-Cal manufactures a complete line ofvacuum fittings with CF flanges. The tubeportions are fabricated from 304 stainlesssteel. On request 316 stainless steel can besupplied. Nor-Cal makes its own elbows,and all tees and crosses are made with thepulled port technique. This allows smooth,crevice-free butt welds to provide themaximum in cleanliness for UHV applica-tions. Bake out range is up to 500˚C.Nor-Cal fittings are also available with NW(ISO-KF compatible), ISO and ASA flanges.

Standard finish is bead blasted.As an option, a tumbled finish can beprovided at no extra charge. Indicate thisby adding “-T” suffix to the part number.Electropolish can also be provided as anoption. Call for pricing.

Non-Rotatable

B

CF Half NipplesModel Flange TubeNumber OD OD B Price

1N-075 1.33 .75 1.50 1N-100 2.12 1.00 2.05 1N-150 2.75 1.50 2.46 1N-200 3.38 2.00 3.22 1N-250 4.50 2.50 3.38 1N-250V 4.50 2.50 4.12 1N-300 4.62 3.00 3.53 1N-400 6.00 4.00 4.32 1N-400V 6.00 4.00 5.31 1N-600 8.00 6.00 5.50 1N-600V 8.00 6.00 6.56 1N-800 10.00 8.00 7.50 1N-1000 13.25 10.00 10.00 1N-1200 14.00 12.00 10.00


CF Full NipplesModel Flange TubeNumber OD OD B Price

2N-075 1.33 .75 3.00 2N-100 2.12 1.00 4.10 2N-150 2.75 1.50 4.92 2N-200 3.38 2.00 6.44 2N-250 4.50 2.50 6.76 2N-250V 4.50 2.50 8.24 2N-300 4.62 3.00 7.06 2N-400 6.00 4.00 8.64 2N-400V 6.00 4.00 10.62 2N-600 8.00 6.00 11.00 2N-600V 8.00 6.00 13.12 2N-800 10.00 8.00 15.00 2N-1000 13.25 10.00 20.00 2N-1200 14.00 12.00 20.00




CF FITTINGS

5.00


1 2

Both Flanges Rotatable

B

B


1 2

CF Conical Reducer NipplesModel Flange 1 Flange 2Number OD Tube OD OD Tube OD B Price

2NRC-212-133 2.12 1.00 1.33 .75 2.04 2NRC-275-133 2.75 1.50 1.33 .75 3.08 2NRC-275-212 2.75 1.50 2.12 1.00 2.75 2NRC-338-212 3.38 2.00 2.12 1.00 2.77 2NRC-338-275 3.38 2.00 2.75 1.50 2.81 2NRC-450-275 4.50 2.50 2.75 1.50 2.96 2NRC-450-338 4.50 2.50 3.38 2.00 2.98 2NRC-462-275 4.62 3.00 2.75 1.50 4.12 2NRC-462-338 4.62 3.00 3.38 2.00 4.13 2NRC-462-450 4.62 3.00 4.50 2.50 4.28 2NRC-600-338 6.00 4.00 3.38 2.00 4.29 2NRC-600-450 6.00 4.00 4.50 2.50 4.44 2NRC-600-462 6.00 4.00 4.62 3.00 4.34


CF 45˚ Radius Elbows with TangentsModel Flange TubeNumber OD OD B Price

2KL-075 1.33 .75 .94 2KL-100 2.12 1.00 1.14 2KL-150 2.75 1.50 1.74 2KL-200 3.38 2.00 2.07 2KL-250 4.50 2.50 3.37 2KL-300 4.62 3.00 3.96 2KL-400 6.00 4.00 5.22


CF Reducer NipplesModel Flange 1 Flange 2 TubeNumber OD OD OD Price

2NR-600-275 6.00 2.75 1.50 2NR-800-275 8.00 2.75 1.50 2NR-800-450 8.00 4.50 2.50 2NR-800-600 8.00 6.00 4.00 2NR-1000-275 10.00 2.75 1.50 2NR-1000-450 10.00 4.50 2.50 2NR-1000-600 10.00 6.00 4.00 2NR-1000-800 10.00 8.00 6.00 2NR-1325-1000 13.25 10.00 8.00 2NR-1400-1200 14.00 12.00 10.00

Note: Reducer Nipples with other CF Flanges Dimensions in inches and different lengths are available upon request.



CF 90˚ Radius ElbowsModel Flange TubeNumber OD OD B R Price

2E-075 1.33 .75 1.50 1.00 2E-100 2.12 1.00 1.67 1.50 2E-150 2.75 1.50 2.46 2.25 2E-200 3.38 2.00 3.22 3.00 2E-250 4.50 2.50 4.12 3.75 2E-300 4.62 3.00 4.78 4.50 2E-400 6.00 4.00 6.44 6.00 2E-600 8.00 6.00 9.50 9.00 2E-800 10.00 8.00 12.50 12.00 2E-1000 13.25 10.00 15.50 15.00


CF FITTINGS

CF 90˚ Mitered ElbowsModel Flange TubeNumber OD OD B Price

2E-075M 1.33 .75 1.50 2E-100M 2.12 1.00 2.05 2E-150M 2.75 1.50 2.46 2E-200M 3.38 2.00 3.22 2E-250M 4.50 2.50 3.38 2E-250MV 4.50 2.50 4.12 2E-300M 4.62 3.00 3.53 2E-400M 6.00 4.00 4.32 2E-400MV 6.00 4.00 5.31 2E-500M 6.75 5.00 4.71 2E-600M 8.00 6.00 5.50 2E-600MV 8.00 6.00 6.56 2E-800M 10.00 8.00 7.50 2E-1000M 13.25 10.00 10.00


B

B



B

B

R



CF TeesModel Flange TubeNumber OD OD B Price

3T-075 1.33 .75 1.50 3T-100 2.12 1.00 2.05 3T-150 2.75 1.50 2.46 3T-200 3.38 2.00 3.22 3T-250 4.50 2.50 3.38 3T-250V 4.50 2.50 4.12 3T-300 4.62 3.00 3.53 3T-400 6.00 4.00 4.32 3T-400V 6.00 4.00 5.31 3T-500 6.75 5.00 4.71 3T-600 8.00 6.00 5.50 3T-600V 8.00 6.00 6.56 3T-800 10.00 8.00 7.50 3T-1000 13.25 10.00 10.00


CF Reducer TeesModel Flange 1 & 2 Flange 3Number Flange OD Tube OD Flange OD Tube OD B M Price

3TR-150-075 2.75 1.50 1.33 .75 2.46 1.873TR-150-100 2.75 1.50 2.12 1.00 2.46 2.29 3TR-200-075 3.38 2.00 1.33 .75 3.22 2.13 3TR-200-150 3.38 2.00 2.75 1.50 3.22 2.71 3TR-250-150 4.50 2.50 2.75 1.50 3.38 2.96 3TR-250-200 4.50 2.50 3.38 2.00 3.38 3.48 3TR-300-200 4.62 3.00 3.38 2.00 3.53 3.73 3TR-300-250 4.62 3.00 4.50 2.50 3.53 3.63 3TR-400-150 6.00 4.00 2.75 1.50 4.32 3.71 3TR-400-200 6.00 4.00 3.38 2.00 4.32 4.23 3TR-400-250 6.00 4.00 4.50 2.50 4.32 4.13 3TR-400-300 6.00 4.00 4.62 3.00 4.32 4.03 3TR-500-400 6.75 5.00 6.00 4.00 4.71 4.823TR-600-150 8.00 6.00 2.75 1.50 5.50 4.71 3TR-600-200 8.00 6.00 3.38 2.00 5.50 5.23 3TR-600-250 8.00 6.00 4.50 2.50 5.50 5.13 3TR-600-400 8.00 6.00 6.00 4.00 5.50 5.32 3TR-800-600 10.00 8.00 8.00 6.00 7.50 6.50

Note: Reducer tees of other tube sizes are available upon request. Dimensions in inches

B

Rotatable

Non-Rotatable

BTyp

1 2

M

Rotatable

Non-Rotatable

BTyp

3

CF FITTINGS



CF 4-Way CrossesModel Flange TubeNumber OD OD B Price

4C-075 1.33 .75 1.50 4C-100 2.12 1.00 2.05 4C-150 2.75 1.50 2.46 4C-200 3.38 2.00 3.22 4C-250 4.50 2.50 3.38 4C-250V 4.50 2.50 4.12 4C-300 4.62 3.00 3.53 4C-400 6.00 4.00 4.32 4C-400V 6.00 4.00 5.31 4C-500 6.75 5.00 4.71 4C-600 8.00 6.00 5.50 4C-600V 8.00 6.00 6.56 4C-800 10.00 8.00 7.50 4C-1000 13.25 10.00 10.00


CF Reducer Crosses Model Flange 1 & 2 Flange 3 & 4Number Flange OD Tube OD Flange OD Tube OD B M Price

4CR-150-075 2.75 1.50 1.33 .75 2.46 1.87 4CR-150-100 2.75 1.50 2.12 1.00 2.46 2.29 4CR-200-075 3.38 2.00 1.33 .75 3.22 2.13 4CR-200-150 3.38 2.00 2.75 1.50 3.22 2.71 4CR-250-150 4.50 2.50 2.75 1.50 3.38 2.96 4CR-250-200 4.50 2.50 3.38 2.00 3.38 3.48 4CR-300-200 4.62 3.00 3.38 2.00 3.53 3.73 4CR-300-250 4.62 3.00 4.50 2.50 3.53 3.63 4CR-400-150 6.00 4.00 2.75 1.50 4.32 3.71 4CR-400-200 6.00 4.00 3.38 2.00 4.32 4.23 4CR-400-250 6.00 4.00 4.50 2.50 4.32 4.13 4CR-400-300 6.00 4.00 4.62 3.00 4.32 4.03 4CR-500-400 6.75 5.00 6.00 4.00 4.71 4.82 4CR-600-150 8.00 6.00 2.75 1.50 5.50 4.71 4CR-600-200 8.00 6.00 3.38 2.00 5.50 5.23 4CR-600-250 8.00 6.00 4.50 2.50 5.50 5.13 4CR-600-400 8.00 6.00 6.00 4.00 5.50 5.32 4CR-800-600 10.00 8.00 8.00 6.00 7.50 6.50

Other reducer combinations can be supplied upon request. Dimensions in inches

CF FITTINGS

Rotatable

1 2

Non-Rotatable

BTyp

3

4

MTyp

BTyp

Rotatable

Non-Rotatable

BTyp









CF 6-Way Cube CrossesModel NominalNumber Flg. Size B Price

6C-075-CU 1.33 .67 6C-150-CU 2.75 1.37 6C-250-CU 4.50 2.24 6C-400-CU 6.00 2.98 6C-600-CU 8.00 3.98

Note: CF 6-Way Cube Crosses are available in other sizes upon request. Dimensions in inches

CF FITTINGS

BTyp

Rotatable

Non-Rotatable(incl. flange not shown)

BTyp

BTyp

Rotatable

Non-Rotatable

BTyp

BTyp



CF Zero Length 7056 Glass ViewportsModel Flange VNumber OD View Diameter Price

ZV-075 1.33 .63 ZV-100 2.12 .63 ZV-150 2.75 1.49 ZV-200 3.38 1.49 ZV-250 4.50 2.66 ZV-300 4.62 2.66 ZV-400 6.00 3.97 ZV-500 6.75 3.97 ZV-600 8.00 5.60 ZV-800 10.00 5.60


CF Flex CouplingsModel Flange Bellows Wall Free Spring Rate CompresssedNumber OD ID Thickness Length lbs./in. Length Price

2FC-075-1 1.33 .50 .006 3.20 45 2.95 2FC-075-2 1.33 .50 .006 4.20 36 3.70 2FC-075-3 1.33 .50 .006 5.20 28 4.45 2FC-100-1 2.12 .75 .006 3.20 40 2.95 2FC-100-2 2.12 .75 .006 4.20 32 3.70 2FC-100-3 2.12 .75 .006 5.20 25 4.45 2FC-150-1 2.75 1.50 .006 3.20 85 2.95 2FC-150-2 2.75 1.50 .006 4.20 69 3.70 2FC-150-3 2.75 1.50 .006 5.20 53 4.45 2FC-150-6 2.75 1.50 .006 8.20 28 6.70 2FC-200-3 3.38 2.00 .006 6.00 56 5.25 2FC-250-4 4.50 2.50 .010 7.00 80 6.00 2FC-300-4 4.62 3.00 .010 7.00 78 6.00 2FC-400-4 6.00 4.00 .010 7.00 75 6.00 2FC-500-4 6.75 5.00 .010 7.00 73 6.00 2FC-600-4 8.00 6.00 .010 7.00 130 6.00 2FC-800-4 10.00 8.00 .010 7.00 83 6.00


Free Length

Rotatable Non-Rotatable

CF FITTINGS

V

CF Zero Length Fused Silica ViewportsModel Flange VNumber OD View Diameter Price

ZVQ-150 2.75 1.40 ZVQ-200 3.38 1.40 ZVQ-250 4.50 2.69 ZVQ-300 4.62 2.69 ZVQ-400 6.00 3.88 ZVQ-500 6.75 3.88 ZVQ-600 8.00 5.37 ZVQ-800 10.00 7.78


V

• Bakeable to 4000C• 90% transmission 0.4

to 2.0 micron wavelength

• Bakeable to 2000C• Special coatings and

materials available• 90% transmission 0.3

to 2.5 micron wavelength



CF Swagelok ® AdaptersModel Flange TubeNumber OD OD B Price

133-1⁄4 SWAG 1.33 1⁄4 1.37 133-3⁄8 SWAG 1.33 3⁄8 1.58 275-1⁄4 SWAG 2.75 1⁄4 1.37 275-3⁄8 SWAG 2.75 3⁄8 1.54


CF ADAPTERS

Nor-Cal offers a full line of adapter flanges, adapter nipples and conical adapter nipples.Other flange sizes and combinations are available upon request. They are made fromselect grade 304 stainless steel to provide the maximum cleanliness for UHV applica-tions. Also see the ASA and NW/ISO flange catalogs for other adapter combinations.

CF Quick Disconnect AdaptersModel Flange Tube MinimumNumber OD OD ID B Price

133-1⁄4 QD 1.33 1⁄4 3⁄16 1.39 133-3⁄8 QD 1.33 3⁄8 9⁄32 1.53 133-1⁄2 QD 1.33 1⁄2 13⁄32 1.70 275-1⁄4 QD 2.75 1⁄4 3⁄16 1.39 275-3⁄8 QD 2.75 3⁄8 9⁄32 1.53 275-1⁄2 QD 2.75 1⁄2 13⁄32 1.70 275-3⁄4 QD 2.75 3⁄4 5⁄8 1.99 275-1 QD 2.75 1 7⁄8 2.01

Dimensions in inchesB

TubeOD

MinID

CF Male VCR AdaptersModel Flange TubeNumber OD OD B Price

133-1⁄4 MVCR 1.33 1⁄4 1.36 133-3⁄8 MVCR 1.33 3⁄8 1.55 275-1⁄4 MVCR 2.75 1⁄4 1.36 275-3⁄8 MVCR 2.75 3⁄8 1.55


B

CF

Swagelok®

B

CF

MVCR



Glass Adapters - 7052 Glass / Kovar ®

Model FlangeNumber OD B C Price

1GA-075K 1.33 5.43 .75 1GA-100K 2.12 5.42 1.00 1GA-150K 2.75 5.46 1.50 1GA-200K 3.38 5.98 2.00 1GA-250K 4.50 7.76 2.50 1GA-300K 4.62 7.66 3.00 1GA-400K 6.00 10.44 4.00 1GA-500K 6.75 10.96 5.00 1GA-600K 8.00 11.00 6.00


CF Female VCR AdaptersModel Flange TubeNumber OD OD B Price

133-1⁄4 FVCR 1.33 1⁄4 1.88 133-3⁄8 FVCR 1.33 3⁄8 2.13 275-1⁄4 FVCR 2.75 1⁄4 1.88 275-3⁄8 FVCR 2.75 3⁄8 2.13


Glass Adapters - 7740 Pyrex ®/ S.S. Model FlangeNumber OD B C Price

1GA-075P 1.33 4.93 .75 1GA-100P 2.12 4.92 1.00 1GA-150P 2.75 4.96 1.50 1GA-200P 3.38 5.48 2.00 1GA-250P 4.50 5.63 2.50 1GA-300P 4.62 6.53 3.00 1GA-400P 6.00 6.69 4.00 1GA-500P 6.75 8.71 5.00 1GA-600P 8.00 8.75 6.00


CF ADAPTERS

B

CF

FVCR

C

B

C

B



CF ADAPTERS

CF to ASA Adapter FlangesModel Small Flange Large FlangeNumber Detail Detail B D Price

ASA-5-133-075Z 133-000NT ASA-5-000N .63 .50 ASA-5-212-100Z 212-000NT ASA-5-000N 1.00 .50 ASA-5-275-150Z 275-000NT ASA-5-000N 1.50 .50

ASA-6-133-075Z 133-000NT ASA-6-000N .63 .50 ASA-6-212-100Z 212-000NT ASA-6-000N 1.00 .50 ASA-6-275-150Z 275-000NT ASA-6-000N 1.50 .50 ASA-6-338-200Z 338-000NT ASA-6-000N 2.00 .75

ASA-7.5-133-075Z 133-000NT ASA-7.5-000N .63 .50 ASA-7.5-212-100Z 212-000NT ASA-7.5-000N 1.00 .50 ASA-7.5-275-150Z 275-000NT ASA-7.5-000N 1.50 .50 ASA-7.5-338-200Z 338-000NT ASA-7.5-000N 2.00 .75 ASA-7.5-450-250Z 450-000NT ASA-7.5-000N 2.50 .75

ASA-9-133-075Z 133-000NT ASA-9-000N .63 .75 ASA-9-212-100Z 212-000NT ASA-9-000N 1.00 .75ASA-9-275-150Z 275-000NT ASA-9-000N 1.50 .75 ASA-9-338-200Z 338-000NT ASA-9-000N 2.00 .75 ASA-9-450-250Z 450-000NT ASA-9-000N 2.50 .75 ASA-9-462-300Z 462-000NT ASA-9-000N 3.00 .75 ASA-9-600-400Z 600-000NT ASA-9-000N 4.00 .75

ASA-11-133-075Z 133-000NT ASA-11-000N .63 .75 ASA-11-212-100Z 212-000NT ASA-11-000N 1.00 .75 ASA-11-275-150Z 275-000NT ASA-11-000N 1.50 .75 ASA-11-338-200Z 338-000NT ASA-11-000N 2.00 .75 ASA-11-450-250Z 450-000NT ASA-11-000N 2.50 .75 ASA-11-462-300Z 462-000NT ASA-11-000N 3.00 .75 ASA-11-600-400Z 600-000NT ASA-11-000N 4.00 .75 ASA-11-800-600Z 800-000NT ASA-11-000N 6.00 .75

Note: Add suffix “-G” to Model Number if O-ring is required on ASA mating side.See ASA Flange Catalog for Groove prices.Dimensions in inches

Large FlangeDetail

D

B

Small FlangeDetail



CF to ISO Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-275-ISO-63-OF 2.75 CF 1.50 ISO-63-OF 2.50 2.83 ANC-275-ISO-80-OF 2.75 CF 1.50 ISO-80-OF 3.00 4.08 ANC-338-ISO-63-OF 3.38 CF 2.00 ISO-63-OF 2.50 2.85 ANC-338-ISO-80-OF 3.38 CF 2.00 ISO-80-OF 3.00 4.10 ANC-338-ISO-100-OF 3.38 CF 2.00 ISO-100-OF 4.00 4.10 ANC-450-ISO-80-OF 4.50 CF 2.50 ISO-80-OF 3.00 4.25 ANC-450-ISO-100-OF 4.50 CF 2.50 ISO-100-OF 4.00 4.25 ANC-462-ISO-63-OF 4.62 CF 3.00 ISO-63-OF 2.50 4.16 ANC-462-ISO-100-OF 4.62 CF 3.00 ISO-100-OF 4.00 4.16 ANC-600-ISO-63-OF 6.00 CF 4.00 ISO-63-OF 2.50 4.31 ANC-600-ISO-80-OF 6.00 CF 4.00 ISO-80-OF 3.00 4.31


CF to NW Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-NW-10-133 NW-10 1.33 CF .50 AN-NW-16-133 NW-16 1.33 CF .75 AN-NW-25-212 NW-25 2.12 CF 1.00 AN-NW-40-275 NW-40 2.75 CF 1.50 AN-NW-50-133 NW-50 1.33 CF .75 AN-NW-50-338 NW-50 3.38 CF 2.00

Note: Other sizes available on request. Dimensions in inches

1

2

B

CF ADAPTERS

5.00

1 2

2.00

12

CF to ISO Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-450-ISO-63-OF 4.50 CF ISO-63-OF 2.50 AN-462-ISO-80-OF 4.62 CF ISO-80-OF 3.00 AN-600-ISO-100-OF 6.00 CF ISO-100-OF 4.00 AN-800-ISO-160-OF 8.00 CF ISO-160-OF 6.00 AN-1000-ISO-200-OF 10.00 CF ISO-200-OF 8.00




CF to NW Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-NW-16-212 NW-16 .75 2.12 CF 1.00 1.69 ANC-NW-16-275 NW-16 .75 2.75 CF 1.50 2.73 ANC-NW-25-133 NW-25 1.00 1.33 CF .75 2.03 ANC-NW-25-275 NW-25 1.00 2.75 CF 1.50 2.73 ANC-NW-25-338 NW-25 1.00 3.38 CF 2.00 2.75 ANC-NW-40-133 NW-40 1.50 1.33 CF .75 3.03 ANC-NW-40-212 NW-40 1.50 2.12 CF 1.00 2.69 ANC-NW-40-338 NW-40 1.50 3.38 CF 2.00 2.75 ANC-NW-40-450 NW-40 1.50 4.50 CF 2.50 2.90 ANC-NW-40-462 NW-40 1.50 4.62 CF 3.00 4.06 ANC-NW-50-212 NW-50 2.00 2.12 CF 1.00 2.69 ANC-NW-50-275 NW-50 2.00 2.75 CF 1.50 2.73 ANC-NW-50-450 NW-50 2.00 4.50 CF 2.50 2.90 ANC-NW-50-462 NW-50 2.00 4.62 CF 3.00 4.06 ANC-NW-50-600 NW-50 2.00 6.00 CF 4.00 4.21


CF to ASA Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-212-ASA-5 2.12 CF 1.00 ASA-5 2.00 2.79 ANC-275-ASA-5 2.75 CF 1.50 ASA-5 2.00 2.83 ANC-275-ASA-6 2.75 CF 1.50 ASA-6 3.00 4.08 ANC-338-ASA-5 3.38 CF 2.00 ASA-5 2.50 2.85 ANC-338-ASA-6 3.38 CF 2.00 ASA-6 3.00 4.10 ANC-338-ASA-7.5 3.38 CF 2.00 ASA-7.5 4.00 4.10 ANC-450-ASA-5 4.50 CF 2.50 ASA-5 2.00 3.00 ANC-450-ASA-6 4.50 CF 2.50 ASA-6 3.00 4.25 ANC-450-ASA-7.5 4.50 CF 2.50 ASA-7.5 4.00 4.25 ANC-462-ASA-5 4.62 CF 3.00 ASA-5 2.00 4.16 ANC-462-ASA-7.5 4.62 CF 3.00 ASA-7.5 4.00 4.16 ANC-600-ASA-5 6.00 CF 4.00 ASA-5 2.00 4.31 ANC-600-ASA-6 6.00 CF 4.00 ASA-6 3.00 4.31

Note: Add suffix “-G” to Model Number if O-ring groove is required on ASA Flange.See ASA Flange Catalog for Groove prices.Dimensions in inches

B

12

CF ADAPTERS

B

1

2



CF to ASA Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-133-ASA-5 1.33 CF ASA-5 .75 AN-133-ASA-6 1.33 CF ASA-6 .75 AN-212-ASA-6 2.12 CF ASA-6 1.00 AN-462-ASA-6 4.62 CF ASA-6 3.00

AN-133-ASA-7.5 1.33 CF ASA-7.5 .75 AN-212-ASA-7.5 2.12 CF ASA-7.5 1.00 AN-275-ASA-7.5 2.75 CF ASA-7.5 1.50

AN-133-ASA-9 1.33 CF ASA-9 .75 AN-212-ASA-9 2.12 CF ASA-9 1.00 AN-275-ASA-9 2.75 CF ASA-9 1.50 AN-338-ASA-9 3.38 CF ASA-9 2.00 AN-450-ASA-9 4.50 CF ASA-9 2.50 AN-462-ASA-9 4.62 CF ASA-9 3.00 AN-600-ASA-9 6.00 CF ASA-9 4.00

AN-133-ASA-11 1.33 CF ASA-11 .75 AN-212-ASA-11 2.12 CF ASA-11 1.00 AN-275-ASA-11 2.75 CF ASA-11 1.50 AN-338-ASA-11 3.38 CF ASA-11 2.00 AN-450-ASA-11 4.50 CF ASA-11 2.50 AN-462-ASA-11 4.62 CF ASA-11 3.00 AN-600-ASA-11 6.00 CF ASA-11 4.00 AN-800-ASA-11 8.00 CF ASA-11 6.00

AN-133-ASA-13.5 1.33 CF ASA-13.5 .75 AN-212-ASA-13.5 2.12 CF ASA-13.5 1.00 AN-275-ASA-13.5 2.75 CF ASA-13.5 1.50 AN-338-ASA-13.5 3.38 CF ASA-13.5 2.00 AN-450-ASA-13.5 4.50 CF ASA-13.5 2.50 AN-462-ASA-13.5 4.62 CF ASA-13.5 3.00 AN-600-ASA-13.5 6.00 CF ASA-13.5 4.00 AN-800-ASA-13.5 8.00 CF ASA-13.5 6.00 AN-1000-ASA-13.5 10.00 CF ASA-13.5 8.00

AN-133-ASA-16 1.33 CF ASA-16 .75 AN-212-ASA-16 2.12 CF ASA-16 1.00 AN-275-ASA-16 2.75 CF ASA-16 1.50 AN-338-ASA-16 3.38 CF ASA-16 2.00 AN-450-ASA-16 4.50 CF ASA-16 2.50 AN-462-ASA-16 4.62 CF ASA-16 3.00 AN-600-ASA-16 6.00 CF ASA-16 4.00 AN-800-ASA-16 8.00 CF ASA-16 6.00 AN-1000-ASA-16 10.00 CF ASA-16 8.00 AN-1325-ASA-16 13.25 CF ASA-16 10.00

Note: Add suffix “-G” to Model Number if O-ring Groove is required on ASA Flange.See ASA Flanges Catalog for Groove prices.Dimensions in inches

CF ADAPTERS

5.00

1 2

Rotatable Non-Rotatable



Stainless steel vacuum hose is availablein 3⁄4 to 4 inch diameters with CF flanges,in standard lengths of 12, 18, 24 and 36inches with one rotatable and non-rotatableflange. Larger sizes and non standardlengths are available upon request.Flex hoses can be found with otherflange types or with butt weld fittingsin their appropriate catalog.

The flexibility and reliability of thesehoses, provided by 321 stainless steelbellows, make them ideally suited forvibration isolation and roughing andalignment manifolds.

CF FLEXIBLE STAINLESS STEEL HOSES

Length

CF Flexible Stainless Steel HoseNom Model Overall Flange Wall Static BendID Number Length OD Thickness Radius Price3⁄4 FH-075-12-2CF 12 1.33 .008 1.26

FH-075-18-2CF 18 1.33 .008 1.26 FH-075-24-2CF 24 1.33 .008 1.26 FH-075-36-2CF 36 1.33 .008 1.26

1 FH-100-12-2CF 12 2.12 .008 1.46 FH-100-18-2CF 18 2.12 .008 1.46 FH-100-24-2CF 24 2.12 .008 1.46 FH-100-36-2CF 36 2.12 .008 1.46

11⁄2 FH-150-12-2CF 12 2.75 .010 2.16 FH-150-18-2CF 18 2.75 .010 2.16 FH-150-24-2CF 24 2.75 .010 2.16 FH-150-36-2CF 36 2.75 .010 2.16


21⁄2 FH-250-12-2CF 12 4.50 .012 3.15 FH-250-18-2CF 18 4.50 .012 3.15 FH-250-24-2CF 24 4.50 .012 3.15 FH-250-36-2CF 36 4.50 .012 3.15



See Braided Hose selection next page. Dimensions in inches



Length

CF FLEXIBLE STAINLESS STEEL HOSES

CF Flexible Stainless Steel Braided HoseNom Model Overall Flange Wall Static BendOD Number Length OD Thickness Radius Price3⁄4 FHB-075-12-2CF 12 1.33 .008 2.09

FHB-075-18-2CF 18 1.33 .008 2.09 FHB-075-24-2CF 24 1.33 .008 2.09 FHB-075-36-2CF 36 1.33 .008 2.09

1 FHB-100-12-2CF 12 2.12 .008 2.52 FHB-100-18-2CF 18 2.12 .008 2.52 FHB-100-24-2CF 24 2.12 .008 2.52 FHB-100-36-2CF 36 2.12 .008 2.52

11⁄2 FHB-150-12-2CF 12 2.75 .010 3.86 FHB-150-18-2CF 18 2.75 .010 3.86 FHB-150-24-2CF 24 2.75 .010 3.86 FHB-150-36-2CF 36 2.75 .010 3.86

2 FHB-200-12-2CF 12 3.38 .012 4.72 FHB-200-18-2CF 18 3.38 .012 4.72 FHB-200-24-2CF 24 3.38 .012 4.72 FHB-200-36-2CF 36 3.38 .012 4.72

Dimensions in inchesStainless steel vacuum hose withprotective stainless steel braid isavailable for 3/4 to 2 inch OD hosein 12, 18, 24 and 36 inch lengths.Larger sizes and nonstandardlengths are available on request.


Prices subject to change without notice. - International product pricing will vary. CF-LIT 4/03

ALUMINUM TO STAINLESS STEEL TRANSITIONS

Applications

• Accelerators• Synchrotrons• Semiconductor

Processing

Specifications

• 6061 Aluminum• 304 Stainless Steel• UHV materials for

transition bond

Aluminum to Stainless Steel Transitions provide a reliableUHV seal for aluminum vacuum systems. An explosionbonded composite of aluminum, stainless steel and twoother UHV materials make these transitions leak tightat UHV pressures. Transitions are welded to astainless steel CF flange as a complete unit readyto weld to your aluminum chamber or beamline,or the transition can be purchased separately forwelding to your own CF flange.

The explosion bonds have been tested for tensile, shearand thermal stress. Testing included thermal quenchingfrom 773°K to 77°K. This process has shown vacuum integrityto better than 5 x 10-10 standard cc/per second with wall thicknessas thin as 0.025”. Each unit is thermally cycled to 300°C.Helium leak testing is done before and after thermal cycling.

Aluminum toStainless Steel Transitions

DB

A

E

Chamfer .020" x 45°

.25"

1.70

"

Flange Diameter

D

B

A

C

.25"

SS

Al

45°

Model Number Description O.D. A B C D E Price

ALST-075-CF Nonrotatable CF 1.33 0.50 0.750 2.20 1.00 -- ALST-075 Transition Only -- 0.50 0.750 -- 1.00 0.750






Dimensons in inches


Prices subject to change without notice. - International product pricing will vary. WS-LIT 11/01

Assembly Instructionsfor Nor-Cal Conflat andWire Seal Type Flanges

WIRE SEAL FLANGE SYSTEM

General Information

Nor-Cal’s wire seal flanges aredesigned for use on bell jars, customvacuum chambers and related systems.Standard sizes range from 12 to 27inch nominal OD for tube sizes from10 to 24 inch OD. A male and femaleflange compress a .080 inch diameterOFHC® copper wire to effect a seal.Gasket flow is confined by the geometryof the flange surfaces to the area of theseal. Minor nicks and scratches withinthis contact area are filled with crushedcopper wire providing a seal thatis leak tight at 10-13 Torr afterrepeated bake out to 500˚C.

Typical Wire Seal Flange Assembly

Torque Specifications for Conflat Flange AssemblyNominal OD Bolt Size Torque in Inch Pounds

11/3 8-32 2821/8 1/4 - 28 110 23/4 1/4 - 28 11033/8 5/16 - 24 19041/2 5/16 - 24 19045/8 5/16 - 24 190

6 5/16 - 24 19063/4 5/16 - 24 190

8 5/16 - 24 19010 5/16 - 24 19012 5/16 - 24 190

131/4 3/8 - 24 34514 3/8 - 24 345

141/2 3/8 - 24 345161/2 3/8 - 24 345

These torque specs are for Nor-Cal supplied fasteners only. Dimensions in inches

Torque Specifications for Wire Seal Flange AssemblyNominal OD Bolt Size Torque in Inch Pounds

12 3/8 - 24 34514 3/8 - 24 34517 1/2 - 20 85019 1/2 - 20 85022 5/8 - 18 1,45027 5/8 - 18 1,450

These torque specs are for Nor-Cal supplied fasteners only. Dimensions in inches

Male Bored

FemaleBlank

Wire Seal

1. Apply a small amount of hightemperature anti-seize compoundto the bolt threads.

2. Check that both flange surfacesare clean and sealing edges arefree from nicks and scratches.

3. Using clean, lint free gloves,unpack gasket.

4. Place gasket in the knife edgecounterbore of non-rotatable flange.

5. Align the mating hole patternand leak test grooves.

6. Install the proper bolts andtighten hand tight. Check to seethat the flange faces are parallel.

7. Tighten the bolts 1/4 to 1/2 turnsusing a circular clockwise patternuntil the flange faces are metal tometal. Torque the fasteners tothe listed value using thesame pattern.


Prices subject to change without notice. - International product pricing will vary. WS-LIT 11/01

Nor-Cal’s wire seal flanges are designed for use on bell jars, custom vacuumchambers and related systems. Standard sizes range from 12 to 27 inch nominalOD for tube sizes from 10 to 24 inch OD. A male and female flange compress a.080 inch diameter OFHC® copper wire to effect a seal. Gasket flow is confined bythe geometry of the flange surfaces to the area of the seal. Minor nicks and scratcheswithin this contact area are filled with crushed copper wire providing a seal that isleak tight at 10-13 Torr after repeated bake out to 500˚C. Solid blanks are standard.Dished head blanks are offered as a lower cost alternative.

Wire Seal FlangesModel OD BoltNumber A B C D E F Holes Price

WS-12-000M 12.375 Blank - 1.13 - 11.343 24 WS-12-1000M 12.375 9.750 10.020 1.13 .630 11.343 24 WS-12-000F 12.375 Blank - 1.13 - 11.343 24 WS-12-1000F 12.375 9.750 10.020 1.13 .630 11.343 24




WS-22-000M 22.125 Blank - 1.50 - 20.187 36 WS-22-1800M 22.125 17.750 18.020 1.50 1.000 20.187 36 WS-22-000F 22.125 Blank - 1.50 - 20.187 36 WS-22-1800F 22.125 17.750 18.020 1.50 1.000 20.187 36

WS-27-000M 27.125 Blank - 1.75 - 25.843 40 WS-27-2400M 27.125 23.625 24.020 1.75 1.125 25.843 40 WS-27-000F 27.125 Blank - 1.75 - 25.843 40 WS-27-2400F 27.125 23.625 24.020 1.75 1.125 25.843 40


Wire Seal Flange Gaskets and Bolt SetsModel FlangeNumber OD Description Quantity Size Price

WG-12 12.375 Copper Gasket 1 WB-12 12.375 Stainless Steel Bolts and Nuts 24 3⁄8-24 x 21⁄2



WG-19 19.562 Copper Gasket 1 WB-19 19.562 Stainless Steel Bolts and Nuts 36 1⁄2-20 x 3


WG-27 27.125 Copper Gasket 1 WB-27 27.125 Stainless Steel Bolts and Nuts 40 5⁄8-18 x 4


WIRE SEAL FLANGES & HARDWARE

DE

F

A

B

C

D

F

A

E

F

A

B

C

D

Female Wire Seal

Male Wire Seal

D

F

A

Blank

Bored

Blank

Bored


Prices subject to change without notice. - International product pricing will vary. NW/ISO-LIT 7/01

NEW PRODUCTS

NW and ISO CenteringRings with Screens

Nor-Cal Products now stockscentering rings with stainless steelscreen for NW and ISO flanges. Theseare commonly used at the inlet of thepump to protect it from small itemsthat might damage it.

EVAC Chain Clamps, MetalSeals and Tapered Flanges

Nor-Cal Products stocks a complete lineof EVAC chain clamps and aluminum metalseals for converting elastomer seal NW (KF)and ISO flanges to UHV metal seals. Theyprovide a number of benefits over elastomerseals: reduced outgassing, no permeation,no hydrocarbons, resistanceto radiation and short half-life.

Thin Wall FlexibleStainless Steel Hose

For applications requiring increasedflexibility, Nor-Cal now offers the samehigh quality stainless steel NW flexhoses in a .006 inch wall thickness.Thin wall hose is offered instandard lengths fromten to forty inchesin 3/4 to 2 inchdiameters.

NW and ISO 316L Flanges

In response to requests from ourcustomers for corrosion resistant flangesand fittings for downstream semiconductorapplications, Nor-Cal now stocks severalitems made from 316L stainless steel mate-rial. NW and ISO flanges and centeringrings are available in 25 to 100mm sizes.Conical reducers with NW flanges are alsoavailable for immediate shipment. Tubingand elbows in 316L stainless steel can befound in the Weld Fittings catalog.

New Improved NW/ISO-KF Clamps

Nor-Cal’s improved NW wing-nut and SureSeal clamps help prevent O-ring leaks,permeation and failure in your vacuum system due to unique centering ribs and alarger clamping surface for uniform O-ring compression. Limited hinge rotationfacilitates one-handed installation. The SureSeal clamp features instant closure tooptimal compression, saving at least 10 seconds per flange assembly/disassembly,and an ergonomic lever, which eliminates injury causing repetitive motions.



NW Flange System

Nor-Cal NW flanges are designed toISO 2681 specifications for standard USAtube sizes from .375 to 2.00 inches. Theyare compatible with other manufacturers’ISO-KF style flanges. NW flanges utilizean aluminum clamp with a single wingnutfastener allowing frequent disassemblywithout tools. The vacuum seal is effectedby uniform application of pressure bythe clamp on the 15˚ surface of the 304stainless steel flanges. The mating flangesurfaces compress a Viton® O-Ring heldin place by a centering ring. The resultantseal can be used in vacuum applicationsof up to 10-8 Torr and baked to 204˚C,however sustained baking above 150˚Cmay result in deterioration of O-rings.

Additionally, Nor-Cal’s NW flanges havethe advantage of being rotatable and areavailable on virtually all of our componentsand fittings. Nor-Cal manufactures a fullline of NW adapters so you can add toor build an entire system with NWcomponents.

NW flanges can also be used with EVACchain clamps and aluminum seals to obtaina UHV seal bakeable to 150˚C. EVAC chainclamps and seals are described in detail onpages three through six of this catalog.

NW FLANGE SYSTEM

Flange

O-ringCentering

Ring

FlangeFlange

Centering Ring

O-ring

Clamp



NW Socket Weld FlangesModel TubeNumber OD A B C D Price

NW-10-SW .500 1.180 .480 .510 .640 NW-16-SW .750 1.180 .680 .760 .798 NW-25-SW 1.000 1.575 .938 1.010 1.140 NW-40-SW 1.500 2.160 1.438 1.510 1.640 NW-50-SW 2.000 2.950 1.938 2.010 2.140


NW FLANGES & HARDWARE

NW Bored Blank Flanges (NWB)Model TubeNumber OD A B Price

NW-10B-038 .375 .380 .326 NW-10B-050 .500 .510 .451 NW-16B-038* .375 .380 .326 NW-16B-050* .500 .510 .451 NW-16B-075 .750 .760 .680 NW-25B-038* .375 .380 .326 NW-25B-050* .500 .510 .451 NW-25B-075* .750 .760 .715 NW-25B-100 1.000 1.010 .938 NW-40B-038* .375 .380 .326 NW-40B-050* .500 .510 .451 NW-40B-075* .750 .760 .715 NW-40B-100* 1.000 1.010 .938 NW-40B-150 1.500 1.510 1.438 NW-50B-038* .375 .380 .326 NW-50B-050* .500 .510 .451 NW-50B-075* .750 .760 .715 NW-50B-100* 1.000 1.010 .938 NW-50B-150* 1.500 1.510 1.438 NW-50B-200 2.000 2.010 1.938

*Refer to Bored Blank (NWB) drawing to left Dimensions in inches

NW 316L Stainless Steel Bored Blank Flanges (NWB)Model TubeNumber OD A B Price

NW-25B-100-316L 1.000 1.010 .938 NW-40B-150-316L 1.500 1.510 1.438 NW-50B-200-316L 2.000 2.010 1.938


NW-16B-075

*Bored Blank (NWB)

B

.150A

.150

B

A

A

.150

B

A

.150

.500

C

AB

D

NW-10B-038, NW-10B-050, NW-25B-100,NW-40B-150 and NW-50B-200

A

B

.150

NW Blank Off CapsModel Number A Price

NW-10B .200 NW-16B .200 NW-25B .200 NW-40B .200 NW-50B .200


NW Blank Off Caps- 316LModel Number A Price

NW-16B-316L .200 NW-25B-316L .200 NW-40B-316L .200 NW-50B-316L .200





Long Butt WeldNW Long Butt Weld Flanges

ModelNumber A B C D Price

NW-10FL 1.180 .480 .380 .500 NW-16FL 1.180 .680 .625 .750 NW-25FL 1.575 1.031 .870 1.000 NW-40FL 2.160 1.620 1.370 1.500 NW-50FL 2.950 2.060 1.870 2.000


NW 316L Stainless Steel Long Butt Weld FlangesModelNumber A B C D Price

NW-25FL-316L 1.575 1.031 .870 1.000 NW-40FL-316L 2.160 1.620 1.370 1.500 NW-50FL-316L 2.950 2.060 1.870 2.000


NW-16FNW- 16FB, NW-10F, NW-25, NW-40F, NW-50F

NW Short Butt Weld FlangesModel TubeNumber OD A B C D E Price

NW-10F .50 1.180 .480 .380 .500 .500 NW-16F .75 (Noted on drawing) NW-16FB .75 1.180 .680 .625 .750 .500 NW-25F 1.00 1.575 1.031 .870 1.000 .500 NW-40F 1.50 2.160 1.620 1.370 1.500 .750 NW-50F 2.00 2.950 2.060 1.870 2.000 .750


.120

A

E

B

D

C

15o

.100

.625

.750

.672

1.180

.120

.56015o

.100.680

.100

.120

C

AB

D

1.575

15



B

A

C

D

Aluminum

Bulkhead or BaseplateNW Flange

Bulkhead Clamps NW Centering Ring

10-32 x 5/8" Screws


NW ClampsModelNumber A B C Price

NW-10-CP 1.690 2.392 .625 NW-16-CP 1.690 2.392 .625 NW-25-CP 2.140 2.796 .625 NW-40-CP 2.750 3.437 .625 NW-50-CP 3.500 4.245 .710


NW SureSeal ClampsModelNumber A B C Price

NW-10-SSC 1.750 2.392 .741 NW-16-SSC 1.750 2.392 .741 NW-25-SSC 2.284 2.796 .741 NW-40-SSC 2.947 3.437 .741 NW-50-SSC 3.784 4.245 .836


See pages 4 through 6 for EVAC chain clamps, metal seals and flanges.

Bulkhead clamps provide a simplemeans of fastening an NW flange to abaseplate. Each aluminum clamp is soldwith stainless steel socket head cap screwsand washers for attachment. Leave .075inch minimum between the bottom ofthe tapped hole and the inside of thechamber wall.

NW Bulkhead Clamps

CB

A

CB

A

Model Number of Through Hole ∅Number A B C Screws D Price

NW-16-BCP 2.00 1.50 .361 6 .90 NW-25-BCP 2.37 1.89 .387 6 1.26 NW-40-BCP 2.94 2.44 .366 6 1.84 NW-50-BCP 3.75 3.25 .404 8 2.35




NW Stainless Steel Centering Rings with O-ringModel O-ringNumber Material A B Price

NW-10-CR-SV Viton® .478 .456 NW-10-CR-SS Silicone .478 .456 NW-10-CR-SB Buna .478 .456 NW-16-CR-SV Viton® .669 .625 NW-16-CR-SS Silicone .669 .625 NW-16-CR-SB Buna .669 .625 NW-25-CR-SV Viton® 1.024 .984 NW-25-CR-SS Silicone 1.024 .984 NW-25-CR-SB Buna 1.024 .984 NW-40-CR-SV Viton® 1.614 1.570 NW-40-CR-SS Silicone 1.614 1.570 NW-40-CR-SB Buna 1.614 1.570 NW-50-CR-SV Viton® 2.047 1.967 NW-50-CR-SS Silicone 2.047 1.967 NW-50-CR-SB Buna 2.047 1.967

See next page for replacement O-rings. Dimensions in inches


NW 316L Stainless Steel Centering Rings with O-ringModel O-ringNumber Material A B Price

NW-25-CR-SV-316L Viton® 1.024 .984 NW-40-CR-SV-316L Viton® 1.614 1.570 NW-50-CR-SV-316L Viton® 2.047 1.967


NW Aluminum Centering Rings with O-ringModel O-ringNumber Material A B Price

NW-10-CR-AV Viton® .478 .456 NW-10-CR-AB Buna .478 .456 NW-16-CR-AV Viton® .669 .625 NW-16-CR-AB Buna .669 .625 NW-25-CR-AV Viton® 1.024 .984 NW-25-CR-AB Buna 1.024 .984 NW-40-CR-AV Viton® 1.614 1.570 NW-40-CR-AB Buna 1.614 1.570 NW-50-CR-AV Viton® 2.047 1.967 NW-50-CR-AB Buna 2.047 1.967


AB

.310

.210

.154

AB

.310

.210

.154

AB

.310

.210

.154

Nor-Cal offers aluminum and stainless steel centering rings for NW and ISO flanges.Buna, silicone and Viton® O-rings are available for NW, while Buna and Viton® are stockedfor ISO centering rings. Aluminum ISO centering rings are provided with an aluminumspacer ring. Stainless steel ISO centering rings are also provided with aluminum spacerrings as an option.




NW Stainless Steel Overpressure RingsModel MaximumNumber A B C PSIG Price

NW-10-PR 1.25 1.186 .346 100 NW-16-PR 1.25 1.186 .346 100 NW-25-PR 1.66 1.583 .346 100 NW-40-PR 2.25 2.169 .346 75 NW-50-PR 2.75 2.620 .145 50


B

A

C

NW Reducer Stainless Steel Centering Rings with O-ringModel O-ringNumber Material A B Price

NW-10/16-CR Viton® .48 .67 NW-20/25-CR Viton® .87 1.02 NW-32/40-CR Viton® 1.34 1.61

See below for replacement O-rings. Dimensions in inches

A

B

.154

.210

.310

NW Screened Stainless Steel Centering Rings with O-ringModel O-ringNumber Material A B Mesh Price

NW-25-CR-SV-74 Viton® 1.024 .984 74 NW-40-CR-SV-74 Viton® 1.614 1.570 74 NW-50-CR-SV-74 Viton® 2.047 1.967 74


AB

.310

.210

.154

Silicone Replacement O-RingsModel FlangeNumber Type Price

NW-10-OR-S NW-10 NW-16-OR-S NW-16 NW-25-OR-S NW-25 NW-40-OR-S NW-40 NW-50-OR-S NW-50

Viton®Replacement O-RingsModel FlangeNumber Type Price

NW-10-OR-V NW-10 NW-16-OR-V NW-16 NW-25-OR-V NW-25 NW-40-OR-V NW-40 NW-50-OR-V NW-50

Buna Replacement O-RingsModel FlangeNumber Type Price

NW-10-OR-B NW-10 NW-16-OR-B NW-16 NW-25-OR-B NW-25 NW-40-OR-B NW-40 NW-50-OR-B NW-50

NW Stainless Steel CenteringRings with Viton® O-ring and Over Pressure Ring

ModelNumber Description Price

NW-10-CR-SV-PR Contains Part Numbers NW-10-PR and NW-10-CR-SV NW-16-CR-SV-PR Contains Part Numbers NW-16-PR and NW-16-CR-SV NW-25-CR-SV-PR Contains Part Numbers NW-25-PR and NW-25-CR-SV NW-40-CR-SV-PR Contains Part Numbers NW-40-PR and NW-40-CR-SV NW-50-CR-SV-PR Contains Part Numbers NW-50-PR and NW-50-CR-SV

Buna and Silicone O-rings available. Call for pricing. Dimensions in inches

For dimensions refer toCentering Ring/ O-ring assembly drawingon previous page and Overpressure Ring

Diagram this page.



Nor-Cal manufactures a completeline of NW vacuum fittings. The tubeportions are fabricated from 304 stainlesssteel. 316L stainless steel can be suppliedon request. Nor-Cal makes its own elbows,and all tees and crosses are made withthe pulled-port technique. This allowssmooth, crevice-free butt welds to providethe maximum in cleanliness for UHVapplications. Bakeout range is up to200˚C. Nor-Cal fittings are also availablewith CF, ISO and ASA flanges.

Standard finish is bead blasted.As an option, a tumbled finish can beprovided at no extra charge. Indicatethis by adding “-T” to the part number.Electropolished finish can also beprovided as an option. Call for pricing.

NW FITTINGS

NW Flex CouplingsModel Bellows Free CompressedNumber ID Length Length Price

2FC-NW-10-1 .38 3.20 2.95 2FC-NW-10-2 .38 4.20 3.70 2FC-NW-10-3 .38 5.20 4.45 2FC-NW-16-1 .50 3.20 2.95 2FC-NW-16-2 .50 4.20 3.70 2FC-NW-16-3 .50 5.20 4.45 2FC-NW-25-1 .75 3.20 2.95 2FC-NW-25-2 .75 4.20 3.70 2FC-NW-25-3 .75 5.20 4.45 2FC-NW-40-1 1.50 3.20 2.95 2FC-NW-40-2 1.50 4.20 3.70 2FC-NW-40-3 1.50 5.20 4.45 2FC-NW-40-6 1.50 8.20 6.70 2FC-NW-50-1 1.75 3.20 2.95 2FC-NW-50-2 1.75 4.20 3.70 2FC-NW-50-3 1.75 5.20 4.45


Free Length

321 Stainless Steel Flex Coupling



NW Conical Reducer NipplesModel Flange FlangeNumber 1 2 A B Price

2NRC-NW-25-16 NW-25 NW-16 .620 1.57 2NRC-NW-40-16 NW-40 NW-16 .620 1.57 2NRC-NW-50-16 NW-50 NW-16 .620 1.57 2NRC-NW-40-25 NW-40 NW-25 .870 1.57 2NRC-NW-50-25 NW-50 NW-25 .870 1.57 2NRC-NW-50-40 NW-50 NW-40 1.380 1.57


NW Reducer NipplesModel Flange Flange TubeNumber 1 2 OD B Price

2NR-NW-16-10 NW-16 NW-10 .50 1.40 2NR-NW-25-10 NW-25 NW-10 .50 1.40 2NR-NW-25-16 NW-25 NW-16 .75 1.30 2NR-NW-40-10 NW-40 NW-10 .50 1.40 2NR-NW-40-16 NW-40 NW-16 .75 1.30 2NR-NW-40-25 NW-40 NW-25 1.00 2.18 2NR-NW-50-10 NW-50 NW-10 .50 1.40 2NR-NW-50-16 NW-50 NW-16 .75 1.30 2NR-NW-50-25 NW-50 NW-25 1.00 2.18 2NR-NW-50-40 NW-50 NW-40 1.50 2.55


NW FITTINGS

1 2

B

B

A

1

2

NW Full NipplesModel TubeNumber OD B Price

2N-NW-l0 .50 2.50 2N-NW-16B .75 2.30 2N-NW-25B 1.00 4.06 2N-NW-40B 1.50 4.80 2N-NW-50B 2.00 6.30


NW Half NipplesModel TubeNumber OD B Price

1N-NW-10 .50 1.25 1N-NW-16B .75 1.15 1N-NW-25B 1.00 2.03 1N-NW-40B 1.50 2.40 1N-NW-50B 2.00 3.15


B

B

NW 316L Conical Reducer NipplesModel Flange FlangeNumber 1 2 A B Price

2NRC-NW-40-25-316L NW-40 NW-25 .870 1.57 2NRC-NW-50-40-316L NW-50 NW-40 1.380 1.57




NW TeesModel TubeNumber OD B Price

3T-NW-10 .50 1.25 3T-NW-16B .75 1.15 3T-NW-25B 1.00 2.03 3T-NW-40B 1.50 2.40 3T-NW-40H 1.50 2.56 3T-NW-50B 2.00 3.15 3T-NW-50H 2.00 2.76


NW 90˚ Radius ElbowsModel TubeNumber OD B R Price

2E-NW-10 .50 1.25 .75 2E-NW-16B .75 1.15 1.00 2E-NW-25B 1.00 1.65 1.50 2E-NW-40B 1.50 2.40 2.25 2E-NW-40H 1.50 2.56 2.25 2E-NW-40HL 1.50 5.12 2.25 2E-NW-50B 2.00 3.15 3.00 2E-NW-50HL 2.00 5.51 3.00


NW 90˚ Mitered ElbowsModel TubeNumber OD B Price

2E-NW-16MB .75 1.15 2E-NW-25MB 1.00 2.03 2E-NW-40MB 1.50 2.40 2E-NW-40MH 1.50 2.56 2E-NW-50MB 2.00 3.15 2E-NW-50MH 2.00 2.76


NW FITTINGS

NW 45˚ Radius ElbowsModel TubeNumber OD B Price

2K-NW-25 1.00 .77 2K-NW-40 1.50 1.08 2K-NW-50 2.00 1.39


NW 45˚ Radius Elbows with TangentsModel TubeNumber OD B Price

2KL-NW-16 .75 .91 2KL-NW-25 1.00 1.12 2KL-NW-40 1.50 1.68 2KL-NW-50 2.00 1.99


B

B

RB

B

B

B Typ

B

B Typ



NW 6-Way CrossesModel TubeNumber OD B Price

6C-NW-16 .75 1.50 6C-NW-25B 1.00 2.03 6C-NW-40B 1.50 2.40 6C-NW-50B 2.00 3.15



5C-NW-16 .75 1.50 5C-NW-25B 1.00 2.03 5C-NW-40B 1.50 2.40 5C-NW-50B 2.00 3.15


NW Reducer CrossesModel Tube 1 & 2 Tube 3 & 4Number OD OD B K Price

4CR-NW-25-16B 1.00 .75 2.03 1.27 4CR-NW-40-16B 1.50 .75 2.40 1.53 4CR-NW-40-25B 1.50 1.00 2.40 2.28 4CR-NW-50-16B 2.00 .75 3.15 1.78 4CR-NW-50-40B 2.00 1.50 3.15 2.65


NW FITTINGS


4C-NW-10 .50 1.25 4C-NW-16B .75 1.15 4C-NW-25B 1.00 2.03 4C-NW-40B 1.50 2.40 4C-NW-40H 1.50 2.56 4C-NW-50B 2.00 3.15 4C-NW-50H 2.00 2.76


NW Reducer TeesModel Tube 1 & 2 Tube 3Number Arm OD Leg OD B K Price

3TR-NW-25-16B 1.00 .75 2.03 1.27 3TR-NW-40-16B 1.50 .75 2.40 1.53 3TR-NW-40-25B 1.50 1.00 2.40 2.28 3TR-NW-50-16B 2.00 .75 3.15 1.78 3TR-NW-50-40B 2.00 1.50 3.15 2.65


1 2

K

B Typ3

BTyp

B Typ

5th Leg Opposite

BTyp

B Typ

1 2

K Typ

B Typ

3

4

6th Leg Opposite

BTyp

B Typ



NW FITTINGS

NW Viewports - 7056 GlassModel Flange View DiameterNumber Type B V Price

VP-NW-16 NW-16 .385 .62 VP-NW-25 NW-25 .385 .62 VP-NW-40 NW-40 .554 1.51 VP-NW-50 NW-50 .554 1.51


NW Zero Length Viewports - Fused QuartzModel Flange ViewNumber Type Diameter Price

ZV-NW-40A NW-40 1.26 ZV-NW-50A NW-50 1.63 ZV-NW-40 NW-40 1.26 ZV-NW-50 NW-50 1.63


NW-50 and 40-VP NW-25 and 16 VP

Nor-Cal’s zero length view ports havean innovative design which places theviewing glass inside the centering ring.The clear, polished quartz can be removedfor cleaning or replacement. Zero lengthviewports are available for NW-40, NW-50or other ISO-KF compatible flanges of thesame size. Also available are 7056 glassviewports in a one-piece assembly.This viewport replaces a blank off capand uses a standard NW centering ringassembly and clamp for sealing.

B

V V

B

Nor-Cal Products offers a completeline of NW flanged viewports. Specialmaterials and coatings, such as sapphireand anti-reflective (AR) coating, are avail-able on request. Glass provides a largedistortion free viewing area at low cost.Quartz provides superior ultravioletradiation transmission and resistanceto thermal shock. NW and ISO flangedviewports withstand 2000C bakeoutsand pressures to 10-9 Torr.

ZV-NW-40 and ZV-NW-50

Inner O-ring

Outer Flange

Bearing Washer

Quartz Glass

Outer O-ring

Retainer Ring

ZV-NW-40A and ZV-NW-50A

NW Clamp

NW Butt Weld Flange

NW Viewport

NW ZERO LENGTH VIEWPORT ASSEMBLY


% T

rans

mis

sion

100

0

90

80

70

60

50

40

30

20

10

.10 .20 .30 .40 .50 .60 .80 1.0 2.0 3.0 4.0 5.0 6.0 10.08.0

Viewport Optical

Transmission Curves

7056 Glass

Fused Quartz



NW Male Pipe AdaptersModelNumber NPT A Price

NW-10B-1⁄8 MPT 1/8 .89 NW-16B-1⁄8 MPT 1/8 .89 NW-25B-1⁄8 MPT 1/8 .89 NW-40B-1⁄8 MPT 1/8 .89 NW-50B-1⁄8 MPT 1/8 .89 NW-10B-1⁄4 MPT 1/4 1.10 NW-16B-1⁄4 MPT 1/4 1.10 NW-25B-1⁄4 MPT 1/4 1.10 NW-40B-1⁄4 MPT 1/4 1.10 NW-50B-1⁄4 MPT 1/4 1.10 NW-16B-1⁄2 MPT 1/2 1.35 NW-25B-1⁄2 MPT 1/2 1.35 NW-40B-1⁄2 MPT 1/2 1.35 NW-50B-1⁄2 MPT 1/2 1.35 NW-25B-3⁄4 MPT 3/4 1.35 NW-40B-3⁄4 MPT 3/4 1.35 NW-50B-3⁄4 MPT 3/4 1.35 NW-25B-1 MPT 1 1.64 NW-40B-1 MPT 1 1.64 NW-50B-1 MPT 1 1.64


NW Female Pipe AdaptersModelNumber NPT A Price

NW-10B-1⁄8 FPT 1/8 .92 NW-16B-1⁄8 FPT 1/8 .92 NW-25B-1⁄8 FPT 1/8 .92 NW-40B-1⁄8 FPT 1/8 .92 NW-50B-1⁄8 FPT 1/8 .92 NW-10B-1⁄4 FPT 1/4 1.07 NW-16B-1⁄4 FPT 1/4 1.07 NW-25B-1⁄4 FPT 1/4 1.07 NW-40B-1⁄4 FPT 1/4 1.07 NW-50B-1⁄4 FPT 1/4 1.07 NW-25B-1⁄2 FPT 1/2 1.39 NW-40B-1⁄2 FPT 1/2 1.39 NW-50B-1⁄2 FPT 1/2 1.39 NW-25B-3⁄4 FPT 3/4 1.45 NW-40B-3⁄4 FPT 3/4 1.45 NW-50B-3⁄4 FPT 3/4 1.45 NW-25B-1 FPT 1 1.57 NW-40B-1 FPT 1 1.57 NW-50B-1 FPT 1 1.57


Nor-Cal offers a full line of adapter nipples and conical adapter nipples with NW and ISOflanges. Other flange sizes and combinations are available upon request. They are madefrom select grade 304 stainless steel to provide the maximum in cleanliness for UHVapplications. Also see CF/Wire Seal and ASA catalogs for other adapter combinations.

NW ADAPTERS

A

NWFlange

NPT

A

NPT



NW ADAPTERS

NW Swagelok® AdaptersModel Flange TubeNumber Size OD B Price

NW-10-1⁄4 SWAG NW-10 1⁄4 1.47 NW-16-1⁄4 SWAG NW-16 1⁄4 1.47 NW-25-1⁄4 SWAG NW-25 1⁄4 1.47 NW-40-1⁄4 SWAG NW-40 1⁄4 1.47 NW-50-1⁄4 SWAG NW-50 1⁄4 1.47 NW-10-3⁄8 SWAG NW-10 3⁄8 1.63 NW-16-3⁄8 SWAG NW-16 3⁄8 1.63 NW-25-3⁄8 SWAG NW-25 3⁄8 1.63 NW-40-3⁄8 SWAG NW-40 3⁄8 1.63 NW-50-3⁄8 SWAG NW-50 3⁄8 1.63


NW Male VCR ®AdaptersModel Flange TubeNumber Size OD B Price

NW-10-1⁄4 MVCR NW-10 1⁄4 1.46 NW-16-1⁄4 MVCR NW-16 1⁄4 1.46 NW-25-1⁄4 MVCR NW-25 1⁄4 1.46 NW-40-1⁄4 MVCR NW-40 1⁄4 1.46 NW-50-1⁄4 MVCR NW-50 1⁄4 1.46 NW-16-3⁄8 MVCR NW-16 3⁄8 1.65 NW-25-3⁄8 MVCR NW-25 3⁄8 1.65 NW-40-3⁄8 MVCR NW-40 3⁄8 1.65 NW-50-3⁄8 MVCR NW-50 3⁄8 1.65


NW Female VCR ®AdaptersModel Flange TubeNumber Size OD B Price

NW-10-1⁄4 FVCR NW-10 1⁄4 1.96 NW-16-1⁄4 FVCR NW-16 1⁄4 1.96 NW-25-1⁄4 FVCR NW-25 1⁄4 1.96 NW-40-1⁄4 FVCR NW-40 1⁄4 1.96 NW-50-1⁄4 FVCR NW-50 1⁄4 1.96 NW-16-3⁄8 FVCR NW-16 3⁄8 2.77 NW-25-3⁄8 FVCR NW-25 3⁄8 2.77 NW-40-3⁄8 FVCR NW-40 3⁄8 2.77 NW-50-3⁄8 FVCR NW-50 3⁄8 2.77


NWFlange

B

Swagelok®

B

NWFlangeMale

VCR

B

NWFlangeFemale

VCR



NW Quick DisconnectsModel Flange Tube OD MinimumNumber Size A ID B Price

NW-10-1⁄4 QD NW-10 1/4 .187 1.48 NW-16-1⁄4 QD NW-16 1/4 .187 1.48 NW-25-1⁄4 QD NW-25 1/4 .187 1.48 NW-40-1⁄4 QD NW-40 1/4 .187 1.48 NW-10-3⁄8 QD NW-10 3⁄8 .281 1.62 NW-16-3⁄8 QD NW-16 3⁄8 .281 1.62 NW-25-3⁄8 QD NW-25 3⁄8 .281 1.62 NW-40-3⁄8 QD NW-40 3⁄8 .281 1.62 NW-16-1⁄2 QD NW-16 1⁄2 .406 1.79 NW-25-1⁄2 QD NW-25 1⁄2 .406 1.79 NW-40-1⁄2 QD NW-40 1⁄2 .406 1.79 NW-50-1⁄2 QD NW-50 1⁄2 .406 1.79 NW-25-3⁄4 QD NW-25 3/4 .625 1.93 NW-40-3⁄4 QD NW-40 3/4 .625 1.93 NW-50-3⁄4 QD NW-50 3/4 .625 1.93 NW-40-1 QD NW-40 1 .875 1.95 NW-50-1 QD NW-50 1 .875 1.95

On request, NW Quick Disconnects can be provided Dimensions in inchesbored through for the tube OD. Add “-BT” suffix to the part numberand add $10.00 to the list price. Example NW-10-1/4 QD-BT for $55.00

NW Ball Socket AdaptersModel Ball Flange Tube OD O-RingNumber Socket Size A B Size Price

BS-50/30-NW 50/30 NW-40 1.50 1.90 - BS-50/30G-NW 50/30 NW-40 1.50 1.90 2-224 BS-75/50-NW 75/50 NW-50 2.00 2.65 - BS-75/50G-NW 75/50 NW-50 2.00 2.65 2-232

Note: “G” suffix in model number indicates O-ring and O-ring groove. Dimensions in inches

NW Welch Pump AdaptersModel Use With Welch Pump Tube IDNumber Model Number Thread B Price

AN-NW-16-1400 1399, 1400, 1410 3/8-18 NPSM x 1.00 .450 AN-NW-16-1405 1405 3/4-20 NPSM x 1.00 .562 AN-NW-25-1405 1405 3/4-20 NPSM x 1.00 .562 AN-NW-25-1402 1380, 1402, 1403, 1-20 NPSM x 1.00 .750

8806, 8811, 8816, 8821AN-NW-40-1402 1380, 1402, 1403, 8806, 1-20 NPSM x 1.00 .750

8811, 8816, 8821AN-NW-40-1376 1373, 1376, 8831 11/2-12 NPSM x 1.00 1.125 AN-NW-40-1397 1374, 1397 13/4-20 NPSM x 1.00 1.375 AN-NW-50-1397 1374, 1397 13/4-20 NPSM x 1.00 1.375

Note: Includes aluminum gasket Dimensions in inches

NW ADAPTERS

BallSocket NW

Flange

B

A

2.90

B

B

A



NW ADAPTERS

This fitting provides a compact means of adapting from an ISO flange to a smallerNW with minimal loss in conductance. They are also available with other flangecombinations and are listed in the appropriate catalogs. The same fitting is used toreduce a larger ISO flange to a smaller size with the same benefit in conductance.(See ISO Conical Reducer Nipples.)

NW to CF Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-NW-16-212 NW-16 .75 2.12 CF 1.00 1.69 ANC-NW-16-275 NW-16 .75 2.75 CF 1.50 2.73 ANC-NW-25-133 NW-25 1.00 1.33 CF .75 2.03 ANC-NW-25-275 NW-25 1.00 2.75 CF 1.50 2.73 ANC-NW-25-338 NW-25 1.00 3.38 CF 2.00 2.75 ANC-NW-40-133 NW-40 1.50 1.33 CF .75 3.03 ANC-NW-40-212 NW-40 1.50 2.12 CF 1.00 2.69 ANC-NW-40-338 NW-40 1.50 3.38 CF 2.00 2.75 ANC-NW-40-450 NW-40 1.50 4.50 CF 2.50 2.90 ANC-NW-40-462 NW-40 1.50 4.62 CF 3.00 4.06 ANC-NW-50-212 NW-50 2.00 2.12 CF 1.00 2.69 ANC-NW-50-275 NW-50 2.00 2.75 CF 1.50 2.73 ANC-NW-50-450 NW-50 2.00 4.50 CF 2.50 2.90 ANC-NW-50-462 NW-50 2.00 4.62 CF 3.00 4.06 ANC-NW-50-600 NW-50 2.00 6.00 CF 4.00 4.21


NW to ASA Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-NW-25-ASA-5 NW-25 1.00 ASA-5 2.00 2.78 ANC-NW-40-ASA-5 NW-40 1.50 ASA-5 2.50 2.78 ANC-NW-40-ASA-6 NW-40 1.50 ASA-6 3.00 4.03 ANC-NW-50-ASA-5 NW-50 2.00 ASA-5 2.50 2.78 ANC-NW-50-ASA-6 NW-50 2.00 ASA-6 3.00 4.03 ANC-NW-50-ASA-7.5 NW-50 2.00 ASA-7.5 4.00 4.03

Note: Add suffix “-G” to model number Dimensions in inchesif O-ring groove is required on ASA flange.See ASA flange catalog for groove prices.

NW to ISO Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-NW-40-ISO-63 NW-40 1.50 ISO-63 2.50 2.78 ANC-NW-40-ISO-80 NW-40 1.50 ISO-80 3.00 4.03 ANC-NW-50-ISO-63 NW-50 2.00 ISO-63 2.50 2.78 ANC-NW-50-ISO-80 NW-50 2.00 ISO-80 3.00 4.03 ANC-NW-50-ISO-100 NW-50 2.00 ISO-100 4.00 4.03


B

12

B

12

2

1

B



NW ADAPTERS

NW to ASA Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-NW-16-ASA-5 NW-16 ASA-5 .75 AN-NW-16-ASA-6 NW-16 ASA-6 .75 AN-NW-16-ASA-7.5 NW-16 ASA-7.5 .75 AN-NW-16-ASA-9 NW-16 ASA-9 .75 AN-NW-16-ASA-11 NW-16 ASA-11 .75 AN-NW-25-ASA-6 NW-25 ASA-6 1.00 AN-NW-25-ASA-7.5 NW-25 ASA-7.5 1.00 AN-NW-25-ASA-9 NW-25 ASA-9 1.00 AN-NW-25-ASA-11 NW-25 ASA-11 1.00 AN-NW-40-ASA-7.5 NW-40 ASA-7.5 1.50 AN-NW-40-ASA-9 NW-40 ASA-9 1.50 AN-NW-40-ASA-11 NW-40 ASA-11 1.50 AN-NW-50-ASA-9 NW-50 ASA-9 2.00 AN-NW-50-ASA-11 NW-50 ASA-11 2.00

Note: Add suffix “-G” to model number if Dimensions in inchesO-Ring Groove is required on ASA Flange.See ASA flange catalog for groove prices.

NW to CF Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-NW-10-133 NW-10 1.33 CF .50 AN-NW-16-133 NW-16 1.33 CF .75 AN-NW-25-212 NW-25 2.12 CF 1.00 AN-NW-40-275 NW-40 2.75 CF 1.50 AN-NW-50-133 NW-50 1.33 CF .75 AN-NW-50-338 NW-50 3.38 CF 2.00

Note: Other sizes available on request. Dimensions in inches

NW to ISO Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-NW-16-ISO-63-OF NW-16 ISO-63 .75 AN-NW-25-ISO-63-OF NW-25 ISO-63 1.00 AN-NW-25-ISO-80-OF NW-25 ISO-80 1.00 AN-NW-25-ISO-100-OF NW-25 ISO-100 1.00 AN-NW-40-ISO-100-OF NW-40 ISO-100 1.50 AN-NW-50-ISO-160-OF NW-50 ISO-160 2.00


NW Glass Adapters-7740 Pyrex ®

Model FlangeNumber Type B C Price

1GA-NW-038P NW-10 4.90 .38 1GA-NW-075P NW-16 4.90 .75 1GA-NW-100P NW-25 4.90 1.00 1GA-NW-150P NW-40 4.90 1.50 1GA-NW-200P NW-50 5.40 2.00


1.75

1

2

2.00

1

2

2.00

1

2

C

B



NW ADAPTERS

NW to ISO tee and cross adapters are commonly ordered as aspecial roughing line component. These fittings are offered byNor-Cal as standard items. They are available from stock withseveral NW to ISO flange combinations.

NW to ISO Adapter CrossesModel Flange 1 & 2 Flange 3 & 4Number Type Arm OD Type Leg OD B K Price

4CA-NW-40-ISO-63-OF ISO-63 2.50 NW-40 1.50 3.25 2.90 4CA-NW-40-ISO-80-OF ISO-80 3.00 NW-40 1.50 3.50 3.15 4CA-NW-40-ISO-100-OF ISO-100 4.00 NW-40 1.50 4.13 3.65 4CA-NW-40-ISO-160-OF ISO-160 6.00 NW-40 1.50 5.38 4.65 4CA-NW-50-ISO-63-OF ISO-63 2.50 NW-50 2.00 3.25 3.40 4CA-NW-50-ISO-80-OF ISO-80 3.00 NW-50 2.00 3.50 3.65 4CA-NW-50-ISO-100-OF ISO-100 4.00 NW-50 2.00 4.13 4.15 4CA-NW-50-ISO-160-OF ISO-160 6.00 NW-50 2.00 5.38 5.15

Other adapter combinations can be supplied upon request. Dimensions in inches

NW to ISO Adapter TeesModel Flange 1 & 2 Flange 3Number Type Arm OD Type Leg OD B K Price

3TA-NW-40-ISO-63-OF ISO-63 2.50 NW-40 1.50 3.25 2.90 3TA-NW-40-ISO-80-OF ISO-80 3.00 NW-40 1.50 3.50 3.15 3TA-NW-40-ISO-100-OF ISO-100 4.00 NW-40 1.50 4.13 3.65 3TA-NW-40-ISO-160-OF ISO-160 6.00 NW-40 1.50 5.38 4.653TA-NW-50-ISO-63-OF ISO-63 2.50 NW-50 2.00 3.25 3.40 3TA-NW-50-ISO-80-OF ISO-80 3.00 NW-50 2.00 3.50 3.65 3TA-NW-50-ISO-100-OF ISO-100 4.00 NW-50 2.00 4.13 4.15 3TA-NW-50-ISO-160-OF ISO-160 6.00 NW-50 2.00 5.38 5.15

Other adapter combinations can be supplied upon request. Dimensions in inches

1 2

K

B Typ3

1 2

KTyp

B Typ

3

4



We now offer PVC hoses with and without NW flanges. This inexpensive alternativeto stainless steel flex hose is made of non-toxic PVC reinforced with a spring wire.It is excellent for exhaust lines and may be ordered by the foot. Each length includestwo hose clamps for installation.

NW HOSE

PVC Hose with NW FlangesModel Minimum Bend

ID Number Length NW Flange Radius at 20˚C Price

.50 PVC-050-12-2NW 12.00 NW-10 2.00 PVC-050-24-2NW 24.00 NW-10 2.00 PVC-050-36-2NW 36.00 NW-10 2.00 PVC-050-72-2NW 72.00 NW-10 2.00

.75 PVC-075-12-2NW 12.00 NW-16 3.00 PVC-075-24-2NW 24.00 NW-16 3.00 PVC-075-36-2NW 36.00 NW-16 3.00 PVC-075-72-2NW 72.00 NW-16 3.00

1.00 PVC-100-12-2NW 12.00 NW-25 4.00 PVC-100-24-2NW 24.00 NW-25 4.00 PVC-100-36-2NW 36.00 NW-25 4.00 PVC-100-72-2NW 72.00 NW-25 4.00




Length

Length

ID OD

B

.500NWFlange

A

PVC HoseModel Minimum BendNumber ID OD Radius at 20˚C Price/ft

PVC-050 .50 .813 2.00 PVC-075 .75 1.125 3.00 PVC-100 1.00 1.375 4.00 PVC-150 1.50 2.000 6.00 PVC-200 2.00 2.500 8.00

To order specify length required in Dimensions in inchesfeet as follows: PVC-100-5.0 and PVC-200-10.0

PVC Hose NipplesModel Flange Hose IDNumber Type A B Price

1HN-NW-10-050 NW-10 .50 1.26 1HN-NW-16-075 NW-16 .75 1.26 1HN-NW-25-100 NW-25 1.00 1.50 1HN-NW-40-150 NW-40 1.50 1.97 1HN-NW-50-200 NW-50 2.00 2.17




The flexibility and reliability of stainlesssteel vacuum hoses make them ideallysuited for use in vibration isolation androughing and alignment manifolds.These 321 stainless steel hoses areavailable in .75 to 2 inch diameters withNW and NW to CF flange configurations.For applications requiring increased flex-ibility, Nor-Cal now offers the same highquality stainless steel NW flex hoses in a.006 inch wall thickness. You can nowchoose between our standard wall “ FH-”hose, the heavy wall “TH-” hose, andlightweight, thin wall “LH-” hose. Thinwall hose is offered in standard lengthsfrom 10 to 40 inches in .75 to 2 inchdiameters. Flex hoses can be found withother flange types or with butt weld fittingsin their appropriate catalog. Customlengths can be supplied on request.

NW HOSE

Length

NW Flexible Stainless Steel Hose - Thin WallNom Model Wall Static BendiD Number Length Flanges Thickness Radius Price

.75 LH-075-10-2NW 10.00 NW-16 .006 1.00 LH-075-12-2NW 12.00 NW-16 .006 1.00 LH-075-18-2NW 18.00 NW-16 .006 1.00 LH-075-24-2NW 24.00 NW-16 .006 1.00 LH-075-36-2NW 36.00 NW-16 .006 1.00

1.00 LH-100-10-2NW 10.00 NW-25 .006 1.40 LH-100-12-2NW 12.00 NW-25 .006 1.40 LH-100-18-2NW 18.00 NW-25 .006 1.40 LH-100-24-2NW 24.00 NW-25 .006 1.40 LH-100-36-2NW 36.00 NW-25 .006 1.40




NW Flexible Stainless Steel Hose - Medium WallNom Model Wall Static BendiD Number Length Flanges Thickness Radius Price

.75 FH-075-10-2NW 10.00 NW-16 .008 1.26 FH-075-12-2NW 12.00 NW-16 .008 1.26 FH-075-18-2NW 18.00 NW-16 .008 1.26 FH-075-20-2NW 20.00 NW-16 .008 1.26 FH-075-24-2NW 24.00 NW-16 .008 1.26 FH-075-36-2NW 36.00 NW-16 .008 1.26 FH-075-40-2NW 40.00 NW-16 .008 1.26

1.00 FH-100-10-2NW 10.00 NW-25 .008 1.46 FH-100-12-2NW 12.00 NW-25 .008 1.46 FH-100-18-2NW 18.00 NW-25 .008 1.46 FH-100-20-2NW 20.00 NW-25 .008 1.46 FH-100-24-2NW 24.00 NW-25 .008 1.46 FH-100-36-2NW 36.00 NW-25 .008 1.46 FH-100-40-2NW 40.00 NW-25 .008 1.46






NW Flexible Stainless Steel Hose - Medium Wall with BraidNom Model Wall Static BendID Number Length Flanges Thickness Radius Price

.75 FHB-075-12-2NW 12.00 NW-16 .008 2.09 FHB-075-18-2NW 18.00 NW-16 .008 2.09 FHB-075-20-2NW 20.00 NW-16 .008 2.09 FHB-075-24-2NW 24.00 NW-16 .008 2.09 FHB-075-36-2NW 36.00 NW-16 .008 2.09 FHB-075-40-2NW 40.00 NW-16 .008 2.09

1.00 FHB-100-12-2NW 12.00 NW-25 .008 2.52 FHB-100-18-2NW 18.00 NW-25 .008 2.52 FHB-100-20-2NW 20.00 NW-25 .008 2.52 FHB-100-24-2NW 24.00 NW-25 .008 2.52 FHB-100-36-2NW 36.00 NW-25 .008 2.52 FHB-100-40-2NW 40.00 NW-25 .008 2.52




NW HOSE

Stainless steel vacuum hose withprotective stainless steel braid is availablefor .75 to 2 inch OD hose in 12, 18, 20, 24,36 and 40 inch lengths. Larger sizes andcustom lengths are available on request.

Length

NW Flexible Stainless Steel Hose - Thick WallNom Model Wall Static BendID Number Length Flanges Thickness Radius Price

.75 TH-075-10-2NW 10.00 NW-16 .017 2.13 TH-075-20-2NW 20.00 NW-16 .017 2.13 TH-075-40-2NW 40.00 NW-16 .017 2.13

1.00 TH-100-10-2NW 10.00 NW-25 .017 2.88 TH-100-20-2NW 20.00 NW-25 .017 2.88 TH-100-40-2NW 40.00 NW-25 .017 2.88




Thick wall stainless steel vacuum hoseis available for .75 to 2 inch OD hose in 10,20 and 40 inch lengths. Larger sizes andcustom lengths are available on request.

Length

NW/CF Flexible Stainless Steel Adapter Hose - Medium WallNom Model Wall Static BendID Number Length Flanges Thickness Radius Price

.75 FH-075-12-NW-CF 12.00 NW-16/CF-1.33 .008 1.26 FH-075-18-NW-CF 18.00 NW-16/CF-1.33 .008 1.26 FH-075-24-NW-CF 24.00 NW-16/CF-1.33 .008 1.26 FH-075-36-NW-CF 36.00 NW-16/CF-1.33 .008 1.26

1.50 FH-150-12-NW-CF 12.00 NW-40/CF-2.75 .010 2.16 FH-150-18-NW-CF 18.00 NW-40/CF-2.75 .010 2.16 FH-150-24-NW-CF 24.00 NW-40/CF-2.75 .010 2.16 FH-150-36-NW-CF 36.00 NW-40/CF-2.75 .010 2.16


Length

Flexible stainless steel NW/CF adapterhoses connect components with NWflanges to components with CF flanges.They are available in .75 to 1.5 inch ODhose in 12, 18, 24 and 36 inch lengths.Larger sizes, custom lengths and protec-tive stainless steel braid are also available.


Prices subject to change without notice. - International product pricing will vary. ISO-LIT 11/02

NEW PRODUCTS













A. Optional Fastener/Optional Fastenerwith Double Claw Clamp

B. Optional Fastener/TappedNon-Rotatable withSingle Claw Clamp

C. Optional Fastener/Non-Rotatable withRotatable Bolt Ring & Bolts D. Non-Rotatable/

Non-Rotatablewith Bolts

ISO FLANGE SYSTEM

Nor-Cal ISO flanges and hardware aremanufactured to the International Stan-dards Organization specification so theycan be mated to other manufacturers’ ISOflanges. ISO flanges are made from ArgonOxygen Decarburization (AOD) 304 stain-less steel. This material is certified to meetASTM-240 and has less than .01% sulfurin order to prevent sulfur stringers. Grainsize is 3 to 6 per ASTM E-112. Maximuminclusion size is 2.5 per ASTM E-45.Normally our standard material is in thelow carbon range for 304 stainless steel.For increased corrosion resistance, somesizes are available from stock in 316Lstainless steel.

Optional fastener and non-rotatable ISOflanges are available from stock for 2.5 to20 inch tube sizes. Both use a Viton® O-ring,held in place by a centering ring, to effect aseal with a vacuum range of 10-8 Torr.ISO components can be baked to 204˚C.

ISO flanges can also be used with standardclamps and aluminum seals to obtain aUHV seal bakeable to 150˚C. EVAC sealsare described in detail on pages 4 through6 of this catalog.

Optional fastener (OF) flanges are joinedaround the periphery with clamps. Doubleclaw clamps are used when a pair of OFflanges are joined (Illustration A), or singleclaw clamps are used to join an OF flangeto a tapped non-rotatable on a pump orgate valve (B). This fastening methodallows the OF flange to be rotated for easeof component alignment. Additionally, arotatable bolt ring can be used to fasten anOF flange to a non-rotatable flange usingbolts (C). A retainer ring prevents the OFflange from slipping through the bolt ring.

Non-rotatable ISO flanges are assembledwith bolts (D). They do not allow rotationof bolt holes on mating flanges to aligncomponents.



Optional FastenerBlank

Stainless SteelReplacement Retainer Ring

Model Number Price

ISO-63-RR ISO-80-RR ISO-100-RR ISO-160-RR ISO-200-RR ISO-250-RR ISO-320-RR ISO-400-RR ISO-500-RR

ISO Optional Fastener FlangesNom ModelID Number A B C D E Price

2.5 ISO-63-000-OF 3.740 .47 Blank - - ISO-63-250-OF 3.740 .47 2.438 2.510 .250






12.0 ISO-320-000-OF 14.567 .67 Blank - - ISO-320-1200-OF 14.567 .67 11.875 12.020 .375 ISO-320-1275-OF 14.567 .67 12.420 12.770 .375




ISO FLANGES & HARDWARE

B

FA

Aluminum

ISO 316L Optional Fastener FlangesNom ModelID Number A B C D E Price

2.5 ISO-63-250-OF-316L 3.740 .47 2.438 2.510 .250 3.0 ISO-80-300-OF-316L 4.331 .47 2.938 3.010 .250 4.0 ISO-100-400-OF-316L 5.118 .47 3.910 4.010 .250


ISO Rotatable Bolt Ring and Retainer RingModel Number Flange Size A B F Price

ISO-63-BR ISO-63 5.118 .472 4.331 ISO-80-BR IS0-80 5.709 .472 4.921 ISO-100-BR ISO-100 6.496 .472 5.709 ISO-160-BR ISO-160 8.858 .630 7.874 ISO-200-BR ISO-200 11.220 .630 10.236 ISO-250-BR ISO-250 13.189 .630 12.205 ISO-320-BR ISO-320 16.732 .787 15.551 ISO-400-BR ISO-400 20.079 .787 18.898 ISO-500-BR ISO-500 24.016 .787 22.835


Seal Side

A

B

A

Seal Side

D

C

BE

Optional FastenerBored



Non-Rotatable

Seal SideF

A

B

AD

CF

BE

ISO Non-Rotatable FlangesNom Model Bolt HolesID Number A B C D E F Number Diameter Price

2.5 ISO-63-000N 5.118 .472 Blank - - 4.331 4 .359 ISO-63-250N 5.118 .472 2.438 2.510 .250 4.331 4 .359

3.0 ISO-80-000N 5.709 .472 Blank - - 4.921 8 .359 ISO-80-300N 5.709 .472 2.938 3.010 .250 4.921 8 .359

4.0 ISO-100-000N 6.496 .472 Blank - - 5.709 8 .359 ISO-100-400N 6.496 .472 3.910 4.010 .250 5.709 8 .359

6.0 ISO-160-000N 8.858 .630 Blank - - 7.874 8 .438 ISO-160-600N 8.858 .630 5.875 6.020 .375 7.874 8 .438

8.0 ISO-200-000N 11.220 .630 Blank - - 10.236 12 .438 ISO-200-800N 11.220 .630 7.875 8.020 .375 10.236 12 .438

10.0 ISO-250-000N 13.189 .630 Blank - - 12.205 12 .438 ISO-250-1000N 13.189 .630 9.875 10.020 .375 12.205 12 .438

12.0 ISO-320-000N 16.732 .787 Blank - - 15.551 12 .551 ISO-320-1200N 16.732 .787 11.760 12.020 .375 15.551 12 .551 ISO-320-1275N 16.732 .787 12.420 12.770 .375 15.551 12 .551

16.0 ISO-400-000N 20.079 .787 Blank - - 18.898 16 .551 ISO-400-1600N 20.079 .787 15.642 16.020 .375 18.898 16 .551

20.0 ISO-500-000N 24.016 .787 Blank - - 22.835 16 .551 ISO-500-2000N 24.016 .787 19.642 20.020 .375 22.835 16 .551


ISO Bolt KitsModelNumber Description Price

B-ISO-63 (4) S.S. Bolts, Nuts & Washers, M8 x 40 B-ISO-80 (8) S.S. Bolts, Nuts & Washers, M8 x 40 B-ISO-100 (8) S.S. Bolts, Nuts & Washers, M8 x 40 B-ISO-160 (8) S.S. Bolts, Nuts & Washers, M10 x 50 B-ISO-200 (12) S.S. Bolts, Nuts & Washers, M10 x 50 B-ISO-250 (12) S.S. Bolts, Nuts & Washers, M10 x 50 B-ISO-320 (12) S.S. Bolts, Nuts & Washers, M12 x 60 B-ISO-400 (16) S.S. Bolts, Nuts & Washers, M12 x 60 B-ISO-500 (16) S.S. Bolts, Nuts & Washers, M12 x 60





ISO Single Claw Aluminum Clamps - MetricModel Flange Metric ClampsNumber Size A B C Thread Size Required Price

ISO-63-SCP-M ISO-63 .94 1.20 .40 M8 4 ISO-80-SCP-M ISO-80 .94 1.20 .40 M8 8 ISO-100-SCP-M ISO-100 .94 1.20 .40 M8 8 ISO-160-SCP-M ISO-160 1.10 1.20 .40 M10 8 ISO-200-SCP-M ISO-200 1.10 1.20 .40 M10 12 ISO-250-SCP-M ISO-250 1.10 1.20 .40 M10 12 ISO-320-SCP-M ISO-320 1.34 1.48 .79 M12 12 ISO-400-SCP-M ISO-400 1.34 1.48 .79 M12 16 ISO-500-SCP-M ISO-500 1.34 1.48 .79 M12 16


ISO Single Claw Aluminum ClampsModel Flange Thread ClampsNumber Size A B C Size Required Price

ISO-63-SCP ISO-63 .94 1.18 .52 5⁄16-18 4 ISO-80-SCP ISO-80 .94 1.18 .52 5⁄16-18 8 ISO-100-SCP ISO-100 .94 1.18 .52 5⁄16-18 8 ISO-160-SCP ISO-160 1.10 1.18 .52 5⁄16-18 8 ISO-200-SCP ISO-200 1.10 1.18 .52 5⁄16-18 12 ISO-250-SCP ISO-250 1.10 1.18 .52 5⁄16-18 12 ISO-320-SCP ISO-320 1.34 1.46 .88 7⁄16-14 12 ISO-400-SCP ISO-400 1.34 1.46 .88 7⁄16-14 16 ISO-500-SCP ISO-500 1.34 1.46 .88 7⁄16-14 16


ISO Double Claw Aluminum ClampsModel Flange Thread ClampsNumber Size A B Size Required Price

ISO-63-DCP ISO-63 .94 1.96 5⁄16-18 3-4 ISO-80-DCP ISO-80 .94 1.96 5⁄16-18 4-8 ISO-100-DCP ISO-100 .94 1.96 5⁄16-18 4-8 ISO-160-DCP ISO-160 1.10 1.96 5⁄16-18 4-8 ISO-200-DCP ISO-200 1.10 1.96 5⁄16-18 6-12 ISO-250-DCP ISO-250 1.10 1.96 5⁄16-18 6-12 ISO-320-DCP ISO-320 1.34 2.20 7/16-14 8-12 ISO-400-DCP ISO-400 1.34 2.20 7⁄16-14 8-16 ISO-500-DCP ISO-500 1.34 2.20 7⁄16-14 12-16



A

B Thread Size

A

B

C

Thread Size

A

B

C

Thread Size




ISO Aluminum Centering Ringswith O-ring and Aluminum Spacer Ring

Model O-ringNumber Material A B Price

ISO-63-CR-AV Viton 2.63 2.74 ISO-63-CR-AB Buna 2.63 2.74 ISO-80-CR-AV* Viton 3.14 3.25 ISO-80-CR-AB* Buna 3.14 3.25 ISO-100-CR-AV* Viton 3.89 4.00 ISO-100-CR-AB* Buna 3.89 4.00 ISO-160-CR-AV* Viton 5.90 6.01 ISO-160-CR-AB* Buna 5.90 6.01 ISO-200-CR-AV* Viton 8.26 8.37 ISO-200-CR-AB* Buna 8.26 8.37 ISO-250-CR-AV* Viton 10.14 10.25 ISO-250-CR-AB* Buna 10.14 10.25 ISO-320-CR-AV* Viton 12.32 12.51 ISO-320-CR-AB* Buna 12.32 12.51 ISO-400-CR-AV* Viton 15.55 15.75 ISO-400-CR-AB* Buna 15.55 15.75 ISO-500-CR-AV* Viton 19.53 19.72 ISO-500-CR-AB* Buna 19.53 19.72

* Rolled Centering Ring. See page 32 for replacement O-rings. Dimensions in inches

ISO Stainless Steel Centering Ringswith O-Ring and Aluminum Spacer Ring


ISO-63-CR-SV Viton 2.63 2.74 ISO-80-CR-SV Viton 3.14 3.25 ISO-100-CR-SV Viton 3.89 4.00 ISO-160-CR-SV Viton 5.90 6.01 ISO-200-CR-SV Viton 8.26 8.37 ISO-250-CR-SV Viton 10.14 10.25 ISO-320-CR-SV Viton 12.36 12.52 ISO-400-CR-SV Viton 15.55 15.75

See page 32 for replacement O-rings. Dimensions in inches


ISO 316L Stainless Steel Centering Ringswith O-Ring and Aluminum Spacer Ring


ISO-63-CR-SV-316L Viton 2.63 2.74 ISO-80-CR-SV-316L Viton 3.14 3.25 ISO-100-CR-SV-316L Viton 3.89 4.00

See page 32 for replacement O-rings. Dimensions in inches

BA

.312

.210

.154

BA

.312

.210

.154

BA

.550

.275

.220

ISO-63 through ISO-250

ISO-320 and ISO-400

BA

.312

.210

.154

BA

.550

.275

.220





ISO Stainless Steel Centering Rings with O-ringModel O-ringNumber Material A B Price

ISO-63-CR Viton 2.63 2.74 ISO-80-CR Viton 3.14 3.25 ISO-100-CR Viton 3.89 4.00 ISO-160-CR Viton 5.90 6.01 ISO-200-CR Viton 8.26 8.37 ISO-250-CR Viton 10.14 10.25 ISO-320-CR Viton 12.32 12.52 ISO-400-CR Viton 15.55 15.74


ISO Screened Stainless Steel Centering Ringswith O-ring and Aluminum Spacer Ring

Model O-ringNumber Material A B C Mesh Price

ISO-63-CR-SV-16 Viton 2.63 2.74 2.38 16 ISO-80-CR-SV-16 Viton 3.14 3.25 2.87 16 ISO-100-CR-SV-16 Viton 3.89 4.00 3.50 16 ISO-160-CR-SV-16 Viton 5.90 6.01 5.50 16

Includes O-ring. See below for replacement O-rings. Dimensions in inches

BA

C

.312

.210

.154

Viton®Replacement O-RingsModel FlangeNumber Type Price

ISO-63-0R-V ISO-63 $ 8.00ISO-80-OR-V ISO-80 $ 11.00ISO-100-OR-V ISO-100 $ 19.00ISO-160-OR-V ISO-160 $ 24.00ISO-200-OR-V ISO-200 $ 27.00ISO-250-OR-V ISO-250 $ 32.00ISO-320-OR-V ISO-320 $ 40.00ISO-400-OR-V ISO-400 $ 42.00ISO-500-OR-V ISO-500 $ 55.00

Buna Replacement O-RingsModel FlangeNumber Type Price

ISO-63-0R-B ISO-63 ISO-80-OR-B ISO-80 ISO-100-OR-B ISO-100 ISO-160-OR-B ISO-160 ISO-200-OR-B ISO-200 ISO-250-OR-B ISO-250 ISO-320-OR-B ISO-320 ISO-400-OR-B ISO-400 ISO-500-OR-B ISO-500



AB

.154

.210

.312


ISO-320 and ISO-400

A

B.220

.275

.550



Nor-Cal manufactures a complete lineof ISO vacuum fittings. The tube portionsare fabricated from 304 stainless steel.For increased resistance to corrosion indownstream semiconductor processes,Nor-Cal now stocks some ISO flanges andfittings in 316L material. Nor-Cal makesits own elbows, and all tees and crossesare made with the pulled-port technique.This allows smooth, crevice-free buttwelds to provide the maximum in cleanli-ness for UHV applications. Bakeout rangeis up to 204˚C. Nor-Cal fittings are alsoavailable with CF (Conflat style), NW(ISO-KF compatible) and ASA flanges.

ISO flanged fittings are available withoptional fastener (OF) or non-rotatable(N) flanges, although they are shownhere with OF flanges only. To order afitting with non-rotatable flangessubstitute an “N” for “OF” in themodel number.

Standard finish is bead blasted. As anoption, a tumbled finish can be providedat no extra charge. Indicate this by adding“-T” to the part number. Electropolishedfinish can also be provided as an option.Call for pricing.

ISO Half Nipples Model Tube Number OD B Price

1N-ISO-63-OF 2.50 3.25 1N-ISO-63-OF-V 2.50 4.00 1N-ISO-63-OF-H 2.50 3.94 1N-ISO-80-OF 3.00 3.50 1N-ISO-80-OF-H 3.00 3.94 1N-ISO-100-OF 4.00 4.13 1N-ISO-100-OF-V 4.00 5.12 1N-ISO-100-OF-H 4.00 3.94 1N-ISO-160-OF 6.00 5.38 1N-ISO-160-OF-V 6.00 6.44 1N-ISO-160-OF-H 6.00 3.94 1N-ISO-200-OF 8.00 7.38 1N-ISO-250-OF 10.00 9.88 1N-ISO-320-OF 12.00 9.88 1N-ISO-400-OF 16.00 9.88 1N-ISO-500-OF 20.00 9.88


ISO FITTINGS

ISO 316L Half Nipples Model Tube Number OD B Price

1N-ISO-63-OF-316L 2.50 3.25 1N-ISO-80-OF-316L 3.00 3.50 1N-ISO-100-OF-316L 4.00 4.13

Dimensions in inches B

B



ISO Conical Reducer NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

2NRC-ISO-80-63-OF ISO-80 3.00 ISO-63 2.50 4.12 2NRC-ISO-100-63-OF ISO-100 4.00 ISO-63 2.50 4.12 2NRC-ISO-100-80-OF ISO-100 4.00 ISO-80 3.00 4.12


ISO 45˚ Elbows with TangentsModel TubeNumber OD B Price

2KL-ISO-63-OF 2.50 3.25 2KL-ISO-80-OF 3.00 3.93 2KL-ISO-100-OF 4.00 5.03

Dimsensions in inches

ISO Reducer NipplesModel Flange Flange TubeNumber 1 2 OD Price

2NR-ISO-80-63-OF ISO-80 ISO-63 2.50 2NR-ISO-100-63-OF ISO-100 ISO-63 2.50 2NR-ISO-100-80-OF ISO-100 ISO-80 3.00 2NR-ISO-160-63-OF ISO-160 ISO-63 2.50 2NR-ISO-160-80-OF ISO-160 ISO-80 3.00 2NR-ISO-160-100-OF ISO-160 ISO-100 4.00 2NR-ISO-200-63-OF ISO-200 ISO-63 2.50 2NR-ISO-200-80-OF ISO-200 ISO-80 3.00 2NR-ISO-200-100-OF ISO-200 ISO-100 4.00 2NR-ISO-200-160-OF ISO-200 ISO-160 6.00 2NR-ISO-250-63-OF ISO-250 ISO-63 2.50 2NR-ISO-250-80-OF ISO-250 ISO-80 3.00 2NR-ISO-250-100-OF ISO-250 ISO-100 4.00 2NR-ISO-250-160-OF ISO-250 ISO-160 6.00 2NR-ISO-250-200-OF ISO-250 ISO-200 8.00


ISO FITTINGS

ISO Full NipplesModel TubeNumber OD B Price

2N-ISO-63-OF 2.50 6.50 2N-ISO-80-OF 3.00 7.00 2N-ISO-100-OF 4.00 8.26 2N-ISO-160-OF 6.00 10.76 2N-ISO-200-OF 8.00 14.76 2N-ISO-250-OF 10.00 19.76 2N-ISO-320-OF 12.00 19.76 2N-ISO-400-OF 16.00 19.76 2N-ISO-500-OF 20.00 19.76


B

3.00

21

B

12

B



ISO 90˚ Mitered ElbowsModel TubeNumber OD B Price

2E-ISO-63-OF-M 2.50 3.25 2E-ISO-80-OF-M 3.00 3.50 2E-ISO-100-OF-M 4.00 4.13 2E-ISO-160-OF-M 6.00 5.38 2E-ISO-200-OF-M 8.00 7.38 2E-ISO-250-OF-M 10.00 9.88


ISO 90˚ Radius ElbowsModel TubeNumber OD B R Price

2E-ISO-63-OF 2.50 4.00 3.75 2E-ISO-80-OF 3.00 4.75 4.50 2E-ISO-100-OF 4.00 6.25 6.00 2E-ISO-160-OF 6.00 9.38 9.00 2E-ISO-200-OF 8.00 12.38 12.00 2E-ISO-250-OF 10.00 15.38 15.00


ISO Reducer TeesModel Flange 1 & 2 Flange 3Number Type Arm OD Type Leg OD B K Price

3TR-ISO-80-63-OF ISO-80 3.00 ISO-63 2.50 3.50 3.50 3TR-ISO-100-63-OF ISO-100 4.00 ISO-63 2.50 4.13 4.00 3TR-ISO-100-80-OF ISO-100 4.00 ISO-80 3.00 4.13 4.00 3TR-ISO-160-63-OF ISO-160 6.00 ISO-63 2.50 5.38 5.00 3TR-ISO-160-80-OF ISO-160 6.00 ISO-80 3.00 5.38 5.00 3TR-ISO-160-100-OF ISO-160 6.00 ISO-100 4.00 5.38 5.13 3TR-ISO-200-63-OF ISO-200 8.00 ISO-63 2.50 7.38 6.00 3TR-ISO-200-80-OF ISO-200 8.00 ISO-80 3.00 7.38 6.00 3TR-ISO-200-100-OF ISO-200 8.00 ISO-100 4.00 7.38 6.13 3TR-ISO-200-160-OF ISO-200 8.00 ISO-160 6.00 7.38 6.38


ISO TeesModel TubeNumber OD B Price

3T-ISO-63-OF 2.50 3.25 3T-ISO-80-OF 3.00 3.50 3T-ISO-100-OF 4.00 4.13 3T-ISO-160-OF 6.00 5.38 3T-ISO-200-OF 8.00 7.38 3T-ISO-250-OF 10.00 9.88


ISO FITTINGS

B

B

RB

B

B

B Typ

1 2

K

3 B Typ



ISO 5-Way CrossesModel TubeNumber OD B Price

5C-ISO-63-OF 2.50 3.25 5C-ISO-80-OF 3.00 3.50 5C-ISO-100-OF 4.00 4.13 5C-ISO-160-OF 6.00 5.38 5C-ISO-200-OF 8.00 7.38 5C-ISO-250-OF 10.00 9.88





ISO Reducer CrossesModel Flanges 1 & 2 Flanges 3 & 4Number Type Arm OD Type Leg OD B K Price

4CR-ISO-80-63-OF ISO-80 3.00 ISO-63 2.50 3.50 3.504CR-IS0-100-63-OF ISO-100 4.00 IS0-63 2.50 4.13 4.00 4CR-ISO-100-80-OF ISO-100 4.00 IS0-80 3.00 4.13 4.00 4CR-ISO-160-63-OF IS0-160 6.00 ISO-63 2.50 5.38 5.00 4CR-ISO-160-80-OF ISO-160 6.00 ISO-80 3.00 5.38 5.00 4CR-ISO-160-100-OF ISO-160 6.00 ISO-100 4.00 5.38 5.13 4CR-ISO-200-160-OF ISO-200 8.00 ISO-160 6.00 7.38 6.38


ISO FITTINGS

BTyp

B Typ

1 2

KTyp

3

4 B Typ

5th Leg Opposite

BTyp

B Typ



ISO Viewports - 7056 GlassModel Flange View DiameterNumber Type V Price

ZV-ISO-63-OF ISO-63 1.49 ZV-ISO-80-OF ISO-80 1.49 ZV-ISO-100-OF ISO-100 2.66 ZV-ISO-160-OF ISO-160 3.97 ZV-ISO-200-OF ISO-200 5.60


V




ISO Flex CouplingsModel Flange Bellows Free CompressedNumber Type ID Length Length Price

2FC-ISO-250-4 ISO-63 2.50 7.00 6.00 2FC-ISO-300-4 ISO-80 3.00 7.00 6.00 2FC-ISO-400-4 ISO-100 4.00 7.00 6.00 2FC-ISO-600-4 ISO-160 6.00 7.00 6.00 2FC-ISO-800-4 ISO-200 8.00 7.00 6.00 2FC-ISO-1000-10 ISO-250 10.00 13.50 10.50


ISO FITTINGS

6th Leg Opposite

BTyp

B Typ

Free Length

321 Stainless Steel Flex Coupling



Nor-Cal offers a full line of adapter nipples and conical adapter nipples with ISO flanges. Other flange sizes and combinations are avail-able upon request. They are made from select grade 304 stainless steel to provide the maximum in cleanliness for UHV applications.Also see CF and Wire Seal and ASA catalogs for other adapter combinations.

ISO ADAPTERS

C

B

B

12

ISO to CF Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-275-ISO-63-OF 2.75 CF 1.50 ISO-63 2.50 2.83 ANC-275-ISO-80-OF 2.75 CF 1.50 ISO-80 3.00 4.08 ANC-338-ISO-63-OF 3.38 CF 2.00 ISO-63 2.50 2.85 ANC-338-ISO-80-OF 3.38 CF 2.00 ISO-80 3.00 4.10 ANC-338-ISO-100-OF 3.38 CF 2.00 ISO-100 4.00 4.10 ANC-450-ISO-80-OF 4.50 CF 2.50 ISO-80 3.00 4.25 ANC-450-ISO-100-OF 4.50 CF 2.50 ISO-100 4.00 4.25 ANC-462-ISO-63-OF 4.62 CF 3.00 ISO-63 2.50 4.16 ANC-462-ISO-100-OF 4.62 CF 3.00 ISO-100 4.00 4.16 ANC-600-ISO-63-OF 6.00 CF 4.00 ISO-63 2.50 4.31 ANC-600-ISO-80-OF 6.00 CF 4.00 ISO-80 3.00 4.31


ISO Glass Adapters - 7740 Pyrex ®/ Stainless SteelModel FlangeNumber Type B C Price

1GA-ISO-63-OF-P ISO-63 5.50 2.50 1GA-ISO-80-OF-P ISO-80 6.50 3.00 1GA-ISO-100-OF-P ISO-100 6.50 4.00 1GA-ISO-160-OF-P ISO-160 8.63 6.00


ISO Glass Adapters - 7052 Glass / Kovar®

Model FlangeNumber Type B C Price

1GA-ISO-63-OF-K ISO-63 7.36 2.50 1GA-ISO-80-OF-K ISO-80 7.36 3.00 1GA-ISO-100-OF-K ISO-100 10.25 4.00 1GA-ISO-160-OF-K ISO-160 10.88 6.00




2 1

B

ISO ADAPTERS

ISO to CF Adapter NipplesModel Flange Flange TubeNumber 1 2 OD Price

AN-450-ISO-63-OF 4.50 CF ISO-63 2.50 AN-462-ISO-80-OF 4.62 CF ISO-80 3.00 AN-600-ISO-100-OF 6.00 CF ISO-100 4.00 AN-800-ISO-160-OF 8.00 CF ISO-160 6.00 AN-1000-ISO-200-OF 10.00 CF ISO-200 8.00


ISO to ASA Adapter NipplesModel Flange Flange TubeNumber 1 2 OD Price

AN-ISO-63-OF-ASA-11 ISO-63 ASA-11 2.50 AN-ISO-80-OF-ASA-6 ISO-80 ASA-6 3.00 AN-ISO-80-OF-ASA-11 ISO-80 ASA-11 3.00 AN-ISO-100-OF-ASA-7.5 ISO-100 ASA-7.5 4.00 AN-ISO-100-OF-ASA-9 ISO-100 ASA-9 4.00 AN-ISO-100-OF-ASA-11 ISO-100 ASA-11 4.00 AN-ISO-160-OF-ASA-9 ISO-160 ASA-9 6.00 AN-ISO-160-OF-ASA-11 ISO-160 ASA-11 6.00 AN-ISO-200-OF-ASA-11 ISO-200 ASA-11 8.00 AN-ISO-200-OF-ASA-13.5 ISO-200 ASA-13.5 8.00

Note: Add suffix “-G” to model number if Dimensions in inchesO-ring groove is required on ASA flange.See ASA flange catalog for groove prices.

ISO to ASA Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-ISO-63-OF-ASA-5 ISO-63 2.50 ASA-5 2.00 2.88 ANC-ISO-63-OF-ASA-6 ISO-63 2.50 ASA-6 3.00 4.13 ANC-ISO-63-OF-ASA-7.5 ISO-63 2.50 ASA-7.5 4.00 4.13 ANC-ISO-80-OF-ASA-5 ISO-80 3.00 ASA-5 2.00 4.13 ANC-ISO-80-OF-ASA-7.5 ISO-80 3.00 ASA-7.5 4.00 4.13 ANC-ISO-100-OF-ASA-5 ISO-100 4.00 ASA-5 2.00 4.13 ANC-ISO-100-OF-ASA-6 ISO-100 4.00 ASA-6 3.00 4.13

Note: Add suffix “-G” to model number if Dimensions in inchesO-ring groove is required on ASA flange.See ASA flange catalog for groove prices.

5.00

1 2

5.00

12



Flexible stainless steel vacuum hose is available in 2.5 to 4 inch diameters with ISO flanges. Medium wall hose is availablein standard lengths of 10, 12, 18, 20, 24, 36 and 40 inches, while thick wall is available in 20 and 40 inch lengths. Non-standardlengths can be supplied upon request. Flex hoses can be found with other flange types or with butt weld fittings in their appropriatecatalog. The flexibility and reliability of these hoses, provided by 321 stainless steel, make them ideally suited for vibration isolationand roughing and alignment manifolds.

ISO HOSE

ISO Flexible Stainless Steel Hose - Medium Wall Nom Model Overall Flange Wall Static Bend

ID Number Length Type Thickness Radius Price

2.5 FH-250-10-2ISO 10 ISO-63 .012 3.15 FH-250-12-2ISO 12 ISO-63 .012 3.15 FH-250-18-2ISO 18 ISO-63 .012 3.15 FH-250-20-2ISO 20 ISO-63 .012 3.15 FH-250-24-2ISO 24 ISO-63 .012 3.15 FH-250-36-2ISO 36 ISO-63 .012 3.15 FH-250-40-2ISO 40 ISO-63 .012 3.15

3.0 FH-300-10-2ISO 10 ISO-80 .016 3.82 FH-300-12-2ISO 12 ISO-80 .016 3.82 FH-300-18-2ISO 18 ISO-80 .016 3.82 FH-300-20-2ISO 20 ISO-80 .016 3.82 FH-300-24-2ISO 24 ISO-80 .016 3.82 FH-300-36-2ISO 36 ISO-80 .016 3.82 FH-300-40-2ISO 40 ISO-80 .016 3.82

4.0 FH-400-10-2lSO 10 ISO-100 .016 4.45 FH-400-12-2lSO 12 ISO-100 .016 4.45 FH-400-18-2ISO 18 ISO-100 .016 4.45 FH-400-20-2ISO 20 ISO-100 .016 4.45 FH-400-24-2ISO 24 ISO-100 .016 4.45 FH-400-36-2ISO 36 ISO-100 .016 4.45 FH-400-40-2ISO 40 ISO-100 .016 4.45


ISO Flexible Stainless Steel Hose - Thick Wall Nom Model Overall Flange Wall Static Bend

ID Number Length Type Thickness Radius Price

2.5 TH-250-20-2ISO 20 ISO-63 .020 8.00 TH-250-40-2ISO 40 ISO-63 .020 8.00




Length

Length



NEW PRODUCTS













EVAC CHAIN CLAMPS, METAL SEALS & FLANGES

Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metalseals for converting elastomer seal NW (KF) and ISO flanges to UHV metal seals. Theyprovide a number of benefits over elastomer seals: reduced outgassing, no permeation,no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used inhigh-energy physics, other UHV applications and, in some circumstances,cryogenic applications. EVAC seals are reliable in high vibration ortemperature cycling environments. EVAC chain clamps andtapered flanges are the standard vacuum flange for manyJapanese semiconductor equipment manufacturers.The advantages over using the standard ISO flange are thetime and space savings during assembly and the flexibilityto form high vacuum or UHV seals.To install a metal seal on an existing KF flange, simply remove the standard clamp, centering ringand O-ring assembly. Replace them with an aluminum knife edge seal and chain clamp. (Seedrawing.) Standard ISO claw clamps can be used with EVAC aluminum seals to convert ISOflanges from high vacuum to UHV. Nor-Cal is the only authorized U.S. manufacturer of EVAC ta-pered flanges. Tapered flanges are similar to NW flanges and are available in 80 and 100mm sizesfrom stock. Chain clamps are used to form either elastomer or metal seals with tapered flanges.

Aluminum Metal SealsStocked EVAC aluminum seals locate on thecentering ring groove (inner centering) oroutside edge of the flange (outer centering)depending on the size. (Inner and outercentering versions are available for all NWflange sizes.) Aluminum knife-edges arecompressed by the sealing surfaces of themating flanges when the chain clamp or ISOclaw clamp is tightened. The resultant sealhas a helium leak rate of less than 1x10-11

standard cc/sec. and can be baked repeatedlyto 1500C. Proper sealing occurs even if theflanges are slightly scratched or misaligned.The aluminum alloy is soft enough to makea good seal with reasonable force but willnot flow at moderate temperatures. EVACseals will even work with aluminum flanges.Normally the seals are for one-time use,however, by sealing the first time with a lowtorque and increasing the torque each timethereafter, they can be reused up to five times.If the seal is going to be baked or subject tovibration or pressure, it should be tightenedto the recommended torque initially.

Chain ClampsNor-Cal Products stocks chain clamps for NW (KF) and EVAC tapered flanges in twostyles: one with Teflon® coated aluminum links and an uncoated version. The less expensiveuncoated version is the preferred choice for sealing standard KF flanges with aluminum metalseals. The uncoated chain clamps can be used with Nor-Cal or other manufacturers’ KFflanges with a radius of approximately .060 inches on the outer edge ofthe non-sealing side. (See drawing.) Most manufacturers’ KF flangeshave this feature. If the flanges to be sealed have a sharp edge, theTeflon coated chain clamps are required to ensure adequate sealingforce for aluminum metal seals. Both versions use a single, hex headnut for closure. Stainless steel chain clamps and low cost compositechain clamps are available for elastomer KF connections.Chain clamps for NW-63 flanges are similar to the NW-16 to 50 sizes. The style to use withNW-63 elastomer seals has a single knob for tightening. The clamp used for sealingaluminum metal seals has a single hex head nut. Both have uncoated aluminum links,although Teflon® coated aluminum versions are available.Chain clamps for 80 to 100mm tapered flanges are stocked in two styles: one with a singleknob for elastomer seals and another with two Allen head bolts for aluminum metal seals.Although chain clamps are bakeable to 1500C, the knobs should not be baked above 600C.Chain clamps for tube sizes up to 28 inches OD can be supplied on request.

Tapered FlangesNor-Cal Products is the only authorizedU.S. manufacturer of EVAC tapered flanges.These flanges are designed specifically foruse with EVAC chain clamps for elastomeror aluminum metal seals. High vacuumseals are formed with a standard ISO center-ing ring/O- ring assembly and an elastomerseal EVAC chain clamp. UHV seals areformed with a metal seal chain clamp andan aluminum seal. Both blank and bored304 stainless steel versions are availablefrom stock in 80 and 100mm sizes for 3 and4 inch OD tube sizes, respectively. Flangesfor tube sizes up to 28 inches OD or metrictube sizes can be supplied upon request.

NW-63 FlangesNor-Cal Products stocks blank and boredNW-63 flanges that are compatible with othermanufacturers’ KF-63 flanges made to theISO 2861 specification. They can be usedwith EVAC chain clamps to form elastomer oraluminum metal seals. Elastomer seals areformed with ISO-63 centering ring/O-ringassemblies and elastomer EVAC chainclamps. Metal seals are formed with EVACaluminum seals and metal seal chain clamps.NW-63 flanges are made from 304 stainlesssteel for 2.5 inch OD tube size.

Radius .060




Aluminum Metal Seals for EVAC Tapered FlangesModelNumber Application A D Price

NW-80-MS-A NW-80 Tapered Flange 4.49 4.25 NW-100-MS-A NW-100 Tapered Flange 5.28 5.04


Aluminum Metal Seals for ISO FlangesModel Torque NumberNumber Application A D (lb. in.) Clamps* Price

ISO-63-MS-A ISO-63 Flange 3.74 3.47 100 4 ISO-80-MS-A ISO-80 Flange 4.33 4.06 100 6 ISO-100-MS-A ISO-100 Flange 5.12 4.84 100 8

* Use with Nor-Cal ISO double or single claw clamps. Dimensions in inches

NW-16, 25, & 40-MS-A

NW-50 & 63-MS-A

.175/.157 .276

D

BA

.173/.157 .276

D

BC

.177/.157

AD

.276

.098/.079AD

.236

EVAC Tapered FlangesPart Number Description A B C D E Price

NW-80-300 Bored for 3.0 tube OD 4.49 2.87 3.27 3.01 3.82 NW-80B Blank 4.49 .- 3.27 .- .- NW-100-400 Bored for 4.0 tube OD 5.28 3.87 4.02 4.01 4.61 NW-100B Blank 5.28 .- 4.02 .- .-


BC

AED

.787

.453

.590

Blank

Bored

NW-63 FlangesPart Number Description A B C D E Price

NW-63-250 Bored for 2.5 tube OD 3.43 2.44 2.76 2.51 2.71 NW-63B Blank 3.43 .- 2.76 .- .-


BC

D

AE

.470

.200

.250

Blank

Bored

Aluminum Metal Seals for NW FlangesModelNumber Application A B C D Price

NW-16-MS-A NW-16 Flange 1.18 0.63 .- 0.91 NW-25-MS-A NW-25 Flange 1.58 0.96 .- 1.30 NW-40-MS-A NW-40 Flange 2.16 1.58 .- 1.89 NW-50-MS-A NW-50 Flange .- 1.97 2.05 2.32 NW-63-MS-A NW-63 Flange .- 2.68 2.76 3.03





.787

.157

B

A

200

1.50

B

200

1.50

B

A

.787

.157

B

A

NW-63-CCV-AN

NW-63-CC-ANNW-16 through -50-CC-ANNW-16 through -50-CC-TN

NW-80-CC-TSNW-100-CC-TS

NW-80-CCV-ASNW-100-CCV-AS

Chain Clamps for NW-16 to 50 Flanges - TeflonCoated Links*Model Max. Torque (lb. in.)Number Application A B Temp. Elastomer / Metal Price

NW-16-CC-TN No radius, metal/elastomer 4.53 2.36 1500C 9 / 22 NW-25-CC-TN No radius, metal/elastomer 4.92 2.76 1500C 13 / 26 NW-40-CC-TN No radius, metal/elastomer 5.32 3.35 1500C 18 / 39 NW-50-CC-TN No radius, metal/elastomer 5.98 4.13 1500C 22 / 44

*Not Radiation Resistant Dimensions in inches

Chain Clamps for NW-63 FlangesModel Max. Torque (lb. in.)Number Application A B Bakeout Elastomer / Metal Price

NW-63-CCV-AN Elastomer Seals only 6.69 4.72 1000C .- NW-63-CC-AN Metal or Elastomer Seals 6.30 4.72 1500C 22 / 44


Chain Clamps for NW-16 to 50 Flanges - Aluminum LinksModel Max. Torque (lb. in.)Number Application A B Temp. Elastomer / Metal Price

NW-16-CC-AN Metal or Elastomer Seals 4.53 2.36 1500C 9 / 22 NW-25-CC-AN Metal or Elastomer Seals 4.92 2.76 1500C 13 / 26 NW-40-CC-AN Metal or Elastomer Seals 5.32 3.35 1500C 18 / 39 NW-50-CC-AN Metal or Elastomer Seals 5.98 4.13 1500C 22 / 44


Chain Clamps for 80 and 100mm Tapered FlangesModel Max. TorqueNumber Application A B Bakeout (lb. in.) Price

NW-80-CCV-AS Elastomer Seals only 9.61 6.06 1500C .- NW-80-CC-TS Metal Seals only . - 6.30 1500C 75 NW-100-CCV-AS Elastomer Seals only 10.08 6.77 1500C - NW-100-CC-TS Metal Seals only . - 7.09 1500C 88



Prices subject to change without notice. - International product pricing will vary. ASA-LIT 11/01

NEW PRODUCTS

Conical Adapter Nipples

The same fittings used as a reducer can be ordered as a standard product to adapt anASA flange to a CF, ISO or NW flange with minimal loss in conductance. These adaptersare also available with other flange combinations in their appropriate catalog.

Conical Reducer Nipples

These reducers provide a compact means of reducing to a smaller flange and tube size ina short distance with minimal loss in conductance. They are also listed in the appropriatecatalog as weld fittings or with CF and ISO flanges.

Larger Radius Elbow Weld Fittings

Nor-Cal offers 45° and 90° Radius Elbows in sizes up to ten inches OD. Radiuselbows offer the highest conductance geometry in a tube bend. These elbows are alsolisted in their appropriate catalog as weld fittings or with CF or ISO flanges.



ASA FLANGE SYSTEM

General Information

Nor-Cal’s ASA flanges are manufacturedfrom specially treated 304 stainless steel.These flanges mate with standard 150 lb.ASA flanges or 150 ANSI flanges. Theyare available from stock for standard tubesizes from two to 12 inches. Larger sizesare available upon request. Nuts and boltsare used to apply pressure between themating flanges and a seal is effectedwhen a Viton-A® O-ring is compressed.ASA flanges can be baked to 204˚Cand have a vacuum range of up to 10-8

Torr. Besides being sold separately,they are available as standards onnipples, adapters, tees, crosses,traps, elbows and valves.

Rotatable Flange Option

Only Nor-Cal offers ASA flanges in rotat-able as well as non-rotatable versions.When components of several systemsare used interchangeably, use of rotatableflanges is recommended. Assembly isfacilitated by rotation of mating flanges,to align bolt holes. Non-rotatable ASAflanges, unlike rotatable, contain bothsealing surface and bolt holes in oneunit rather than two. This makes thenon-rotatable flange less expensive,and therefore the preferred choice whenmating component orientation is not aconcern. All fittings are priced withnon-rotatable flanges. For fittings withrotatable flanges, add the difference

between a non-rotatable and rotatableflange of the desired size. Multiply

by the number of rotatable flangesrequired. Be sure to specify

the flange numbers whichare rotatable.

O-Ring Groove Option

One of each pair of mating ASA flangesrequires an O-ring groove. When orderingflanges with grooves indicate this by add-ing “-G” to the flange model number.An example would be a rotatable ASA-11flange bored out for six inch OD tubingwith a groove. The model number wouldbe ASA-11-600R-G. The same rule applieswhen ordering a fitting or adapter flangewith only one ASA flange. An examplewould be adapter flange model numberASA-6-338-200Z-G. When a fitting hasmore than one ASA flange, such as afour-way cross, indicate which flangesare desired with grooves by using theflange numbers on the drawing. If, forexample, you desired a cross withASA-9 flanges and a six inch tubeOD with grooved flanges on the leftand bottom ports, the model numberwould be 4C-ASA-9-600-G1-G3. Addthe appropriate amount for each O-ringgroove to the price of the fitting. Somerotatable flange sizes are not availablewith O-ring grooves.

Insert O-ring

Receiver

Rotatable ASA Flange Non-rotatable ASA Flange with O-ring groove



ASA FLANGES

ASA Non-Rotatable FlangesRefer to drawings on facing page for dimensional references.

Part Bolt Holes Add for EachType Description Number A B C D E F No. Size Price O-Ring Groove

ASA-5 Non-rotatable ASA-5-000N 5.00 .500 Blank - - 3.880 4 .625 (1.5 ANSI) ASA-5-200N 5.00 .500 2.010 1.938 .250 3.880 4 .625

ASA-5-250N 5.00 .500 2.510 2.438 .250 3.880 4 .625 ASA-6 Non-rotatable ASA-6-000N 6.00 .500 Blank - - 4.750 4 .750

(2.0 ANSI) ASA-6-300N 6.00 .500 3.010 2.938 250 4.750 4 .750 ASA-6-350N 6.00 .500 3.510 3.438 .250 4.750 4 .750

ASA-7.5 Non-rotatable ASA-7.5-000N 7.50 .500 Blank - - 6.000 4 .750 (3.0 ANSI) ASA-7 .5-400N 7.50 .500 4.010 3.910 .250 6.000 4 .750

ASA-9 Non-rotatable ASA-9-000N 9.00 .500 Blank - - 7.500 8 .750 (4.0 ANSI) ASA-9-400N 9.00 .500 4.010 3.910 .250 7.500 8 .750

ASA-9-600N 9.00 .500 6.020 5.875 .250 7.500 8 .750 ASA-11 Non-rotatable ASA-11-000N 11.00 .750 Blank - - 9.500 8 .812

(6.0 ANSI) ASA-11-600N 11.00 .750 6.020 5.875 .375 9.500 8 .812 ASA-11-800N 11.00 .750 8.020 7.875 .375 9.500 8 .812

ASA-13.5 Non-rotatable ASA-13.5-000N 13.50 .750 Blank - - 11.750 8 .812 (8.0 ANSI) ASA-13.5-800N 13.50 .750 8.020 7.875 .375 11.750 8 .812

ASA-13.5-1000N 13.50 .750 10.030 9.875 .375 11.750 8 .812 ASA-16 Non-rotatable ASA-16-000N 16.00 .750 Blank - - 14.250 12 .812

(10.0 ANSI) ASA-16-1000N 16.00 .750 10.030 9.875 .375 14.250 12 .812 ASA-16-1200N 16.00 .750 12.030 11.875 .375 14.250 12 .812

Add suffix “-G” to model number if O-ring groove is required. Dimensions in inches

FA

B

Non-rotatable Blank

FA

B

Non-rotatable Blank with O-ring Groove

F

DC

A

B

Non-rotatable Bored

E

FA

B

Non-rotatable Bored with O-ring Groove

CDE



ASA FLANGES & HARDWARE

ASA Rotatable FlangesRefer to drawings on facing page for dimensional references.

Part Bolt Holes Add for EachType Description Number A B C D E F No. Size Price O-Ring Groove

ASA-5 Rotatable ASA-5-000R 5.00 .500 Blank - - 3.880 4 .625 (1.5 ANSI) ASA-5-200R 5.00 .500 2.010 1.938 .250 3.880 4 .625

ASA-5-250R 5.00 .500 2.510 2.438 .250 3.880 4 .625


ASA-6-350R 6.00 .612 3.510 3.438 .250 4.750 4 .750

ASA-7.5 Rotatable ASA-7.5-000R 7.50 .612 Blank - - 6.000 4 .750 (3.0 ANSI) ASA-7.5-400R 7.50 .612 4.010 3.910 .250 6.000 4 .750


ASA-9-600R 9.00 .612 6.020 5.875 .250 7.500 8 .750


ASA-11-800R 11.00 .750 8.020 7.875 .375 9.500 8 .812

ASA-13.5 Rotatable ASA-13.5-000R 13.50 .750 Blank - - 11.750 8 .812 (8.0 ANSI) ASA-13.5-800R 13.50 .750 8.020 7.875 .375 11.750 8 .812

ASA-13.5-1000R 13.50 .750 10.030 9.875 .375 11.750 8 .812

ASA-16 Rotatable ASA-16-000R 16.00 .750 Blank - - 14.250 12 .812 ASA-16-1000R 16.00 .750 10.030 9.875 .375 14.250 12 .812 ASA-16-1200R 16.00 .750 12.030 11.875 .375 14.250 12 .812

Add suffix “-G” to model number if O-ring groove is required. Dimensions in inches

FA

B

Rotatable Blank

FA

B

Rotatable Blank with O-ring Groove

FA

B

Rotatable Bored

CD

E

FA

B

Rotatable Bored with O-ring Groove

CD

E



ASA FLANGE HARDWARE

ASA Flange HardwareModel

Size Number Quantity Description Price

ASA-5 BA-5 4 each Stainless steel bolts ( 9⁄16-12 x 1.5) nuts and washers 2-231 1 each Viton® O-ring


ASA-7.5 BA-7.5 4 each Stainless steel bolts ( 5⁄8-11 x 1.5) nuts and washers 2-243 1 each Viton® O-ring


ASA-11 BA-11 8 each Stainless steel bolts (3⁄4-10 x 2.25) nuts and washers 2-266 1 each Viton® O-ring

ASA-13.5 BA-13.5 8 each Stainless steel bolts (3⁄4-10 x 2.25) nuts and washers 2-274 1 each Viton® O-ring

ASA-16 BA-16 12 each Stainless steel bolts (3⁄4-10 x 2.25) nuts and washers 2-278 1 each Viton® O-ring


ASA Flange Hardware for Gate ValvesModel

Size Number Quantity Description Price

ASA-6 BA-6GV 4 each Stainless steel bolts (3⁄8-16 x 1.0) and reducer bushings (3⁄8 x 3⁄4)

2-238 1 each Viton® O-ring ASA-7.5 BA-7.5GV 4 each Stainless steel bolts (3⁄8-16 x 1.0)

and reducer bushings (3⁄8 x 3⁄4)2-243 1 each Viton® O-ring

ASA-9 BA-9GV 8 each Stainless steel bolts (3⁄8-16 x 1.0) and reducer bushings (3⁄8 x 3⁄4)

2-259 1 each Viton® O-ring ASA-11 BA-11GV 8 each Stainless steel bolts (3⁄8-16 x 1.0)

2-266 1 each Viton® O-ring ASA-16 BA-16GV 12 each Stainless steel bolts (3⁄8-16 x 1.0)

2-278 1 each Viton-A® O-ring




ASA Half Nipples Model Flange Tube Add for Each Number OD OD B Price O-Ring Groove

1N-ASA-5-200 5.00 2.00 3.25 1N-ASA-5-250 5.00 2.50 3.25 1N-ASA-5-250V 5.00 2.50 4.00 1N-ASA-6-300 6.00 3.00 3.50 1N-ASA-7.5-400 7.50 4.00 4.13 1N-ASA-7.5-400V 7.50 4.00 5.12 1N-ASA-9-400 9.00 4.00 4.13 1N-ASA-9-400V 9.00 4.00 5.12 1N-ASA-9-600 9.00 6.00 5.25 1N-ASA-9-600V 9.00 6.00 6.31 1N-ASA-11-600 11.00 6.00 5.38 1N-ASA-11-600V 11.00 6.00 6.44 1N-ASA-11-800 11.00 8.00 7.38 1N-ASA-13.5-800 13.50 8.00 7.75 1N-ASA-13.5-1000 13.50 10.00 9.88 1N-ASA-16-1000 16.00 10.00 9.88 1N-ASA-16-1200 16.00 12.00 9.88

Note: Add suffix “-G” to model number if O-ring groove is required. Dimensions in inches

ASA FITTINGS

ASA Fittings

Nor-Cal manufactures a complete line of flanged vacuum component fittings. The tubeportions are fabricated from 304 stainless steel. On request, 316 stainless steel can besupplied. Nor-Cal makes its own elbows, and all tees and crosses are made with the pulled-port technique. This allows smooth, crevice-free butt welds to provide the maximum incleanliness for UHV applications. Bake-out range is up to 200°C. Nor-Cal fittings are alsoavailable with CF (Conflat style), NW (ISO-KF compatible) and ISO flanges.

B

21

B

ASA Full NipplesModel Flange Tube Add for EachNumber OD OD B Price O-Ring Groove

2N-ASA-5-200N 5.00 2.00 6.50 2N-ASA-5-250N 5.00 2.50 6.50 2N-ASA-5-250NV 5.00 2.50 8.00 2N-ASA-6-300N 6.00 3.00 7.00 2N-ASA-7.5-400N 7.50 4.00 8.26 2N-ASA-7.5-400NV 7.50 4.00 10.24 2N-ASA-9-400N 9.00 4.00 8.26 2N-ASA-9-400NV 9.00 4.00 10.24 2N-ASA-9-600N 9.00 6.00 10.50 2N-ASA-9-600NV 9.00 6.00 12.62 2N-ASA-11-600N 11.00 6.00 10.76 2N-ASA-11-600NV 11.00 6.00 12.88 2N-ASA-11-800N 11.00 8.00 14.76 2N-ASA-13.5-800N 13.50 8.00 15.50 2N-ASA-13.5-1000N 13.50 10.00 19.76 2N-ASA-16-1000N 16.00 10.00 19.76 2N-ASA-16-1200N 16.00 12.00 19.76

Note: Add suffix “-G” if O-ring groove is required and designate Dimensions in inchesflange location by appropriate flange number; “-G1, -G2”.



ASA FITTINGS

ASA Reducer NipplesModel Flange Flange TubeNumber 1 2 OD Price

2NR-ASA-9-5-N ASA-9 ASA-5 2.00 2NR-ASA-9-6-N ASA-9 ASA-6 3.00 2NR-ASA-9-7.5-N ASA-9 ASA-7.5 4.00 2NR-ASA-11-5-N ASA-11 ASA-5 2.00 2NR-ASA-11-6-N ASA-11 ASA-6 3.00 2NR-ASA-11-7.5-N ASA-11 ASA-7.5 4.00 2NR-ASA-11-9-N ASA-11 ASA-9 6.00 2NR-ASA-13.5-5-N ASA-13.5 ASA-5 2.00 2NR-ASA-13.5-6-N ASA-13.5 ASA-6 3.00 2NR-ASA-13.5-7.5-N ASA-13.5 ASA-7.5 4.00 2NR-ASA-13.5-9-N ASA-13.5 ASA-9 6.00 2NR-ASA-13.5-11-N ASA-13.5 ASA-11 8.00 2NR-ASA-16-5-N ASA-16 ASA-5 2.00 2NR-ASA-16-6-N ASA-16 ASA-6 3.00 2NR-ASA-16-7.5-N ASA-16 ASA-7.5 4.00 2NR-ASA-16-9-N ASA-16 ASA-9 6.00 2NR-ASA-16-11-N ASA-16 ASA-11 8.00 2NR-ASA-16-13.5-N ASA-16 ASA-13.5 10.00

Note: Add suffix “-G” if O-ring groove is required and designate flange Dimensions in incheslocation by appropriate flange number “-G1, -G2”. See ASA flangetable for O-ring groove prices.

ASA 45˚ Radius Elbows with TangentsModel Flange Tube Add for EachNumber OD OD B Price O-Ring Groove

2KL-ASA-5-N 5.00 2.00 2.092 2KL-ASA-6-N 6.00 3.00 3.933 2KL-ASA-7.5-N 7.50 4.00 5.027 2KL-ASA-9-N 9.00 4.00 5.027

Note: Add suffix “-G1” to model number if O-ring is required Dimensions in incheson one flange. If groove is required on both flanges, designateby adding “-G1, -G2”.

ASA Conical Reducer NipplesModel Flange 1 Flange 2Number Size Tube OD Size Tube OD Price

2NRC-ASA-6-5-N ASA-6 3.00 ASA-5 2.00 2NRC-ASA-7.5-5-N ASA-7.5 4.00 ASA-5 2.00 2NRC-ASA-7.5-6-N ASA-7.5 4.00 ASA-6 3.00

Note: Add suffix “-G1” to model number if O-ring is required on one flange. Dimensions in inchesIf groove is required on both flanges, designate by adding “-G1, -G2”.See ASA flange table for O-ring groove prices.

21

5.00

B

21

4.125



ASA 90º Mitered ElbowsModel Flange Tube Add for EachNumber OD OD B Price O-Ring Groove

2E-ASA-5-200NM 5.00 2.00 3.25 2E-ASA-5-250NM 5.00 2.50 3.25 2E-ASA-5-250NMV 5.00 2.50 4.00 2E-ASA-7.5-400NMV 7.50 4.00 5.12 2E-ASA-9-400NMV 9.00 4.00 5.12 2E-ASA-9-600NM 9.00 6.00 5.25 2E-ASA-9-600NMV 9.00 6.00 6.31 2E-ASA-11-600NMV 11.00 6.00 6.44 2E-ASA-11-800NM 11.00 8.00 7.38 2E-ASA-13.5-800NM 13.50 8.00 7.75 2E-ASA-13.5-1000NM 13.50 10.00 9.88 2E-ASA-16-1000NM 16.00 10.00 9.88

Note: Add suffix “-G1” to model number if O-ring groove is required Dimensions in incheson one flange. If groove is required on both flanges, designate byadding suffix “-G1, -G2”.

ASA FITTINGS

ASA 90º Radius ElbowsModel Flange Tube Add for EachNumber OD OD B R Price O-Ring Groove

2E-ASA-5-N 5.00 2.00 3.25 3.00 2E-ASA-6-N 6.00 3.00 4.75 4.50 2E-ASA-9-N 9.00 4.00 6.25 6.00 2E-ASA-11-N 11.00 6.00 9.38 9.00 2E-ASA-13.5-N 13.50 8.00 12.38 12.00 2E-ASA-16-N 16.00 10.00 15.38 15.00

Note: Add suffix “-G1” to model number if O-ring is required Dimensions in incheson one flange. If groove is required on both flanges, designateby adding “-G1,-G2”.

BR

B

B



ASA TeesModel Flange Tube Add for EachNumber OD OD B Price O-Ring Groove

3T-ASA-5-200N 5.00 2.00 3.25 3T-ASA-5-250N 5.00 2.50 3.25 3T-ASA-5-250NV 5.00 2.50 4.00 3T-ASA-7.5-400NV 7.50 4.00 5.12 3T-ASA-9-400NV 9.00 4.00 5.12 3T-ASA-9-600N 9.00 6.00 5.25 3T-ASA-9-600NV 9.00 6.00 6.31 3T-ASA-11-600NV 11.00 6.00 6.44 3T-ASA-11-800N 11.00 8.00 7.38 3T-ASA-13.5-800N 13.50 8.00 7.75 3T-ASA-13.5-1000N 13.50 10.00 9.88 3T-ASA-16-1000N 16.00 10.00 9.88

Note: Add suffix “-G” to model number if O-ring groove is required Dimensions in inchesand designate flange location by appropriate flange number.Example: “-G1, -G2 and/or -G3”.

ASA 4-Way CrossesModel Flange Tube Add for EachNumber OD OD B Price O-Ring Groove

4C-ASA-5-200N 5.00 2.00 3.25 4C-ASA-5-250N 5.00 2.50 3.25 4C-ASA-5-250NV 5.00 2.50 4.00 4C-ASA-7.5-400NV 7.50 4.00 5.12 4C-ASA-9-400NV 9.00 4.00 5.12 4C-ASA-9-600N 9.00 6.00 5.25 4C-ASA-9-600NV 9.00 6.00 6.31 4C-ASA-11-600NV 11.00 6.00 6.44 4C-ASA-11-800N 11.00 8.00 7.38 4C-ASA-13.5-800N 13.50 8.00 7.75 4C-ASA-13.5-1000N 13.50 10.00 9.88 4C-ASA-16-1000N 16.00 10.00 9.88

Note: Add suffix “-G” to model number if O-ring groove is required Dimensions in inchesand designate flange location by appropriate flange number.Example: “-G1, -G2, -G3 and/or -G4”.

ASA FITTINGS

21

3

B

B

21

3

4

B

B



ASA Flex CouplingsModel Flange Bellows Free Compressed Add for EachNumber OD ID Length Length Price O-Ring Groove

2FC-ASA-5-200N-3 5.00 2.00 6.00 5.25 2FC-ASA-5-250N-4 5.00 2.50 7.00 6.00 2FC-ASA-6-300N-4 6.00 3.00 7.00 6.00 2FC-ASA-7.5-400N-4 7.50 4.00 7.00 6.00 2FC-ASA-9-400N-4 9.00 4.00 7.00 6.002FC-ASA-9-600N-4 9.00 6.00 7.00 6.00 2FC-ASA-11-600N-4 11.00 6.00 7.00 6.00 2FC-ASA-11-800N-4 11.00 8.00 7.00 6.00 2FC-ASA-13.5-800N-4 13.50 8.00 7.00 6.00 2FC-ASA-13.5-1000N-10 13.50 10.00 14.00 11.00 2FC-ASA-16-1000N-10 16.00 10.00 14.00 11.00 2FC-ASA-16-1200N-11.8 16.00 12.00 15.87 12.87

Note: Add suffix “-G” to model number if O-ring groove is required. Dimensions in inchesDesignate flange location by appropriate flange number.Example: “-G1 and/or -G2”.

ASA FITTINGS



Note: Add suffix “-G” to model number if O-ring groove is required. Dimensions in inchesDesignate flange location by appropriate flange number.Example: “-G1, -G2, -G3, -G4, -G5 and/or -G6”.



Note: Add suffix “-G” to model number if O-ring groove is required. Dimensions in inchesDesignate flange location by appropriate flange number.Example: “-G1, -G2, -G3, -G4 and/or -G5”.

21

3

4

5

B

B

21

3

4

5

B

B

6th Leg Opposite

21

Free Length



ASA ADAPTERS

ASA to CF Adapter FlangesModel Small Flange Large FlangeNumber Detail Detail B D Price

ASA-5-133-075Z 133-000NT ASA-5-000N .62 .50 ASA-5-212-100Z 212-000NT ASA-5-000N 1.00 .50 ASA-5-275-150Z 275-000NT ASA-5-000N 1.50 .50 ASA-6-133-075Z 133-000NT ASA-6-000N .62 .50 ASA-6-212-100Z 212-000NT ASA-6-000N 1.00 .50 ASA-6-275-150Z 275-000NT ASA-6-000N 1.50 .50 ASA-6-338-200Z 338-000NT ASA-6-000N 2.00 .75 ASA-7.5-133-075Z 133-000NT ASA-7.5-000N .62 .50 ASA-7.5-212-100Z 212-000NT ASA-7.5-000N 1.00 .50 ASA-7.5-275-150Z 275-000NT ASA-7.5-000N 1.50 .50 ASA-7.5-338-200Z 338-000NT ASA-7.5-000N 2.00 .75 ASA-7.5-450-250Z 450-000NT ASA-7.5-000N 2.50 .75 ASA-9-133-075Z 133-000NT ASA-9-000N .62 .50 ASA-9-212-100Z 212-000NT ASA-9-000N 1.00 .50 ASA-9-275-150Z 275-000NT ASA-9-000N 1.50 .50 ASA-9-338-200Z 338-000NT ASA-9-000N 2.00 .75 ASA-9-450-250Z 450-000NT ASA-9-000N 2.50 .75 ASA-9-462-300Z 462-000NT ASA-9-000N 3.00 .75 ASA-9-600-400Z 600-000NT ASA-9-000N 4.00 .75 ASA-11-133-075Z 133-000NT ASA-11-000N .62 .75 ASA-11-212-100Z 212-000NT ASA-11-000N 1.00 .75 ASA-11-275-150Z 275-000NT ASA-11-000N 1.50 .75 ASA-11-338-200Z 338-000NT ASA-11-000N 2.00 .75 ASA-11-450-250Z 450-000NT ASA-11-000N 2.50 .75 ASA-11-462-300Z 462-000NT ASA-11-000N 3.00 .75 ASA-11-600-400Z 600-000NT ASA-11-000N 4.00 .75 ASA-11-800-600Z 800-000NT ASA-11-000N 6.00 .75

Note: Add suffix “-G” to model number if O-ring is required Dimensions in incheson ASA mating side. See ASA flange table for groove prices.

ASA Adapters

Nor-Cal offers a full line of adapterflanges, adapter nipples and conicaladapter nipples. Other flange sizes andcombinations are available upon request.They are made from select grade 304stainless steel to provide the maximumin cleanliness for UHV applications.Also see CF/Wire Seal and NW/ISOcatalogs for other adapter combinations.

B

SmallFlange Detail

D

LargeFlange Detail



ASA to CF Adapter NipplesModel Flange Types TubeNumber Flange 1 Flange 2 OD Price

AN-133-ASA-5 1.33 CF ASA-5 .75 AN-133-ASA-6 1.33 CF ASA-6 .75 AN-212-ASA-6 2.12 CF ASA-6 1.00 AN-462-ASA-6 4.62 CF ASA-6 3.00 AN-133-ASA-7.5 1.33 CF ASA-7.5 .75 AN-212-ASA-7.5 2.12 CF ASA-7.5 1.00 AN-275-ASA-7.5 2.75 CF ASA-7.5 1.50 AN-133-ASA-9 1.33 CF ASA-9 .75 AN-212-ASA-9 2.12 CF ASA-9 1.00 AN-275-ASA-9 2.75 CF ASA-9 1.50 AN-338-ASA-9 3.38 CF ASA-9 2.00 AN-450-ASA-9 4.50 CF ASA-9 2.50 AN-462-ASA-9 4.62 CF ASA-9 3.00 AN-600-ASA-9 6.00 CF ASA-9 4.00 AN-133-ASA-11 1.33 CF ASA-11 .75 AN-212-ASA-11 2.12 CF ASA-11 1.00 AN-275-ASA-11 2.75 CF ASA-11 1.50 AN-338-ASA-11 3.38 CF ASA-11 2.00 AN-450-ASA-11 4.50 CF ASA-11 2.50 AN-462-ASA-11 4.62 CF ASA-11 3.00 AN-600-ASA-11 6.00 CF ASA-11 4.00 AN-800-ASA-11 8.00 CF ASA-11 6.00 AN-133-ASA-13.5 1.33 CF ASA-13.5 .75 AN-212-ASA-13.5 2.12 CF ASA-13.5 1.00 AN-275-ASA-13.5 2.75 CF ASA-13.5 1.50 AN-338-ASA-13.5 3.38 CF ASA-13.5 2.00 AN-450-ASA-13.5 4.50 CF ASA-13.5 2.50 AN-462-ASA-13.5 4.62 CF ASA-13.5 3.00 AN-600-ASA-13.5 6.00 CF ASA-13.5 4.00 AN-800-ASA-13.5 8.00 CF ASA-13.5 6.00 AN-1000-ASA-13.5 10.00 CF ASA-13.5 8.00 AN-133-ASA-16 1.33 CF ASA-16 .75 AN-212-ASA-16 2.12 CF ASA-16 1.00 AN-275-ASA-16 2.75 CF ASA-16 1.50 AN-338-ASA-16 3.38 CF ASA-16 2.00 AN-450-ASA-16 4.50 CF ASA-16 2.50 AN-462-ASA-16 4.62 CF ASA-16 3.00 AN-600-ASA-16 6.00 CF ASA-16 4.00AN-800-ASA-16 8.00 CF ASA-16 6.00 AN-1000-ASA-16 10.00 CF ASA-16 8.00 AN-1325-ASA-16 13.25 CF ASA-16 10.00

Note: Add suffix “-G” to model number if O-ring groove is required Dimensions in incheson ASA Flange. See ASA flanges table for groove prices.

ASA ADAPTERS

21

5.00

Rotatable Non-rotatable



ASA to NW Adapter NipplesModel Flange Types TubeNumber Flange 1 Flange 2 OD Price

AN-NW-16-ASA-5 NW-16 ASA-5 .75 AN-NW-16-ASA-6 NW-16 ASA-6 .75 AN-NW-16-ASA-7.5 NW-16 ASA-7.5 .75 AN-NW-16-ASA-9 NW-16 ASA-9 .75 AN-NW-16-ASA-11 NW-16 ASA-11 .75 AN-NW-25-ASA-6 NW-25 ASA-6 1.00 AN-NW-25-ASA-7.5 NW-25 ASA-7.5 1.00 AN-NW-25-ASA-9 NW-25 ASA-9 1.00 AN-NW-25-ASA-11 NW-25 ASA-11 1.00 AN-NW-40-ASA-7.5 NW-40 ASA-7.5 1.50 AN-NW-40-ASA-9 NW-40 ASA-9 1.50 AN-NW-40-ASA-11 NW-40 ASA-11 1.50 AN-NW-50-ASA-9 NW-50 ASA-9 2.00 AN-NW-50-ASA-11 NW-50 ASA-11 2.00

Note: Add suffix “-G” to model number if O-ring groove is Dimensions in inchesrequired on ASA flange. See ASA flange table for groove prices.

ASA to CF Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-212-ASA-5 2.12 CF 1.00 ASA-5 2.00 2.792 ANC-275-ASA-5 2.75 CF 1.50 ASA-5 2.00 2.834 ANC-275-ASA-6 2.75 CF 1.50 ASA-6 3.00 4.084 ANC-338-ASA-5 3.38 CF 2.00 ASA-5 2.50 2.850 ANC-338-ASA-6 3.38 CF 2.00 ASA-6 3.00 4.100 ANC-338-ASA-7.5 3.38 CF 2.00 ASA-7.5 4.00 4.100 ANC-450-ASA-5 4.50 CF 2.50 ASA-5 2.00 3.000 ANC-450-ASA-6 4.50 CF 2.50 ASA-6 3.00 4.250 ANC-450-ASA-7.5 4.50 CF 2.50 ASA-7.5 4.00 4.250ANC-462-ASA-5 4.62 CF 3.00 ASA-5 2.00 4.156 ANC-462-ASA-7.5 4.62 CF 3.00 ASA-7.5 4.00 4.156 ANC-600-ASA-5 6.00 CF 4.00 ASA-5 2.00 4.313 ANC-600-ASA-6 6.00 CF 4.00 ASA-6 3.00 4.313

Note: Add suffix “-G” to model number if O-ring groove Dimensions in inchesis required on ASA flange. See ASA flange table for groove prices.

ASA ADAPTERS

ASA to NW Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-NW-25-ASA-5 ASA-5 2.00 NW-25 1.00 2.775 ANC-NW-40-ASA-5 ASA-5 2.50 NW-40 1.50 2.775 ANC-NW-50-ASA-5 ASA-5 2.50 NW-50 2.00 2.775 ANC-NW-40-ASA-6 ASA-6 3.00 NW-40 1.50 4.025 ANC-NW-50-ASA-6 ASA-6 3.00 NW-50 2.00 4.025 ANC-NW-50-ASA-7.5 ASA-7.5 4.00 NW-50 2.00 4.025

Note: Add suffix “-G” to model number if O-ring goove is Dimensions in inchesrequired on ASA flange. See ASA flange table for groove prices.

21

Rotatable Non-rotatable

B

21

2.00

2

B

1



ASA ADAPTERS

ASA to ISO Adapter NipplesModel Flange TypesNumber Flange 1 Flange 2 Tube OD Price

AN-ISO-63-OF-ASA-11 ISO-63-OF ASA-11 2.50 AN-ISO-80-OF-ASA-6 ISO-80-OF ASA-6 3.00 AN-ISO-80-OF-ASA-11 ISO-80-OF ASA-11 3.00 AN-ISO-100-OF-ASA-7.5 ISO-100-OF ASA-7.5 4.00 AN-ISO-100-OF-ASA-9 ISO-100-OF ASA-9 4.00 AN-ISO-100-OF-ASA-11 ISO-100-OF ASA-11 4.00 AN-ISO-160-OF-ASA-9 ISO-160-OF ASA-9 6.00 AN-ISO-160-OF-ASA-11 ISO-160-OF ASA-11 6.00 AN-ISO-200-OF-ASA-11 ISO-200-OF ASA-11 8.00 AN-ISO-200-OF-ASA-13.5 ISO-200-OF ASA-13.5 8.00

Note: Add suffix “-G” to model number if O-ring groove is Dimensions in inchesrequired on ASA Flange. See ASA flange table for groove prices.

ASA to ISO Conical Adapter NipplesModel Flange 1 Flange 2Number Type Tube OD Type Tube OD B Price

ANC-ISO-63-OF-ASA-5 ISO-63-OF 2.50 ASA-5 2.00 2.875 ANC-ISO-63-OF-ASA-6 ISO-63-OF 2.50 ASA-6 3.00 4.125 ANC-ISO-63-OF-ASA-7.5 ISO-63-OF 2.50 ASA-7.5 4.00 4.125 ANC-ISO-80-OF-ASA-5 ISO-80-OF 3.00 ASA-5 2.00 4.125 ANC-ISO-80-OF-ASA-7.5 ISO-80-OF 3.00 ASA-7.5 4.00 4.125 ANC-ISO-100-OF-ASA-5 ISO-100-OF 4.00 ASA-5 2.00 4.125 ANC-ISO-100-OF-ASA-6 ISO-100-OF 4.00 ASA-6 3.00 4.125

Note: Add suffix “-G” to model number if O-ring groove is Dimensions in inchesrequired on ASA flange. See ASA flange table for groove prices.

5.00

21

2

B

1



ASA Flexible Stainless Steel HoseNom Model Add for EachOD Number Length Description Price O-Ring Groove

2.5 FH-250-12-ASA 12.0 ASA-5 on one port FH-250-12-2ASA 12.0 ASA-5 on both ports FH-250-18-ASA 18.0 ASA-5 on one port FH-250-18-2ASA 18.0 ASA-5 on both ports FH-250-24-ASA 24.0 ASA-5 on one port FH-250-24-2ASA 24.0 ASA-5 on both ports FH-250-36-ASA 36.0 ASA-5 on one port FH-250-36-2ASA 36.0 ASA-5 on both ports

3.0 FH-300-12-ASA 12.0 ASA-6 on one port FH-300-12-2ASA 12.0 ASA-6 on both ports FH-300-18-ASA 18.0 ASA-6 on one port FH-300-18-2ASA 18.0 ASA-6 on both ports FH-300-24-ASA 24.0 ASA-6 on one port FH-300-24-2ASA 24.0 ASA-6 on both ports FH-300-36-ASA 36.0 ASA-6 on one port FH-300-36-2ASA 36.0 ASA-6 on both ports

4.0 FH-400-12-ASA 12.0 ASA-7.5 on one port FH-400-12-2ASA 12.0 ASA-7.5 on both ports FH-400-18-ASA 18.0 ASA-7.5 on one port FH-400-18-2ASA 18.0 ASA-7.5 on both ports FH-400-24-ASA 24.0 ASA-7.5 on one port FH-400-24-2ASA 24.0 ASA-7.5 on both ports FH-400-36-ASA 36.0 ASA-7.5 on one port FH-400-36-2ASA 36.0 ASA-7.5 on both ports

Note: Add suffix “-G1” if O-ring groove is required and designate flange Dimensions in incheslocation by appropriate flange number. Example: “-G1 and/or -G2”.

ASA STAINLESS STEEL FLEXIBLE HOSE

Stainless steel vacuum hose is availablein 2.5 to 4.0 inch diameters with ASAflanges. Standard lengths are 12, 18, 24and 36 inches with one non-rotatable orone rotatable and non-rotatable flange.Be sure to specify if O-ring grooves arerequired. Non-standard lengths can besupplied upon request. Flex hoses can befound with other flange types or with buttweld fittings in their appropriate catalog.The flexibility and reliability of these hoses,provided by 321 stainless steel, make themideally suited for vibration isolation androughing and alignment manifolds.

Length


Prices subject to change without notice. - International product pricing will vary. WELD-LIT 6/02

GENERAL INFORMATION / NEW PRODUCTS

General Information

Nor-Cal Products has manufacturedstainless steel weld fittings for nearlyforty years. We worked with the LawrenceLivermore National Laboratory in the 60’sto develop their specification for vacuumpiping, which has become the standard inthe industry. Weld fittings are commonlyused in vacuum roughing lines on semi-conductor process equipment and forforelines and pump exhaust lines insemiconductor subfabs.

All tees and crosses are fabricated withthe pulled-port technique and full penetra-tion butt welds. This provides crevice-freeweld joints and the maximum in cleanli-ness for UHV applications. Weld fittingsare available from stock in 304 stainlesssteel, and some sizes are stocked in316L material for additional corrosionresistance. All weld fittings are availablewith various flange combinations.See appropriate catalog.

New 45˚ and 90˚Elbows with Tangents

We have added several 45˚ and 90˚ elbowswith tangents to match our competitors’dimensions. Look for the HW suffix forelbows that match HPS weld fitting dimen-sions, for example.

New 316 L Weld Fittings

At the request of our customers whorequire additional corrosion resistance fordownstream semiconductor applications,we now stock a variety of weld fittings in316L stainless steel. We have added tees,elbows conical reducers and tubing inthe sizes most commonly requested forforelines and pump exhaust lines.

Tube Finishes

The standard finish for all weld fittingsis now tumbled, although there are somefittings that are not available with thetumbled finish. These weld fittings arebead-blasted and are designated by a "-B"suffix on the part number. All weld fittingscan be electropolished on request.Call for pricing.



End Cap ReducersModel Tube ODNumber 1 2 E Price

ECR-075-050 .75 .50 2.38 ECR-100-050 1.00 .50 2.38 ECR-100-075 1.00 .75 2.38 ECR-150-050 1.50 .50 2.38 ECR-150-075 1.50 .75 2.38 ECR-150-100 1.50 1.00 2.38 ECR-200-150 2.00 1.50 2.38 ECR-250-200 2.50 2.00 2.38 ECR-300-150 3.00 1.50 3.62 ECR-300-200 3.00 2.00 3.62 ECR-300-250 3.00 2.50 3.62 ECR-400-200-B 4.00 2.00 3.62 ECR-400-300-B 4.00 3.00 3.62 ECR-600-400-B 6.00 4.00 3.62 ECR-800-600-B 8.00 6.00 3.62


End CapsModel Tube WallNumber OD Thickness B Price

G-2W-050 .50 .050 .32 G-2W-075 .75 .050 .31 G-2W-100 1.00 .060 .43 G-2W-150 1.50 .060 .56 G-2W-200 2.00 .060 .75 G-2W-250 2.50 .060 .70 G-2W-300 3.00 .074 .67 G-2W-400 4.00 .074 .48 G-2W-450 4.50 .074 .51 G-2W-600 6.00 .074 .88 G-2W-800 8.00 .074 .83

Note: End caps are stocked with bead blasted finish. Dimensions in inches

BALL SOCKETS / END CAPS & REDUCERS

1

E

2

Tube OD

B

Ball SocketsModel Tube O-RingNumber ID OD B Size Price

BS-50/30 2.00 1.50 1.75 - BS-50/30-G 2.00 1.50 1.75 2-224 BS-75/50 3.00 2.00 2.50 - BS-75/50-G 3.00 2.00 2.50 2-232

Note: “G” suffix in model number indicates Dimensions in inchesO-ring and O-ring groove are provided.

IDTubeOD

B



CONICAL REDUCERS

Conical ReducersModel Tube OD WallNumber 1 2 E Thickness Price

B-31W-100-075 1.00 .75 1.38 .065 B-31W-150-075 1.50 .75 2.38 .065 B-31W-150-100 1.50 1.00 2.38 .065 B-31W-200-100 2.00 1.00 2.38 .065 B-31W-200-150 2.00 1.50 2.38 .065 B-31W-250-150 2.50 1.50 2.38 .065 B-31W-250-200 2.50 2.00 2.38 .065 B-31W-300-150 3.00 1.50 3.62 .065 B-31W-300-200 3.00 2.00 3.62 .065 B-31W-300-250 3.00 2.50 3.62 .065 B-31W-400-150-B 4.00 1.50 5.25 .065 B-31W-400-200 4.00 2.00 3.62 .065 B-31W-400-250 4.00 2.50 3.62 .065 B-31W-400-300 4.00 3.00 3.62 .065


316L Conical ReducersModel Tube OD WallNumber 1 2 E Thickness Price

B-31W-200-100-316L 2.00 1.00 2.38 .065 B-31W-200-150-316L 2.00 1.50 2.38 .065 B-31W-300-200-316L 3.00 2.00 3.62 .065 B-31W-400-150-316L 4.00 1.50 5.25 .065 B-31W-400-200-316L 4.00 2.00 3.62 .065


Conical reducers provide a compact means of adapting to a smaller diameter tube withminimal loss in conductance. They are available from stock in 304 stainless steel andsome sizes are stocked in 316L material for additional corrosion resistance. Conicaladapter nipples are available with various flange combinations. See appropriate catalog.

E

1

2

E

1

2



ELBOWS

Nor-Cal Products offers 45˚ and 90˚ radius elbows in sizes up to ten inches OD and180˚ return bend radius elbows in sizes up to two inches OD. Radius elbows offer thehighest conductance geometry in a tube bend. All elbows are available from stock in304 stainless steel, and some sizes are stocked in 316L material for additional corrosionresistance. We have added several 45˚ and 90˚ elbows with tangents to match ourcompetitors’ dimensions. Look for the HW suffix for elbows that match HPS weld fittingdimensions, for example. Elbows are also available with various flange combinations.See appropriate catalog.

180˚ Return Bend Radius ElbowsModel Tube WallNumber OD Thickness R Price

G-2WU-050 .50 .049 .75 G-2WU-075 .75 .035 1.00 G-2WU-100 1.00 .065 1.50 G-2WU-150 1.50 .065 2.25 G-2WU-200 2.00 .065 3.00


R

90˚ Mitered ElbowsModel Tube WallNumber OD Thickness A Price

E-075M .75 .035 1.00 E-100M 1.00 .065 1.88 E-150M 1.50 .065 2.25 E-150MH 1.50 .065 2.41 E-200M 2.00 .065 3.00 E-200MH 2.00 .065 2.61 E-250M 2.50 .065 3.00 E-250MV 2.50 .065 3.75 E-300M 3.00 .065 3.25 E-400M 4.00 .083 3.88 E-400MV-B 4.00 .083 4.87 E-500M-B 5.00 .083 4.25 E-600M-B 6.00 .083 5.00 E-600MV-B 6.00 .083 6.06 E-800M-B 8.00 .120 7.00 E-1000M-B 10.00 .120 9.50


ATyp.



ELBOWS

90˚ Radius ElbowsModel Tube WallNumber OD Thickness A R Price

G-2WC-050 .50 .049 .75 .75 G-2WC-075 .75 .035 1.00 1.00 G-2WC-100 1.00 .065 1.50 1.50 G-2WC-150 1.50 .065 2.25 2.25 G-2WC-200 2.00 .065 3.00 3.00 G-2WC-250 2.50 .065 3.75 3.75G-2WC-300 3.00 .065 4.50 4.50 G-2WC-400 4.00 .083 6.00 6.00 G-2WC-600-B 6.00 .083 9.00 9.00 G-2WC-800-B 8.00 .120 12.00 12.00 G-2WC-1000-B 10.00 .120 15.00 15.00


90˚ Radius Elbows with TangentsModel Tube WallNumber OD Thickness A R Price

G-2WC-075H .75 .035 1.42 1.00 G-2WC-100H 1.00 .065 1.82 1.50 G-2WC-100HW 1.00 .065 2.06 1.50 G-2WC-150H 1.50 .065 2.41 2.25 G-2WC-150HW 1.50 .065 2.94 2.25 G-2WC-150HL 1.50 .065 4.97 2.25 G-2WC-200H 2.00 .065 4.06 3.00 G-2WC-200HL 2.00 .065 5.36 3.00 G-2WC-250H 2.50 .065 5.19 3.75 G-2WC-300H 3.00 .065 6.31 4.50 G-2WC-400H 4.00 .083 8.31 6.00


316L 90˚ Radius ElbowsModel Tube WallNumber OD Thickness A R Price

G-2WC-100-316L 1.00 .065 1.50 1.50 G-2WC-150-316L 1.50 .065 2.25 2.25 G-2WC-200-316L 2.00 .065 3.00 3.00 G-2WC-250-316L 2.50 .065 3.75 3.75 G-2WC-300-316L 3.00 .065 4.50 4.50 G-2WC-400-316L 4.00 .083 6.00 6.00


316L 90˚ Radius Elbows with TangentsModel Tube WallNumber OD Thickness A R Price

G-2WC-100H-316L 1.00 .065 1.82 1.50 G-2WC-150H-316L 1.50 .065 2.41 2.25 G-2WC-200H-316L 2.00 .065 4.06 3.00


RA

A Typ.

R



ELBOWS

45˚ Radius Elbows with TangentsModel Tube WallNumber OD Thickness A Price

G-2KL-075 .75 .035 .76 G-2KL-100 1.00 .065 .97 G-2KL-100HW 1.00 .065 1.19 G-2KL-150 1.50 .065 1.53 G-2KL-150HW 1.50 .065 1.63 G-2KL-200 2.00 .065 1.84 G-2KL-200HW 2.00 .065 2.31 G-2KL-250 2.50 .065 3.00 G-2KL-300 3.00 .065 3.68 G-2KL-400 4.00 .083 4.78 G-2KL-400HW 4.00 .083 4.81


316L 45˚ Radius Elbows with TangentsModel Tube WallNumber OD Thickness A Price

G-2KL-100-316L 1.00 .065 .97 G-2KL-150-316L 1.50 .065 1.53 G-2KL-200-316L 2.00 .065 1.84 G-2KL-300-316L 3.00 .065 3.68 G-2KL-400-316L 4.00 .083 4.77


A

45˚ Radius ElbowsModel WallNumber Tube OD Thickness R Price

G-2WK-050 .50 .049 .75 G-2WK-075 .75 .035 1.00 G-2WK-075T .75 .065 1.13 G-2WK-100 1.00 .065 1.50 G-2WK-150 1.50 .065 2.25 G-2WK-200 2.00 .065 3.00 G-2WK-250 2.50 .065 3.75 G-2WK-300 3.00 .065 4.50 G-2WK-400 4.00 .083 6.00 G-2WK-600-B 6.00 .083 9.00 G-2WK-800-B 8.00 .134 12.00 G-2WK-1000-B 10.00 .134 15.00


316L 45˚ Radius ElbowsModel WallNumber Tube OD Thickness R Price

G-2WK-100-316L 1.00 .065 1.50 G-2WK-150-316L 1.50 .065 2.25 G-2WK-200-316L 2.00 .065 3.00 G-2WK-250-316L 2.50 .065 3.75 G-2WK-300-316L 3.00 .065 4.50 G-2WK-400-316L 4.00 .083 6.00


R

45°



TEES

Reducer TeesModel Tube 1 & 2 Tube 3Number Arm OD Leg OD A M Price

G-7WR-100-050 1.00 .50 1.88 1.00 G-7WR-100-075 1.00 .75 1.88 1.12 G-7WR-150-050 1.50 .50 2.25 1.25 G-7WR-150-075 1.50 .75 2.25 1.38 G-7WR-150-100 1.50 1.00 2.25 2.13 G-7WR-200-050 2.00 .50 3.00 1.50 G-7WR-200-075 2.00 .75 3.00 1.63 G-7WR-200-100 2.00 1.00 3.00 2.38 G-7WR-250-150 2.50 1.50 3.00 2.75 G-7WR-250-200 2.50 2.00 3.00 3.25 G-7WR-300-150 3.00 1.50 3.25 3.00 G-7WR-300-200 3.00 2.00 3.25 3.50 G-7WR-300-250 3.00 2.50 3.25 3.25 G-7WR-400-150-B 4.00 1.50 3.88 3.50 G-7WR-400-200-B 4.00 2.00 3.88 4.00 G-7WR-400-250-B 4.00 2.50 3.88 3.75 G-7WR-400-300-B 4.00 3.00 3.88 3.75 G-7WR-500-400-B 5.00 4.00 4.25 4.38 G-7WR-600-150-B 6.00 1.50 5.00 4.50 G-7WR-600-200-B 6.00 2.00 5.00 5.00 G-7WR-600-250-B 6.00 2.50 5.00 4.75 G-7WR-600-400-B 6.00 4.00 5.00 4.88 G-7WR-600-500-B 6.00 5.00 5.00 4.75 G-7WR-800-600-B 8.00 6.00 7.00 6.00


TeesModel Tube WallNumber OD Thickness A Price

G-7W-050 .50 .049 .75 G-7W-075 .75 .035 1.00 G-7W-075T .75 .065 1.88 G-7W-100 1.00 .065 1.88 G-7W-150 1.50 .065 2.25 G-7W-150H 1.50 .065 2.41 G-7W-200 2.00 .065 3.00 G-7W-200H 2.00 .065 2.61 G-7W-250 2.50 .065 3.00 G-7W-250V 2.50 .065 3.75 G-7W-300 3.00 .065 3.25 G-7W-400 4.00 .083 3.88 G-7W-400V 4.00 .083 4.87 G-7W-500-B 5.00 .083 4.25 G-7W-600-B 6.00 .083 5.00 G-7W-600V-B 6.00 .083 6.06 G-7W-800-B 8.00 .120 7.00 G-7W-1000-B 10.00 .120 9.50


ATyp.

1 2

ATyp.

3

MTyp.

304 stainless steel tees and reducer tees are fabricated with the pulled-port techniqueand full penetration butt welds. This provides crevice-free weld joints and the maximumin cleanliness for UHV applications. Other sizes are available on request. These fittingsare also offered with various flange combinations. See appropriate catalog.



CROSSES

4-Way CrossesModel Tube WallNumber OD Thickness A Price

G-9W-050 .50 .049 .75 G-9W-075 .75 .035 1.00 G-9W-100 1.00 .065 1.88 G-9W-150 1.50 .065 2.25 G-9W-150H 1.50 .065 2.41 G-9W-200 2.00 .065 3.00 G-9W-200H 2.00 .065 2.61 G-9W-250 2.50 .065 3.00 G-9W-250V 2.50 .065 3.75 G-9W-300 3.00 .065 3.25 G-9W-400 4.00 .083 3.88 G-9W-400V 4.00 .083 4.87 G-9W-500-B 5.00 .083 4.25 G-9W-600-B 6.00 .083 5.00 G-9W-600V-B 6.00 .083 6.06 G-9W-800-B 8.00 .120 7.00 G-9W-1000-B 10.00 .120 9.50


304 stainless steel crosses and reducer crosses are offered in a wide range of sizesas standard products. All crosses are fabricated with the pulled-port technique andfull penetration butt welds. This provides crevice-free weld joints and the maximumin cleanliness for UHV applications. As always, other sizes are available on request.These fittings are offered with various flange combinations. See appropriate catalog.

ATyp


G-10W-075 .75 .035 1.00 G-10W-100 1.00 .065 1.88 G-10W-150 1.50 .065 2.25 G-10W-200 2.00 .065 3.00 G-10W-250 2.50 .065 3.00 G-10W-250V 2.50 .065 3.75 G-10W-300-B 3.00 .065 3.25 G-10W-400-B 4.00 .083 3.88 G-10W-400V-B 4.00 .083 4.87 G-10W-500-B 5.00 .083 4.25 G-10W-600-B 6.00 .083 5.00 G-10W-600V-B 6.00 .083 6.06 G-10W-800-B 8.00 .120 7.00 G-10W-1000-B 10.00 .120 9.50


ATyp



10


G-11W-075 .75 .035 1.00 G-11W-100 1.00 .065 1.88 G-11W-150 1.50 .065 2.25 G-11W-200 2.00 .065 3.00 G-11W-250 2.50 .065 3.00 G-11W-250V 2.50 .065 3.75 G-11W-300-B 3.00 .065 3.25 G-11W-400-B 4.00 .083 3.88 G-11W-400V-B 4.00 .083 4.87 G-11W-500-B 5.00 .083 4.25 G-11W-600-B 6.00 .083 5.00 G-11W-600V-B 6.00 .083 6.06 G-11W-800-B 8.00 .120 7.00 G-11W-1000-B 10.00 .120 9.50


ATyp.

CROSSES

Reducer CrossesModel Tube 1 & 2 Tube 3 & 4Number Arm OD Leg OD A M Price

G-9WR-100-050 1.00 .50 1.88 1.00 G-9WR-100-075 1.00 .75 1.88 1.12 G-9WR-150-050 1.50 .50 2.25 1.25 G-9WR-150-075 1.50 .75 2.25 1.38 G-9WR-150-100 1.50 1.00 2.25 2.13 G-9WR-200-050 2.00 .50 3.00 1.50 G-9WR-200-075 2.00 .75 3.00 1.63 G-9WR-200-150 2.00 1.50 3.00 2.50 G-9WR-250-150 2.50 1.50 3.00 2.75 G-9WR-250-200 2.50 2.00 3.00 3.25 G-9WR-300-150 3.00 1.50 3.25 3.00 G-9WR-300-200 3.00 2.00 3.25 3.50 G-9WR-300-250 3.00 2.50 3.25 3.25 G-9WR-400-150-B 4.00 1.50 3.88 3.50 G-9WR-400-200-B 4.00 2.00 3.88 4.00 G-9WR-400-250-B 4.00 2.50 3.88 3.75 G-9WR-400-300-B 4.00 3.00 3.88 3.75 G-9WR-500-400-B 5.00 4.00 4.25 4.38 G-9WR-600-150-B 6.00 1.50 5.00 4.50 G-9WR-600-200-B 6.00 2.00 5.00 5.00 G-9WR-600-250-B 6.00 2.50 5.00 4.75 G-9WR-600-300-B 6.00 3.00 5.00 4.75 G-9WR-600-400-B 6.00 4.00 5.00 4.88 G-9WR-600-500-B 6.00 5.00 5.00 4.75 G-9WR-800-600-B 8.00 6.00 7.00 6.00


1 2

MTyp.

ATyp.

3

4



11

Stainless Steel TubingModel Surface Tube Tube Wall Price per Ft.Number Finish OD ID Thickness (add cut chg.*)

SST-050 Bright annealed .50 .402 .049 SST-075 Bright annealed .75 .680 .035 SST-100 Polished ID & OD 1.00 .870 .065 SST-125 Bright annealed 1.25 1.120 .065 SST-150 Polished ID & OD 1.50 1.370 .065 SST-162 Bright annealed 1.62 1.490 .065 SST-175 Bright annealed 1.75 1.630 .065 SST-200 Polished ID & OD 2.00 1.870 .065 SST-250 Polished ID & OD 2.50 2.370 .065 SST-300 Polished ID & OD 3.00 2.870 .065 SST-400 Polished ID & OD 4.00 3.834 .083 SST-500 White pickled 5.00 4.834 .083 SST-600 White pickled 6.00 5.834 .083 SST-800 White pickled 8.00 7.760 .120 SST-1000 White pickled 10.00 9.760 .120 SST-1200 White pickled 12.00 11.760 .120

* Cutting charge: $15.00 per piece from 1 to 10 pieces Dimensions in inches To order specify length required in feet as follows: SST-150-3.0, SST-400-20.0

STAINLESS STEEL TUBING

Nor-Cal’s consumption of stainlesssteel tubing for its own products makesit possible to offer 304 and 316L stainlesssteel tubing lengths up to 20 feet.

304 stainless steel tubing standard finishesare white pickled (Number 1 unpolished),bright annealed or polished O.D. and I.D.,depending on the size.

316L stainless steel tubing is offeredwith a bright annealed finish only.Bright annealed and polished tubing hasbeen pickled and passivated. Polishedtube can be described as No. 4 polished.The surface meets ASTM A 270, and hasreceived a 150 grit polish on the O.D.and 180 grit on the I.D. Special cleaning,materials and surface finishes areavailable for an additional charge.

316L Stainless Steel TubingModel Surface Tube Tube Wall Price per Ft.Number Finish OD ID Thickness (add cut chg.*)

SST-075-316L Bright annealed .75 .680 .035 SST-100-316L Bright annealed 1.00 .870 .065 SST-150-316L Bright annealed 1.50 1.370 .065 SST-200-316L Bright annealed 2.00 1.870 .065 SST-250-316L Bright annealed 2.50 2.370 .065 SST-300-316L Bright annealed 3.00 2.870 .065 SST-400-316L Bright annealed 4.00 3.834 .083

* Cutting charge: $15.00 per piece from 1 to 10 pieces Dimensions in inches To order specify length required in feet as follows: SST-150-316L-3.0, SST-400-316L-20.0



FLEXIBLE STAINLESS STEEL HOSE

Stainless steel vacuum hose is available in.75 to 4 inch diameters in standard lengthsof 12, 18, 24 and 36 inches. The flexibilityand reliability of these hoses, provided by321 stainless steel, makes them ideallysuited for vibration isolation and roughingand alignment manifolds.

Intermediate lengths, protective stainlesssteel braiding and thick and thin walled flexhose can be supplied upon request. Referto the appropriate catalog for NW, ASA, CFand ISO flanged flex hose.

Flexible Stainless Steel HoseNom ModelOD Number Length Price

.75 FH-075-12 12 FH-075-18 18 FH-075-24 24 FH-075-36 36

1.00 FH-100-12 12 FH-100-18 18 FH-100-24 24 FH-100-36 36

1.50 FH-150-12 12 FH-150-18 18 FH-150-24 24 FH-150-36 36

2.00 FH-200-12 12 FH-200-18 18 FH-200-24 24 FH-200-36 36

2.50 FH-250-12 12 FH-250-18 18 FH-250-24 24 FH-250-36 36

3.00 FH-300-12 12 FH-300-18 18 FH-300-24 24 FH-300-36 36

4.00 FH-400-12 12 FH-400-18 18 FH-400-24 24 FH-400-36 36


Length

THERMAL PRODUCTS


Prices subject to change without notice. - International product pricing will vary. THERMAL-LIT 11/01

HC-SERIES HEATER JACKET SPECIFICATIONS

Electrical Specifications

• Watt density: 1 to 2 W/in2 typical• 120 V / 240 V standard, other voltages available• Power lead wires: 4 in. #18 AWG UL 1180/CSA Teflon®

insulated, rated 10A, leadwire pair encapsulated inreinforced silicone rubber sleeving

• Connectors: positive locking Amp UniversalMate-N-Lok® connector, 3 position, rated 10A.Other connectors available on request

• Heaters are interconnectable up to a 10A circuit

Physical Specifications

• Heater and jacket material is a reinforced silicone rubber fabric

• Insulation material: 1/4 inch closed-cell silicone rubber foam.

• Color: grey insulation and outer jacket, red heater• Fasteners: snap type: 1/2 inch nominal diameter metal

construction with nylon cover• Thermocouple pocket is built-in to all straight length

heaters three inches long and greater, one per heater• Self-adhesive kapton thermocouples are available for

heaters without thermocouple pockets• Nominal thickness: .35 inch (0.80 inch including snaps)• Maximum operating temperature 200°C

��

yyyyyyyyyyyyyyyyyyyyyyyyyyyyyyyy

Heating ElementSilicone Rubber

Silicone Sponge Insulation

SnapFastener

Silicone RubberOuter Jacket

Heater Jackets Greatly ImproveVacuum Line Performance

Nor-Cal is Your Source for Stock Standardand Custom Heater Jackets

Features

• Even heating up to 200°C• Easy on, easy off with

reclosable fasteners• Tight contact fit• Silicone rubber construction• Modular heating system• UL® recognized construction• Trimable materials• Integrates with standard

control consoles• Built-in insulation• 1 year warranty

Benefits

• Fewer particles, reducedsystem downtime

• Improved heat transferminimizing cold spots

• Clean room compatible• Combine standard parts

to cover custom lines• Adjustable temperatures

All trimable jacketsallow for up to one inchof insulation to be removed.This allows you to coveralmost any line completely.

Thermocouple pocket isbuilt-in to all straight lengthheaters three inch long and

greater. Shown with optionalthermocouple installed.

Self-adhesive kaptonthermocouples are available

for heaters withoutthermocouple pockets.

Typical Steady State Outer Surface Temperature vs.Internal Temperature for Silicone Rubber Heaters,

1/4 inch Insulation, 20°C Ambient

Heater jackets, controllers and accessories from Nor-Cal Productsreduce build-up of semiconductor process by-products in valvesand other exhaust line components, while reducing particlegeneration and system downtime.



Aluminum or Tungsten Metal Etch

When heating lines for metal etch applications, keeping the linesabove 90°C can greatly reduce the metal and salt build-up. Thisminimizes wafer defects and extends preventative maintenanceschedules. For metal etch, heating both the foreline from theprocess tool to the pump, and the pump exhaust line to thescrubber will yield the best results (reference 1 on chart below).Heating other components, such as pump mufflers, is alsobeneficial and helps to reduce downtime.Variations in process equipment, process parameters and componenttemperature ratings will dictate different system solutions. Always reviewequipment specifications and process parameters before determiningtemperature specifications and heated line design. Failure to follow therequired specifications and parameters could result in equipmentdamage or undesired process results.

Many semiconductor processes can benefit from heated foreline and exhaust lines.Silicon nitride and TEOS LPCVD and aluminum or tungsten metal etch are the most

common processes requiring heated pump lines.

PROCESS BENEFITS & APPLICATIONS

Heated foreline to pumpand heated exhaust line toscrubber. No foreline trap

Heated foreline to forelinetrap before pump

Heated foreline to pumpand heated exhaust toforeline trap after pump

Heated foreline to foreline trap

Typical Variations of Forelineand Exhaust Configurations

1

2

3

4

Refer to the Nor-Cal Foreline Traps catalogfor more information on line design.

Silicon Nitride and TEOS LPCVD

For silicon nitride LPCVD, heating the line over 110ºC from theprocess to the dry-pump can greatly reduce the amount of solidswhich build up in the line. TEOS LPCVD lines should be heatedto 150ºC. This extends PM intervals and reduces wafer defectsin the process chamber by up to 10 times.Preventative maintenance schedules can be extended severaltimes, meaning larger numbers of runs between line cleanings.The heated foreline will no longer catch the majority of thecondensable by-products, which can sublimate in the pump.For most applications, it is highly recommended that the dry-pump is protected by a foreline trap upstream from the pump(reference 2 and 4 on chart below). Nor-Cal offers standard andcustom water-cooled and particulate foreline traps for mostsemiconductor applications.



HEATED FORELINE

DESIGNING HEATED FORELINE & EXHAUST SYSTEMS

Trimable Lengthsfor Test Portsand Gauges

Gate Valve Heater

Bellows Heater

Flange Heater

45° Elbow Heater

24 inch StraightSection

HC-FLG-400-ISO-3 (3X)

HC-2WC-400-3

HC-400-6T-3

HC-400-6-3

HC-2WK-400-3

HC-400-12T-3

MEASUREMENT & SELECTION

90° Elbow

5.5

.25 Test Port


11.4

6.0 R

6.0 R

2.0

2.0

6.5

4.0

5.7

14.0

45°Elbow

Line Measurement

To achieve the maximum benefit from your Nor-Cal heatingsystem, 100% heated coverage is needed. To accomplish this,measurement of the vacuum line is necessary.For best results, please contact your Nor-Cal representative toset up an appointment to measure your line. Use the followingguidelines to develop an approximate measurement that can beused for component selection and control zone layout.NOTE: To measure quickly, start at one end of the line and workyour way to the other end. Measure one component at a time.Drawings of each component are not necessary if detailedmeasurement notes are taken.DIAMETER: Verify the diameter of your line by measuring thecircumference (distance around the outside of the tubing) of acommon straight section within the line.

Diameter Circumference1.50" 4.71"2.00" 6.28"3.00" 9.42"4.00" 12.57"

STRAIGHT SECTIONS: Measure the length of astraight section referencing the backside of the flangeor the centerline of the butt-weld joint.45° and 90° ELBOWS: Measure the “L” dimensionfrom the backside of the flange to the centerline ofthe opposing leg. Please refer to specific heaterdrawings located in this product guide.TEE: Measure the length “L” as shown in this guide.

FLEXIBLE SECTIONS:Measure the outer diameterof the bellows and the lengthas shown in the specific heaterdrawings located in this productguide. Note: the length must bemeasured under compressionwith full vacuum pulled. If thereis a noticeable “twisting” on theflexible section, adjustment ofthe line may be needed forproper heater installation.FLANGE: Note flange typeand measure dimensions.VALVES and OTHER SHAPES:Nor-Cal has a large selectionof existing heater designs forvalves, reducers and othermiscellaneous components.


1

2

3

4

5

6

1

2

34

5

6

1



HEATED EXHAUST LINEHeater Jacket Selection

• After measuring your system using the instructions above,choose the heater segments you will need to cover yourexhaust line from this product guide. List the modelnumbers with your notes.

• Trimable heaters solve the problem of odd straight sectionlengths. For example, for a 14.5 inch section, combine a 12inch trimable and a 3 inch heater. The 12 inch heater can becut to a minimum of 11 inches. Cut .5 inch from the 12 inchheater to make a 11.5 inch length. Place cut edge towardsthe 3 inch heater to maximize temperature uniformity.

Zone Layout and Heater Installation

• Heaters can be connected together end-to-end inorder to form a larger single circuit which then canbe controlled as one “zone.”

• A single line may contain multiple zones, depending on thelength and the complexity. Use the following rules of thumbwhen grouping sets of heaters into zones.

• The maximum amperage per zone is 10 amps, or 1200 watts.Please use the part number list to calculate the total wattageof your heated line. Dividing by 1080 will give you theapproximate number of zones required.

• Split the zones at natural break points, such asat a flange, elbow or valve.

• Each component, such as a gate valve, needs to becontrolled with a separate control circuit. This is dueto the difference in thermal mass between them andlengths of tubing.

• Temperature sensors (thermocouples) can be placedeasily in any straight heater three inches long and up.These heaters have a built-in thermocouple pocketfor easy installation of the sensor. Self-adhesivekapton thermocouples are available for heaterswithout thermocouple pockets.

• Remove labels and residual glue with methanol oranother solvent before attaching the heater jacket.Operating the heater on a component with a label cancause discoloration or scorching of the jacket and maycause the label to ignite and damage the heater.

• When choosing where to place the thermocouplesfor each zone, start at the process tool, placing the firstthermocouple two to four feet from the outlet of the process.

• The jacket should fit tightly for optimum heat transfer.Loose areas can draw higher wattage and damage theinsulation and/or heater element. Note: Heater mustbe attached to the component when in operation.

• Do not immerse the heaters in water or cleaning solutions.


2 inch by 1.5 inch Conical Reducer

90° Elbow

Y Heater

Ball Valve Heater

Flange Heater

Trimable Length

36 inch Straight Section

1

2

3

4

5

6

7

2

4

5

6

1

3

7

A helpful Heater Design Worksheet is posted on ourWebsite at www.n-c.com. Look under Thermal Products.



HC-SERIES HEATER JACKETS

Straight Tube Heater Jackets - 2.0” O.D.Model Length WattsNumber "L" @ 120V Features Price

HC-200-2-3 2.00 19 HC-200-2T-3 2.00 10 Trimable HC-200-3-3 3.00 29 HC-200-3T-3 3.00 19 Trimable HC-200-4-3 4.00 38 HC-200-4T-3 4.00 29 Trimable HC-200-5-3 5.00 48 HC-200-5T-3 5.00 38 Trimable HC-200-6-3 6.00 57 HC-200-6T-3 6.00 47 Trimable HC-200-7T-3 7.00 57 Trimable HC-200-8T-3 8.00 68 Trimable HC-200-9T-3 9.00 75 Trimable HC-200-10T-3 10.00 85 Trimable HC-200-11T-3 11.00 95 Trimable HC-200-12-3 12.00 114 HC-200-12T-3 12.00 104 Trimable HC-200-18-3 18.00 170 HC-200-24-3 24.00 227 HC-200-24T-3 24.00 217 Trimable HC-200-30-3 30.00 283 HC-200-36-3 36.00 340 HC-200-36T-3 36.00 330 Trimable



HC-150-2-3 2.00 14 HC-150-2T-3 2.00 7 Trimable HC-150-3-3 3.00 22 HC-150-3T-3 3.00 14 Trimable HC-150-4-3 4.00 29 HC-150-4T-3 4.00 22 Trimable HC-150-5-3 5.00 36 HC-150-5T-3 5.00 29 Trimable HC-150-6-3 6.00 43 HC-150-6T-3 6.00 36 Trimable HC-150-12-3 12.00 85 HC-150-12T-3 12.00 78 Trimable HC-150-18-3 18.00 128 HC-150-24-3 24.00 170 HC-150-24T-3 24.00 163 Trimable HC-150-30-3 30.00 213 HC-150-36-3 36.00 255 HC-150-36T-3 36.00 248 Trimable

Dimensions in inchesTube O.D.(Heater I.D.)

• Standard heaters feature a .25 inchwall silicone rubber sponge insulation

• Trimable heaters have a one inchcut-to-length section at one end

• All heaters listed are designed for 120 voltoperation. Other voltages available

• A thermocouple pocket is built-into all straight length heaters threeinches long or greater

• Thermocouple pocket allows installationof the temperature sensor

• .50 inch silicone rubber spongeinsulation available




HC-300-2-3 2.00 24 HC-300-2T-3 2.00 12 Trimable HC-300-3-3 3.00 36 HC-300-3T-3 3.00 24 Trimable HC-300-4-3 4.00 48 HC-300-4T-3 4.00 36 Trimable HC-300-5-3 5.00 59 HC-300-5T-3 5.00 48 Trimable HC-300-6-3 6.00 71 HC-300-6T-3 6.00 59 Trimable HC-300-12-3 12.00 141 HC-300-12T-3 12.00 129 Trimable HC-300-18-3 18.00 213 HC-300-24-3 24.00 283 HC-300-24T-3 24.00 271 Trimable HC-300-30-3 30.00 354 HC-300-36-3 36.00 425 HC-300-36T-3 36.00 413 Trimable




HC-400-2-3 2.00 32 HC-400-2T-3 2.00 16 Trimable HC-400-3-3 3.00 48 HC-400-3T-3 3.00 32 Trimable HC-400-4-3 4.00 63 HC-400-4T-3 4.00 48 Trimable HC-400-5-3 5.00 79 HC-400-5T-3 5.00 63 Trimable HC-400-6-3 6.00 95 HC-400-6T-3 6.00 79 Trimable HC-400-7T-3 7.00 95 Trimable HC-400-8T-3 8.00 114 Trimable HC-400-9T-3 9.00 130 Trimable HC-400-10T-3 10.00 146 Trimable HC-400-11T-3 11.00 157 Trimable HC-400-12-3 12.00 189 HC-400-12T-3 12.00 173 Trimable HC-400-18-3 18.00 283 HC-400-24-3 24.00 377 HC-400-24T-3 24.00 361 Trimable HC-400-30-3 30.00 472 HC-400-36-3 36.00 566 HC-400-36T-3 36.00 550 Trimable


Consider the following questionswhen designing your heated lines.

What type of components will you be heating?Do you have a sample part available for fitting?Are drawings available?

What is the application temperature?

What is the maximum component temperature?

What is the maximum external temperature?

What voltage will power heater?

Will temperature need to be adjusted?(Accuracy : +/- 10% T/S, +/- 3C T/C)

Are there any special instructions such as safetyrequirements, unique environment or other issues?

Are you using thermocouples or thermostats?If using thermocouples, what type and lead length?

What length power cable is required?

Do you have special power requirements?

Are there multiple temperature zones?

Cost of Ownership

Please calculate the following informationso we may provide you with approximatecost of ownership for your system.

Average number of maintenance intervals per month

Average length of each maintenance session (hours)

Cost of maintenance (labor rate per hour)

How many maintenance and operatingpersonnel are involved

Cost of downtime (lost production in $$ per hour)

Cost of current replacement partsand/or refurbishing services per month

A complete printable heater design worksheet islocated on our website under Thermal Products.

Heater Design Worksheet



• Standard heaters feature .25 inch silicone rubber sponge insulation• Elbow and tee heaters will fit both butt-weld and flanged style tubing elbows• .50 inch silicone rubber sponge insulation is available. Call for information


45° Radius Elbow Heater JacketsModel Tube Length Radius WattsNumber O.D. "L" "R" @ 120V Features Price

HC-2WK-150-3 1.50 0.69 2.25 13 HC-2KL-150HW-3 1.50 1.38 2.25 23 With Tangent HC-2WK-200-3 2.00 1.00 3.00 23 HC-2KL-200HW-3 2.00 2.06 3.00 44 With Tangent HC-2WK-300-3 3.00 1.37 4.50 47 HC-2KL-300HW-3 3.00 3.18 4.50 95 With Tangent HC-2WK-400-3 4.00 2.00 6.00 70 HC-2KL-400HW-3 4.00 4.31 6.00 148 With Tangent


Tee Heater JacketsModel Tube Length WattsNumber O.D. "L" @ 120V Price

HC-7W-150-3 1.50 2.00 37 HC-7W-200-3 2.00 2.75 69 HC-7W-300-3 3.00 3.00 99 HC-7W-400-3 4.00 3.63 140


Conical Heater JacketsModel Length WattsNumber A B "L" @ 120V Price

HC-200-150-3 1.50 2.00 1.38 12 HC-300-200-3 2.00 3.00 2.42 24 HC-400-200-3 2.00 4.00 2.63 31 HC-400-300-3 3.00 4.00 2.60 36


90 ° Radius Elbow Heater JacketsModel Tube Length Radius WattsNumber O.D. "L" "R" @ 120V Features Price

HC-2WC-150-3 1.5 2.00 2.25 25 HC-2WC-150HW-3 1.5 2.68 2.25 36 With Tangent HC-2WC-200-3 2.0 2.75 3.00 45 HC-2WC-200HW-3 2.0 3.81 3.00 65 With Tangent HC-2WC-300-3 3.0 4.00 4.50 93 HC-2WC-300HW-3 3.0 5.81 4.50 141 With Tangent HC-2WC-400-3 4.0 5.50 6.00 149 HC-2WC-400HW-3 4.0 7.81 6.00 217 With Tangent


Tube O.D. (Heater I.D.)

A

Tube O.D. (Heater I.D.)B



HC SERIES HEATER JACKETS & ACCESSORIES

• .25 inch silicone rubber sponge insulation• For both NW flanges and ISO clamp flanges• .50 inch silicone rubber sponge insulation available

Flange Heater JacketsModel Flange Nominal WattsNumber Type Tube O.D. @120V Price

HC-FLG-150-NW-3 NW-40 1.5 10 HC-FLG-200-NW-3 NW-50 2.0 15 HC-FLG-300-ISO-3 ISO-80 3.0 35 HC-FLG-400-ISO-3 ISO-100 4.0 82


• .25 inch silicone rubber sponge insulation• For both NW flanges and ISO clamp flanges.• .50 inch silicone rubber sponge insulation available

Flange InsulatorsModel Flange NominalNumber Type Tube O.D. Price

HI-FLG-150-NW-1 NW-40 1.5 HI-FLG-200-NW-1 NW-50 2.0 HI-FLG-300-ISO-1 ISO-80 3.0 HI-FLG-400-ISO-1 ISO-100 4.0


Control Cables and AccessoriesModel Length

Number Description/Features in Feet Price

HC-PLG Termination plug for end of last heater HC-PCRD-6 Power cable from temperature control console to heater 6 HC-PCRD-10 Power cable from temperature control console to heater 10 HC-PCRD-25 Power cable from temperature control console to heater 25 HT-CRD-6 Power cable from wall plug to AMP connector 6 HT-CRD-10 Power cable from wall plug to AMP connector 10 HC-JCRD-6 Power cable, male 3-pin. Use with HC-PLG-JCRD below 6 HC-JCRD-12 Power cable, male 3-pin. Use with HC-PLG-JCRD below 12 HC-PLG-JCRD Female power receptacle, 3-pin, fits .50 NPT

Thermocouples and Cables*Model Length

Number Description/Features in Feet Price

HC-TC-PLG-K K-type panel mount jack, .50 inch NPT HC-TC-K-1 K-type with one foot lead and mini-connector HC-TC-K-8 K-type with eight foot lead and mini-connector HC-TC-K-KAP-4 K-type kapton with four foot lead and mini-connector HC-TC-K-KAP-8 K-type kapton with eight foot lead and mini-connector HC-TC-CRD-K-6 K-type thermocouple extension cable with connectors 6 HC-TC-CRD-K-10 K-type thermocouple extension cable with connectors 10 HC-TC-CRD-K-25 K-type thermocouple extension cable with connectors 25

*Most items available in J-type also. Call for pricing and information

Heater Jacket Accessories

Self-adhesive Kapton thermocouple



Upstream Gas Line Heater JacketsModel Tube WattsNumber O.D. Length @120V Features Price

HC-025-2WC-1-1 .25 6.0 12 Elbow w/two 1.0 tangents HC-025-2WC-5-1 .25 9.0 18 Elbow w/one 5.0 tangent HC-025-6-1 .25 6.0 12 Straight HC-025-6-TC-1 .25 6.0 12 Straight w/Type J ThermocoupleHC-025-9-1 .25 9.0 18 Straight HC-025-9-TC-1 .25 9.0 18 Straight w/Type J Thermocouple HC-025-12-1 .25 12.0 24 Straight HC-025-12-TC-1 .25 12.0 24 Straightw/Type J Thermocouple HC-025-18-1 .25 18.0 36 Straight HC-025-18-TC-1 .25 18.0 36 Straight w/Type J Thermocouple HC-025-24-1 .25 24.0 48 Straight HC-025-24-TC-1 .25 24.0 48 Straight w/Type J Thermocouple HC-025-36-1 .25 36.0 72 Straight HC-025-36-TC-1 .25 36.0 72 Straight w/Type J Thermocouple HC-050-6-1 .50 6.0 24 Straight HC-050-6-TC-1 .50 6.0 24 Straight w/Type J Thermocouple HC-050-9-1 .50 9.0 36 Straight HC-050-9-TC-1 .50 9.0 36 Straight w/Type J Thermocouple HC-050-12-1 .50 12.0 48 Straight HC-050-12-TC-1 .50 12.0 48 Straight w/Type J Thermocouple HC-050-18-1 .50 18.0 72 Straight HC-050-18-TC-1 .50 18.0 72 Straight w/Type J Thermocouple HC-050-24-1 .50 24.0 96 Straight HC-050-24-TC-1 .50 24.0 96 Straight w/Type J Thermocouple HC-050-36-1 .50 36.0 144 Straight HC-050-36-TC-1 .50 36.0 144 Straight w/Type J Thermocouple


HC-SERIES GAS LINE HEATER JACKETS & INSULATORSNor-Cal’s upstream gas line heaters and insulators offer quick delivery from stock forheating gas delivery lines,such as BCL3 and WF6. They are made from silicone rubberheater material insulated with closed cell silicone rubber sponge and feature quick ON/OFF installation with snap closures. Heaters can be linked/daisy chained to a maximumof 10 amps. Insulators trim-to-fit to insure 100% line coverage. UL® Listed.• Heater watt density of 2.5 W/in2

• Meets UL94HB flammability requirements• Lead pair extends 3 inches past

each end of the heaters• Optional thermocouples #30 AWG,

type J, Teflon® insulated• Flexible elbow heaters fit

any radius elbow

Thermocouple Option

Available

Warning: Upstream gas line heater jackets are not designed forhazardous locations or for outdoor locations. They are not de-signed for total or partial immersion and should only be installedon grounded metallic tubing systems or GFI protected circuit.

��

yyyyyyyyyyyyyyyyyy

HeatingElement

Silicone Rubber

Silicone Sponge Insulation

SnapFastener

Silicone RubberOuter Jacket

Optional Thermocouple

Upstream Gas Line InsulatorsModel TubeNumber O.D. Length Features Price

HI-025-18T .25 18.0 Straight HI-050-18T .50 18.0 Straight HI-025-7W-M .25 Micro-tee HI-050-7W-M .50 Micro-tee HI-025-2WC-M .25 Micro-elbow HI-050-2WC-M .50 Micro-elbow




Heater Controllers Model Max. Output Number Description Watts@120V Zones Price

HC-935A-1-1 Self-contained microprocessor-based temperature control console. LED display. 960 1 HC-935S-1-1 Self-contained microprocessor-based temperature control console. LED display. 1200 1 HC-935A-2-1E Self-contained microprocessor-based temperature control console. LED display. 1900 2 HC-935A-4-1E Self-contained microprocessor-based temperature control console. LED display. 1900 4 HC-MLS2-8-1 Single multi-zone controller. RS232/485 compatible. Call for specifications. Call 8 HC-MLS2-16-1 16 zone control. Call for specifications. Call 16 HC-MLS2-32-1 32 zone control. Call for specifications. Call 32

HEATER CONTROLLERS

Nor-Cal is your source for temperaturecontrollers. Full control of the processis available through front panel controlsincluding set points and alarms.PC control is available on selectcontrollers using standard softwareprograms. Thermostat control, thermalfuses, up-to-temperature sensors, etc.are available on request.

HC-935 Heater Controllers

HC-935 series digital indicating control-lers are available with a single tempera-ture sensor input from a thermocouple orRTD sensor, and dual control outputs.The outputs may operate in a variety ofmodes including: heat, cool, alarm andtimer.The timer function operates in a choiceof delay-ON, delay-OFF, signal-ON orsignal-OFF modes. Front panel lockcapability rounds out the feature set.HC-935 controllers are available forone, two and four zones.

Features

• 1/32 DIN package• NEMA 4X• Countdown timer• Programmable alarms• Universal power supply• Small panel footprint• ±0.25% accuracy• Worldwide flexibility• Low cost multi-zone

temperature control

Pre-programmed controllers are available with alarms,remote communication packages and other custom

features. (16 zone MLS controller shown)

The Effect of Temperature Excursion on Heater LifePID Controllers result in temperature control accuracy of

± 2ºC, and extend heater element life by up to 10x.

Process Set Point: 150ºC • Overshoot: 9ºC • Droop: 9ºC Process Set Point: 150ºC • Overshoot: 1ºC • Droop: 1ºC

160ºC

140ºC

145ºC

150ºC

155ºC

160ºC

140ºC

145ºC

150ºC

155ºC

THERMOSTAT PID Control with SCR Burst FiringAlthough the lowest cost initially, this device creates

the highest 3 year operating cost due to heater failure caused by high temperature excursions.

The highest cost initially, this device operates at the lowest cost over a 3 year period due to it's ability to eliminate

temperature excursions, extending heater life up to 10 times.

General Specifications

• 1, 2, 4, 8, 16 and 32 zones standard.Custom zoning available

• 100 V to 240 V Line voltage• Sensor Input for various

thermocouple types• Nema 4, 4x and 12 enclosure• Digital readout display on most models• Programmable alarm output• Timer available on select models• RS232 or RS485 serial communication

available on most multi-zone controllers• Three year warranty• UL and CSA agency approvals



Teflon® is a registered trademarkof E.I. du Pont de Nemours & Company.

Amp Mate-N-Lok® is a registeredtrademark of the Amp Company.

UL® is a registered trademark ofUnderwriters Laboratories, Inc.

Custom Components

The experience gained designing heaters for our standard products hasallowed us to provide thermal components for special applications. Wehave drawn from a number of heating technologies (silicon, fiberglass,cartridge, strip, band, tubular and thick film) in order to provide themost cost-effective solutions. Examples include heated traps,internal heaters for vacuum chambers, gas delivery systems, ionpump heaters, UHV bakeout tents for vacuum chambers, Kaptonand tube heaters for heating inside the vacuum chamber andheater jackets for specific agency compliance, i.e. CE, NEC 427,Semi S2-93 and others.

CUSTOM THERMAL COMPONENTS

High TemperatureCloth Heater Jackets

Nor-Cal offers a complete line of high temperaturecloth heater jackets and insulators. Heating elements are helical wound resistivewire on a fiberglass core. This allows the wire to expand during thermal cycling withminimal metal fatigue. Jackets with fiberglass insulation and fiberglass based clothcan attain temperatures up to 482°C. Various types and thicknesses of insulation canbe specified to meet specific requirements. A major benefit of cloth heater jackets istheir durability and ease of removal/reinstallation for system cleaning and maintenance.Nor-Cal cloth heater jackets are sewn for an exact fit upon the piece to be heatedor insulated. A helpful heater design worksheet is available on ourWebsite at www.n-c.com.

Genesis Heaters and Insulators

The unique, CE certified Genesis modular heater provides 120ºC or 150ºC internaltemperatures in valves or fittings at a fraction of the cost of a silicone heater. Genesisheaters use thick film technology to provide uniform heat throughout the component.Each heater contains a control set point and a resetable high temperature shut off. The1.5 and 2.0 inch sizes also have a low temperature alert that can be connected to aremote alarm. Each thermostat can be replaced without destroying the heater. Thesame heater can be attached to a valve body or fitting with two screws. A trim-to-fit,molded insulator covers the heated component and mating flanges. These clean roomcompatible insulators are constructed of .50 inch thick molded silicone. When in use,the exterior surface remains touch-safe. Genesis Insulators meet UL 94 V-O require-ments.

INTRODUCTION - Find The Needle

Documents

Transcript of INTRODUCTION - Find The Needle