Plasma para recubrimientos de materiales

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  • Evaluacin del Comportamiento a la Fatiga y Fatiga-Corrosin de un Acero AISI 4340 Recubierto con una Pelcula Cermica nanoestructurada Obtenida a Travs de una Tcnica de PAPVDCrisanto Jos Villalobos G La Fsica de Plasma en el Desarrollo Tecnolgico de Materiales y sus Aplicaciones

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  • La Comunidad Europea Invierte en Ingeniera de SuperficieMillardos

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  • Inyeccin de Aluminio. Director Tcnico en TAPSA. Costos de fabricacin ms reducidos Mejor llenado del molde Menor fuerza de liberacin del molde Mayor resistencia al uso Mejor calidad de los productos moldeados por inyeccin Buen indicador de desgaste

    Molde de inyeccin de aluminio

    DescripcinSin recubrimientoCon RecubrimientoInyecciones50,000130,000Mantenimiento cada25,000 inyecciones0Limpieza menor1 (turno)8 (turnos)

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  • Fuentes: Renault S.A.

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  • Motores

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  • Engranajes y componentes de rodamientos

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  • Engranajes y componentes de rodamientos Unidades de engranajes Transmisiones para aviacinWC/C

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  • Que es la SOBERANIA ENERGETICA.

    ExploracinProduccinManejo y AlmacenamientoRefinacinDistribucin

    La Industria Petrolera Nacional

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  • Perforacin Petrolera

    Desarrollo de piezas, con tecnologa Venezolana, que permitir una menor dependencia de actores forneos en el proceso de extraccin de crudo

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  • Exploracin y PerforacinSistema integrado de perforacinCondiciones de servicio del sistemaPropiedades de los componentes que integran el sistema.

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  • Exploracin y PerforacinEmpacaduras Recuperables de compresinEmpacaduras recuperables de tensin:

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  • ambientes agresivoscondiciones de operacin criticas

    Distribucin

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  • Procesamiento de Materiales por Plasma

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  • El Mecanizado y las cargas fluctuantes en la herramienta.Los mecanismos de formacin de la viruta, condicionan las necesidades de fuerzas y potencia, el aumento de la temperatura causado por la accin del corte, la vida de la herramienta, el acabado superficial y maquinabilidad, lo cual permitir planificar operaciones eficientes econmicas, as mismo seleccionar el equipo y herramienta mas adecuada. Porque estudiar fatiga en estos sistemas

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  • MecanizadoModelo de Corte Ortogonal:ngulo de ataquengulo de incidencia

    Mecnica de formacin de la viruta

    dVirutaPiezaPlano Cortantef

    Angulo de Ataque

    Herramientaa90

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  • MecanizadoMecnica de formacin de la virutaMenor ngulo de incidencia, mayor deformacin involucrada en el proceso de corte.

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  • Estructura del recubrimientoEstructura nanoPropiedades del recubrimiento*mayor estabilidad trmica y qumica*mejores propiedades deslizantes*mejor resistencia al desgasteAplicacinHerramientas bajo altas cargas trmicas y abrasivasTiAIN/TiN/TiHV*3300Coeficiente de friccin 0,30 - 0,35Tensiones internas (GPa)*-1,3 / -1,5Temperatura mx.de aplicacin (C)*900Balinit Futura

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  • Microscopia ptica del Substrato.

    Microestructura del substrato de la probeta recubierta en la seccin longitudinalMicroestructura del substrato de la probeta sin recubrir en la seccin longitudinal

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  • Condiciones superficiales de la PelculaMicroscopia de Fuerza Atmica (AFM)Espesores y Perfil de Composicin QumicaMicroscopia Electrnica de BarridoAnlisis Espectroscpico por Electrones Auger AESDifraccin de Rayos XEsfuerzos Residuales

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  • (AFM)

    Reporte del Anlisis Superficial:Superficie Analizada: 222,410 mm2Rugosidad Ra: 82nmSkewness Rsk: 0,982Pico Mximo Rmax: 135,719 nmDesviacin E. Rq: 68,518 nmKurtosis Rku: 5,095

    Imagen en 2D de la superficie de un espcimen de Acero AISI 4340, recubierto con una Pelcula de Balinit Futura y (b) la correspondiente imagen en 3D de la misma zona utilizando para ello un Microscopio de Fuerza Atmica. (a)

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  • Espesores y Perfil de Composicin QumicaBalinit Futura

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  • Espesores y Perfil de Composicin QumicaBalinit Futura

    Chart1

    53.692173283612.90859814965.2818565512.90626008870.90530448260.851524018212.15766034411.2966230833

    13.495905625538.193381131125.19635953474.39698098020.5579121340.897757759215.33034712051.9313557148

    5.919765102142.600442748629.63483557114.2785477320.74077372180.686093685114.90195069611.2375907432

    5.036806596643.252142693830.06163634354.24530971020.50214966040.515576937814.93768292111.4486951367

    4.306768282944.313659986530.55178336314.30513211370.54715617720.477432847214.44661323421.0514539952

    3.161895048544.554672342730.15954493964.49078074030.35880501520.662748806615.16687688691.4446762203

    2.963166317144.9735630630.46620646744.49021237280.54410734150.586725016714.79140630631.1846131183

    2.692589405445.1563820330.78319314674.3470580480.5108838780.786525098214.91205807150.8113103222

    2.476284543345.181416960630.54241443394.3331241850.50703053070.636799134314.89974512841.4231850838

    1.909500030746.226091894630.17142041554.05256183350.50065565550.621449864815.42431758041.0940027249

    2.471512883845.344956401530.38577161414.24951766430.72671893670.598113195414.68404791481.5393613893

    2.253627894745.640042143930.22323087874.16356467440.7727471950.521811704915.04090916521.3840663432

    1.803008467545.590447936630.04641379194.20041416460.80063121970.840528596714.72808396361.9904718593

    1.368373647646.138084443230.35026870484.32979641320.57333624650.856668864814.83773836481.545733315

    1.93152228846.143163048530.04742241014.24132262620.56928926370.775479603914.83341406351.4583866962

    1.53564031545.881384764129.93484035464.3965568020.52446142470.960262520615.12837026061.6384835583

    1.354993054246.121410138430.52004367664.450938510.56357087310.847319971314.84321095451.298512822

    2.029178130845.288583126530.13743881064.70645353710.73104389460.827529849914.83880401861.4409686319

    2.048111017245.09021732530.18214920824.54963915050.68590795780.450208312715.3078746691.6858923594

    1.904212238245.030183325429.85571473134.60338619880.78431795550.823706431714.84778779612.1506913229

    1.481124262345.079305899930.6810474624.84846675290.58512438050.601331660915.1829042311.5406953507

    1.600598415845.398169664430.24456455554.73899197660.71011723310.555205463114.74337736332.0089753283

    1.988696499745.037703237429.53841764294.80572183180.69614558350.845575561915.44674620921.6409934338

    1.983845581845.097293075930.17870902144.84322902020.51218387560.708162832614.79095672151.8856198711

    1.458020898545.245712363829.96616684945.06147834320.61117517130.79378505115.62303666391.2406246587

    2.25613528444.750966109329.6095065594.90557146230.81957672241.084186630314.54814507362.0259121591

    2.055861940144.974943372529.98539017965.24353939240.37041132481.142267837614.38387014961.8437158035

    2.136348448244.594554049130.02380449025.10055633860.61683548950.895442104714.66245639581.9700026839

    2.748368323943.974004705630.04161171345.0548149860.79093884960.877018234414.56855107861.9446921085

    2.176096200545.064222141530.10563907034.99088954230.43691573881.310520247214.50023701451.4154800448

    2.92799768444.417698326129.60147963945.03311743750.70053859071.015746916714.90721364291.3962077626

    2.185920333245.188140748329.54017778865.04450843210.726698360.970935619214.88093530641.4626834122

    2.671383153244.44129933829.25920658935.12744124440.84074937340.898098953214.86723358571.8945877629

    2.743045619144.404946761529.75143314775.16426400660.68341861260.959167632514.31165075961.9820734604

    2.837906086644.491591349930.05660983494.87732162660.82370519680.608118739414.91652372871.3882234371

    2.450904021544.682420219929.54931819975.09980153310.61211244271.080599423614.73465551021.7901886492

    2.79791271244.770516601529.58599288824.93500792061.05336336750.669198347913.99317376992.1948343923

    2.460345110143.952230369430.38529684135.28935994560.9035457450.77023176514.25717721151.981813012

    2.671696875944.504770267929.7100282515.11735823730.87683207690.95503152214.35231247081.8119702982

    3.38445278444.021941731229.7234140735.30491697480.72697965570.723356833514.18900882181.925929126

    2.722283126144.221631498429.7820694815.12120321710.71678891210.792227691314.89957813021.7442179438

    3.275023206643.201312666429.52075733135.25949614250.92165682671.067690594714.26733797572.486725256

    3.206658866443.941190648129.72799066115.30015356120.57729702190.89546917614.25638064132.094859424

    3.471339243643.873192523629.22233905275.33593665890.85390637381.08118635914.67758977761.4845100108

    3.510395661343.360668867729.81387396025.31847932940.75920741450.804584207214.19155162232.2412389375

    3.174511735144.1537638229.58905697515.42087038420.79773353121.097556127514.16644358761.6000638392

    3.54483126943.558610071529.66906408595.51705935120.73629263880.909711848514.20940967241.8550210627

    3.115887434944.293048855830.04350409955.59656491670.62693510590.738412553713.95440208541.6312449481

    3.5411630243.120593626729.39918798265.36576748720.76555002181.01780862514.49506375682.2948654799

    3.527415265143.590493027730.30451508945.44862306970.89222980360.713386965614.02968649851.4936502805

    3.524011575442.926397870329.69888437655.39113878071.10649270821.009832458514.26242474262.0808174879

    3.045375748243.533603766429.59547767795.36417055110.79234589221.17436540914.65043887521.84422208

    3.754740815243.814061599129.64345316215.25861662210.57671645770.914952204313.79387438362.2435847559

    2.948885482843.892311984129.42463566585.40889151030.65867679710.634299599814.02020638033.0120925798

    3.418713325444.626316366329.4930278455.58453993980.53534602430.637848531513.86612898711.8380789806

    3.334398142343.740861913129.13419204825.55871984560.68283081580.839562093614.7229847441.9864503973

    3.843868012243.992032312929.09669557725.55829123240.69179818430.962192726313.72361005322.1315119014

    3.321127828843.966662613730.233225925.5211490631.05645763130.646672521614.1344059391.1202984826

    3.505998179844.09650619529.9094327775.39468491720.7097142031.17325724813.88037678311.3300296969

    3.402542860443.661247364829.61842669275.33118800780.97984103411.029512672914.34591819321.6313231742

    4.168655701942.768316891629.60838595495.22355090460.64489782150.800562812914.58383090192.2017990107

    3.163423948243.482198084729.43859262975.66287536280.41929744981.478222229814.55397154311.8014187519

    3.239251359544.045933321730.01272305975.77788102750.74423791930.821149273114.10977281071.2490512285

    3.332406291743.806473042429.71696908225.47005897931.02679891931.173131360413.98037991911.4937824057

    3.137624341843.457811144929.25053311115.31130912820.97846363461.184095221614.3406684562.3394949619

    3.932583502543.065745135929.33657913735.32313860170.80495101341.154951238813.87240048422.5096508862

    3.009574219343.672709070729.68800862215.65930621430.76176154381.019569440814.31736562171.8717052672

    3.649398167143.736576210829.4935787185.65685805850.6656287751.161865473813.6522861041.9838084928

    3.66559283843.52704977129.41454997925.35107436420.64230297370.939016338114.45685170062.0035620352

    3.335530901944.210319083529.6557987335.69607055370.69204639010.819620598414.12949150911.4611222302

    3.821383717743.0943954729.42641362495.5627200710.73307525520.850318342814.10157456592.4101189526

    3.080271191343.527548870329.53476448845.66125500980.92126586571.079862305913.78624556472.408786704

    3.916740435343.323705113629.57685195165.88185704810.75233965631.093865496413.63030262791.8243376709

    3.719747669743.443802149128.52271041166.15459503431.15283466050.956050606614.27734226721.7729172009

    3.610166034543.01325106830.19397168585.54911045420.85284661120.924040334613.9385669691.9180468427

    4.032991672643.061912955329.75374323865.78383295380.69011617421.086032611213.96923196041.6221384339

    3.575229246543.269942923129.5235566075.60172666820.8625421491.207559008613.96628927921.9931541184

    3.5125743242.739667288929.35801963175.30110758960.78144600461.212804199214.44347567332.6509052927

    3.697701646742.385608371329.95327525555.77838488760.76594003711.138996162613.94226944432.3378241948

    3.481884674343.864546280429.64068952635.64665243330.67209093121.005672720414.54191435441.1465490795

    4.499994139542.98357330629.39436576555.45994953080.8760853051.437998217613.28928794112.0587457945

    3.426292669643.636331520729.54593240095.62075222760.93576711180.8279331613.9244622822.0825286275

    3.662756650743.405769409629.24584038255.71555120741.26233590680.62774090414.21365568711.8663498519

    3.372794439243.806515702829.73240605765.92179191040.78784902011.157415724713.22493242161.9962947237

    3.703428970143.372543975529.40056911155.90205120451.07746734530.928826318713.49941740072.1156956737

    2.86082665143.094904538629.81111501165.93875679010.80770948681.499478654714.21985847681.7673503904

    3.160298967443.550236752729.94258532285.75941626590.57063111620.907176014214.33235350831.7773020524

    3.234885663843.389800711829.99113764315.95790015830.6378071380.663825195113.73220215552.3924413344

    3.401067030544.194614347929.6151738545.87844456550.58681039141.087260923613.78575118261.4508777045

    3.977403266441.83249621629.1153961116.04421337662.12989919461.665430518212.43190894042.8032523768

    3.836411705343.27344658129.73254488996.01929677440.54115343591.083500943814.07711632371.4365293461

    3.401522003343.455457066128.93631027585.79471671210.98058517830.905826760414.15008461082.3754973931

    3.426521907743.233509949929.86201971845.89041134510.73782415991.224437918613.93709510531.6881798951

    3.625049725643.176653169429.66341663055.83476816111.19836134810.877350151113.99981088691.6245899273

    4.028583350843.263860202629.21559181355.64027649750.82965945941.331191476713.80774778731.8830894123

    4.054368320142.629656992129.41002353875.9786704210.86210782340.940173656614.08282212222.0421771259

    3.907011089543.019027810129.11295819625.751320520.6720946181.049134765513.93971416112.5487388395

    3.275838544443.337603897129.71550327535.72472640620.61134570940.856125155214.47670134692.0021556655

    3.514219282343.256608964329.28114120615.8754717081.40234937671.020706299513.42884912952.2206540337

    3.530976502643.81051772229.83275177635.70569660920.95792907410.897865615413.28907342761.9751892728

    3.761659864743.041072439229.66375224475.69750945770.705768891.226143882614.0642485441.8398446771

    4.01624504843.442830031929.39972381985.99513809070.80866129250.809126441413.67516952211.8531057536

    3.871294128242.824043655330.10957601995.65421494091.03669650431.014252072214.07147862061.4184440586

    3.713878375543.410943898229.79321448945.58053628860.78357424170.773859532314.37745110731.566542067

    3.847819271443.75593985929.82315688695.87057657130.47644634560.993764896413.88143514981.3508610195

    3.754407015943.0829829129.97337640195.8391129441.29344299450.791048665813.59106727691.6745617909

    3.346337228143.412059021729.32251779595.83681561140.99137916021.368846950913.87912094841.8429232833

    3.833905949143.15821925729.49854246966.06022254510.76404248571.315077757813.65450123621.7154882996

    3.366001099943.822189354629.18988436025.62761913671.12645487671.015188530713.54980109692.3028615442

    4.125203677643.294101768829.26179339425.92894351460.928628371.172387573513.92565958571.3632821155

    3.739433180443.263675408629.57346124586.05764078440.81193897540.867266616913.42736186812.2592219203

    3.678669048343.425826600829.51272191126.24176591330.67960770280.757028386413.72169938931.9826810477

    3.624469021943.234787972629.478806875.82151864970.84809601080.830688457213.99631037762.1653226403

    3.972263050643.262955016629.59834369395.90064603960.86808199391.031225553713.65385003681.712634615

    3.985310686543.63674413829.58943058095.7297644840.50831177120.88448089913.2826607242.3832967165

    3.250852382643.846396283129.44204749296.00200771790.56530463871.262615296414.11606703031.5147091582

    3.255983573143.526974357729.14850137085.69440063250.74820625061.08753805914.36089315212.1775026042

    3.559766626743.837091415729.51229043875.68514506120.90260758020.842174305713.5451197832.1158047888

    4.025893672342.967910501329.22408820695.97477473960.77258106720.696961020913.86358563322.4742051585

    3.728818115142.662282268829.5175765645.97431931791.06597435061.098511027613.88653384372.0659845122

    3.806686936243.024620536329.16964134985.66860614120.99281336241.116915032713.64354874772.5771678937

    3.690268122543.297827123929.06226986185.53319856961.23478658540.863966222814.05131422982.266369284

    2.995608492843.410274477529.71659435916.12497130591.28495603431.284041474813.31965455951.863899296

    3.867016356842.965459680129.73551857385.5577722790.62607299480.799931788113.83792601332.6103023141

    3.695528237542.984001001229.86516761316.08944655220.82831499390.865768442813.69130012211.9804730371

    3.968410294343.379282559229.55112125995.93487276310.81443239640.769072181713.5504653972.0323431485

    3.304877480243.985252041929.88855431175.83908488290.82813339181.279156026513.54530763681.3296342281

    3.819973747743.080303198829.87552846285.91770738450.51827181721.047526878213.84799869461.8926898162

    3.800843852143.38028601929.58811448876.11025170730.6988488080.984979100513.22168064982.2149953746

    3.837747626842.650607595429.76645638766.00215550140.65429542350.729266774114.27523248892.0842382023

    4.3285083843.191433298129.02517272776.06117974930.60973734561.042215013313.79746031271.9442931733

    4.293865681743.088977264729.45895727716.27542743470.53294428291.333475653413.86918615181.1471662539

    3.531341923943.932481496529.2762843775.86882004360.64625493991.043050524214.10506821751.5966984774

    3.344083561143.544898656728.8135878726.18827786021.09334415730.942324891714.25983727041.8136457307

    4.052978586443.256876561329.57384917876.41372607641.10155942910.8221590413.34202709271.4368240353

    3.798547347743.731875174528.99737641556.376332370.42604810171.5077443613.37244868461.789627546

    3.77399255443.360796448429.20381449456.32662669650.83271295070.951031690813.26959510682.2814300582

    3.889317865643.608458584429.13470879366.17055238290.571052320.988574356213.36399668822.2733390091

    3.603221299643.587059917829.50807503996.21487864920.55676119350.95594425913.96590369211.6081559489

    3.438351658843.766189313729.62588115886.32644933050.57857388061.059594900313.61514452281.5898152344

    3.656969082243.981792800629.51612721146.20981605140.74614945310.603073835513.70657887661.5794926892

    3.849621944543.440316934929.69455314586.25488221830.61820495350.677475688914.09481875991.3701263541

    3.147942469844.008691212829.52959368736.18449704861.01567023580.867263834613.91302930531.3333122058

    3.731571865243.793235265129.30190594596.12506975930.92593663560.742692141713.81104620341.5685421839

    4.060170856642.611316661929.39727659546.08174721080.84433717171.089291097514.18895356181.7269068442

    3.734960446842.357357785229.37398483166.27739693550.6443340040.827867596214.04081557672.743282824

    3.280633219343.320865189329.66443291146.20633762120.70079980680.752905509413.94500944412.1290162986

    3.608053679643.47974199629.48360649766.11760672020.75313361850.975784054813.9187862761.6632871573

    3.434580621143.281879076729.41961489166.1874180571.13896162991.155506179513.49061452771.8914250165

    3.61247032643.147191334229.21445843026.24800789870.80768002331.086457817514.17455600781.7091781624

    3.55006198643.566256412129.44816019655.88386937010.85683710771.111237780413.45295448322.1306226641

    3.31596215544.104654766929.30283901076.21766254360.93162746260.917148446113.16819068832.0419149268

    3.102346953343.84539207330.10160124566.38959116710.53885466470.857268784713.3759063351.7890387765

    3.516443475843.454378293729.22517530416.14413641130.92493777581.068484700813.57205573522.0943883034

    3.87086091743.075473336229.11304366946.05813963130.87210859190.91080788214.32428039481.7752855774

    3.728960152843.498303911629.34358254846.11517960980.84645489490.995829288113.47416646761.9975231267

    3.085482149243.4069716129.20672556666.09975362150.74480132480.864707420414.17517405832.4163842492

    3.628684838843.401685052529.57454589616.19580292050.81378029041.024332847913.46695597391.8942121798

    3.53466809443.759737540329.42118386915.80131113810.88919899960.902369171114.0638016791.6277295088

    3.548489168643.486314510730.00453667955.91307245231.03935726370.666144280613.96204467451.3800409701

    3.936287376743.097001341429.84241166616.09058371830.83659827531.172086923712.8157612922.2092694065

    2.995485056243.852705470230.11070837116.12788230410.71460552710.628696665914.14609967451.4238169308

    3.669074684143.260576573529.9084752266.07991743880.56386114250.769985608413.96592237311.7821869537

    4.058471279843.467118598329.53185600086.0568050381.20443072630.88788025513.52321860971.270219492

    3.725543977243.630723107229.54755190575.9448379210.43163993181.2185121413.83337338661.6678176305

    3.720787426443.58930485730.11917279856.08898818180.76434537290.857309171413.58856895821.2715232338

    3.699481233143.225348198529.46457338225.96567221290.75498618070.949714856813.88231495232.0579089837

    3.588831869343.292168688129.69811094026.13844251660.62734999841.120865330413.94618451711.58804614

    3.007759325243.01595383330.09895973146.33076325061.04988826640.929708941113.75028172931.8166849231

    3.32754143.038340665130.14107440885.88353765410.85338775320.735722109313.53919604982.4812003597

    3.621520799643.575860548429.54925196276.11204349081.06958829280.899929460213.23782602961.933979416

    3.894337330843.05948301730.03174956756.14147769940.41146578210.754943029113.65161098392.0549325901

    3.684959585742.99868867829.55460200636.25529153051.03482201380.993804615913.5065995521.9712320179

    3.154785061643.330787192829.86790213176.33213555870.98046339640.949522963213.28240603092.1019976646

    3.550317847243.294268494529.81703024416.33990542120.88423318680.864551669112.84449283192.4052003052

    4.23227672243.415891232830.18831802186.21295527070.72831289240.898514203613.139803971.1839276867

    3.68051310242.685654381430.20527425356.36036531811.08288032210.861312903713.24940482671.8745948926

    3.504613043143.739448378629.82603568576.04699890320.97866480351.12242462413.56463107941.2171834825

    3.75084136643.126620017130.63345426646.15143196280.7058880310.529061966513.21780018721.8849022031

    3.538259035243.111614038130.62827996826.16775238850.68391242581.006027484812.75684705242.1073076069

    3.513203859442.704770331330.8731225836.23254240480.82685220730.943293121713.52454120431.3816742881

    3.362106584643.567964633230.82204552526.20065936740.52214468991.206103539912.53215305481.786822605

    3.504314613343.24476499831.27207954096.32658732510.587304940.747627169612.49477949511.8225419178

    3.397448452943.761011500631.71448061596.32136363230.76928821670.917597029611.89324790221.2255626499

    3.86908935943.151361571831.69803302216.30990158580.68126814651.147887401111.90151573341.2409431802

    3.590387518543.702863879532.0745418316.51712595830.60854271960.772412539811.29463967571.4394858776

    3.603499457143.243525316632.48326628626.20398485750.36950807871.018873095711.85711409051.2202288178

    4.018106287143.220794214532.51869726456.49988333760.61407783330.91870070610.48114282191.7285975352

    3.654353266442.364169029832.48438825926.4571010210.68292744840.829127733511.28568809412.2422451476

    3.577377858843.477950311732.65926233886.63217620810.96950024550.84293260759.93958768681.9012127427

    4.031109406243.334567305933.15474084416.27668110591.00395388740.725493550710.16344598061.3100079193

    3.74185026443.085707818932.96675552126.48301424090.76508008570.656614509210.23647782972.0644997304

    4.005860914443.281149000933.63483001566.6579322010.90848979330.78310689219.44388361951.2847475632

    3.459108655343.162554941533.64317603346.69337098350.77881774950.78597884719.53114575921.9458470304

    4.135306638942.812033757233.77708235976.59484634240.59668479061.00849479988.89265301622.1828982951

    3.943813254443.186455134334.21258814276.60567502780.99336958880.70853174057.93642148692.4131456246

    4.077480655743.706784711934.57931953046.96522488380.6212385971.1509934287.39428020591.5046779873

    4.231631223943.87627598334.6122149466.99160788660.53706916430.87594792337.36972245591.505530417

    4.403067690743.295867637534.81517154717.26298451430.83804584560.73059922866.52099802782.1332655084

    4.003095104443.939881702335.85928813936.98541987820.58527076560.89002375316.38779903691.3492216203

    4.098113764343.191040614635.56529341547.34845961980.69761617951.05812037626.41379703911.6275589911

    4.647142806443.208901583135.79566818517.35289342920.62774291620.85802701695.81640501871.6932190443

    3.945746562443.357307364736.38143033877.86523938730.43298544450.82891105955.37310789761.8152719454

    4.019128189643.059672015936.55705434277.82358783541.01784519851.14962975764.96130776711.4117748932

    4.738922022343.222396024236.65317293437.65501154510.45840862320.75488636284.64627002121.8709324667

    4.570732664642.769780225736.84534514677.84661250860.73917872290.99809085784.93128625611.2989736176

    4.280399938343.547608159637.0553727117.79536412370.76166366090.81148362824.29474290231.453364876

    4.506039550343.479846742637.26231171717.64232595340.74063389191.00001730774.03030235991.3385224772

    4.507685184142.853511868637.402061587.75597405790.70798182330.86457201333.50880834062.3994051322

    3.892769033242.970108186137.69861532697.90771652320.50177952381.25772603423.95608242331.8152029494

    4.422059540243.070894184837.78096163697.40088488520.79326333381.32120309533.26738270271.9433506212

    4.406384211243.557043914338.26718613157.76448642250.57331411831.06366524572.55135835361.816561603

    4.83339987342.852511626637.33356978757.53352355151.06333957971.57034017422.47565400812.3376613994

    4.542931040742.958816208138.60001856937.725356350.56675735011.62971690712.22905852421.7473450504

    4.633861477343.198525482738.3093523627.60773460610.55500972721.73647135592.24799316711.7110518218

    4.789986787541.952798732438.59827028537.43368253621.21253082851.73698996652.45921185391.8165290098

    4.421109877741.723567920438.37705018197.53685109910.62370399022.530634392.49848154322.2886009975

    4.529935269343.026416859138.91106958217.5929447480.58161683062.4863353511.72910135411.1425800059

    4.793842871642.411811216938.50921301827.61080837920.57253034332.73388559851.73375668811.6341518841

    4.918093129141.762708498238.19036934427.51995030170.73895133943.55658169951.94823984941.3651058386

    4.999171572241.649622684138.00227630687.49413301460.82010852013.88902783261.3758318651.7698282047

    4.855400043241.185338976237.53030829157.64919832150.97980087864.77821663021.41877559741.6029612616

    4.640002315941.204016568237.32069247247.69579050850.55461425865.3097351731.38979667281.8853520306

    4.460614763141.161650611437.04625570287.27444037670.85976066546.10101412391.78134212921.3149216275

    4.953088735239.709466365437.03005621497.29215149680.46807600976.91716228581.23253640332.3974624889

    4.652787768439.887452460236.66006110487.22645016120.84857315017.42661145971.30189248591.9961714095

    5.443298133539.404791841635.59290570527.55724496460.77830674448.47787092951.04810608371.6974755974

    4.817216153138.730457597235.80984085737.12257258760.74488953289.84816764411.14479985291.782055775

    4.544137124838.157479360135.16940595077.1922399490.86872252711.15882707341.02438435121.8848036638

    4.540429524837.700944648234.44841995677.02221452841.201466717712.47820422590.86655713641.7417632619

    5.072060700636.825693495933.80217847716.7814151130.912629383314.30917319510.85338181521.4434678198

    4.224426930936.261915881932.82675037236.83865574621.493434703815.99228488411.08523998931.2772914915

    4.630762839235.423078340532.51177892916.68075597850.941439921617.13196547290.79251220051.8877063179

    3.914932966334.229410204831.86940503776.5079891450.976867782319.54535692940.86688931522.0891486194

    4.962970046233.065979875830.92000365296.29203324471.229024925420.85182487551.01098383891.6671795405

    4.813720001232.090440509329.67471094766.06852711741.610688813922.85346481720.91510618521.9733416082

    4.727006987731.399547578929.47812350595.89906384411.262428117224.54048458021.29878433661.3945610494

    4.534171772630.111473980327.76372800946.02141301411.628924299727.08747781041.50156936921.3512417443

    4.588152982728.841585630327.12207878325.63445961031.25476729728.95198615421.3287248952.2782446474

    4.621088365127.802001224725.95029360385.44754694131.769348474331.87521509410.90963196061.6248743361

    4.486045701426.667719772424.6122434735.29503496881.8237290333.63619569731.46161409072.0174172664

    5.156244351325.617181373923.62166936974.89742892611.982884640535.93924683910.98503454021.8003099593

    4.396349780324.483148924922.927843014.79727952962.024823392238.99404673851.09318459441.2833240303

    4.859673085822.545236090821.63961033024.66212327212.401748211440.65611199540.82722087482.4082761394

    3.885881182521.761474506420.78405171144.59426502472.188731773143.35281569221.0579321162.3748479936

    4.252422546720.48294230219.6350303134.4683403272.16198079945.45840558270.99548604152.5453920881

    4.078843068420.008354812518.84501123184.01489205692.096072132447.91237828660.942112252.1023361614

    4.102138034718.471698455517.56868214444.08615292912.43766055549.96650935111.05967752982.3074810003

    4.213738301117.982461826916.89003972263.90935512712.295475967152.0238882381.26266387431.422376943

    4.180256971316.75881108316.15859601113.55976682322.522827982853.88705648671.14155932961.7911253124

    4.257316411715.834097040214.91330925093.53631853742.770413914256.30124994960.64100629391.7462886022

    3.509189489615.012617528413.72128453493.22062009663.027292803659.03437176390.98268688771.4919368953

    4.215781031213.445456558213.20703706222.83181985572.687945943659.62567326851.82145154492.1648347357

    3.563729539312.433140087111.83741574332.81802785142.808554669862.77130640751.00013428082.767691421

    3.788364271312.496253090110.87719581062.89010753943.040039163863.53533662311.06655778332.3061457185

    3.020940139711.131742872310.75640471442.66906206643.122651536766.08167845491.11460221172.102918004

    3.643962630210.97042078729.61593136982.52164667283.039960860267.2776349881.29108836881.639354323

    3.95557060079.47825240429.3220827792.23664920543.318340958268.26209997341.53714846261.8898556165

    3.86344900468.60714270818.05564852382.22722360672.90286190870.83221840251.19788435212.3135714942

    3.40793627798.30891497117.8892962912.09984462013.936184169270.73937553211.14272376492.4757243736

    3.69947168267.47036599916.97008016732.13788394463.435921826772.54388001061.37156706722.3708293018

    3.57913664577.19998813656.60681512372.06498275273.612941240274.14969639710.84371925481.9427204493

    3.67628512026.71056024755.76092145591.98721097433.535977377174.64172514091.59434891322.0929707709

    3.46758945225.8961329885.69651954991.7418788882.906076387577.90000687460.93852311581.4532727439

    3.44470402075.49463656685.35326356121.70405362443.308233776677.61806438311.3752245931.7018194742

    3.58003042155.43123536154.88237733821.92642263053.477060510277.96840076491.0815029551.6529700184

    2.94067003824.68754912194.22880736181.62810139813.902787576379.88920044540.93363584731.7892482109

    3.31976062725.32585640243.83525430671.65240531074.078761599478.42974783011.05037161942.3078423041

    3.28980279144.01733559844.187554011.54896491063.582140841280.75139416881.02949996741.5933077122

    3.32996199033.63542185633.27979364681.99578060613.68380342380.3452139381.21683864952.51318589

    2.90805810433.21830112983.08426152891.36538502374.322545867181.95849835711.44000164851.7029483406

    3.55631548862.85892222353.06339222391.70731424353.650507829782.8173653620.62836341441.7178192143

    3.30779763982.6611362252.521711551.23216074184.666102956982.0445703911.36693668872.1995838068

    3.57702699522.35285116972.55713981231.36029805714.052569740482.95774542571.65946023561.482908564

    3.13406038752.72816909242.57647247381.37763110824.071485813782.61367288991.15437605432.3441321803

    2.90160005132.26038969842.25874697331.27868854974.261113556683.71183730361.494040081.8335837871

    3.57249856922.06922487891.70247497441.03162577913.685982351684.87631042821.53705381131.5248292073

    3.37324483141.64224879611.85277486381.12680312173.803499346885.31834055091.28806029551.5950281938

    C

    N

    Ti

    O

    Cr

    Fe

    Al

    W

    Sputter Time (min)

    Approx. Atom %

    8/11/05 U. of Arkansas Balinit Futura AES depth profile (3 keV Ar+)

    Sheet1

    File = 20050811.a04

    Title = Balinit Futura

    Ion Gun Beam Energy = 3000.000000

    Ion Gun Filament Current = 15.000000

    245361.3410495527.563013751720

    280380423.8515543.866014051750

    26538042051052064513901735

    2.82.41.51.12.362.361.7853

    CNTiOCrFeAlW

    053.692173283612.90859814965.2818565512.90626008870.90530448260.851524018212.15766034411.2966230833

    0.7913.495905625538.193381131125.19635953474.39698098020.5579121340.897757759215.33034712051.9313557148

    2.365.919765102142.600442748629.63483557114.2785477320.74077372180.686093685114.90195069611.2375907432

    3.935.036806596643.252142693830.06163634354.24530971020.50214966040.515576937814.93768292111.4486951367

    5.54.306768282944.313659986530.55178336314.30513211370.54715617720.477432847214.44661323421.0514539952

    7.073.161895048544.554672342730.15954493964.49078074030.35880501520.662748806615.16687688691.4446762203

    8.642.963166317144.9735630630.46620646744.49021237280.54410734150.586725016714.79140630631.1846131183

    10.212.692589405445.1563820330.78319314674.3470580480.5108838780.786525098214.91205807150.8113103222

    11.782.476284543345.181416960630.54241443394.3331241850.50703053070.636799134314.89974512841.4231850838

    13.351.909500030746.226091894630.17142041554.05256183350.50065565550.621449864815.42431758041.0940027249

    14.922.471512883845.344956401530.38577161414.24951766430.72671893670.598113195414.68404791481.5393613893

    16.492.253627894745.640042143930.22323087874.16356467440.7727471950.521811704915.04090916521.3840663432

    18.061.803008467545.590447936630.04641379194.20041416460.80063121970.840528596714.72808396361.9904718593

    19.631.368373647646.138084443230.35026870484.32979641320.57333624650.856668864814.83773836481.545733315

    21.21.93152228846.143163048530.04742241014.24132262620.56928926370.775479603914.83341406351.4583866962

    22.771.53564031545.881384764129.93484035464.3965568020.52446142470.960262520615.12837026061.6384835583

    24.341.354993054246.121410138430.52004367664.450938510.56357087310.847319971314.84321095451.298512822

    25.912.029178130845.288583126530.13743881064.70645353710.73104389460.827529849914.83880401861.4409686319

    27.482.048111017245.09021732530.18214920824.54963915050.68590795780.450208312715.3078746691.6858923594

    29.051.904212238245.030183325429.85571473134.60338619880.78431795550.823706431714.84778779612.1506913229

    30.621.481124262345.079305899930.6810474624.84846675290.58512438050.601331660915.1829042311.5406953507

    32.191.600598415845.398169664430.24456455554.73899197660.71011723310.555205463114.74337736332.0089753283

    33.761.988696499745.037703237429.53841764294.80572183180.69614558350.845575561915.44674620921.6409934338

    35.331.983845581845.097293075930.17870902144.84322902020.51218387560.708162832614.79095672151.8856198711

    36.91.458020898545.245712363829.96616684945.06147834320.61117517130.79378505115.62303666391.2406246587

    38.472.25613528444.750966109329.6095065594.90557146230.81957672241.084186630314.54814507362.0259121591

    40.042.055861940144.974943372529.98539017965.24353939240.37041132481.142267837614.38387014961.8437158035

    41.612.136348448244.594554049130.02380449025.10055633860.61683548950.895442104714.66245639581.9700026839

    43.182.748368323943.974004705630.04161171345.0548149860.79093884960.877018234414.56855107861.9446921085

    44.752.176096200545.064222141530.10563907034.99088954230.43691573881.310520247214.50023701451.4154800448

    46.322.92799768444.417698326129.60147963945.03311743750.70053859071.015746916714.90721364291.3962077626

    47.892.185920333245.188140748329.54017778865.04450843210.726698360.970935619214.88093530641.4626834122

    49.462.671383153244.44129933829.25920658935.12744124440.84074937340.898098953214.86723358571.8945877629

    51.032.743045619144.404946761529.75143314775.16426400660.68341861260.959167632514.31165075961.9820734604

    52.62.837906086644.491591349930.05660983494.87732162660.82370519680.608118739414.91652372871.3882234371

    54.172.450904021544.682420219929.54931819975.09980153310.61211244271.080599423614.73465551021.7901886492

    55.742.79791271244.770516601529.58599288824.93500792061.05336336750.669198347913.99317376992.1948343923

    57.312.460345110143.952230369430.38529684135.28935994560.9035457450.77023176514.25717721151.981813012

    58.882.671696875944.504770267929.7100282515.11735823730.87683207690.95503152214.35231247081.8119702982

    60.453.38445278444.021941731229.7234140735.30491697480.72697965570.723356833514.18900882181.925929126

    62.022.722283126144.221631498429.7820694815.12120321710.71678891210.792227691314.89957813021.7442179438

    63.593.275023206643.201312666429.52075733135.25949614250.92165682671.067690594714.26733797572.486725256

    65.163.206658866443.941190648129.72799066115.30015356120.57729702190.89546917614.25638064132.094859424

    66.733.471339243643.873192523629.22233905275.33593665890.85390637381.08118635914.67758977761.4845100108

    68.33.510395661343.360668867729.81387396025.31847932940.75920741450.804584207214.19155162232.2412389375

    69.873.174511735144.1537638229.58905697515.42087038420.79773353121.097556127514.16644358761.6000638392

    71.443.54483126943.558610071529.66906408595.51705935120.73629263880.909711848514.20940967241.8550210627

    73.013.115887434944.293048855830.04350409955.59656491670.62693510590.738412553713.95440208541.6312449481

    74.583.5411630243.120593626729.39918798265.36576748720.76555002181.01780862514.49506375682.2948654799

    76.153.527415265143.590493027730.30451508945.44862306970.89222980360.713386965614.02968649851.4936502805

    77.723.524011575442.926397870329.69888437655.39113878071.10649270821.009832458514.26242474262.0808174879

    79.293.045375748243.533603766429.59547767795.36417055110.79234589221.17436540914.65043887521.84422208

    80.863.754740815243.814061599129.64345316215.25861662210.57671645770.914952204313.79387438362.2435847559

    82.432.948885482843.892311984129.42463566585.40889151030.65867679710.634299599814.02020638033.0120925798

    843.418713325444.626316366329.4930278455.58453993980.53534602430.637848531513.86612898711.8380789806

    85.573.334398142343.740861913129.13419204825.55871984560.68283081580.839562093614.7229847441.9864503973

    87.143.843868012243.992032312929.09669557725.55829123240.69179818430.962192726313.72361005322.1315119014

    88.713.321127828843.966662613730.233225925.5211490631.05645763130.646672521614.1344059391.1202984826

    90.283.505998179844.09650619529.9094327775.39468491720.7097142031.17325724813.88037678311.3300296969

    91.853.402542860443.661247364829.61842669275.33118800780.97984103411.029512672914.34591819321.6313231742

    93.424.168655701942.768316891629.60838595495.22355090460.64489782150.800562812914.58383090192.2017990107

    94.993.163423948243.482198084729.43859262975.66287536280.41929744981.478222229814.55397154311.8014187519

    96.563.239251359544.045933321730.01272305975.77788102750.74423791930.821149273114.10977281071.2490512285

    98.133.332406291743.806473042429.71696908225.47005897931.02679891931.173131360413.98037991911.4937824057

    99.73.137624341843.457811144929.25053311115.31130912820.97846363461.184095221614.3406684562.3394949619

    101.273.932583502543.065745135929.33657913735.32313860170.80495101341.154951238813.87240048422.5096508862

    102.843.009574219343.672709070729.68800862215.65930621430.76176154381.019569440814.31736562171.8717052672

    104.413.649398167143.736576210829.4935787185.65685805850.6656287751.161865473813.6522861041.9838084928

    105.983.66559283843.52704977129.41454997925.35107436420.64230297370.939016338114.45685170062.0035620352

    107.553.335530901944.210319083529.6557987335.69607055370.69204639010.819620598414.12949150911.4611222302

    109.123.821383717743.0943954729.42641362495.5627200710.73307525520.850318342814.10157456592.4101189526

    110.693.080271191343.527548870329.53476448845.66125500980.92126586571.079862305913.78624556472.408786704

    112.263.916740435343.323705113629.57685195165.88185704810.75233965631.093865496413.63030262791.8243376709

    113.833.719747669743.443802149128.52271041166.15459503431.15283466050.956050606614.27734226721.7729172009

    115.43.610166034543.01325106830.19397168585.54911045420.85284661120.924040334613.9385669691.9180468427

    116.974.032991672643.061912955329.75374323865.78383295380.69011617421.086032611213.96923196041.6221384339

    118.543.575229246543.269942923129.5235566075.60172666820.8625421491.207559008613.96628927921.9931541184

    120.113.5125743242.739667288929.35801963175.30110758960.78144600461.212804199214.44347567332.6509052927

    121.683.697701646742.385608371329.95327525555.77838488760.76594003711.138996162613.94226944432.3378241948

    123.253.481884674343.864546280429.64068952635.64665243330.67209093121.005672720414.54191435441.1465490795

    124.824.499994139542.98357330629.39436576555.45994953080.8760853051.437998217613.28928794112.0587457945

    126.393.426292669643.636331520729.54593240095.62075222760.93576711180.8279331613.9244622822.0825286275

    127.963.662756650743.405769409629.24584038255.71555120741.26233590680.62774090414.21365568711.8663498519

    129.533.372794439243.806515702829.73240605765.92179191040.78784902011.157415724713.22493242161.9962947237

    131.13.703428970143.372543975529.40056911155.90205120451.07746734530.928826318713.49941740072.1156956737

    132.672.86082665143.094904538629.81111501165.93875679010.80770948681.499478654714.21985847681.7673503904

    134.243.160298967443.550236752729.94258532285.75941626590.57063111620.907176014214.33235350831.7773020524

    135.813.234885663843.389800711829.99113764315.95790015830.6378071380.663825195113.73220215552.3924413344

    137.383.401067030544.194614347929.6151738545.87844456550.58681039141.087260923613.78575118261.4508777045

    138.953.977403266441.83249621629.1153961116.04421337662.12989919461.665430518212.43190894042.8032523768

    140.523.836411705343.27344658129.73254488996.01929677440.54115343591.083500943814.07711632371.4365293461

    142.093.401522003343.455457066128.93631027585.79471671210.98058517830.905826760414.15008461082.3754973931

    143.663.426521907743.233509949929.86201971845.89041134510.73782415991.224437918613.93709510531.6881798951

    145.233.625049725643.176653169429.66341663055.83476816111.19836134810.877350151113.99981088691.6245899273

    146.84.028583350843.263860202629.21559181355.64027649750.82965945941.331191476713.80774778731.8830894123

    148.374.054368320142.629656992129.41002353875.9786704210.86210782340.940173656614.08282212222.0421771259

    149.943.907011089543.019027810129.11295819625.751320520.6720946181.049134765513.93971416112.5487388395

    151.513.275838544443.337603897129.71550327535.72472640620.61134570940.856125155214.47670134692.0021556655

    153.083.514219282343.256608964329.28114120615.8754717081.40234937671.020706299513.42884912952.2206540337

    154.653.530976502643.81051772229.83275177635.70569660920.95792907410.897865615413.28907342761.9751892728

    156.223.761659864743.041072439229.66375224475.69750945770.705768891.226143882614.0642485441.8398446771

    157.794.01624504843.442830031929.39972381985.99513809070.80866129250.809126441413.67516952211.8531057536

    159.363.871294128242.824043655330.10957601995.65421494091.03669650431.014252072214.07147862061.4184440586

    160.933.713878375543.410943898229.79321448945.58053628860.78357424170.773859532314.37745110731.566542067

    162.53.847819271443.75593985929.82315688695.87057657130.47644634560.993764896413.88143514981.3508610195

    164.073.754407015943.0829829129.97337640195.8391129441.29344299450.791048665813.59106727691.6745617909

    165.643.346337228143.412059021729.32251779595.83681561140.99137916021.368846950913.87912094841.8429232833

    167.213.833905949143.15821925729.49854246966.06022254510.76404248571.315077757813.65450123621.7154882996

    168.783.366001099943.822189354629.18988436025.62761913671.12645487671.015188530713.54980109692.3028615442

    170.354.125203677643.294101768829.26179339425.92894351460.928628371.172387573513.92565958571.3632821155

    171.923.739433180443.263675408629.57346124586.05764078440.81193897540.867266616913.42736186812.2592219203

    173.493.678669048343.425826600829.51272191126.24176591330.67960770280.757028386413.72169938931.9826810477

    175.063.624469021943.234787972629.478806875.82151864970.84809601080.830688457213.99631037762.1653226403

    176.633.972263050643.262955016629.59834369395.90064603960.86808199391.031225553713.65385003681.712634615

    178.23.985310686543.63674413829.58943058095.7297644840.50831177120.88448089913.2826607242.3832967165

    179.773.250852382643.846396283129.44204749296.00200771790.56530463871.262615296414.11606703031.5147091582

    181.343.255983573143.526974357729.14850137085.69440063250.74820625061.08753805914.36089315212.1775026042

    182.913.559766626743.837091415729.51229043875.68514506120.90260758020.842174305713.5451197832.1158047888

    184.484.025893672342.967910501329.22408820695.97477473960.77258106720.696961020913.86358563322.4742051585

    186.053.728818115142.662282268829.5175765645.97431931791.06597435061.098511027613.88653384372.0659845122

    187.623.806686936243.024620536329.16964134985.66860614120.99281336241.116915032713.64354874772.5771678937

    189.193.690268122543.297827123929.06226986185.53319856961.23478658540.863966222814.05131422982.266369284

    190.762.995608492843.410274477529.71659435916.12497130591.28495603431.284041474813.31965455951.863899296

    192.333.867016356842.965459680129.73551857385.5577722790.62607299480.799931788113.83792601332.6103023141

    193.93.695528237542.984001001229.86516761316.08944655220.82831499390.865768442813.69130012211.9804730371

    195.473.968410294343.379282559229.55112125995.93487276310.81443239640.769072181713.5504653972.0323431485

    197.043.304877480243.985252041929.88855431175.83908488290.82813339181.279156026513.54530763681.3296342281

    198.613.819973747743.080303198829.87552846285.91770738450.51827181721.047526878213.84799869461.8926898162

    200.183.800843852143.38028601929.58811448876.11025170730.6988488080.984979100513.22168064982.2149953746

    201.753.837747626842.650607595429.76645638766.00215550140.65429542350.729266774114.27523248892.0842382023

    203.324.3285083843.191433298129.02517272776.06117974930.60973734561.042215013313.79746031271.9442931733

    204.894.293865681743.088977264729.45895727716.27542743470.53294428291.333475653413.86918615181.1471662539

    206.463.531341923943.932481496529.2762843775.86882004360.64625493991.043050524214.10506821751.5966984774

    208.033.344083561143.544898656728.8135878726.18827786021.09334415730.942324891714.25983727041.8136457307

    209.64.052978586443.256876561329.57384917876.41372607641.10155942910.8221590413.34202709271.4368240353

    211.173.798547347743.731875174528.99737641556.376332370.42604810171.5077443613.37244868461.789627546

    212.743.77399255443.360796448429.20381449456.32662669650.83271295070.951031690813.26959510682.2814300582

    214.313.889317865643.608458584429.13470879366.17055238290.571052320.988574356213.36399668822.2733390091

    215.883.603221299643.587059917829.50807503996.21487864920.55676119350.95594425913.96590369211.6081559489

    217.453.438351658843.766189313729.62588115886.32644933050.57857388061.059594900313.61514452281.5898152344

    219.023.656969082243.981792800629.51612721146.20981605140.74614945310.603073835513.70657887661.5794926892

    220.593.849621944543.440316934929.69455314586.25488221830.61820495350.677475688914.09481875991.3701263541

    222.163.147942469844.008691212829.52959368736.18449704861.01567023580.867263834613.91302930531.3333122058

    223.733.731571865243.793235265129.30190594596.12506975930.92593663560.742692141713.81104620341.5685421839

    225.34.060170856642.611316661929.39727659546.08174721080.84433717171.089291097514.18895356181.7269068442

    226.873.734960446842.357357785229.37398483166.27739693550.6443340040.827867596214.04081557672.743282824

    228.443.280633219343.320865189329.66443291146.20633762120.70079980680.752905509413.94500944412.1290162986

    230.013.608053679643.47974199629.48360649766.11760672020.75313361850.975784054813.9187862761.6632871573

    231.583.434580621143.281879076729.41961489166.1874180571.13896162991.155506179513.49061452771.8914250165

    233.153.61247032643.147191334229.21445843026.24800789870.80768002331.086457817514.17455600781.7091781624

    234.723.55006198643.566256412129.44816019655.88386937010.85683710771.111237780413.45295448322.1306226641

    236.293.31596215544.104654766929.30283901076.21766254360.93162746260.917148446113.16819068832.0419149268

    237.863.102346953343.84539207330.10160124566.38959116710.53885466470.857268784713.3759063351.7890387765

    239.433.516443475843.454378293729.22517530416.14413641130.92493777581.068484700813.57205573522.0943883034

    2413.87086091743.075473336229.11304366946.05813963130.87210859190.91080788214.32428039481.7752855774

    242.573.728960152843.498303911629.34358254846.11517960980.84645489490.995829288113.47416646761.9975231267

    244.143.085482149243.4069716129.20672556666.09975362150.74480132480.864707420414.17517405832.4163842492

    245.713.628684838843.401685052529.57454589616.19580292050.81378029041.024332847913.46695597391.8942121798

    247.283.53466809443.759737540329.42118386915.80131113810.88919899960.902369171114.0638016791.6277295088

    248.853.548489168643.486314510730.00453667955.91307245231.03935726370.666144280613.96204467451.3800409701

    250.423.936287376743.097001341429.84241166616.09058371830.83659827531.172086923712.8157612922.2092694065

    251.992.995485056243.852705470230.11070837116.12788230410.71460552710.628696665914.14609967451.4238169308

    253.563.669074684143.260576573529.9084752266.07991743880.56386114250.769985608413.96592237311.7821869537

    255.134.058471279843.467118598329.53185600086.0568050381.20443072630.88788025513.52321860971.270219492

    256.73.725543977243.630723107229.54755190575.9448379210.43163993181.2185121413.83337338661.6678176305

    258.273.720787426443.58930485730.11917279856.08898818180.76434537290.857309171413.58856895821.2715232338

    259.843.699481233143.225348198529.46457338225.96567221290.75498618070.949714856813.88231495232.0579089837

    261.413.588831869343.292168688129.69811094026.13844251660.62734999841.120865330413.94618451711.58804614

    262.983.007759325243.01595383330.09895973146.33076325061.04988826640.929708941113.75028172931.8166849231

    264.553.32754143.038340665130.14107440885.88353765410.85338775320.735722109313.53919604982.4812003597

    266.123.621520799643.575860548429.54925196276.11204349081.06958829280.899929460213.23782602961.933979416

    267.693.894337330843.05948301730.03174956756.14147769940.41146578210.754943029113.65161098392.0549325901

    269.263.684959585742.99868867829.55460200636.25529153051.03482201380.993804615913.5065995521.9712320179

    270.833.154785061643.330787192829.86790213176.33213555870.98046339640.949522963213.28240603092.1019976646

    272.43.550317847243.294268494529.81703024416.33990542120.88423318680.864551669112.84449283192.4052003052

    273.974.23227672243.415891232830.18831802186.21295527070.72831289240.898514203613.139803971.1839276867

    275.543.68051310242.685654381430.20527425356.36036531811.08288032210.861312903713.24940482671.8745948926

    277.113.504613043143.739448378629.82603568576.04699890320.97866480351.12242462413.56463107941.2171834825

    278.683.75084136643.126620017130.63345426646.15143196280.7058880310.529061966513.21780018721.8849022031

    280.253.538259035243.111614038130.62827996826.16775238850.68391242581.006027484812.75684705242.1073076069

    281.823.513203859442.704770331330.8731225836.23254240480.82685220730.943293121713.52454120431.3816742881

    283.393.362106584643.567964633230.82204552526.20065936740.52214468991.206103539912.53215305481.786822605

    284.963.504314613343.24476499831.27207954096.32658732510.587304940.747627169612.49477949511.8225419178

    286.533.397448452943.761011500631.71448061596.32136363230.76928821670.917597029611.89324790221.2255626499

    288.13.86908935943.151361571831.69803302216.30990158580.68126814651.147887401111.90151573341.2409431802

    289.673.590387518543.702863879532.0745418316.51712595830.60854271960.772412539811.29463967571.4394858776

    291.243.603499457143.243525316632.48326628626.20398485750.36950807871.018873095711.85711409051.2202288178

    292.814.018106287143.220794214532.51869726456.49988333760.61407783330.91870070610.48114282191.7285975352

    294.383.654353266442.364169029832.48438825926.4571010210.68292744840.829127733511.28568809412.2422451476

    295.953.577377858843.477950311732.65926233886.63217620810.96950024550.84293260759.93958768681.9012127427

    297.524.031109406243.334567305933.15474084416.27668110591.00395388740.725493550710.16344598061.3100079193

    299.093.74185026443.085707818932.96675552126.48301424090.76508008570.656614509210.23647782972.0644997304

    300.664.005860914443.281149000933.63483001566.6579322010.90848979330.78310689219.44388361951.2847475632

    302.233.459108655343.162554941533.64317603346.69337098350.77881774950.78597884719.53114575921.9458470304

    303.84.135306638942.812033757233.77708235976.59484634240.59668479061.00849479988.89265301622.1828982951

    305.373.943813254443.186455134334.21258814276.60567502780.99336958880.70853174057.93642148692.4131456246

    306.944.077480655743.706784711934.57931953046.96522488380.6212385971.1509934287.39428020591.5046779873

    308.514.231631223943.87627598334.6122149466.99160788660.53706916430.87594792337.36972245591.505530417

    310.084.403067690743.295867637534.81517154717.26298451430.83804584560.73059922866.52099802782.1332655084

    311.654.003095104443.939881702335.85928813936.98541987820.58527076560.89002375316.38779903691.3492216203

    313.224.098113764343.191040614635.56529341547.34845961980.69761617951.05812037626.41379703911.6275589911

    314.794.647142806443.208901583135.79566818517.35289342920.62774291620.85802701695.81640501871.6932190443

    316.363.945746562443.357307364736.38143033877.86523938730.43298544450.82891105955.37310789761.8152719454

    317.934.019128189643.059672015936.55705434277.82358783541.01784519851.14962975764.96130776711.4117748932

    319.54.738922022343.222396024236.65317293437.65501154510.45840862320.75488636284.64627002121.8709324667

    321.074.570732664642.769780225736.84534514677.84661250860.73917872290.99809085784.93128625611.2989736176

    322.644.280399938343.547608159637.0553727117.79536412370.76166366090.81148362824.29474290231.453364876

    324.214.506039550343.479846742637.26231171717.64232595340.74063389191.00001730774.03030235991.3385224772

    325.784.507685184142.853511868637.402061587.75597405790.70798182330.86457201333.50880834062.3994051322

    327.353.892769033242.970108186137.69861532697.90771652320.50177952381.25772603423.95608242331.8152029494

    328.924.422059540243.070894184837.78096163697.40088488520.79326333381.32120309533.26738270271.9433506212

    330.494.406384211243.557043914338.26718613157.76448642250.57331411831.06366524572.55135835361.816561603

    332.064.83339987342.852511626637.33356978757.53352355151.06333957971.57034017422.47565400812.3376613994

    333.634.542931040742.958816208138.60001856937.725356350.56675735011.62971690712.22905852421.7473450504

    335.24.633861477343.198525482738.3093523627.60773460610.55500972721.73647135592.24799316711.7110518218

    336.774.789986787541.952798732438.59827028537.43368253621.21253082851.73698996652.45921185391.8165290098

    338.344.421109877741.723567920438.37705018197.53685109910.62370399022.530634392.49848154322.2886009975

    339.914.529935269343.026416859138.91106958217.5929447480.58161683062.4863353511.72910135411.1425800059

    341.484.793842871642.411811216938.50921301827.61080837920.57253034332.73388559851.73375668811.6341518841

    343.054.918093129141.762708498238.19036934427.51995030170.73895133943.55658169951.94823984941.3651058386

    344.624.999171572241.649622684138.00227630687.49413301460.82010852013.88902783261.3758318651.7698282047

    346.194.855400043241.185338976237.53030829157.64919832150.97980087864.77821663021.41877559741.6029612616

    347.764.640002315941.204016568237.32069247247.69579050850.55461425865.3097351731.38979667281.8853520306

    349.334.460614763141.161650611437.04625570287.27444037670.85976066546.10101412391.78134212921.3149216275

    350.94.953088735239.709466365437.03005621497.29215149680.46807600976.91716228581.23253640332.3974624889

    352.474.652787768439.887452460236.66006110487.22645016120.84857315017.42661145971.30189248591.9961714095

    354.045.443298133539.404791841635.59290570527.55724496460.77830674448.47787092951.04810608371.6974755974

    355.614.817216153138.730457597235.80984085737.12257258760.74488953289.84816764411.14479985291.782055775

    357.184.544137124838.157479360135.16940595077.1922399490.86872252711.15882707341.02438435121.8848036638

    358.754.540429524837.700944648234.44841995677.02221452841.201466717712.47820422590.86655713641.7417632619

    360.325.072060700636.825693495933.80217847716.7814151130.912629383314.30917319510.85338181521.4434678198

    361.894.224426930936.261915881932.82675037236.83865574621.493434703815.99228488411.08523998931.2772914915

    363.464.630762839235.423078340532.51177892916.68075597850.941439921617.13196547290.79251220051.8877063179

    365.033.914932966334.229410204831.86940503776.5079891450.976867782319.54535692940.86688931522.0891486194

    366.64.962970046233.065979875830.92000365296.29203324471.229024925420.85182487551.01098383891.6671795405

    368.174.813720001232.090440509329.67471094766.06852711741.610688813922.85346481720.91510618521.9733416082

    369.744.727006987731.399547578929.47812350595.89906384411.262428117224.54048458021.29878433661.3945610494

    371.314.534171772630.111473980327.76372800946.02141301411.628924299727.08747781041.50156936921.3512417443

    372.884.588152982728.841585630327.12207878325.63445961031.25476729728.95198615421.3287248952.2782446474

    374.454.621088365127.802001224725.95029360385.44754694131.769348474331.87521509410.90963196061.6248743361

    376.024.486045701426.667719772424.6122434735.29503496881.8237290333.63619569731.46161409072.0174172664

    377.595.156244351325.617181373923.62166936974.89742892611.982884640535.93924683910.98503454021.8003099593

    379.164.396349780324.483148924922.927843014.79727952962.024823392238.99404673851.09318459441.2833240303

    380.734.859673085822.545236090821.63961033024.66212327212.401748211440.65611199540.82722087482.4082761394

    382.33.885881182521.761474506420.78405171144.59426502472.188731773143.35281569221.0579321162.3748479936

    383.874.252422546720.48294230219.6350303134.4683403272.16198079945.45840558270.99548604152.5453920881

    385.444.078843068420.008354812518.84501123184.01489205692.096072132447.91237828660.942112252.1023361614

    387.014.102138034718.471698455517.56868214444.08615292912.43766055549.96650935111.05967752982.3074810003

    388.584.213738301117.982461826916.89003972263.90935512712.295475967152.0238882381.26266387431.422376943

    390.154.180256971316.75881108316.15859601113.55976682322.522827982853.88705648671.14155932961.7911253124

    391.724.257316411715.834097040214.91330925093.53631853742.770413914256.30124994960.64100629391.7462886022

    393.293.509189489615.012617528413.72128453493.22062009663.027292803659.03437176390.98268688771.4919368953

    394.864.215781031213.445456558213.20703706222.83181985572.687945943659.62567326851.82145154492.1648347357

    396.433.563729539312.433140087111.83741574332.81802785142.808554669862.77130640751.00013428082.767691421

    3983.788364271312.496253090110.87719581062.89010753943.040039163863.53533662311.06655778332.3061457185

    399.573.020940139711.131742872310.75640471442.66906206643.122651536766.08167845491.11460221172.102918004

    401.143.643962630210.97042078729.61593136982.52164667283.039960860267.2776349881.29108836881.639354323

    402.713.95557060079.47825240429.3220827792.23664920543.318340958268.26209997341.53714846261.8898556165

    404.283.86344900468.60714270818.05564852382.22722360672.90286190870.83221840251.19788435212.3135714942

    405.853.40793627798.30891497117.8892962912.09984462013.936184169270.73937553211.14272376492.4757243736

    407.423.69947168267.47036599916.97008016732.13788394463.435921826772.54388001061.37156706722.3708293018

    408.993.57913664577.19998813656.60681512372.06498275273.612941240274.14969639710.84371925481.9427204493

    410.563.67628512026.71056024755.76092145591.98721097433.535977377174.64172514091.59434891322.0929707709

    412.133.46758945225.8961329885.69651954991.7418788882.906076387577.90000687460.93852311581.4532727439

    413.73.44470402075.49463656685.35326356121.70405362443.308233776677.61806438311.3752245931.7018194742

    415.273.58003042155.43123536154.88237733821.92642263053.477060510277.96840076491.0815029551.6529700184

    416.842.94067003824.68754912194.22880736181.62810139813.902787576379.88920044540.93363584731.7892482109

    418.413.31976062725.32585640243.83525430671.65240531074.078761599478.42974783011.05037161942.3078423041

    419.983.28980279144.01733559844.187554011.54896491063.582140841280.75139416881.02949996741.5933077122

    421.553.32996199033.63542185633.27979364681.99578060613.68380342380.3452139381.21683864952.51318589

    423.122.90805810433.21830112983.08426152891.36538502374.322545867181.95849835711.44000164851.7029483406

    424.693.55631548862.85892222353.06339222391.70731424353.650507829782.8173653620.62836341441.7178192143

    426.263.30779763982.6611362252.521711551.23216074184.666102956982.0445703911.36693668872.1995838068

    427.833.57702699522.35285116972.55713981231.36029805714.052569740482.95774542571.65946023561.482908564

    429.43.13406038752.72816909242.57647247381.37763110824.071485813782.61367288991.15437605432.3441321803

    430.972.90160005132.26038969842.25874697331.27868854974.261113556683.71183730361.494040081.8335837871

    432.543.57249856922.06922487891.70247497441.03162577913.685982351684.87631042821.53705381131.5248292073

    434.113.37324483141.64224879611.85277486381.12680312173.803499346885.31834055091.28806029551.5950281938

    Sheet2

    Sheet3

    *

  • Esfuerzos Residuales

    -2,956 GPaLos Esfuerzos Residuales y las Variables de Deposicin de la Pelcula

    Grfico1

    0.1888110925

    0.1900014595

    0.1907261642

    0.1916373616

    0.192055121

    0.1924794081

    0.1926109918

    0.1934316193

    0.193641606

    0.1933656518

    peak n2 coating

    sinpsi

    ln(1/sin(theta))

    balinit futura

    Analyse des contraintes rsiduelles sur balinit futuraTiNE approximately 450-500 Gpa

    etude des contraintes sur le bruker D8

    E=450200

    configurationnu=0.210.3

    Copper linear/-/antiscattering slit 0.6/divergence slit 0.2/detecteur Sol X /1/2S20.00268888890.0065

    montage OmegaS1-0.0004666667

    assumption: plan stresses, no shear stress, isotropic plane stresses

    balayage 2theta : 105-125

    balayage omega sur 10

    phi=

    55.5correctionWITHOUT ANY CORRECTIONpenteordonnecorrigepenteordonne

    psiomega2theta pic 12theta pic 22theta pic 3 le substrat0.000038190x2 - 0.004569347x + 116.301491628sinpsiln(1/sin(theta) pic 1ln(1/sin(theta) pic 2ln(1/sin(theta) pic 3theta corrigeln(1/sin(theta)

    45.57.5107.75111.776116.268-0.1043697140.50872620320.21352406530.18881109250.163360319slope-0.0096043332-0.0091424043-0.001097158107.750.2135240653-0.01034778740.2187896159

    40.512.5107.61111.575116.246-0.0853419790.42178276750.21441692790.19000145950.1634796874intercept0.2185254860.1937470430.1639127565107.610.2144169279

    35.517.5107.476111.453116.244-0.0682237440.33721592280.21527367150.19072616420.1634905416107.4760.2152736715-3.8483506768

    30.522.5107.323111.3116.215-0.0530150090.25759518990.21625446560.19163736160.1636479751stress (GPa)-3.5718594593-3.400067721-0.1687935401107.3230.2162544656

    25.527.5107.256111.23116.195-0.0397157740.18533980450.21668482830.1920551210.1637566017STRESS107.2560.2166848283

    2330107.16111.159116.209-0.0337822190.15267081480.21730238660.19247940810.1636805587107.160.2173023866

    20.532.5107.135111.137116.194-0.0283260390.12264520990.21746338690.19261099180.1637620342107.1350.2174633869

    10.542.5106.978111116.173-0.0112750690.03320978680.21847615060.19343161930.1638761398

    0.552.5106.982110.965116.165-0.0018620990.00007615240.21845031160.1936416060.1639196209

    -9.562.5107.09111.011116.167-0.0000871290.02724071220.21775337280.19336565180.16390875

    WHITH CORRECTION

    sinpsiln(1/sin(theta) pic 1ln(1/sin(theta) pic 2ln(1/sin(theta) pic 3

    0.50872620320.21418947530.18942863240.1639270662slope-0.0083182411-0.0079481887-0.0000022708

    0.42178276750.21496232810.19050823380.163943223intercept0.21853520470.1937561280.1639200869

    0.33721592280.21571067520.19113215050.1638610521

    0.25759518990.21659495470.19195370440.1639360097stress (GPa)-3.094-2.956-0.0003493488

    0.18533980450.21694018450.1922923880.1639724366STRESS

    0.15267081480.2175199620.19268148450.1638640871

    0.12264520990.21764589580.19278049190.1639159576

    0.03320978680.21854899470.19349925040.1639374233

    0.00007615240.21846234010.19365278170.1639297426

    0.02724071220.21775393450.19336617430.1639092236

    balinit futura

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    peak n1

    Feuil2

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    peak n2 coating

    sinpsi

    ln(1/sin(theta))

    Feuil3

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    CORRECTION

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    peak n3 substrate

    sinpsi

    ln(1/sin(theta))

    *

  • Seccin transversal de un recubrimiento de Nitruro de Titanio tomada por MET. (a) Seccin transversal tomada por MET de una pelcula multicapa de TiN/NbN, (b) Imagen en alta resolucin de una pelcula de TiNSiNx 8 at.% Si

    *

  • Ensayos Mecnicos

    *

  • Anlisis Fractogrfico de especmenes ensayados en traccin de muestras de aceros de baja aleacin y alta resistencia recubiertos con depsitos cermicos.

    (a), (b) y (c). Imagen de las condiciones de la superficie lateral de especmenes ensayados en traccin del conjunto substrato- recubrimiento Balinit Futura. (a)(c)(b)

    *

  • Mdulo de Young en funcin de la profundidad de penetracin (calibracin G2005_05_10_05).Dureza en funcin de la profundidad de penetracin (calibracin G2005_05_10_05).Muestra patrn de slica fundida (mdulo elstico nominal = 72 GPa, dureza universal nominal = 9.5 GPa). Nano Indentacin

    *

  • Evaluacin de las Propiedades Mecnicas Estticas:Carga mxima: 65 g.Velocidad: 50 nm/s.Se asign al sistema capa-substrato un coeficiente de Poisson de n = 0.25.Ritmo de deformacin: 0.050 1/s.Desplazamiento harmnico: 2 nm.Frecuencia: 45 Hz.

    Graph2

    0.10063411480.21582357550.5962311440.160209522500000000000000

    0.33382055091.0615218228-0.28459070470.650504864-0.0850314743-1.2800445865-0.62213081230.2272069301-0.01991060460.284295639-0.80630756890.10378111250.0213563918-0.1410236021-0.45078547280.2773749765-0.68310575720.0501008313

    -0.2452659178-0.8505961604-1.38852809290.8579187561-1.2758883904-2.0285559965-1.2145646581-0.9718984362-0.93257144260.4276264407-0.1963427915-0.46377743470.66045898560.7126939401-1.80523738650.36108876840.26419547490.2136151562

    0.4677259911.3509920681.0507284927-4.5058739263-1.19904432010.67185684710.79314872140.2860007546-1.3187750466-1.4809156930.19893302430.7863182960.7460858572-0.3764148369-1.512727023-0.47271129740.1323300990.3039795947

    0.6209715368-2.7900763694-5.9864592169-9.7644793902-1.92879782381.0870987714-1.9791447089-4.48081152810.6398892781-1.89910597120.43639556150.8300034865-2.961744183-2.6994469575-9.0661743509-0.11415229420.2231676074-2.1421923941

    1.0246374226-10.625406707595.4796351023-4.7370449898-4.62046378911.2266538409-2.5107133187-3.0512925681-2.42277696610.97127096230.745427480.3950832525-3.31344021370.7697025466-3.2429181654-2.93968512580.5416179296-2.8136015988

    1.65136525725.1117265985-5.7069352836-52.3588499952-3.4028205771-4.7491514433-4.7562386151-5.1290856797-6.1179206572-3.69560462150.6503855965-7.5346360631-8.49908211460.5069825152-8.8480653878-3.6653501630.7377658595-3.3859771625

    1.43211803382.8165555655-6.893192052911.423543252926.6595126694-5.5773261563-3.7445409404-4.0814265818-7.1096959017-13.58002515740.8926163016-3.59522999287.2539954220.971637656494.3198665868-6.0254889452-10.8257215962-101.7576435079

    1.66743530362.4004536684-19.350042398627.12804972285.24729276154.2191847873-5.0702025627-4.0641510015-15.5750735183-11.976500984-7.73740141737.00543212652.4424708294-12.344647756155.6785762994-14.8389470234-6.5917276949-27.636182965

    -6.11792294242.592429703-7.72899340375.882362586143.7170454832-11.6985222682-6.8424703608-32.980448604112.9521620176.75352596851.0034072677-11.69704736381.9521809853-4.74004610214.69542553783.331688167-80.5331096325-11.7403057993

    -9.27646182922.47625884267.28077106842.83553826144.8217596602-13.108156022849.437228352-235.96559668333.94048033883.70121747240.9982678511517.78505332372.0255704248-7.066532371810.9372697017-1441.9042855711-22.68584037158.0661639183

    -16.65929230112.13319429767.28077106783.04703807861.7339055272-6.9413844812-54.61708121155.7344238462.69756044678.4261450618-7.5080862204-11.25733332111.8492678258-16.62677268051.97811981233.1482243014-39.67295172639.3714345239

    46.13011210012.17378116143.37993823983.32092965211.7339055272-833.07196839963.8497260658.47309441226.06762416466.8379742496-9.5894493073-39.11888240891.88314095754.21572835841.92967656252.869141355617.45506053329.3714345239

    7.12337245182.61608300662.68868091353.54182838831.685843042711.00177567264.04904711952.23228981843.30639690685.0638226137-10.146802683821.61980396112.358436693.53427021352.33148300642.593215166211.01937042544.9023238918

    15.46190551312.85011443953.2070754874.02376113471.24799355093.67408220153.28652644422.18863561822.61380117983.6529830659-12.244206545718.09147882582.48248877443.74117466932.258434052.3214976246.680343088827.5260545851

    10.07750065162.96271182074.29481318344.02376113471.27630652125.76418255743.22533144332.03364092642.56628663944.2655724288848.37670043394.56224988982.52333682053.45770576771.81980071452.3214976245.778610453917.4335140052

    7.04990982214.33934188433.54807192853.71038592631.38827161784.09067983182.90844255252.1237878942.77233352133.5561612534-170.56351465343.45920103992.59475863052.69647118011.96577794682.94360769325.296805048614.4551357027

    5.82417680874.2224909422.94893914393.81418139891.40878730226.60147429382.75979337292.1237878943.92372356473.913523659827.00591415943.51125756732.47997763012.69647118012.0005364413.55556395477.770947005929.4714477611

    9.29768358324.43853304683.69248241653.28823555691.29155553463.42475187492.36943981021.80736720333.53216565082.612651250510.04594898544.74409897482.39049017372.7346416812.46036359412.83454739414.884242535412.2974258024

    8.19719816695.01692491684.22245886764.33985879091.24379604723.39155502572.18624531111.56446373243.05876641572.930821455511.65636402874.18139543462.44558887762.09281925352.64197003153.11670378235.85945887147.3179957681

    7.03850564775.54806760062.9464512284.68165204811.32873533512.93730939162.18624531111.96719703752.95766836273.628277115911.65636402873.20989617752.67207880762.52933399082.14806637152.993380487.69702290387.4441298408

    6.95984886399.46266510073.65709244594.58813383041.38478308743.40668015352.81252627751.80527287623.01574260252.93052308598.17294843362.64700026872.90302265943.38752421362.14806637152.82583517969.69378618498.5954734069

    10.41005153937.34822329913.84572383515.20465099551.316430083.00546211552.81353481972.1028637653.07622342973.8021576235.05001561212.54570077523.24681507443.12724050292.25088288312.68311197389.69378618498.6588731743

    8.98121710997.92676528923.17665385324.96086134181.33066437512.58037606432.99186603751.83583953063.23155674973.88047146198.19085658213.08886609754.50000216762.98717666582.72974229033.13756492879.44852632037.7255955954

    8.96019283819.36258026934.80957285295.58917915161.37205328242.66028232093.38348498722.14615448863.77951739513.9874423035.17496157443.08886609753.14042379713.32811826162.83954201663.84703432737.81681765826.4084725769

    10.74999155448.54344936494.21819265165.94555801961.50442403023.03274389692.5402662192.16805359453.89353122414.82911765487.30887646532.13392093183.09509450412.88166641992.46428425452.89246739647.03679766226.9937018658

    8.71264178911.23582904783.81732918496.02007308331.6516599933.18063458052.80079377622.22571714833.82243856093.17797093347.18773141663.26105617423.33719859792.90180589132.75685112663.15000284377.1597000510.6072624789

    11.69845165396.54355173463.57032797437.49843399312.00127891283.72713444953.27952743662.75531410913.57068842043.15918275997.1825800392.54468197884.22267726143.99093135432.7494825223.48522714045.82416398568.4634370807

    7.6581687313.84329299154.07647669746.97013767891.98757804383.47600680452.75196038612.72217535543.46198950062.87531544338.70145766152.67874034163.49618367342.96841565472.98755689733.61422643446.815692794210.1447358257

    10.744684030514.87681201314.54055238366.57476930522.1925709013.51269656413.03923309973.04800186333.89607594253.33185300576.54879784082.64772897813.86375285113.24951688962.89328954773.81694633088.128915123517.2893292035

    12.53617946411.68716654624.61205801165.65627421692.10209255363.28345144273.06316070492.7517558964.49684082633.48966049446.06631193323.02914999544.15811930373.32104652332.74934956454.05482287619.696257678713.4307799026

    14.680180023718.56822969086.23267329766.00141577951.96108949593.51489603242.51112604482.6129283734.72221405183.76372009336.37490580972.85090000494.04367260674.27189054083.24421484293.917758590213.467794824414.0486700348

    13.309701182815.69205812075.09190609649.28231564291.89025551944.01549507953.24099420973.0529048855.21721446034.13800598367.650702123.10183400864.00416205723.78993452233.27056886463.9914261488.897598434213.0520902728

    12.890649017728.47990744964.02753891126.8950739342.05075370634.26651242633.41838072473.05898488965.60067836143.4587208717.17497751012.54749770914.33496200133.7943437584.00498726194.19732105378.385083606110.483004507

    14.650537576724.69982243985.44372646086.53444294762.21390023083.93310965083.7017163943.18426239715.42541261093.52853097918.07090741883.05119983144.15191558254.34260933333.87074462994.473672036910.646311596314.0475532071

    14.866482502683.60125155345.91479759448.57879882892.16856405235.77672138273.63810518472.86417513986.54279275914.3675513329.4430534422.79850973694.57930028034.29701217353.577152724.733249410914.266332169421.0974489288

    17.780517186678.6768364984.981916567311.10968046282.29187854234.96811927023.53731969363.34502416687.314337364.259817874411.00103671452.93967793014.68697325594.24273441914.12385317364.663896233711.486688660427.1769291707

    35.064973076257.64416150215.21703378519.42973349942.32000818774.63116277053.78020695773.03900087637.79153708823.8599952878.53185910562.99161819274.69665879274.53160966624.0465157234.817399700213.685932508620.0883957436

    19.549537338719.1742123385.26867584068.05891752552.86917067035.20208655273.75117228553.36537006987.52763621413.80989621717.81693355723.31520644614.8008480484.91929946584.03305197996.450279908322.156395728422.0616856962

    19.877137447930.83325577676.20517399048.5530242112.62572329495.13272939814.03048190823.77867966666.98062983744.185266604612.84578497574.72560023945.39741851074.15670715574.0342203266.918172489613.013297396419.6947944496

    18.754148897117.81411711855.78778385678.73974211892.85256954955.11332484923.87777901543.30705193118.7188342694.01514250889.82642569953.89239735116.49152924394.31641790614.86894947126.012726100210.1863438256111.8464679968

    14.544558332415.1747732446.11276194569.17148498562.86080403655.30795352674.15931746573.91333069026.28370868623.97119022467.8562145773.64512338376.23860030835.2025026424.19397017647.062382702316.024068252518.4923229522

    15.500153733217.21866473487.279489017410.57298132063.06278398745.21428982864.18255493183.82917043377.61257025274.129634286911.36164126144.11500172194.90669488254.48295697283.95118750516.799760557513.621260144617.30615255

    13.592569158816.56772940186.02517968338.23453971412.73110342315.51536267055.10819698053.78931097476.4923763264.260434202110.09747650764.10722843585.69025717725.90834859534.16115783966.329235901816.906266976261.3052668136

    18.553615506311.85173203975.417030446812.4260930613.19088587.06312722834.94390438313.8227733587.27729010314.25676560258.04584848834.15781106716.35665488214.83329801224.87091997495.702991996817.8467912319-104.8866754812

    11.715321188213.59972570456.363091304810.17236755364.00217426278.1219416415.3202781384.3077363766.75885562394.317642862711.61504249914.26204494395.08158622386.41254266385.41535204677.341164398317.2564129521-50.6173040488

    12.654301996610.74992023176.807234960110.25224023043.63571253536.89105475575.48656379194.14765530138.0626229964.90932477311.12753611363.89806043365.35685107247.30655789075.11401527275.392308616325.4583730724-69.9812603579

    17.454255383119.35540056437.674139956519.56789747953.84871437277.37560368245.53286669874.36468856747.77145118514.645119841510.25361994464.75923833496.68310485086.13068788275.8438156546.978706284820.8587707074-78.3036259635

    17.643224139918.22055632038.441435313614.28361347064.86742433937.19581900835.059342194.44821572777.91414799954.165461389711.12385120564.6428907976.50803981857.22522754676.50389694977.014032877718.4606685588169.0290742499

    14.390947315629.25928139597.464025181212.1348254774.06531687678.09458585644.7379921334.62264661297.35677890665.13061899598.74660075934.46671093255.34283585947.96798937356.51708482288.104002682124.094144208963.6546560112

    13.269047524517.55897168028.982238752911.29829827094.50326101528.78541018545.73961211215.2923506096.91038111075.001051111413.5156923985.18104797625.82436969728.1555133536.850099319412.463192667616.04144463161029.356766789

    16.604025326416.90890766788.596834630413.66762131924.7851476037.34967202495.68375006124.336918356411.72779816664.87064408810.39516676575.00723634516.3034928047.94700315656.995819391611.931934086519.6377458670.6681615355

    11.82211920514.43030648858.25545699378.8259011814.167271872410.78044759275.45829262615.21633473297.88962828865.354581086113.56785783365.01172307116.77328635178.84655681517.41291360311.774475960815.27065062142.7088033554

    12.377426715426.5486078746.37449138512.71862150434.41536670819.92793771056.19795504295.58176989959.31527496725.363835219613.84121557384.70601280116.770113919710.74268599236.88875291759.570835709927.920514953123.1755582337

    18.975569233233.07451629597.771469062212.50233578784.42079643299.92443550327.38480546844.768615780811.27796748325.701733303713.18073923615.07858424757.047640210510.57500147838.801784802410.29290231426.311807605124.7688487244

    23.895166442336.53498712016.832793684411.75918570094.73076193699.40045850666.46449437475.636830264111.33940020344.80284536220.05269985094.97725320276.76761569068.75334281026.95225469068.462309435717.951493134637.3017771358

    15.252883197524.79639258527.285545276712.61260204115.27536253559.04001533627.66037913655.110099492712.3057103895.218980946218.63079660725.54394470986.27343831719.65997340087.05987760359.440703405325.177016366920.1886820493

    16.524802591928.14265327877.079989986911.13275173435.20168279969.75307048386.44288460224.748928296611.54073253244.942502367214.67855273675.92837435996.79334991348.69953593157.289353131510.353190440220.974160059120.9609723825

    15.786473462423.60148955727.896940100611.45165272714.24148891958.990703075711.06734994955.292757213610.57541319434.804870437615.13518190115.21936294736.061696970312.1506250056.873018572811.657450353718.083264970528.5429198936

    16.250880383528.99239713318.244729307111.55669773655.347841027911.57062348297.06074795695.42736117210.97838045.788893742815.57863127324.91124812236.361512960812.71759884686.721390973510.440674523823.760640469116.2104105455

    15.020391906221.23629197937.324418436713.25026670324.92843011259.33091776299.90344720095.55795925089.51780341355.565958553214.57269163535.09364680676.51095450117.75603477776.68259154949.517706653620.959706673717.653674196

    18.16300787928.87385246658.941708816710.19862017575.137349457910.522275865210.67913112775.415680367213.28250521755.037369099618.05688224824.84602448966.456565407411.82950043347.07168654099.342789060925.341991304619.0789550574

    17.343633391224.8809846417.865490499511.09539772665.055065773611.72467246889.51630096845.652643228911.75890632585.564829078216.54736566515.10888443586.310201512513.8742539326.104494069310.389273483722.275025382724.0302302898

    15.541463031923.23412903828.043164164610.9019722354.632935131114.003073257611.91066043615.978010981910.55590123595.659834046222.16764126994.94817982146.769255235112.84858687767.92089061199.910625843424.200708022316.9080583072

    16.232708854228.79154799429.70429559959.71453582754.735959467611.100727851310.85615719835.495741417211.02104775945.315526939818.43823766875.34792949747.044487281310.81654483527.495027527110.228661434720.127068539925.1789333967

    16.637905782625.40102172878.64741781810.21601613115.11233257849.046099919411.64610890636.152095275612.22251221735.50249683316.27471634235.24688946657.27370706918.80735752626.588193993112.64108202915.909891540621.2809328902

    14.276766678624.95725858519.319914134510.13407109395.007294421610.04082977069.56873049055.458638979611.03983874145.237961968916.82817370845.13539259326.704717399510.10580683427.31105513710.216556619218.953305772535.484698919

    15.101414982221.80990799639.512692634512.38740468065.24395883510.39490882948.93183857755.24387553149.56366356365.382701337117.65968712835.36265431136.61525383628.63118819378.325634059411.176954853824.746311121.4571058239

    17.641508636230.18760891789.746547164412.38190784695.806309543910.468044022710.41948725285.422106547813.87999598446.026995802714.81378940575.12521539466.77436495578.49297621417.489408033314.415192708219.08979442523.9207586551

    15.362515683926.345400012211.31385231369.96425119815.87361805039.481779855510.79817131275.875256602613.60314480294.911024074518.51656348836.17831607866.81317069810.08039385058.001133934211.467715017925.223742280241.4528888779

    18.294772008218.64658816499.894218885112.01738515245.86158669589.667062966210.46073551655.979059392913.34507965885.046933056315.97640554335.3502584546.204943982110.06014410167.178950947516.327824824923.338627480920.0515699015

    15.983431775622.6386350979.773931353312.98173183575.9007720578.80013993928.95722910856.480108322711.18722325585.846966049618.3466389245.92597749176.54820831449.39339703027.331807435212.334636382328.320220060416.2468283166

    15.149311479821.275551849610.770185686514.33861270725.7234285179.560933971610.52310973396.406990953811.29263607025.78651383215.48469822866.11346644696.4197141119.1760616678.480590132415.765378256125.33072420629.6546884641

    12.492801646320.19521058329.938724199712.07648301395.812226425610.067877074410.02345055256.951936278611.00346859135.90804017515.303040826.17938955456.64008774149.91891320457.429240694710.752940518127.929022037718.564267433

    14.432132226320.80447266869.429210263613.77640747686.33102579868.291366375613.29314882787.44358015689.95040439595.990496245814.99255104986.12677910937.2798797438.263787718.040806708912.133809418922.313989675422.9747260032

    14.170475114421.88465960610.076747546414.29327221626.101109917610.13746212178.71439162697.436133554110.63534238916.138482651716.47338135735.90650348346.99904319568.32207315148.251361989812.279511180922.227845786628.1172313291

    13.546858755518.328167664910.584226971412.99497160415.74912664229.66941908910.74779626636.58277972539.71104761835.789954628912.4866817775.94580818447.02260532578.26869513238.690187712115.068335349622.726377681219.9163311239

    14.304712074117.24491979139.95365899313.04212752386.02604283889.861060999512.4163129187.58894003749.69697188646.990176711616.44519944046.09943366.94322450279.08373870138.013336177313.21570592327.705936082730.4794118813

    16.720402330220.36752963410.056616777914.44427963156.09713490810.75278812610.72081904047.00912865569.23563558246.091465298517.25333280725.99616585937.27590521588.84808964217.717136725311.54670629231.817267780228.8978606756

    15.819665711319.694178399710.111156545815.03524328175.53396117398.844811315413.09861926176.39512726139.59835588716.133069875214.91815297076.5734894867.287414147810.37909641939.548771557213.780200779625.504708225922.1137635833

    16.566609691520.67999091210.32432791114.59124030095.619499802910.49543938810.85933831266.798055599110.6122878186.658265344513.7856635826.41979378786.93156550779.31115205597.90505148211.275094889226.478956086724.9337080333

    16.949986078919.42340636599.361090867911.61462472096.43862658879.903331688710.32301536216.882817179412.31450699096.610795004218.00004340276.4312671097.31296331889.00561295528.37489911111.919125204420.694782704820.9450799512

    15.898065254614.866746071410.196255200210.67794856096.155966843710.766322425210.82088610176.384973634211.23087958636.094771865920.0419808195.84809452227.28432776939.79856757378.012647584110.830310818927.52250380224.46672624

    12.729336242418.63900251511.804561419313.23260953636.438556484410.030806744710.28989294296.142976274411.05885818325.796161152817.93428842076.22084657317.22066887628.8877426137.256790964612.164395598526.837606485226.3809998537

    14.587098367116.758743504810.903398107313.63042315566.01132293179.882593435410.69054748756.542714527511.89510049785.404324955414.71583415556.44880725187.57906693019.85048809417.443386804211.274695587133.689776403922.7439016834

    16.805449397417.756429631510.308498689212.80316421156.01935976719.665642123110.00998535416.677013882511.29972393845.955011960317.62339194786.31117716017.26514520389.19428517718.541253183210.266439095927.882914270634.2816250827

    14.826932664919.816342278510.301845267512.88799442756.87518125179.333539065310.43745737766.741186577911.56845225786.015974100220.31240201566.56767011377.2887400489.3462988368.248347491612.18463672533.311455738622.6768564488

    12.745300446815.093447907812.416097220413.65163950056.652918678710.305399546112.25439673536.280374801411.20950157336.393892523517.35267832716.17932486467.78941733828.7377786957.948376647513.503398410125.878189302623.1506144518

    16.585238390418.973968627812.63402574912.29980357726.572988463310.874426166111.84378543196.024325551311.53379043486.299611026419.04384415166.61881512767.1597576218.84086899367.292929599812.078537982626.227610243523.3835181492

    15.591511438814.369800772410.504620698313.84039989326.36718857969.280436162810.51659304826.426932839710.02901469875.977291206515.68782885277.57281028057